JP2016131214A - 半導体装置 - Google Patents
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Abstract
Description
Claims (11)
- 高周波信号をスイッチングする半導体装置であって、
半導体層と、
前記半導体層に設けられた第1拡散層と、
前記半導体層に設けられた第2拡散層と、
前記第1拡散層と前記第2拡散層との間の前記半導体層上に設けられたゲート絶縁膜と、
前記ゲート絶縁膜上に設けられたゲート電極とを備え、
前記ゲート絶縁膜は、前記ゲート電極の中心部と前記半導体層との間に設けられた第1ゲート絶縁膜と、前記ゲート電極の端部と前記半導体層との間に設けられ前記第1ゲート絶縁膜よりも厚い第2ゲート絶縁膜とを含む、
半導体装置。 - 前記半導体層は、SOI基板またはSOS基板の半導体層であり、
前記第1拡散層に隣接し、前記第1拡散層と同じ導電型であり、前記半導体層の表面から底面まで設けられた第3拡散層と、
前記第2拡散層に隣接し、前記第2拡散層と同じ導電型であり、前記半導体層の表面から底面まで設けられた第4拡散層とをさらに備えた請求項1に記載の半導体装置。 - 前記第1および第2拡散層はN型不純物拡散層である、請求項1または請求項2に記載の半導体装置。
- 前記第1拡散層と前記第2拡散層との間の前記半導体層は、基準電圧源に接続されている、請求項1から請求項3のいずれか一項に記載の半導体装置。
- 前記第1拡散層は、前記第2ゲート絶縁膜の下方にある、請求項1から請求項4のいずれか一項に記載の半導体装置。
- 前記第1拡散層の端部は、前記第1ゲート絶縁膜と前記第2ゲート絶縁膜との境界に接して設けられるか、あるいは、前記第2ゲート絶縁膜に接して設けられる、請求項1から請求項5のいずれか一項に記載の半導体装置。
- ゲート長方向において、前記第1拡散層の前記ゲート電極端部直下に対応する位置から前記第1拡散層の前記端部までの長さは、前記第2ゲート絶縁膜の長さ以下である、請求項1から請求項5のいずれか一項に記載の半導体装置。
- 入力されたデータをスイッチング信号に変換し、出力するインタフェース部と、
前記スイッチング信号の電圧を変換して制御信号を出力する制御部と、
前記制御信号に基づいて前記高周波信号を入出力するスイッチング部とを備えた半導体集積回路装置であって、
前記スイッチング部は、複数の入出力ポートと、前記複数の入出力ポートのそれぞれに対応して設けられ前記制御信号に基づいて前記高周波信号をスイッチングする複数のスイッチング素子とを備え、
前記スイッチング素子は、
半導体層と、
前記半導体層に設けられた第1拡散層と、
前記半導体層に設けられた第2拡散層と、
前記第1拡散層と前記第2拡散層との間の前記半導体層上に設けられたゲート絶縁膜と、
前記ゲート絶縁膜上に設けられたゲート電極とを備え、
前記ゲート絶縁膜は、前記ゲート電極の中心部と前記半導体層との間に設けられた第1ゲート絶縁膜と、前記ゲート電極の端部と前記半導体層との間に設けられ前記第1ゲート絶縁膜よりも厚い第2ゲート絶縁膜とを含み、
前記第1拡散層の端部は、前記ゲート電極および前記第2ゲート絶縁膜の下方にある、半導体装置。 - 前記第1拡散層は、前記第2ゲート絶縁膜の下方にある、請求項8に記載の半導体装置。
- 前記第1拡散層の端部は、前記第1ゲート絶縁膜と前記第2ゲート絶縁膜の境界に接して設けられるか、あるいは、前記第2ゲート絶縁膜に接して設けられる、請求項8または請求項9に記載の半導体装置。
- ゲート長方向において、前記第1拡散層の前記ゲート電極端部直下に対応する位置から前記第1拡散層の前記端部までの長さは、前記第2ゲート絶縁膜の長さ以下である、請求項8または請求項9に記載の半導体装置。
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JP2015005357A JP6382731B2 (ja) | 2015-01-14 | 2015-01-14 | 半導体装置 |
CN201510463261.1A CN105789305B (zh) | 2015-01-14 | 2015-07-31 | 半导体装置 |
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US10050147B2 (en) * | 2015-07-24 | 2018-08-14 | Taiwan Semiconductor Manufacturing Co., Ltd. | Semiconductor device and manufacturing method thereof |
CN111121452B (zh) * | 2020-01-09 | 2020-09-18 | 永康市利高工具厂 | 一种基于导体半导体互相切换的加热器 |
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JP2002094067A (ja) * | 2000-09-12 | 2002-03-29 | Fujitsu Ltd | Soi構造のmos型半導体装置及びその設計方法 |
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