JP2016111057A5 - - Google Patents

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Publication number
JP2016111057A5
JP2016111057A5 JP2014244340A JP2014244340A JP2016111057A5 JP 2016111057 A5 JP2016111057 A5 JP 2016111057A5 JP 2014244340 A JP2014244340 A JP 2014244340A JP 2014244340 A JP2014244340 A JP 2014244340A JP 2016111057 A5 JP2016111057 A5 JP 2016111057A5
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JP
Japan
Prior art keywords
material layer
photosensitive material
fluorescent substrate
fluorescent
light
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JP2014244340A
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English (en)
Japanese (ja)
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JP6609917B2 (ja
JP2016111057A (ja
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Priority to JP2014244340A priority Critical patent/JP6609917B2/ja
Priority claimed from JP2014244340A external-priority patent/JP6609917B2/ja
Priority to US14/953,740 priority patent/US9494296B2/en
Publication of JP2016111057A publication Critical patent/JP2016111057A/ja
Publication of JP2016111057A5 publication Critical patent/JP2016111057A5/ja
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Publication of JP6609917B2 publication Critical patent/JP6609917B2/ja
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JP2014244340A 2014-12-02 2014-12-02 蛍光光源用発光素子の製造方法 Active JP6609917B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2014244340A JP6609917B2 (ja) 2014-12-02 2014-12-02 蛍光光源用発光素子の製造方法
US14/953,740 US9494296B2 (en) 2014-12-02 2015-11-30 Method of manufacturing light emitting element of fluorescent light source forming highly precise photonic structure in fluorescence emitting surface of light emitting element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014244340A JP6609917B2 (ja) 2014-12-02 2014-12-02 蛍光光源用発光素子の製造方法

Publications (3)

Publication Number Publication Date
JP2016111057A JP2016111057A (ja) 2016-06-20
JP2016111057A5 true JP2016111057A5 (enExample) 2016-08-12
JP6609917B2 JP6609917B2 (ja) 2019-11-27

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Family Applications (1)

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JP2014244340A Active JP6609917B2 (ja) 2014-12-02 2014-12-02 蛍光光源用発光素子の製造方法

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US (1) US9494296B2 (enExample)
JP (1) JP6609917B2 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017054006A (ja) * 2015-09-09 2017-03-16 ウシオ電機株式会社 光照射方法、基板上構造体の製造方法および基板上構造体
GB2548706B (en) * 2016-02-24 2019-12-11 Nichia Corp Method of manufacturing fluorescent-material-containing member
US11669012B2 (en) * 2020-02-21 2023-06-06 Applied Materials, Inc. Maskless lithography method to fabricate topographic substrate
US11933462B2 (en) * 2020-07-07 2024-03-19 Signify Holding B.V. Laser phosphor based pixelated light source

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07106237A (ja) * 1993-09-29 1995-04-21 Sony Corp 半導体装置の製造方法
JPH10261571A (ja) * 1997-03-19 1998-09-29 Hitachi Ltd パターン形成方法
JP2000056476A (ja) * 1998-08-06 2000-02-25 Oki Electric Ind Co Ltd レジストパターン形成方法
JP2000315785A (ja) * 1999-04-30 2000-11-14 Canon Inc ナノ構造体の製造方法及びナノ構造体デバイス
US8110345B2 (en) * 2002-12-04 2012-02-07 Taiwan Semiconductor Manufacturing Company, Ltd. High resolution lithography system and method
CN100422269C (zh) * 2003-03-26 2008-10-01 株式会社半导体能源研究所 有机-无机混合材料、用于合成上述有机-无机混合材料的组合物以及上述有机-无机混合材料的制备方法
TWI246783B (en) * 2003-09-24 2006-01-01 Matsushita Electric Works Ltd Light-emitting device and its manufacturing method
US7943947B2 (en) * 2004-07-24 2011-05-17 Young Rag Do LED device comprising thin-film phosphor having two dimensional nano periodic structures
JP4389791B2 (ja) * 2004-08-25 2009-12-24 セイコーエプソン株式会社 微細構造体の製造方法および露光装置
US7718326B2 (en) * 2005-06-17 2010-05-18 Vincent E Stenger Seamless stitching of patterns formed by interference lithography
DE102007001903A1 (de) * 2006-11-17 2008-05-21 Merck Patent Gmbh Leuchtstoffkörper enthaltend Rubin für weiße oder Color-on-demand LEDs
NL1036349A1 (nl) * 2007-12-28 2009-06-30 Asml Holding Nv Scanning EUV interference imaging for extremely high resolution patterning.
DE102010005169A1 (de) * 2009-12-21 2011-06-22 OSRAM Opto Semiconductors GmbH, 93055 Strahlungsemittierendes Halbleiterbauelement
US20110216550A1 (en) 2010-03-02 2011-09-08 Teruo Koike Vehicle light
JP5510646B2 (ja) 2010-03-18 2014-06-04 スタンレー電気株式会社 車両用灯具
JP2012109400A (ja) * 2010-11-17 2012-06-07 Sharp Corp 発光素子、発光装置および発光素子の製造方法

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