JP2015106118A - 感光性樹脂組成物、ドライフィルム、硬化物およびプリント配線板 - Google Patents
感光性樹脂組成物、ドライフィルム、硬化物およびプリント配線板 Download PDFInfo
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- JP2015106118A JP2015106118A JP2013249062A JP2013249062A JP2015106118A JP 2015106118 A JP2015106118 A JP 2015106118A JP 2013249062 A JP2013249062 A JP 2013249062A JP 2013249062 A JP2013249062 A JP 2013249062A JP 2015106118 A JP2015106118 A JP 2015106118A
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- Prior art keywords
- epoxy
- carboxyl group
- resin
- resin composition
- photosensitive resin
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- 239000011342 resin composition Substances 0.000 title claims abstract description 29
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 claims abstract description 90
- 229920005989 resin Polymers 0.000 claims abstract description 68
- 239000011347 resin Substances 0.000 claims abstract description 68
- 239000004593 Epoxy Substances 0.000 claims abstract description 33
- 229920001187 thermosetting polymer Polymers 0.000 claims abstract description 31
- 125000003700 epoxy group Chemical group 0.000 claims abstract description 29
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims abstract description 23
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims abstract description 20
- 239000003999 initiator Substances 0.000 claims abstract description 17
- 239000011256 inorganic filler Substances 0.000 claims abstract description 13
- 229910003475 inorganic filler Inorganic materials 0.000 claims abstract description 13
- 239000003822 epoxy resin Substances 0.000 claims description 91
- 229920000647 polyepoxide Polymers 0.000 claims description 91
- 239000007787 solid Substances 0.000 claims description 35
- 239000007788 liquid Substances 0.000 claims description 22
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 claims description 14
- 238000001035 drying Methods 0.000 claims description 14
- 238000000576 coating method Methods 0.000 claims description 12
- 239000011248 coating agent Substances 0.000 claims description 9
- 150000003440 styrenes Chemical class 0.000 claims description 3
- 239000000203 mixture Substances 0.000 abstract description 51
- 238000011161 development Methods 0.000 abstract description 25
- 238000000034 method Methods 0.000 abstract description 20
- 229910000679 solder Inorganic materials 0.000 abstract description 17
- 239000010408 film Substances 0.000 description 42
- 150000001875 compounds Chemical class 0.000 description 31
- -1 diol compound Chemical class 0.000 description 31
- 125000003118 aryl group Chemical group 0.000 description 28
- 230000018109 developmental process Effects 0.000 description 24
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 22
- 238000012360 testing method Methods 0.000 description 20
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 19
- 239000000126 substance Substances 0.000 description 19
