JP2018169204A5 - - Google Patents

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JP2018169204A5
JP2018169204A5 JP2017064905A JP2017064905A JP2018169204A5 JP 2018169204 A5 JP2018169204 A5 JP 2018169204A5 JP 2017064905 A JP2017064905 A JP 2017064905A JP 2017064905 A JP2017064905 A JP 2017064905A JP 2018169204 A5 JP2018169204 A5 JP 2018169204A5
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Japan
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vibration
measurement
point
laser light
measurement region
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JP2017064905A
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Japanese (ja)
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JP6805930B2 (ja
JP2018169204A (ja
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Priority claimed from JP2017064905A external-priority patent/JP6805930B2/ja
Priority to US15/938,591 priority patent/US10317190B2/en
Priority to CN201810270116.5A priority patent/CN108760878B/zh
Publication of JP2018169204A publication Critical patent/JP2018169204A/ja
Publication of JP2018169204A5 publication Critical patent/JP2018169204A5/ja
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JP2017064905A 2017-03-29 2017-03-29 振動測定装置 Active JP6805930B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2017064905A JP6805930B2 (ja) 2017-03-29 2017-03-29 振動測定装置
US15/938,591 US10317190B2 (en) 2017-03-29 2018-03-28 Vibration measurement device
CN201810270116.5A CN108760878B (zh) 2017-03-29 2018-03-29 振动测定装置以及方法、缺陷检查装置以及方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2017064905A JP6805930B2 (ja) 2017-03-29 2017-03-29 振動測定装置

Publications (3)

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JP2018169204A JP2018169204A (ja) 2018-11-01
JP2018169204A5 true JP2018169204A5 (enExample) 2019-08-15
JP6805930B2 JP6805930B2 (ja) 2020-12-23

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JP2017064905A Active JP6805930B2 (ja) 2017-03-29 2017-03-29 振動測定装置

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US (1) US10317190B2 (enExample)
JP (1) JP6805930B2 (enExample)
CN (1) CN108760878B (enExample)

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CN112005086A (zh) * 2018-04-05 2020-11-27 株式会社岛津制作所 振动测量装置
JP7215134B2 (ja) * 2018-12-17 2023-01-31 株式会社島津製作所 検査装置および検査方法
JP7099545B2 (ja) * 2018-12-20 2022-07-12 株式会社島津製作所 欠陥検査装置および欠陥検査方法
EP3699562A1 (en) * 2019-01-27 2020-08-26 Tata Consultancy Services Limited Unobtrusive and automated detection of frequency of vibrating objects using multiple strobe sources
WO2020157817A1 (ja) 2019-01-29 2020-08-06 株式会社島津製作所 変位計測装置及び欠陥検出装置
JP2020136361A (ja) * 2019-02-14 2020-08-31 ファスフォードテクノロジ株式会社 実装装置および半導体装置の製造方法
CN109669028B (zh) * 2019-03-04 2021-06-15 青岛理工大学 一种钢筋锈胀引起混凝土开裂锈胀力的测量方法
CN113646627B (zh) * 2019-04-17 2024-01-05 株式会社岛津制作所 缺陷检查装置和缺陷检查方法
WO2020241092A1 (ja) * 2019-05-30 2020-12-03 株式会社島津製作所 管状体の接合部の検査方法及び装置
CN110243786B (zh) * 2019-06-10 2024-08-13 佛山科学技术学院 基于二维剪切干涉测量待测气体参数的装置
CN110261052B (zh) * 2019-06-19 2020-11-06 西北工业大学 采用力锤激励和摄影测量的结构振动模态分析系统及方法
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CN111982266B (zh) * 2020-06-24 2022-06-28 北京航空航天大学 一种扫描电子显微镜电子枪灯丝枪尖振动位移激光测量方法
WO2022059710A1 (ja) 2020-09-18 2022-03-24 株式会社島津製作所 欠陥検査装置
WO2022264362A1 (ja) * 2021-06-17 2022-12-22 株式会社島津製作所 欠陥検査システム、欠陥検査装置、および、欠陥検査方法
TWI780777B (zh) * 2021-06-17 2022-10-11 國立中興大學 週期位移測量裝置
CN113442280A (zh) * 2021-06-28 2021-09-28 筑友智造建设科技集团有限公司 振动台的自动控制方法及系统
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DE102022102495B3 (de) * 2022-02-02 2023-06-15 Hochschule Trier, Körperschaft des öffentlichen Rechts System zur shearografischen Messung großflächiger Objekte

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