JP2016092158A5 - - Google Patents

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Publication number
JP2016092158A5
JP2016092158A5 JP2014223754A JP2014223754A JP2016092158A5 JP 2016092158 A5 JP2016092158 A5 JP 2016092158A5 JP 2014223754 A JP2014223754 A JP 2014223754A JP 2014223754 A JP2014223754 A JP 2014223754A JP 2016092158 A5 JP2016092158 A5 JP 2016092158A5
Authority
JP
Japan
Prior art keywords
substrate
pencil
roll member
roll
member according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2014223754A
Other languages
English (en)
Japanese (ja)
Other versions
JP2016092158A (ja
JP6316730B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP2014223754A external-priority patent/JP6316730B2/ja
Priority to JP2014223754A priority Critical patent/JP6316730B2/ja
Priority to TW107140682A priority patent/TWI678260B/zh
Priority to TW104131754A priority patent/TWI670141B/zh
Priority to US14/920,045 priority patent/US10471481B2/en
Priority to KR1020150149207A priority patent/KR102443489B1/ko
Priority to CN201510724374.2A priority patent/CN105575851B/zh
Priority to CN202110546709.1A priority patent/CN113276024B/zh
Priority to MYPI2015002682A priority patent/MY178652A/en
Priority to SG10201508996WA priority patent/SG10201508996WA/en
Publication of JP2016092158A publication Critical patent/JP2016092158A/ja
Publication of JP2016092158A5 publication Critical patent/JP2016092158A5/ja
Publication of JP6316730B2 publication Critical patent/JP6316730B2/ja
Application granted granted Critical
Priority to US16/590,089 priority patent/US11642704B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2014223754A 2014-10-31 2014-10-31 ロール部材、ペンシル部材、及びそれらの少なくともいずれか一方を含む基板処理装置 Active JP6316730B2 (ja)

Priority Applications (10)

Application Number Priority Date Filing Date Title
JP2014223754A JP6316730B2 (ja) 2014-10-31 2014-10-31 ロール部材、ペンシル部材、及びそれらの少なくともいずれか一方を含む基板処理装置
TW107140682A TWI678260B (zh) 2014-10-31 2015-09-25 滾筒構件、鉛筆構件、以及包含前述二者至少任一方之基板處理裝置
TW104131754A TWI670141B (zh) 2014-10-31 2015-09-25 滾筒構件、以及基板洗淨方法
US14/920,045 US10471481B2 (en) 2014-10-31 2015-10-22 Roll-type processing member, pencil-type processing member, and substrate processing apparatus including any one of these
KR1020150149207A KR102443489B1 (ko) 2014-10-31 2015-10-27 롤 부재, 펜슬 부재 및 그들 중 적어도 어느 한쪽을 포함하는 기판 처리 장치
CN202110546709.1A CN113276024B (zh) 2014-10-31 2015-10-29 笔部件以及基板处理装置
CN201510724374.2A CN105575851B (zh) 2014-10-31 2015-10-29 辊部件以及基板处理装置
MYPI2015002682A MY178652A (en) 2014-10-31 2015-10-30 Roll-type processing member, pencil-type processing member, and substrate processing apparatus including any one of these
SG10201508996WA SG10201508996WA (en) 2014-10-31 2015-10-30 Roll-Type Processing Member, Pencil-Type Processing Member, And Substrate Processing Apparatus Including Any One Of These
US16/590,089 US11642704B2 (en) 2014-10-31 2019-10-01 Roll-type processing member, pencil-type processing member, and substrate processing apparatus including any one of these

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014223754A JP6316730B2 (ja) 2014-10-31 2014-10-31 ロール部材、ペンシル部材、及びそれらの少なくともいずれか一方を含む基板処理装置

Publications (3)

Publication Number Publication Date
JP2016092158A JP2016092158A (ja) 2016-05-23
JP2016092158A5 true JP2016092158A5 (enExample) 2017-09-07
JP6316730B2 JP6316730B2 (ja) 2018-04-25

Family

ID=55853472

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014223754A Active JP6316730B2 (ja) 2014-10-31 2014-10-31 ロール部材、ペンシル部材、及びそれらの少なくともいずれか一方を含む基板処理装置

Country Status (7)

Country Link
US (2) US10471481B2 (enExample)
JP (1) JP6316730B2 (enExample)
KR (1) KR102443489B1 (enExample)
CN (2) CN105575851B (enExample)
MY (1) MY178652A (enExample)
SG (1) SG10201508996WA (enExample)
TW (2) TWI678260B (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6956578B2 (ja) * 2017-09-19 2021-11-02 株式会社荏原製作所 ブレークイン装置及びブレークインシステム
JP7224128B2 (ja) * 2018-08-09 2023-02-17 株式会社荏原製作所 基板用洗浄具、基板洗浄装置、基板処理装置、基板処理方法および基板用洗浄具の製造方法
JP7536039B2 (ja) * 2019-12-13 2024-08-19 株式会社荏原製作所 基板洗浄装置、研磨装置、バフ処理装置、基板洗浄方法、基板処理装置、および機械学習器
CN112420574B (zh) * 2020-11-25 2024-02-02 杭州众硅电子科技有限公司 一种可隔离防护晶圆的晶圆处理装置
JP7564693B2 (ja) 2020-11-26 2024-10-09 株式会社Ｓｃｒｅｅｎホールディングス 下面ブラシ、ブラシユニットおよび基板洗浄装置
JP7672908B2 (ja) * 2021-07-28 2025-05-08 株式会社Ｓｃｒｅｅｎホールディングス 基板洗浄装置および基板洗浄方法
US20230178360A1 (en) * 2021-12-06 2023-06-08 Tung An Development Ltd. Device Having Cleaning Bodies
WO2024124074A1 (en) * 2022-12-07 2024-06-13 Tech Core Pva, Llc Cylindrical brush and method of manufacture

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JPH08141521A (ja) 1994-11-24 1996-06-04 Sumitomo Metal Ind Ltd 洗浄装置
US5779526A (en) * 1996-02-27 1998-07-14 Gill; Gerald L. Pad conditioner
EP0837493B8 (en) * 1996-10-21 2007-11-07 Ebara Corporation Cleaning apparatus
EP0937509A4 (en) 1996-11-08 2005-01-19 Aion Co Ltd SPONGE ROLLER TO CLEAN
US6502273B1 (en) * 1996-11-08 2003-01-07 Kanebo, Ltd. Cleaning sponge roller
TW358764B (en) * 1997-07-07 1999-05-21 Super Silicon Crystal Res Inst A method of double-side lapping a wafer and an apparatus therefor
US6202658B1 (en) * 1998-11-11 2001-03-20 Applied Materials, Inc. Method and apparatus for cleaning the edge of a thin disc
JP4091187B2 (ja) * 1998-12-08 2008-05-28 株式会社荏原製作所 洗浄具、基板洗浄装置及び基板洗浄方法
JP2000270929A (ja) * 1999-03-26 2000-10-03 Shibaura Mechatronics Corp 洗浄用ブラシ
JP2000311878A (ja) * 1999-04-27 2000-11-07 Dainippon Screen Mfg Co Ltd 基板洗浄装置
KR100613919B1 (ko) * 1999-07-26 2006-08-18 동경 엘렉트론 주식회사 기판세정구, 기판세정장치 및 기판세정방법
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JP2014534615A (ja) * 2011-09-26 2014-12-18 インテグリス・インコーポレーテッド Ｃｍｐ後クリーニング装置および方法
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