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 15
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 15
- 239000010410 layer Substances 0.000 description 14
- 239000000758 substrate Substances 0.000 description 14
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 13
- 150000008065 acid anhydrides Chemical class 0.000 description 13
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N phenol group Chemical group C1(=CC=CC=C1)O ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 12
- 229920002803 thermoplastic polyurethane Polymers 0.000 description 12
- 239000011521 glass Substances 0.000 description 11
- 229920003986 novolac Polymers 0.000 description 10
- ZUOUZKKEUPVFJK-UHFFFAOYSA-N diphenyl Chemical compound C1=CC=CC=C1C1=CC=CC=C1 ZUOUZKKEUPVFJK-UHFFFAOYSA-N 0.000 description 9
- 239000003960 organic solvent Substances 0.000 description 9
- 229920005862 polyol Polymers 0.000 description 9
- 239000000047 product Substances 0.000 description 9
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 8
- 230000015572 biosynthetic process Effects 0.000 description 8
- 239000000843 powder Substances 0.000 description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 8
- 150000003077 polyols Chemical class 0.000 description 7
- UFWIBTONFRDIAS-UHFFFAOYSA-N Naphthalene Chemical compound C1=CC=CC2=CC=CC=C21 UFWIBTONFRDIAS-UHFFFAOYSA-N 0.000 description 6
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 6
- 125000003647 acryloyl group Chemical group O=C([*])C([H])=C([H])[H] 0.000 description 6
- 239000003513 alkali Substances 0.000 description 6
- PXKLMJQFEQBVLD-UHFFFAOYSA-N bisphenol F Chemical compound C1=CC(O)=CC=C1CC1=CC=C(O)C=C1 PXKLMJQFEQBVLD-UHFFFAOYSA-N 0.000 description 6
- 239000007795 chemical reaction product Substances 0.000 description 6
- VFHVQBAGLAREND-UHFFFAOYSA-N diphenylphosphoryl-(2,4,6-trimethylphenyl)methanone Chemical compound CC1=CC(C)=CC(C)=C1C(=O)P(=O)(C=1C=CC=CC=1)C1=CC=CC=C1 VFHVQBAGLAREND-UHFFFAOYSA-N 0.000 description 6
- 239000003063 flame retardant Substances 0.000 description 6
- 238000002156 mixing Methods 0.000 description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical group [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 5
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 5
- 150000001252 acrylic acid derivatives Chemical class 0.000 description 5
- 230000001476 alcoholic effect Effects 0.000 description 5
- 239000007864 aqueous solution Substances 0.000 description 5
- 230000001588 bifunctional effect Effects 0.000 description 5
- 235000010290 biphenyl Nutrition 0.000 description 5
- 239000004305 biphenyl Substances 0.000 description 5
- 125000005442 diisocyanate group Chemical group 0.000 description 5
- 229910052698 phosphorus Inorganic materials 0.000 description 5
- 239000011574 phosphorus Substances 0.000 description 5
- 239000000243 solution Substances 0.000 description 5
