JP2015149316A5 - - Google Patents

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Publication number
JP2015149316A5
JP2015149316A5 JP2014019768A JP2014019768A JP2015149316A5 JP 2015149316 A5 JP2015149316 A5 JP 2015149316A5 JP 2014019768 A JP2014019768 A JP 2014019768A JP 2014019768 A JP2014019768 A JP 2014019768A JP 2015149316 A5 JP2015149316 A5 JP 2015149316A5
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JP
Japan
Prior art keywords
measurement
substrate
exposure
exposure apparatus
shot
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Application number
JP2014019768A
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English (en)
Japanese (ja)
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JP2015149316A (ja
JP6267530B2 (ja
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Priority to JP2014019768A priority Critical patent/JP6267530B2/ja
Priority claimed from JP2014019768A external-priority patent/JP6267530B2/ja
Priority to US14/608,731 priority patent/US9746789B2/en
Publication of JP2015149316A publication Critical patent/JP2015149316A/ja
Publication of JP2015149316A5 publication Critical patent/JP2015149316A5/ja
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Publication of JP6267530B2 publication Critical patent/JP6267530B2/ja
Expired - Fee Related legal-status Critical Current
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JP2014019768A 2014-02-04 2014-02-04 露光装置、および物品の製造方法 Expired - Fee Related JP6267530B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2014019768A JP6267530B2 (ja) 2014-02-04 2014-02-04 露光装置、および物品の製造方法
US14/608,731 US9746789B2 (en) 2014-02-04 2015-01-29 Exposure apparatus, and method of manufacturing article

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014019768A JP6267530B2 (ja) 2014-02-04 2014-02-04 露光装置、および物品の製造方法

Publications (3)

Publication Number Publication Date
JP2015149316A JP2015149316A (ja) 2015-08-20
JP2015149316A5 true JP2015149316A5 (enExample) 2017-03-16
JP6267530B2 JP6267530B2 (ja) 2018-01-24

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ID=53754743

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014019768A Expired - Fee Related JP6267530B2 (ja) 2014-02-04 2014-02-04 露光装置、および物品の製造方法

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US (1) US9746789B2 (enExample)
JP (1) JP6267530B2 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6806509B2 (ja) * 2016-09-15 2021-01-06 キヤノン株式会社 露光装置及び物品の製造方法
CA2962809C (en) * 2017-03-31 2019-02-26 Centre De Recherche Industrielle Du Quebec System and method for color scanning a moving article
JP6882091B2 (ja) * 2017-06-21 2021-06-02 キヤノン株式会社 露光装置及び物品の製造方法
JP7022611B2 (ja) * 2018-02-06 2022-02-18 キヤノン株式会社 露光装置の制御方法、露光装置、及び物品製造方法
JP7137363B2 (ja) * 2018-06-11 2022-09-14 キヤノン株式会社 露光方法、露光装置、物品の製造方法及び計測方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09306833A (ja) * 1996-03-14 1997-11-28 Nikon Corp 露光方法
JP2008277468A (ja) * 2007-04-27 2008-11-13 Canon Inc 露光装置及びデバイス製造方法
JP2008288347A (ja) * 2007-05-16 2008-11-27 Canon Inc 露光装置及びデバイス製造方法
JP4953923B2 (ja) * 2007-05-30 2012-06-13 キヤノン株式会社 露光装置及びデバイス製造方法
JP5084432B2 (ja) * 2007-10-05 2012-11-28 キヤノン株式会社 露光方法、露光装置およびデバイス製造方法
JP2009186628A (ja) * 2008-02-05 2009-08-20 Ricoh Co Ltd 電子線描画方法及び電子線描画装置
JP2009302344A (ja) * 2008-06-13 2009-12-24 Canon Inc 露光装置及びデバイス製造方法
JP5498243B2 (ja) * 2010-05-07 2014-05-21 キヤノン株式会社 露光装置、露光方法及びデバイス製造方法

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