JP2015146450A5 - - Google Patents
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- Publication number
- JP2015146450A5 JP2015146450A5 JP2015076934A JP2015076934A JP2015146450A5 JP 2015146450 A5 JP2015146450 A5 JP 2015146450A5 JP 2015076934 A JP2015076934 A JP 2015076934A JP 2015076934 A JP2015076934 A JP 2015076934A JP 2015146450 A5 JP2015146450 A5 JP 2015146450A5
- Authority
- JP
- Japan
- Prior art keywords
- sic substrate
- interface
- atom
- arsenic
- phosphorus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 21
- 239000004065 semiconductor Substances 0.000 claims description 17
- 229910052785 arsenic Inorganic materials 0.000 claims description 11
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical group [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 claims description 11
- 229910052757 nitrogen Inorganic materials 0.000 claims description 11
- 125000004433 nitrogen atom Chemical group N* 0.000 claims description 11
- 229910052698 phosphorus Inorganic materials 0.000 claims description 11
- 125000004437 phosphorous atom Chemical group 0.000 claims description 7
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims 4
- 239000011574 phosphorus Substances 0.000 claims 4
- 238000009826 distribution Methods 0.000 claims 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015076934A JP6072122B2 (ja) | 2015-04-03 | 2015-04-03 | 半導体素子 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015076934A JP6072122B2 (ja) | 2015-04-03 | 2015-04-03 | 半導体素子 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013240158A Division JP5763154B2 (ja) | 2013-11-20 | 2013-11-20 | 半導体素子及びその製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015146450A JP2015146450A (ja) | 2015-08-13 |
| JP2015146450A5 true JP2015146450A5 (enExample) | 2015-12-03 |
| JP6072122B2 JP6072122B2 (ja) | 2017-02-01 |
Family
ID=53890529
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015076934A Active JP6072122B2 (ja) | 2015-04-03 | 2015-04-03 | 半導体素子 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6072122B2 (enExample) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6602263B2 (ja) | 2016-05-30 | 2019-11-06 | 株式会社東芝 | 半導体装置、半導体装置の製造方法、インバータ回路、駆動装置、車両、及び、昇降機 |
| JP6776204B2 (ja) | 2017-08-25 | 2020-10-28 | 株式会社東芝 | 半導体装置、半導体装置の製造方法、インバータ回路、駆動装置、車両、及び、昇降機 |
| JP6790010B2 (ja) | 2018-03-21 | 2020-11-25 | 株式会社東芝 | 半導体装置及びその製造方法 |
| JP6862384B2 (ja) | 2018-03-21 | 2021-04-21 | 株式会社東芝 | 半導体装置、半導体装置の製造方法、インバータ回路、駆動装置、車両、及び、昇降機 |
| JP6896672B2 (ja) | 2018-03-21 | 2021-06-30 | 株式会社東芝 | 半導体装置及びその製造方法 |
| JP7074629B2 (ja) | 2018-09-14 | 2022-05-24 | 株式会社東芝 | 半導体装置、半導体装置の製造方法、インバータ回路、駆動装置、車両、及び、昇降機 |
| JP7158966B2 (ja) | 2018-09-14 | 2022-10-24 | 株式会社東芝 | ダイヤモンド基板、量子デバイス、量子システム、及び、ダイヤモンド基板の製造方法 |
| JP7500524B2 (ja) | 2021-09-16 | 2024-06-17 | 株式会社東芝 | 半導体装置の製造方法 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003264190A (ja) * | 2002-03-08 | 2003-09-19 | Toshiba Corp | 半導体装置及びその製造方法 |
| JP2008098200A (ja) * | 2006-10-05 | 2008-04-24 | Kiyoyoshi Mizuno | 成膜体およびその製造方法 |
| US20100072485A1 (en) * | 2007-03-26 | 2010-03-25 | Kyoto University | Semiconductor device and semiconductor manufacturing method |
-
2015
- 2015-04-03 JP JP2015076934A patent/JP6072122B2/ja active Active
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