- 238000003786 synthesis reaction Methods 0.000 description 5
- RNFJDJUURJAICM-UHFFFAOYSA-N 2,2,4,4,6,6-hexaphenoxy-1,3,5-triaza-2$l^{5},4$l^{5},6$l^{5}-triphosphacyclohexa-1,3,5-triene Chemical compound N=1P(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP=1(OC=1C=CC=CC=1)OC1=CC=CC=C1 RNFJDJUURJAICM-UHFFFAOYSA-N 0.000 description 4
- OZAIFHULBGXAKX-UHFFFAOYSA-N 2-(2-cyanopropan-2-yldiazenyl)-2-methylpropanenitrile Chemical compound N#CC(C)(C)N=NC(C)(C)C#N OZAIFHULBGXAKX-UHFFFAOYSA-N 0.000 description 4
- QTWJRLJHJPIABL-UHFFFAOYSA-N 2-methylphenol;3-methylphenol;4-methylphenol Chemical compound CC1=CC=C(O)C=C1.CC1=CC=CC(O)=C1.CC1=CC=CC=C1O QTWJRLJHJPIABL-UHFFFAOYSA-N 0.000 description 4
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 4
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 4
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 4
- 125000000217 alkyl group Chemical group 0.000 description 4
- 125000002947 alkylene group Chemical group 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 239000013039 cover film Substances 0.000 description 4
- 229930003836 cresol Natural products 0.000 description 4
- 239000004744 fabric Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 150000002762 monocarboxylic acid derivatives Chemical class 0.000 description 4
- 239000003208 petroleum Substances 0.000 description 4
- 239000000377 silicon dioxide Substances 0.000 description 4
- 229910000029 sodium carbonate Inorganic materials 0.000 description 4
- 239000002904 solvent Substances 0.000 description 4
- FPZWZCWUIYYYBU-UHFFFAOYSA-N 2-(2-ethoxyethoxy)ethyl acetate Chemical compound CCOCCOCCOC(C)=O FPZWZCWUIYYYBU-UHFFFAOYSA-N 0.000 description 3
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- QCAHUFWKIQLBNB-UHFFFAOYSA-N 3-(3-methoxypropoxy)propan-1-ol Chemical compound COCCCOCCCO QCAHUFWKIQLBNB-UHFFFAOYSA-N 0.000 description 3
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
- IAYPIBMASNFSPL-UHFFFAOYSA-N Ethylene oxide Chemical compound C1CO1 IAYPIBMASNFSPL-UHFFFAOYSA-N 0.000 description 3
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 3
- GOOHAUXETOMSMM-UHFFFAOYSA-N Propylene oxide Chemical compound CC1CO1 GOOHAUXETOMSMM-UHFFFAOYSA-N 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 239000002253 acid Substances 0.000 description 3
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 3
- 239000003795 chemical substances by application Substances 0.000 description 3
- 238000013329 compounding Methods 0.000 description 3
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 3
- 239000003085 diluting agent Substances 0.000 description 3
- 229920001971 elastomer Polymers 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 3
- 229910052753 mercury Inorganic materials 0.000 description 3
- 125000001624 naphthyl group Chemical group 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N nitrogen Substances N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 3
