CN108760878B - 振动测定装置以及方法、缺陷检查装置以及方法 - Google Patents

振动测定装置以及方法、缺陷检查装置以及方法 Download PDF

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CN108760878B
CN108760878B CN201810270116.5A CN201810270116A CN108760878B CN 108760878 B CN108760878 B CN 108760878B CN 201810270116 A CN201810270116 A CN 201810270116A CN 108760878 B CN108760878 B CN 108760878B
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vibration
point
light
measurement
measurement region
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CN108760878A (zh
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畠堀贵秀
长田侑也
田窪健二
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Shimadzu Corp
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02094—Speckle interferometers, i.e. for detecting changes in speckle pattern
    • G01B9/02096—Speckle interferometers, i.e. for detecting changes in speckle pattern detecting a contour or curvature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02097—Self-interferometers
    • G01B9/02098—Shearing interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M7/00—Vibration-testing of structures; Shock-testing of structures
    • G01M7/02—Vibration-testing by means of a shake table
    • G01M7/025—Measuring arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04—Analysing solids
    • G01N29/043—Analysing solids in the interior, e.g. by shear waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04—Analysing solids
    • G01N29/045—Analysing solids by imparting shocks to the workpiece and detecting the vibrations or the acoustic waves caused by the shocks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G01N29/2418—Probes using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
    • G01N2021/1706—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids in solids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8809—Adjustment for highlighting flaws
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1717—Systems in which incident light is modified in accordance with the properties of the material investigated with a modulation of one or more physical properties of the sample during the optical investigation, e.g. electro-reflectance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
    • G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/069—Supply of sources
    • G01N2201/0696—Pulsed
    • G01N2201/0697—Pulsed lasers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/26—Scanned objects
    • G01N2291/263—Surfaces

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Pathology (AREA)
  • Health & Medical Sciences (AREA)
  • Acoustics & Sound (AREA)
  • Optics & Photonics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
CN201810270116.5A 2017-03-29 2018-03-29 振动测定装置以及方法、缺陷检查装置以及方法 Active CN108760878B (zh)

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JP2017064905A JP6805930B2 (ja) 2017-03-29 2017-03-29 振動測定装置
JP2017-064905 2017-03-29

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US12111266B2 (en) * 2018-04-05 2024-10-08 Shimadzu Corporation Vibration measurement device
JP7215134B2 (ja) * 2018-12-17 2023-01-31 株式会社島津製作所 検査装置および検査方法
WO2020129209A1 (ja) * 2018-12-20 2020-06-25 株式会社島津製作所 欠陥検査装置および欠陥検査方法
EP3699562A1 (en) * 2019-01-27 2020-08-26 Tata Consultancy Services Limited Unobtrusive and automated detection of frequency of vibrating objects using multiple strobe sources
CN113287000B (zh) * 2019-01-29 2024-08-23 株式会社岛津制作所 位移测量装置和缺陷检测装置
JP2020136361A (ja) * 2019-02-14 2020-08-31 ファスフォードテクノロジ株式会社 実装装置および半導体装置の製造方法
CN109669028B (zh) * 2019-03-04 2021-06-15 青岛理工大学 一种钢筋锈胀引起混凝土开裂锈胀力的测量方法
US11790513B2 (en) * 2019-04-17 2023-10-17 Shimadzu Corporation Defect inspection apparatus and defect inspection method
CN113841048B (zh) * 2019-05-30 2024-08-20 株式会社岛津制作所 管状体的接合部的检查方法和装置
CN110243786B (zh) * 2019-06-10 2024-08-13 佛山科学技术学院 基于二维剪切干涉测量待测气体参数的装置
CN110261052B (zh) * 2019-06-19 2020-11-06 西北工业大学 采用力锤激励和摄影测量的结构振动模态分析系统及方法
JP7283324B2 (ja) * 2019-09-18 2023-05-30 株式会社島津製作所 欠陥検査装置
KR102816511B1 (ko) 2019-09-19 2025-06-02 제이에프이 스틸 가부시키가이샤 이동식 검사 장치, 이동식 검사 방법 및 강재의 제조 방법
CN111982266B (zh) * 2020-06-24 2022-06-28 北京航空航天大学 一种扫描电子显微镜电子枪灯丝枪尖振动位移激光测量方法
JPWO2022059710A1 (enExample) 2020-09-18 2022-03-24
TWI780777B (zh) * 2021-06-17 2022-10-11 國立中興大學 週期位移測量裝置
WO2022264362A1 (ja) * 2021-06-17 2022-12-22 株式会社島津製作所 欠陥検査システム、欠陥検査装置、および、欠陥検査方法
CN113442280A (zh) * 2021-06-28 2021-09-28 筑友智造建设科技集团有限公司 振动台的自动控制方法及系统
JP7753791B2 (ja) * 2021-10-25 2025-10-15 株式会社島津製作所 欠陥検出装置及び欠陥検出方法
DE102022102495B3 (de) * 2022-02-02 2023-06-15 Hochschule Trier, Körperschaft des öffentlichen Rechts System zur shearografischen Messung großflächiger Objekte

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US10317190B2 (en) 2019-06-11
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CN108760878A (zh) 2018-11-06
JP6805930B2 (ja) 2020-12-23

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