JP2015198246A - 埋め込みチップ - Google Patents
埋め込みチップ Download PDFInfo
- Publication number
- JP2015198246A JP2015198246A JP2014250274A JP2014250274A JP2015198246A JP 2015198246 A JP2015198246 A JP 2015198246A JP 2014250274 A JP2014250274 A JP 2014250274A JP 2014250274 A JP2014250274 A JP 2014250274A JP 2015198246 A JP2015198246 A JP 2015198246A
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- die
- chip
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- XQUPVDVFXZDTLT-UHFFFAOYSA-N 1-[4-[[4-(2,5-dioxopyrrol-1-yl)phenyl]methyl]phenyl]pyrrole-2,5-dione Chemical compound O=C1C=CC(=O)N1C(C=C1)=CC=C1CC1=CC=C(N2C(C=CC2=O)=O)C=C1 XQUPVDVFXZDTLT-UHFFFAOYSA-N 0.000 description 1
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Classifications
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- H01L23/538—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates
- H01L23/5389—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates the chips being integrally enclosed by the interconnect and support structures
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- H01L23/481—Internal lead connections, e.g. via connections, feedthrough structures
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- H01L24/19—Manufacturing methods of high density interconnect preforms
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- H01L24/82—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected by forming build-up interconnects at chip-level, e.g. for high density interconnects [HDI]
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- H01L2224/48235—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a via metallisation of the item
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Abstract
Description
12 チップソケット
14、124、210 ビア
16、18、38、206 フレーム
20 パネル
21、22、23、24 ブロック
25 水平方向バー
26 垂直方向バー
27 外部フレーム
28、29 チップソケット
35、55 チップ
36、208 パッキング材
40 フレームワーク
42、43 ルーティング層
45 ダイシングツール
48 ダイパッケージ
132、202 ダイ
57 半田ボール
120 グリッド
122 有機マトリクスフレーム
126 ソケット
130 テープ
134 パッケージ材
136 銅キャリア
138 シード層
140、150 フォトレジスト層
142 導電性フィーチャ
144 エッチングバリア
146 接着性金属シード層
148 銅シード層
152 パターン
154 銅
200 構造体
204 コンタクト
Claims (28)
- ポリマーマトリクス内に埋め込まれ、前記マトリクスによって囲まれる少なくとも1個のダイを含み、該ダイの外周周りに前記ポリマーマトリクスを通る少なくとも1つの貫通ビアを更に含む構造体。
- 前記少なくとも1つのビアは、両端部を露出させる、請求項1に記載の構造体。
- 前記ダイは、第1ポリマーマトリクスを含むフレームによって囲まれ、前記少なくとも1つの貫通ビアは、前記フレームを貫通し;前記ダイは、端子を下面にして、チップの下面が前記フレームの下面と同一平面上にあるように配置され、前記フレームは、前記チップより厚く、前記ダイは、下面を除く全体が、第2ポリマーマトリクスを有するパッケージ材で囲まれる、請求項1に記載の構造体。
- 前記第1ポリマーマトリクスは、繊維強化材を含む、請求項2に記載の構造体。
- 前記第2ポリマーマトリクスは、前記第1ポリマーマトリクスとは異なるポリマーを含む、請求項2に記載の構造体。
- 前記第2ポリマーマトリクスは、前記第1ポリマーと同じポリマーを含む、請求項2に記載の構造体。
- 前記パッケージ材は、フィラーを更に含む、請求項4に記載の構造体。
- 前記フィラーは、短繊維を含む、請求項6に記載の構造体。
- 前記フィラーは、セラミック粒子を含む、請求項6に記載の構造体。
- 前記ダイは、集積回路を含む、請求項2に記載の構造体。