- 229920001225 polyester resin Polymers 0.000 description 3
- 239000004645 polyester resin Substances 0.000 description 3
- 229920001721 polyimide Polymers 0.000 description 3
- 229920000642 polymer Polymers 0.000 description 3
- 150000007519 polyprotic acids Polymers 0.000 description 3
- 238000005476 soldering Methods 0.000 description 3
- 239000007921 spray Substances 0.000 description 3
- KMOUUZVZFBCRAM-OLQVQODUSA-N (3as,7ar)-3a,4,7,7a-tetrahydro-2-benzofuran-1,3-dione Chemical compound C1C=CC[C@@H]2C(=O)OC(=O)[C@@H]21 KMOUUZVZFBCRAM-OLQVQODUSA-N 0.000 description 2
- AZQWKYJCGOJGHM-UHFFFAOYSA-N 1,4-benzoquinone Chemical compound O=C1C=CC(=O)C=C1 AZQWKYJCGOJGHM-UHFFFAOYSA-N 0.000 description 2
- BOCJQSFSGAZAPQ-UHFFFAOYSA-N 1-chloroanthracene-9,10-dione Chemical compound O=C1C2=CC=CC=C2C(=O)C2=C1C=CC=C2Cl BOCJQSFSGAZAPQ-UHFFFAOYSA-N 0.000 description 2
- 239000012956 1-hydroxycyclohexylphenyl-ketone Substances 0.000 description 2
- HECLRDQVFMWTQS-RGOKHQFPSA-N 1755-01-7 Chemical group C1[C@H]2[C@@H]3CC=C[C@@H]3[C@@H]1C=C2 HECLRDQVFMWTQS-RGOKHQFPSA-N 0.000 description 2
- BJINVQNEBGOMCR-UHFFFAOYSA-N 2-(2-methoxyethoxy)ethyl acetate Chemical compound COCCOCCOC(C)=O BJINVQNEBGOMCR-UHFFFAOYSA-N 0.000 description 2
- YCCILVSKPBXVIP-UHFFFAOYSA-N 2-(4-hydroxyphenyl)ethanol Chemical compound OCCC1=CC=C(O)C=C1 YCCILVSKPBXVIP-UHFFFAOYSA-N 0.000 description 2
- VVBLNCFGVYUYGU-UHFFFAOYSA-N 4,4'-Bis(dimethylamino)benzophenone Chemical compound C1=CC(N(C)C)=CC=C1C(=O)C1=CC=C(N(C)C)C=C1 VVBLNCFGVYUYGU-UHFFFAOYSA-N 0.000 description 2
- VPWNQTHUCYMVMZ-UHFFFAOYSA-N 4,4'-sulfonyldiphenol Chemical compound C1=CC(O)=CC=C1S(=O)(=O)C1=CC=C(O)C=C1 VPWNQTHUCYMVMZ-UHFFFAOYSA-N 0.000 description 2
- KWOLFJPFCHCOCG-UHFFFAOYSA-N Acetophenone Chemical compound CC(=O)C1=CC=CC=C1 KWOLFJPFCHCOCG-UHFFFAOYSA-N 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 2
- QIGBRXMKCJKVMJ-UHFFFAOYSA-N Hydroquinone Chemical compound OC1=CC=C(O)C=C1 QIGBRXMKCJKVMJ-UHFFFAOYSA-N 0.000 description 2
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 2
- CSNNHWWHGAXBCP-UHFFFAOYSA-L Magnesium sulfate Chemical compound [Mg+2].[O-][S+2]([O-])([O-])[O-] CSNNHWWHGAXBCP-UHFFFAOYSA-L 0.000 description 2
- OFOBLEOULBTSOW-UHFFFAOYSA-N Malonic acid Chemical compound OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 2
- 239000004698 Polyethylene Substances 0.000 description 2
- 239000004721 Polyphenylene oxide Substances 0.000 description 2
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- 244000028419 Styrax benzoin Species 0.000 description 2
- 235000000126 Styrax benzoin Nutrition 0.000 description 2
- 235000008411 Sumatra benzointree Nutrition 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- MPIAGWXWVAHQBB-UHFFFAOYSA-N [3-prop-2-enoyloxy-2-[[3-prop-2-enoyloxy-2,2-bis(prop-2-enoyloxymethyl)propoxy]methyl]-2-(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical compound C=CC(=O)OCC(COC(=O)C=C)(COC(=O)C=C)COCC(COC(=O)C=C)(COC(=O)C=C)COC(=O)C=C MPIAGWXWVAHQBB-UHFFFAOYSA-N 0.000 description 2
