JP2011020241A5 - - Google Patents

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Publication number
JP2011020241A5
JP2011020241A5 JP2009169899A JP2009169899A JP2011020241A5 JP 2011020241 A5 JP2011020241 A5 JP 2011020241A5 JP 2009169899 A JP2009169899 A JP 2009169899A JP 2009169899 A JP2009169899 A JP 2009169899A JP 2011020241 A5 JP2011020241 A5 JP 2011020241A5
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JP
Japan
Prior art keywords
workpiece
rotary tool
polishing
radius
shape
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Pending
Application number
JP2009169899A
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English (en)
Japanese (ja)
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JP2011020241A (ja
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Priority to JP2009169899A priority Critical patent/JP2011020241A/ja
Priority claimed from JP2009169899A external-priority patent/JP2011020241A/ja
Publication of JP2011020241A publication Critical patent/JP2011020241A/ja
Publication of JP2011020241A5 publication Critical patent/JP2011020241A5/ja
Pending legal-status Critical Current

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JP2009169899A 2009-07-21 2009-07-21 研磨加工方法 Pending JP2011020241A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009169899A JP2011020241A (ja) 2009-07-21 2009-07-21 研磨加工方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009169899A JP2011020241A (ja) 2009-07-21 2009-07-21 研磨加工方法

Publications (2)

Publication Number Publication Date
JP2011020241A JP2011020241A (ja) 2011-02-03
JP2011020241A5 true JP2011020241A5 (enExample) 2012-09-06

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ID=43630740

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009169899A Pending JP2011020241A (ja) 2009-07-21 2009-07-21 研磨加工方法

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JP (1) JP2011020241A (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120301242A1 (en) * 2011-05-24 2012-11-29 Canon Kabushiki Kaisha Method of manufacturing workpiece
WO2013035709A1 (en) * 2011-09-05 2013-03-14 Canon Kabushiki Kaisha Processing apparatus and optical member manufacturing method
CN104191370B (zh) * 2014-09-09 2017-02-15 成都精密光学工程研究中心 全口径抛光中抛光盘表面形状的修正方法及装置
CN115464501B (zh) * 2022-09-30 2023-06-20 中国科学院国家天文台南京天文光学技术研究所 使用单一研抛工具、可变公转半径的面形误差加工方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3304994B2 (ja) * 1991-08-30 2002-07-22 キヤノン株式会社 研磨方法および研磨装置
JP3890186B2 (ja) * 2000-08-11 2007-03-07 キヤノン株式会社 研磨方法及び光学素子及び光学素子の成形用金型
JP4488304B2 (ja) * 2004-09-28 2010-06-23 オリンパス株式会社 研磨加工方法

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