- 前記ダイは、アナログ集積回路を含む、請求項8に記載の構造体。
- 前記ダイは、デジタル集積回路を含む、請求項8に記載の構造体。
- 前記ダイは、集積化受動素子(Integrated Passive Device)から成る群から選択される構成要素を含む、請求項2に記載の構造体。
- 前記集積化受動素子は、抵抗、コンデンサ、及びインダクタの少なくとも1つを含む、請求項13に記載の構造体。
- 少なくとも1つの導体が、前記チップの端子を前記少なくとも1つの貫通ビアと結合させるように、導体のフィーチャ層を更に含む、請求項2に記載の構造体。
- 前記第1フィーチャ層の下に、少なくとも1層の更なるフィーチャ層を更に含み、前記少なくとも1層の更なるフィーチャ層は、ビアの層によって、前記第1フィーチャ層に結合され、前記ビア及び前記少なくとも1層の更なるフィーチャ層は、ポリマー誘電体内に封止される、請求項15に記載の構造体。
- 前記チップの終端部側と反対側に延伸する導体のフィーチャ層を更に含み、前記導体のフィーチャ層にある導体が、前記チップを囲む前記フレーム内で貫通ビアに結合されるようにする、請求項2に記載の構造体。
- 前記チップの終端部側と反対側に延伸する前記導体上に少なくとも1層の更なるフィーチャ層を更に含み、前記少なくとも1層の更なるフィーチャ層は、ビアの層によって前記第1フィーチャ層に結合され、前記ビア及び前記少なくとも1層の更なるフィーチャ層は、ポリマー誘電体内に封止される、請求項15に記載の構造体。
- 少なくとも1つのビアは、非円形である、請求項1に記載の構造体。
- 前記少なくとも1つのビアは、同軸のビア対である、請求項1に記載の構造体。
- 少なくとも2個の隣接するダイを含む、請求項2に記載の構造体。
- 前記少なくとも2個の隣接するダイは、前記フレームのバーによって分離される、請求項19に記載の構造体。
- 少なくとも1つの貫通ビアの少なくとも片端部に接続される少なくとも1つの端子を有する更なるダイを含む、請求項2に記載の構造体。
- 前記更なるダイは、前記少なくとも1つの貫通ビアの前記少なくとも片端部に、フリップチップボンディング又はワイヤボンディングされる、請求項23に記載の構造体。
- 前記外部のフィーチャ層に接続される少なくとも1つの端子を有する更なるダイを含む、請求項16に記載の構造体。
- 前記外部のフィーチャ層に接続される少なくとも1つの端子を有する更なるダイを含む、請求項18に記載の構造体。
- 前記外部のフィーチャ層に接続される少なくとも1つの端子を有する更なるIC基板パッケージを含む、請求項16に記載の構造体。
- 前記外部のフィーチャ層に接続される少なくとも1つの端子を有する更なるIC基板パッケージを含む、請求項18に記載の構造体。
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US14/242,696 | 2014-04-01 | ||
US14/242,696 US20150279814A1 (en) | 2014-04-01 | 2014-04-01 | Embedded chips |
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JP2022031176A (ja) * | 2020-08-05 | 2022-02-18 | ズハイ アクセス セミコンダクター シーオー.,エルティーディー | 埋め込み型パッケージ構造及びその製造方法 |
JP2022037904A (ja) * | 2020-08-25 | 2022-03-09 | ズハイ アクセス セミコンダクター シーオー.,エルティーディー | 線路プリセット放熱埋め込み型パッケージ構造及びその製造方法 |
JP2022542332A (ja) * | 2020-06-16 | 2022-10-03 | 珠海越亜半導体股▲分▼有限公司 | 放熱兼電磁シールドの埋め込みパッケージ構造及びその製造方法並びに基板 |
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JP2022542332A (ja) * | 2020-06-16 | 2022-10-03 | 珠海越亜半導体股▲分▼有限公司 | 放熱兼電磁シールドの埋め込みパッケージ構造及びその製造方法並びに基板 |
JP7236549B2 (ja) | 2020-06-16 | 2023-03-09 | 珠海越亜半導体股▲分▼有限公司 | 放熱兼電磁シールドの埋め込みパッケージ構造の製造方法 |
JP2022031176A (ja) * | 2020-08-05 | 2022-02-18 | ズハイ アクセス セミコンダクター シーオー.,エルティーディー | 埋め込み型パッケージ構造及びその製造方法 |
JP7176060B2 (ja) | 2020-08-05 | 2022-11-21 | ズハイ アクセス セミコンダクター シーオー.,エルティーディー | 埋め込み型パッケージ構造及びその製造方法 |
JP2022037904A (ja) * | 2020-08-25 | 2022-03-09 | ズハイ アクセス セミコンダクター シーオー.,エルティーディー | 線路プリセット放熱埋め込み型パッケージ構造及びその製造方法 |
JP7277521B2 (ja) | 2020-08-25 | 2023-05-19 | ズハイ アクセス セミコンダクター シーオー.,エルティーディー | 線路プリセット放熱埋め込み型パッケージ構造及びその製造方法 |
Also Published As
Publication number | Publication date |
---|---|
CN104269384A (zh) | 2015-01-07 |
KR20150114370A (ko) | 2015-10-12 |
KR101680593B1 (ko) | 2016-11-29 |
US20150279814A1 (en) | 2015-10-01 |
TW201539700A (zh) | 2015-10-16 |
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