JP2016117642A - 浮遊帯から単結晶を結晶化させることによって単結晶を成長させる方法 - Google Patents
浮遊帯から単結晶を結晶化させることによって単結晶を成長させる方法 Download PDFInfo
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- JP2016117642A JP2016117642A JP2015246155A JP2015246155A JP2016117642A JP 2016117642 A JP2016117642 A JP 2016117642A JP 2015246155 A JP2015246155 A JP 2015246155A JP 2015246155 A JP2015246155 A JP 2015246155A JP 2016117642 A JP2016117642 A JP 2016117642A
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- Prior art keywords
- single crystal
- floating zone
- rotational speed
- acceleration phase
- induction heating
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
- C30B13/32—Mechanisms for moving either the charge or the heater
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
- C30B13/16—Heating of the molten zone
- C30B13/20—Heating of the molten zone by induction, e.g. hot wire technique
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
- C30B13/26—Stirring of the molten zone
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
Description
Claims (5)
- 浮遊帯から単結晶を結晶化させることによって前記単結晶を成長させる方法であって、前記浮遊帯は、誘導加熱され、前記結晶化する単結晶は、ある回転方向に回転され、前記回転方向は、間をおいて交互に反転され、前記回転方向の反転のために前記単結晶が静止状態にある滞留時間は、60ミリ秒以下に制限されることを特徴とする、方法。
- 速度プロファイルの事前設定に従った加速局面中の前記単結晶の回転運動を開始させる駆動装置の回転速度を制御し、その結果、前記加速局面の開始時であって前記加速局面の1/4以上の期間中における前記駆動装置の前記回転速度の増加は、3000rpm2以上であることを特徴とする、請求項1に記載の方法。
- 前記加速局面の開始時であって前記加速局面の少なくとも1/4の期間中における前記速度プロファイルの前記事前設定に従った前記駆動装置の前記回転速度の増加量は、前記加速局面に先立つ減速局面の終了前の対応する期間中における前記速度プロファイルの前記事前設定に従った前記駆動装置の前記回転速度の減少量よりも大きいことを特徴とする、請求項2に記載の方法。
- 端部が重なり合う一巻きの平坦なコイルとして形成される誘導加熱コイルにより前記浮遊帯を加熱することを特徴とする、請求項1から3のいずれか1項に記載の方法。
- 一巻きの平坦なコイルとして形成され、かつ、20mm以下の高さを有する誘導加熱コイルにより前記浮遊帯を加熱することを特徴とする、請求項3に記載の方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102014226419.7A DE102014226419A1 (de) | 2014-12-18 | 2014-12-18 | Verfahren zum Züchten eines Einkristalls durch Kristallisieren des Einkristalls aus einer Fließzone |
DE102014226419.7 | 2014-12-18 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2016117642A true JP2016117642A (ja) | 2016-06-30 |
JP6169673B2 JP6169673B2 (ja) | 2017-07-26 |
Family
ID=54843700
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015246155A Active JP6169673B2 (ja) | 2014-12-18 | 2015-12-17 | 浮遊帯から単結晶を結晶化させることによって単結晶を成長させる方法 |
Country Status (8)
Country | Link |
---|---|
US (1) | US9932691B2 (ja) |
EP (1) | EP3034658B1 (ja) |
JP (1) | JP6169673B2 (ja) |
KR (1) | KR101754501B1 (ja) |
CN (1) | CN105714373B (ja) |
DE (1) | DE102014226419A1 (ja) |
DK (1) | DK3034658T3 (ja) |
TW (1) | TWI561690B (ja) |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5229644A (en) * | 1975-09-01 | 1977-03-05 | Wacker Chemitronic | Band fusing device using no crucible |
JPS5382603A (en) * | 1976-12-27 | 1978-07-21 | Monsanto Co | Zone refining apparatus for semiconductive material rod |
JPS6448391A (en) * | 1987-04-27 | 1989-02-22 | Shinetsu Handotai Kk | Single winding induction heating coil used in floating zone melting method |
JPH01252596A (ja) * | 1988-02-18 | 1989-10-09 | Wacker Chemitronic Ges Elektron Grundstoffe Mbh | 半導体棒のルツボなしゾーン引上げ法および該方法を実施するための誘導加熱コイル |