- GUCYFKSBFREPBC-UHFFFAOYSA-N [phenyl-(2,4,6-trimethylbenzoyl)phosphoryl]-(2,4,6-trimethylphenyl)methanone Chemical compound CC1=CC(C)=CC(C)=C1C(=O)P(=O)(C=1C=CC=CC=1)C(=O)C1=C(C)C=C(C)C=C1C GUCYFKSBFREPBC-UHFFFAOYSA-N 0.000 description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 125000002723 alicyclic group Chemical group 0.000 description 2
- UMLWXYJZDNNBTD-UHFFFAOYSA-N alpha-dimethylaminoacetophenone Natural products CN(C)CC(=O)C1=CC=CC=C1 UMLWXYJZDNNBTD-UHFFFAOYSA-N 0.000 description 2
- ZJKCITHLCNCAHA-UHFFFAOYSA-K aluminum dioxidophosphanium Chemical compound [Al+3].[O-][PH2]=O.[O-][PH2]=O.[O-][PH2]=O ZJKCITHLCNCAHA-UHFFFAOYSA-K 0.000 description 2
- 150000004056 anthraquinones Chemical class 0.000 description 2
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- TZCXTZWJZNENPQ-UHFFFAOYSA-L barium sulfate Chemical compound [Ba+2].[O-]S([O-])(=O)=O TZCXTZWJZNENPQ-UHFFFAOYSA-L 0.000 description 2
- ISAOCJYIOMOJEB-UHFFFAOYSA-N benzoin Chemical compound C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 2
- 239000012965 benzophenone Substances 0.000 description 2
- MQDJYUACMFCOFT-UHFFFAOYSA-N bis[2-(1-hydroxycyclohexyl)phenyl]methanone Chemical compound C=1C=CC=C(C(=O)C=2C(=CC=CC=2)C2(O)CCCCC2)C=1C1(O)CCCCC1 MQDJYUACMFCOFT-UHFFFAOYSA-N 0.000 description 2
- 238000009529 body temperature measurement Methods 0.000 description 2
- OSGAYBCDTDRGGQ-UHFFFAOYSA-L calcium sulfate Chemical compound [Ca+2].[O-]S([O-])(=O)=O OSGAYBCDTDRGGQ-UHFFFAOYSA-L 0.000 description 2
- 125000004432 carbon atom Chemical group C* 0.000 description 2
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 229920001577 copolymer Polymers 0.000 description 2
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 2
- DIOQZVSQGTUSAI-UHFFFAOYSA-N decane Chemical compound CCCCCCCCCC DIOQZVSQGTUSAI-UHFFFAOYSA-N 0.000 description 2
- 150000002009 diols Chemical class 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- VOZRXNHHFUQHIL-UHFFFAOYSA-N glycidyl methacrylate Chemical compound CC(=C)C(=O)OCC1CO1 VOZRXNHHFUQHIL-UHFFFAOYSA-N 0.000 description 2
- 235000019382 gum benzoic Nutrition 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 125000000623 heterocyclic group Chemical group 0.000 description 2
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 2
- 125000002768 hydroxyalkyl group Chemical group 0.000 description 2
- 150000002460 imidazoles Chemical class 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- IQPQWNKOIGAROB-UHFFFAOYSA-N isocyanate group Chemical group [N-]=C=O IQPQWNKOIGAROB-UHFFFAOYSA-N 0.000 description 2
- ZFSLODLOARCGLH-UHFFFAOYSA-N isocyanuric acid Chemical compound OC1=NC(O)=NC(O)=N1 ZFSLODLOARCGLH-UHFFFAOYSA-N 0.000 description 2
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- GKTNLYAAZKKMTQ-UHFFFAOYSA-N n-[bis(dimethylamino)phosphinimyl]-n-methylmethanamine Chemical compound CN(C)P(=N)(N(C)C)N(C)C GKTNLYAAZKKMTQ-UHFFFAOYSA-N 0.000 description 2
