JP2016050357A5 - - Google Patents

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Publication number
JP2016050357A5
JP2016050357A5 JP2015108025A JP2015108025A JP2016050357A5 JP 2016050357 A5 JP2016050357 A5 JP 2016050357A5 JP 2015108025 A JP2015108025 A JP 2015108025A JP 2015108025 A JP2015108025 A JP 2015108025A JP 2016050357 A5 JP2016050357 A5 JP 2016050357A5
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JP
Japan
Prior art keywords
metal film
film forming
forming method
organic solvent
metal
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JP2015108025A
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English (en)
Japanese (ja)
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JP2016050357A (ja
JP6945120B2 (ja
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Priority claimed from JP2015108025A external-priority patent/JP6945120B2/ja
Priority to JP2015108025A priority Critical patent/JP6945120B2/ja
Priority to KR1020150121117A priority patent/KR101807544B1/ko
Priority to US14/838,126 priority patent/US9828694B2/en
Priority to EP15182652.6A priority patent/EP2990503B1/en
Priority to TW104128055A priority patent/TWI597381B/zh
Priority to CN201510540239.2A priority patent/CN105386008B/zh
Priority to CN201911347903.6A priority patent/CN110952077B/zh
Publication of JP2016050357A publication Critical patent/JP2016050357A/ja
Publication of JP2016050357A5 publication Critical patent/JP2016050357A5/ja
Priority to JP2020001057A priority patent/JP6920631B2/ja
Publication of JP6945120B2 publication Critical patent/JP6945120B2/ja
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JP2015108025A 2014-08-29 2015-05-27 金属膜形成方法 Active JP6945120B2 (ja)

Priority Applications (8)

Application Number Priority Date Filing Date Title
JP2015108025A JP6945120B2 (ja) 2014-08-29 2015-05-27 金属膜形成方法
KR1020150121117A KR101807544B1 (ko) 2014-08-29 2015-08-27 금속막 형성방법
US14/838,126 US9828694B2 (en) 2014-08-29 2015-08-27 Method of forming metal film
EP15182652.6A EP2990503B1 (en) 2014-08-29 2015-08-27 Method of forming metal film
TW104128055A TWI597381B (zh) 2014-08-29 2015-08-27 Metal film formation method
CN201911347903.6A CN110952077B (zh) 2014-08-29 2015-08-28 金属膜形成方法
CN201510540239.2A CN105386008B (zh) 2014-08-29 2015-08-28 金属膜形成方法
JP2020001057A JP6920631B2 (ja) 2014-08-29 2020-01-07 金属膜形成方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2014176648 2014-08-29
JP2014176648 2014-08-29
JP2015108025A JP6945120B2 (ja) 2014-08-29 2015-05-27 金属膜形成方法

Related Child Applications (1)

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JP2020001057A Division JP6920631B2 (ja) 2014-08-29 2020-01-07 金属膜形成方法

Publications (3)

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JP2016050357A JP2016050357A (ja) 2016-04-11
JP2016050357A5 true JP2016050357A5 (https=) 2018-07-05
JP6945120B2 JP6945120B2 (ja) 2021-10-06

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JP2015108025A Active JP6945120B2 (ja) 2014-08-29 2015-05-27 金属膜形成方法

Country Status (6)

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US (1) US9828694B2 (https=)
EP (1) EP2990503B1 (https=)
JP (1) JP6945120B2 (https=)
KR (1) KR101807544B1 (https=)
CN (2) CN110952077B (https=)
TW (1) TWI597381B (https=)

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CN109417037B (zh) 2016-06-30 2024-03-15 株式会社Flosfia 氧化物半导体膜及其制造方法
JP2018019052A (ja) * 2016-07-30 2018-02-01 株式会社Flosfia インダクタの製造方法
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JP6879483B2 (ja) * 2016-07-30 2021-06-02 株式会社Flosfia コンデンサの製造方法
JP7064723B2 (ja) * 2017-03-31 2022-05-11 株式会社Flosfia 成膜方法
CN109628910B (zh) 2017-10-07 2023-06-30 株式会社Flosfia 形成膜的方法
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CN110318021B (zh) * 2019-07-26 2020-08-25 中国科学技术大学 一种晶圆级二氧化钒薄膜的制备方法
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