JP2014172774A (ja) * | 2013-03-07 | 2014-09-22 | Shin Etsu Handotai Co Ltd | 半導体単結晶の製造方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL6411697A (ja) * | 1963-10-15 | 1965-04-20 | ||
DE10137856B4 (de) | 2001-08-02 | 2007-12-13 | Siltronic Ag | Durch tiegelloses Zonenziehen hergestellter Einkristall aus Silicium |
DE10137857B4 (de) | 2001-08-02 | 2006-11-16 | Siltronic Ag | Verfahren zur Herstellung eines Einkristalls |
DE10216609B4 (de) | 2002-04-15 | 2005-04-07 | Siltronic Ag | Verfahren zur Herstellung der Halbleiterscheibe |
DE10220964B4 (de) | 2002-05-06 | 2006-11-02 | Pv Silicon Forschungs- Und Produktions Ag | Anordnung zur Herstellung von Kristallstäben mit definiertem Querschnitt und kolumnarer polykristalliner Struktur mittels tiegelfreier kontinuierlicher Kristallisation |
EA017453B1 (ru) * | 2007-04-13 | 2012-12-28 | Топсил Семикондактор Материалз А/С | Способ и устройство для получения монокристалла |
JP4771989B2 (ja) | 2007-04-25 | 2011-09-14 | Sumco Techxiv株式会社 | Fz法シリコン単結晶の製造方法 |
DE102008013326B4 (de) * | 2008-03-10 | 2013-03-28 | Siltronic Ag | Induktionsheizspule und Verfahren zum Schmelzen von Granulat aus Halbleitermaterial |
DE102009005837B4 (de) * | 2009-01-21 | 2011-10-06 | Pv Silicon Forschungs Und Produktions Gmbh | Verfahren und Vorrichtung zur Herstellung von Siliziumdünnstäben |
JP5375889B2 (ja) | 2010-12-28 | 2013-12-25 | 信越半導体株式会社 | 単結晶の製造方法 |
-
2014
- 2014-12-18 DE DE102014226419.7A patent/DE102014226419A1/de not_active Withdrawn
-
2015
- 2015-11-19 US US14/945,840 patent/US9932691B2/en active Active
- 2015-12-08 EP EP15198405.1A patent/EP3034658B1/de active Active
- 2015-12-08 DK DK15198405.1T patent/DK3034658T3/en active
- 2015-12-10 TW TW104141498A patent/TWI561690B/zh active
- 2015-12-11 KR KR1020150176733A patent/KR101754501B1/ko active IP Right Grant
- 2015-12-16 CN CN201510940322.9A patent/CN105714373B/zh active Active
- 2015-12-17 JP JP2015246155A patent/JP6169673B2/ja active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5229644A (en) * | 1975-09-01 | 1977-03-05 | Wacker Chemitronic | Band fusing device using no crucible |
JPS5382603A (en) * | 1976-12-27 | 1978-07-21 | Monsanto Co | Zone refining apparatus for semiconductive material rod |
JPS6448391A (en) * | 1987-04-27 | 1989-02-22 | Shinetsu Handotai Kk | Single winding induction heating coil used in floating zone melting method |
JPH01252596A (ja) * | 1988-02-18 | 1989-10-09 | Wacker Chemitronic Ges Elektron Grundstoffe Mbh | 半導体棒のルツボなしゾーン引上げ法および該方法を実施するための誘導加熱コイル |
JP2014172774A (ja) * | 2013-03-07 | 2014-09-22 | Shin Etsu Handotai Co Ltd | 半導体単結晶の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
TWI561690B (en) | 2016-12-11 |
US20160177469A1 (en) | 2016-06-23 |
CN105714373B (zh) | 2018-06-19 |
DE102014226419A1 (de) | 2016-06-23 |
DK3034658T3 (en) | 2017-10-02 |
TW201623702A (zh) | 2016-07-01 |
JP6169673B2 (ja) | 2017-07-26 |
KR20160074406A (ko) | 2016-06-28 |
EP3034658A1 (de) | 2016-06-22 |
KR101754501B1 (ko) | 2017-07-05 |
EP3034658B1 (de) | 2017-06-14 |
US9932691B2 (en) | 2018-04-03 |
CN105714373A (zh) | 2016-06-29 |
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