JP2015111673A5 - - Google Patents

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JP2015111673A5
JP2015111673A5 JP2014236390A JP2014236390A JP2015111673A5 JP 2015111673 A5 JP2015111673 A5 JP 2015111673A5 JP 2014236390 A JP2014236390 A JP 2014236390A JP 2014236390 A JP2014236390 A JP 2014236390A JP 2015111673 A5 JP2015111673 A5 JP 2015111673A5
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JP2015111673A (ja
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Priority claimed from EP14155685.2A external-priority patent/EP2876498B1/en
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JP2014236390A 2013-11-22 2014-11-21 マイクロリソグラフィ投影露光装置の照明系 Pending JP2015111673A (ja)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
EP13194135 2013-11-22
EP13194135.3 2013-11-22
EP14155685.2 2014-02-19
EP14155685.2A EP2876498B1 (en) 2013-11-22 2014-02-19 Illumination system of a microlithographic projection exposure apparatus

Publications (2)

Publication Number Publication Date
JP2015111673A JP2015111673A (ja) 2015-06-18
JP2015111673A5 true JP2015111673A5 (enExample) 2016-05-19

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Family Applications (4)

Application Number Title Priority Date Filing Date
JP2016533545A Active JP6343344B2 (ja) 2013-11-22 2014-11-13 マイクロリソグラフィ投影露光装置の照明系
JP2014236389A Active JP6034845B2 (ja) 2013-11-22 2014-11-21 マイクロリソグラフィ投影露光装置の照明系
JP2014236390A Pending JP2015111673A (ja) 2013-11-22 2014-11-21 マイクロリソグラフィ投影露光装置の照明系
JP2016210859A Active JP6434473B2 (ja) 2013-11-22 2016-10-27 マイクロリソグラフィ投影露光装置の照明系

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JP2016533545A Active JP6343344B2 (ja) 2013-11-22 2014-11-13 マイクロリソグラフィ投影露光装置の照明系
JP2014236389A Active JP6034845B2 (ja) 2013-11-22 2014-11-21 マイクロリソグラフィ投影露光装置の照明系

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JP2016210859A Active JP6434473B2 (ja) 2013-11-22 2016-10-27 マイクロリソグラフィ投影露光装置の照明系

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Country Link
US (3) US9310690B2 (enExample)
EP (2) EP2876498B1 (enExample)
JP (4) JP6343344B2 (enExample)
KR (3) KR101922314B1 (enExample)
CN (3) CN105745580B (enExample)
TW (1) TWI638238B (enExample)
WO (1) WO2015074746A1 (enExample)

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