JP2016096279A - 回路モジュール及びその製造方法 - Google Patents
回路モジュール及びその製造方法 Download PDFInfo
- Publication number
- JP2016096279A JP2016096279A JP2014232283A JP2014232283A JP2016096279A JP 2016096279 A JP2016096279 A JP 2016096279A JP 2014232283 A JP2014232283 A JP 2014232283A JP 2014232283 A JP2014232283 A JP 2014232283A JP 2016096279 A JP2016096279 A JP 2016096279A
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- Prior art keywords
- semiconductor chip
- circuit board
- circuit module
- filler
- semiconductor
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Abstract
【解決手段】回路モジュール100は、表面に複数の電極パッド12が設けられた回路基板10と、回路基板10上に配置された半導体チップ11であって、表面及び裏面を有し、裏面に設けられた複数のハンダバンプ13、14の各々が複数の電極パッド12の対応する1つにハンダ接合する、半導体チップ11と、回路基板10の表面と半導体チップ11の裏面との間に設けられたアンダーフィル15とを備える。さらに、半導体チップ11は、その表面の外周に所定の厚さの庇部24を備え、アンダーフィル15は、その庇部24の底面から半導体チップ11の側壁に沿って回路基板10の表面に至るフィレット15Aを形成している。
【選択図】図2
Description
(a)複数のチップ領域を含む半導体基板を準備するステップであって、複数のチップ領域の各々は表面に複数のハンダバンプを含むステップと、
(b)複数のチップ領域の隣接するチップ領域の間の半導体基板に開口を設けるステップであって、その開口は半導体基板を貫通しないステップと、
(c)開口を含む半導体基板の表面に樹脂層を形成するステップと、
(d)樹脂層を形成した後の半導体基板を開口の略中心の位置において切断するステップであって、当該切断により各々がチップ領域を含む複数の半導体チップを得るステップと、
(e)半導体チップを回路基板に接合するステップであって、当該回路基板は表面に複数の電極パッドが設けられ、半導体チップの複数のハンダバンプの各々を複数の電極パッドの対応する1つに接合するステップと、を含む。
状態1:アンダーフィル15B及びフィレット15A無し
状態2:アンダーフィル15B有り、フィレット15A無し
状態3:アンダーフィル15B及びフィレット15A有り
状態4:2濃度(2層)のアンダーフィル15B及びフィレット15A有り
d1=(da−db)/2
により得ることができる。
11 半導体チップ
12 電極パッド
13 金属ピラー(ポスト)
14 ハンダ層
15、15B アンダーフィル
15A フィレット
16 半導体基板
17 支持基板(石英ガラス)
18 接着層(紫外線で脱着可能な樹脂テープ)
19、23 開口
20、21 アンダーフィル用樹脂
22 ダイシング用テープ
24 庇部(突起部)
Claims (14)
- 回路モジュールであって、
表面に複数の電極パッドが設けられた回路基板と、
前記回路基板上に配置された半導体チップであって、表面及び裏面を有し、当該裏面に設けられた複数のハンダバンプの各々が前記複数の電極パッドの対応する1つにハンダ接合する、半導体チップと、
前記回路基板の表面と前記半導体チップの裏面との間に設けられたアンダーフィルとを備え、
前記半導体チップは、前記表面の外周に所定の厚さの庇部を備え、前記アンダーフィルは、前記庇部の底面から前記半導体チップの側壁に沿って前記回路基板の表面に至るフィレットを形成している、回路モジュール。 - 前記アンダーフィルは、低濃度フィラーを含む熱硬化性樹脂からなる領域と、当該領域上の高濃度フィラーを含む熱硬化性樹脂からなる領域とを含む、請求項1に記載の回路モジュール。
- 前記半導体チップの前記庇部は、前記半導体チップの前記表面と前記裏面のサイズ差の略半分の長さを有する、請求項1に記載の回路モジュール。
- 前記ハンダバンプは金属ピラー上のハンダを含む、請求項1に記載の回路モジュール。
- 前記回路基板は、有機基板上の銅配線を含む、請求項1に記載の回路モジュール。
- 前記低濃度フィラーを含む熱硬化性樹脂は、50〜70重量%のフィラー密度を有し、前記高濃度フィラーを含む熱硬化性樹脂は、80〜95重量%のフィラー密度を有する、請求項2に記載の回路モジュール。
- 回路モジュールの製造方法であって、
(a)複数のチップ領域を含む半導体基板を準備するステップであって、前記複数のチップ領域の各々は表面に複数のハンダバンプを含むステップと、
(b)前記複数のチップ領域の隣接するチップ領域の間の前記半導体基板に開口を設けるステップであって、前記開口は前記半導体基板を貫通しないステップと、
(c)前記開口を含む前記半導体基板の表面に樹脂層を形成するステップと、
(d)前記樹脂層を形成した後の前記半導体基板を前記開口の略中心の位置において切断するステップであって、当該切断により各々が前記チップ領域を含む複数の半導体チップを得るステップと、
(e)前記半導体チップを回路基板に接合するステップであって、当該回路基板は表面に複数の電極パッドが設けられ、前記半導体チップの前記複数のハンダバンプの各々を前記複数の電極パッドの対応する1つに接合するステップと、を含む回路モジュールの製造方法。 - 前記半導体チップを前記回路基板に接合するステップ(e)は、前記半導体チップと前記回路基板の接合部を加熱して、前記複数の電極パッドの各々にハンダ接合を形成するステップを含む、請求項7に記載の製造方法。
- 前記切断するステップ(d)において、前記開口の略中心の位置における切断により前記半導体チップの裏面の外周に所定の厚さの庇部が形成され、
前記加熱するステップにおいて、前記半導体チップの前記庇部の底面から前記半導体チップの側壁に沿って前記回路基板の表面に至る前記樹脂からなるフィレットが形成される、請求項8に記載の製造方法。 - 前記開口を含む前記半導体基板の表面に樹脂層を形成するステップ(c)は、
前記開口を含む前記半導体基板の表面に低濃度フィラーを含む樹脂層を形成するステップと、
前記低濃度フィラーを含む樹脂層の上に高濃度フィラーを含む樹脂層を形成するステップを含む、請求項7に記載の製造方法。 - 前記半導体チップの前記庇部は、前記半導体チップの前記表面と前記裏面のサイズ差の略半分の長さを有する、請求項9に記載の製造方法。
- 前記ハンダバンプは金属ピラー上のハンダを含む、請求項7に記載の製造方法。
- 前記回路基板は、有機基板上の銅配線を含む、請求項7に記載の製造方法。
- 前記低濃度フィラーを含む熱硬化性樹脂は、50〜70重量%のフィラー密度を有し、前記高濃度フィラーを含む熱硬化性樹脂は、80〜95重量%のフィラー密度を有する、請求項10に記載の製造方法。
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DE112017002430B4 (de) | 2016-05-12 | 2022-03-10 | Denso Corporation | Luftkonditioniereinheit für ein Fahrzeug |
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US10074583B2 (en) | 2018-09-11 |
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US20160141218A1 (en) | 2016-05-19 |
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