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- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- AFEQENGXSMURHA-UHFFFAOYSA-N oxiran-2-ylmethanamine Chemical compound NCC1CO1 AFEQENGXSMURHA-UHFFFAOYSA-N 0.000 description 2
- 230000036961 partial effect Effects 0.000 description 2
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 2
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- BWHMMNNQKKPAPP-UHFFFAOYSA-L potassium carbonate Chemical compound [K+].[K+].[O-]C([O-])=O BWHMMNNQKKPAPP-UHFFFAOYSA-L 0.000 description 2
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- 230000001681 protective effect Effects 0.000 description 2
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- 239000012463 white pigment Substances 0.000 description 2
- JLLAWIKMLAQZCZ-UHFFFAOYSA-N (2,6-dichlorophenyl)-diphenylphosphorylmethanone Chemical compound ClC1=CC=CC(Cl)=C1C(=O)P(=O)(C=1C=CC=CC=1)C1=CC=CC=C1 JLLAWIKMLAQZCZ-UHFFFAOYSA-N 0.000 description 1
- SUEDCWGEKSLKOM-UHFFFAOYSA-N (2,6-dimethoxyphenyl)-diphenylphosphorylmethanone Chemical compound COC1=CC=CC(OC)=C1C(=O)P(=O)(C=1C=CC=CC=1)C1=CC=CC=C1 SUEDCWGEKSLKOM-UHFFFAOYSA-N 0.000 description 1
- CKGKXGQVRVAKEA-UHFFFAOYSA-N (2-methylphenyl)-phenylmethanone Chemical compound CC1=CC=CC=C1C(=O)C1=CC=CC=C1 CKGKXGQVRVAKEA-UHFFFAOYSA-N 0.000 description 1
- MUTGBJKUEZFXGO-OLQVQODUSA-N (3as,7ar)-3a,4,5,6,7,7a-hexahydro-2-benzofuran-1,3-dione Chemical compound C1CCC[C@@H]2C(=O)OC(=O)[C@@H]21 MUTGBJKUEZFXGO-OLQVQODUSA-N 0.000 description 1
- WXPWZZHELZEVPO-UHFFFAOYSA-N (4-methylphenyl)-phenylmethanone Chemical compound C1=CC(C)=CC=C1C(=O)C1=CC=CC=C1 WXPWZZHELZEVPO-UHFFFAOYSA-N 0.000 description 1
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- 229910000019 calcium carbonate Inorganic materials 0.000 description 1
- AXCZMVOFGPJBDE-UHFFFAOYSA-L calcium dihydroxide Chemical compound [OH-].[OH-].[Ca+2] AXCZMVOFGPJBDE-UHFFFAOYSA-L 0.000 description 1
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- OYACROKNLOSFPA-UHFFFAOYSA-N calcium;dioxido(oxo)silane Chemical compound [Ca+2].[O-][Si]([O-])=O OYACROKNLOSFPA-UHFFFAOYSA-N 0.000 description 1
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Images
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/0275—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with dithiol or polysulfide compounds
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Materials For Photolithography (AREA)
- Non-Metallic Protective Coatings For Printed Circuits (AREA)
- Compositions Of Macromolecular Compounds (AREA)
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
Abstract
【解決手段】(A)カルボキシル基含有樹脂、(B)エポキシ系熱硬化性成分、(C)無機充填物、および、(D)光重合開始剤を含有する感光性樹脂組成物であって、(A)カルボキシル基含有樹脂に含まれるカルボキシル基の1当量に対し、(B)エポキシ系熱硬化性成分に含まれるエポキシ基の当量が1.0以下であり、かつ、(C)無機充填物が、酸化チタンを含有する感光性樹脂組成物、それを用いたドライフィルムおよびその硬化物である。
