JP2011020241A - 研磨加工方法 - Google Patents

研磨加工方法 Download PDF

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Publication number
JP2011020241A
JP2011020241A JP2009169899A JP2009169899A JP2011020241A JP 2011020241 A JP2011020241 A JP 2011020241A JP 2009169899 A JP2009169899 A JP 2009169899A JP 2009169899 A JP2009169899 A JP 2009169899A JP 2011020241 A JP2011020241 A JP 2011020241A
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JP
Japan
Prior art keywords
shape
workpiece
polishing
curvature
tool
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Pending
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JP2009169899A
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English (en)
Japanese (ja)
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JP2011020241A5 (enExample
Inventor
Yoichiro Anraku
要一郎 安楽
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
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Canon Inc
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Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2009169899A priority Critical patent/JP2011020241A/ja
Publication of JP2011020241A publication Critical patent/JP2011020241A/ja
Publication of JP2011020241A5 publication Critical patent/JP2011020241A5/ja
Pending legal-status Critical Current

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  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
JP2009169899A 2009-07-21 2009-07-21 研磨加工方法 Pending JP2011020241A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009169899A JP2011020241A (ja) 2009-07-21 2009-07-21 研磨加工方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009169899A JP2011020241A (ja) 2009-07-21 2009-07-21 研磨加工方法

Publications (2)

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JP2011020241A true JP2011020241A (ja) 2011-02-03
JP2011020241A5 JP2011020241A5 (enExample) 2012-09-06

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JP2009169899A Pending JP2011020241A (ja) 2009-07-21 2009-07-21 研磨加工方法

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JP (1) JP2011020241A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013006267A (ja) * 2011-05-24 2013-01-10 Canon Inc 被加工物の加工方法
WO2013035709A1 (en) * 2011-09-05 2013-03-14 Canon Kabushiki Kaisha Processing apparatus and optical member manufacturing method
CN104191370A (zh) * 2014-09-09 2014-12-10 成都精密光学工程研究中心 全口径抛光中抛光盘表面形状的修正方法及装置
CN115464501A (zh) * 2022-09-30 2022-12-13 中国科学院国家天文台南京天文光学技术研究所 使用单一研抛工具、可变公转半径的面形误差加工方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0557606A (ja) * 1991-08-30 1993-03-09 Canon Inc 研磨方法および研磨装置
JP2002052451A (ja) * 2000-08-11 2002-02-19 Canon Inc 研磨方法及び光学素子及び光学素子の成形用金型
JP2006095622A (ja) * 2004-09-28 2006-04-13 Olympus Corp 研磨加工方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0557606A (ja) * 1991-08-30 1993-03-09 Canon Inc 研磨方法および研磨装置
JP2002052451A (ja) * 2000-08-11 2002-02-19 Canon Inc 研磨方法及び光学素子及び光学素子の成形用金型
JP2006095622A (ja) * 2004-09-28 2006-04-13 Olympus Corp 研磨加工方法

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013006267A (ja) * 2011-05-24 2013-01-10 Canon Inc 被加工物の加工方法
WO2013035709A1 (en) * 2011-09-05 2013-03-14 Canon Kabushiki Kaisha Processing apparatus and optical member manufacturing method
CN104191370A (zh) * 2014-09-09 2014-12-10 成都精密光学工程研究中心 全口径抛光中抛光盘表面形状的修正方法及装置
CN104191370B (zh) * 2014-09-09 2017-02-15 成都精密光学工程研究中心 全口径抛光中抛光盘表面形状的修正方法及装置
CN115464501A (zh) * 2022-09-30 2022-12-13 中国科学院国家天文台南京天文光学技术研究所 使用单一研抛工具、可变公转半径的面形误差加工方法
CN115464501B (zh) * 2022-09-30 2023-06-20 中国科学院国家天文台南京天文光学技术研究所 使用单一研抛工具、可变公转半径的面形误差加工方法

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