【選択図】なし
Description
前記(A)カルボキシル基含有樹脂に含まれるカルボキシル基の1当量に対し、前記(B)エポキシ系熱硬化性成分に含まれるエポキシ基の当量が1.0以下であり、かつ、前記(C)無機充填物が、酸化チタンを含有することを特徴とするものである。
まず、本発明の感光性樹脂組成物の各成分について説明する。なお、本明細書において、(メタ)アクリレートとは、アクリレート、メタクリレートおよびそれらの混合物を総称する用語であり、他の類似の表現についても同様である。
本発明の感光性樹脂組成物は、(A)カルボキシル基含有樹脂を含有する。(A)カルボキシル基含有樹脂としては、公知のカルボキシル基を含む樹脂を用いることができる。カルボキシル基の存在により、組成物をアルカリ現像性とすることができる。また、本発明の組成物を光硬化性にすることや耐現像性の観点から、カルボキシル基の他に、分子内にエチレン性不飽和結合を有することが好ましいが、エチレン性不飽和二重結合を有さないカルボキシル基含有樹脂のみを用いることもできる。(A)カルボキシル基含有樹脂は、芳香環を有しても有さなくてもよい。(A)カルボキシル基含有樹脂が芳香環を有する場合、熱や光による劣化を抑制する効果が得られるため、好ましい。
本発明の感光性樹脂組成物には、耐熱性を付与するために、(B)エポキシ系熱硬化性成分を含有させる。(B)エポキシ系熱硬化性成分としては、熱硬化性樹脂組成物において熱硬化性成分として使用されるもの、具体的には、分子中に複数のエポキシ基を有する化合物、すなわち、公知の多官能エポキシ化合物をいずれも使用可能である。
液状の判定は、危険物の試験及び性状に関する省令(平成元年自治省令第1号)の別紙第2の「液状の確認方法」に準じて行う。
恒温水槽:
攪拌機、ヒーター、温度計、自動温度調節器(±0.1℃で温度制御が可能なもの)を備えたもので深さ150mm以上のものを用いる。
なお、後述する実施例で用いたエポキシ樹脂の判定では、いずれもヤマト科学(株)製の低温恒温水槽(型式BU300)と投入式恒温装置サーモメイト(型式BF500)の組み合わせを用い、水道水約22リットルを低温恒温水槽(型式BU300)に入れ、これに組み付けられたサーモメイト(型式BF500)の電源を入れて設定温度(20℃または40℃)に設定し、水温を設定温度±0.1℃にサーモメイト(型式BF500)で微調整したが、同様の調整が可能な装置であれば、いずれも使用できる。
試験管としては、図1に示すように、内径30mm、高さ120mmの平底円筒型透明ガラス製のもので、管底から55mmおよび85mmの高さのところにそれぞれ標線31,32が付され、試験管の口をゴム栓33aで密閉した液状判定用試験管30aと、同じサイズで同様に標線が付され、中央に温度計を挿入・支持するための孔があけられたゴム栓33bで試験管の口を密閉し、ゴム栓33bに温度計34を挿入した温度測定用試験管30bを用いる。以下、管底から55mmの高さの標線を「A線」、管底から85mmの高さの標線を「B線」という。
温度計34としては、JIS B7410(1982)「石油類試験用ガラス製温度計」に規定する凝固点測定用のもの(SOP−58目盛範囲20〜50℃)を用いるが、0〜50℃の温度範囲が測定できるものであればよい。
温度20±5℃の大気圧下で24時間以上放置した試料を、図1(a)に示す液状判定用試験管30aと図1(b)に示す温度測定用試験管30bにそれぞれA線まで入れる。2本の試験管30a,30bを低温恒温水槽にB線が水面下になるように直立させて静置する。温度計は、その下端がA線よりも30mm下となるようにする。
試料温度が設定温度±0.1℃に達してから10分間そのままの状態を保持する。10分後、液状判断用試験管30aを低温恒温水槽から取り出し、直ちに水平な試験台の上に水平に倒し、試験管内の液面の先端がA線からB線まで移動した時間をストップウォッチで測定し、記録する。試料は、設定温度において、測定された時聞が90秒以内のものを液状、90秒を超えるものを固体状と判定する。
本発明のアルカリ現像型感光性樹脂組成物は、(C)無機充填物を含有する。(C)無機充填物としては、炭酸カルシウム、炭酸マグネシウム、フライアッシュ、脱水汚泥、天然シリカ、合成シリカ、カオリン、クレー、酸化カルシウム、酸化マグネシウム、酸化チタン、酸化亜鉛、硫酸バリウム、アルミナ、タルク、マイカ、ハイドロタルサイト、珪酸アルミニウム、珪酸マグネシウム、ケイ酸カルシウム、焼成タルク、ウォラストナイト、チタン酸カリウム、硫酸マグネシウム、硫酸カルシウム、燐酸マグネシウム、セピオライト、ゾノライト、窒化ホウ素、ホウ酸アルミニウム、シリカバルーン、ガラスフレーク、ガラスバルーン、無定形シリカ、結晶性シリカ、溶融シリカ、球状シリカ、製鉄スラグ、銅、鉄、酸化鉄、カーボンブラック、センダスト、アルニコ磁石、各種フェライト等の磁性粉、セメント、ガラス粉末、ノイブルグ珪土、珪藻土、三酸化アンチモン、マグネシウムオキシサルフェイト、水和アルミニウム、水和石膏、ミョウバン等が挙げられる。これらの無機充填物は、1種を単独で用いてもよく、2種以上を組み合わせて用いてもよい。
本発明のアルカリ現像型感光性樹脂組成物は、(D)光重合開始剤を含有する。(D)光重合開始剤としては、光重合開始剤や光ラジカル発生剤として公知の光重合開始剤であれば、いずれのものを用いることもできる。
本発明の感光性樹脂組成物は、希釈剤を含有していてもよい。本発明に用いられる希釈剤は、組成物の粘度を調整して作業性を向上させるとともに、架橋密度を上げたり、密着性などを向上するために用いられ、光硬化性モノマーなどの反応性希釈剤や公知慣用の有機溶剤が使用できる。
本発明の組成物には、電子材料の分野において公知慣用の添加剤を配合してもよい。添加剤としては、熱硬化触媒、熱重合禁止剤、紫外線吸収剤、シランカップリング剤、可塑剤、難燃剤、帯電防止剤、老化防止剤、抗菌・防黴剤、消泡剤、レベリング剤、上記以外の充填剤、増粘剤、密着性付与剤、チキソ性付与剤、着色剤、光開始助剤、増感剤等が挙げられる。
本発明の感光性樹脂組成物は、リン含有化合物等の難燃剤を含んでもよい。本発明の感光性樹脂組成物では、固形の難燃剤を含む場合でも、穴部における現像残渣の発生を抑制できる。難燃剤としては、金属水酸化物、リン含有化合物などの慣用公知のものを使用可能である。金属水酸化物としては、例えば、水酸化アルミニウム、水酸化カルシウム、水酸化マグネシウムなどが挙げられる。リン含有化合物としては、リン酸エステル、縮合リン酸エステル、環状フォスファゼン化合物、フェノール性水酸基を有するリン含有化合物、オリゴマーもしくはポリマーであるリン含有化合物、フォスファゼンオリゴマー、ホスフィン酸金属塩、下記一般式で表される化合物などが挙げられる。
上記一般式中、R7、R8およびR9は、それぞれ独立に、ハロゲン原子以外の置換基を示す。一般式中、R7、R8は水素原子または炭素原子数1〜4のアルキル基であることが好ましく、R9は、水素原子、シアノ基で置換されていてもよい炭素原子数1〜4のアルキル基、2,5−ジヒドロキシフェニル基、または3,5−ジ−t−ブチル−4−ヒドロキシフェニル基であることが好ましい。
下記の表中に示す配合に従い、各成分を配合し、攪拌機にて予備混合した後、3本ロールミルで分散させ、混練して、それぞれ組成物を調製した。なお、表中の配合量は、質量部を示す。
還流冷却器、温度計、窒素置換用ガラス管および撹拌機を取り付けた四ツ口フラスコに、メタクリル酸42質量部、メチルメタクリレート43質量部、スチレン35質量部、ベンジルアクリレート35質量部、カルビトールアセテート100質量部、ラウリルメルカプタン0.5質量部およびアゾビスイソブチロニトリル4質量部を加え、窒素気流下で75℃で5時間加熱して重合反応を進行させて、共重合体溶液(固形分濃度50質量%)を得た。これに、ハイドロキノン0.05質量部、グリシジルメタクリレート23質量部およびジメチルベンジルアミン2.0質量部を加え、80℃で24時間付加反応を行った後、カルビトールアセテート35質量部を加えて、芳香環を有する共重合樹脂溶液(固形分濃度50質量%)を得た。
1.0mm厚の銅張積層板にφ300μmドリルで孔を開け、定法によりスルーホールメッキを行い、実測値約φ260μmのスルーホールを100穴形成した基板を作製した。この基板に、各実施例および比較例の組成物をスクリーン印刷で2回印刷し、80℃の熱風循環式乾燥炉で30分間乾燥させ、室温まで放冷した。この基板を、30℃の1質量%炭酸ナトリウム水溶液を用いて、スプレー圧0.2MPaの条件で90秒間現像、水洗し、現像後の基板を得た。得られた基板のスルーホール内を目視およびスコープにより観察して、スルーホール内の現像性の評価を行った。現像残渣がない場合を◎、現像残渣がわずかにあった場合を○、現像残渣はあるがスルーホールは貫通している場合を△、スルーホールに現像残渣が入り貫通していない場合を×とした。
各実施例および比較例の組成物を、100mm×150mmの大きさで1.6mmの厚さのFR−4銅張り積層板に対し、スクリーン印刷法にて、膜厚40μmとなるように、100メッシュポリエステル(バイアス製)の版を使用してベタ(基板全面)でパターンを印刷した。これらを80℃で30分間に渡って熱風循環式乾燥炉にて乾燥させた。さらにプリント配線板用露光機HMW−680GW(株式会社オーク製作所製)を用いて、30mm角のネガパターンを残すように、900mJ/cm2の積算光量で紫外線露光した。その後、30℃で1%の炭酸ナトリウム水溶液を現像液として、これらをプリント配線板用現像機にて60秒間現像し、続いて150℃で60分間、熱風循環式乾燥炉で熱硬化を行い、特性試験用の試験片を作製した。
ロジン系フラックスを塗布した試験片を、あらかじめ260℃に設定したはんだ槽に30秒で1回浸漬し、変性アルコールでフラックスを洗浄した後、目視によるレジスト層の剥がれについて評価した。剥がれがなかった場合を○、若干の剥がれが生じた場合を△、著しい剥がれが生じた場合を×とした。
※2)DPM(ジプロピレングリコールモノメチルエーテル)で44質量%に希釈(ダイセル化学工業(株)製)(カルボキシル基含有樹脂,カルボキシル基当量=806)
※3)ビスフェノールA型エポキシ樹脂,三菱化学(株)製(20℃で液状,エポキシ基当量=185)
※4)日産化学工業(株)製(40℃で粉体(固体状),エポキシ基当量=100)
※5)ビフェニルタイプエポキシ樹脂(三菱化学(株)製)(40℃で粉体(固体状),エポキシ基当量=182)
※6)クレゾールノボラック型エポキシ樹脂(DIC(株)製)(40℃で固体状,エポキシ基当量=210)
※7)石原産業(株)製
※8)昭和電工(株)製
※9)ホスフィン酸アルミニウム塩,クラリアントジャパン(株)製
※10)モノアシルフォスフィンオキサイド系光重合開始剤、ルシリンTPO(2,4,6−トリメチルベンゾイル−ジフェニル−フォスフィンオキサイド),BASFジャパン(株)製
※11)ビスアシルフォスフィンオキサイド系光重合開始剤、IRGACURE819(ビス(2,4,6−トリメチルベンゾイル)−フェニルフォスフィンオキサイド),BASFジャパン(株)製
※12)イミダゾール系化合物、四国化成工業(株)製
※13)ジエチレングリコールモノメチルエーテルアセテート
※14)芳香族炭化水素(ソルベッソ150)
※15)ジペンタエリスリトールヘキサアクリレート、共栄社化学(株)製
※16)乾燥状態(固形分換算)における、組成物中の(A)カルボキシル基含有樹脂に含まれるカルボキシル基の当量(数)と、(B)エポキシ系熱硬化性成分に含まれるエポキシ基の当量(数)との比(エポキシ基数/カルボキシル基数)である。
※2)DPM(ジプロピレングリコールモノメチルエーテル)で44質量%に希釈(ダイセル化学工業(株)製)(カルボキシル基含有樹脂,カルボキシル基当量=806)
※3)ビスフェノールA型エポキシ樹脂,三菱化学(株)製(20℃で液状,エポキシ基当量=185)
※4)日産化学工業(株)製(40℃で粉体(固体状),エポキシ基当量=100)
※5)ビフェニルタイプエポキシ樹脂(三菱化学(株)製)(40℃で粉体(固体状),エポキシ基当量=182)
※6)クレゾールノボラック型エポキシ樹脂(DIC(株)製)(40℃で固体状,エポキシ基当量=210)
※7)石原産業(株)製
※8)昭和電工(株)製
※9)ホスフィン酸アルミニウム塩,クラリアントジャパン(株)製
※10)モノアシルフォスフィンオキサイド系光重合開始剤、ルシリンTPO(2,4,6−トリメチルベンゾイル−ジフェニル−フォスフィンオキサイド),BASFジャパン(株)製
※11)ビスアシルフォスフィンオキサイド系光重合開始剤、IRGACURE819(ビス(2,4,6−トリメチルベンゾイル)−フェニルフォスフィンオキサイド),BASFジャパン(株)製
※12)イミダゾール系化合物、四国化成工業(株)製
※13)ジエチレングリコールモノメチルエーテルアセテート
※14)芳香族炭化水素(ソルベッソ150)
※15)ジペンタエリスリトールヘキサアクリレート、共栄社化学(株)製
※16)乾燥状態(固形分換算)における、組成物中の(A)カルボキシル基含有樹脂に含まれるカルボキシル基の当量(数)と、(B)エポキシ系熱硬化性成分に含まれるエポキシ基の当量(数)との比(エポキシ基数/カルボキシル基数)である。
Claims (7)
- (A)カルボキシル基含有樹脂、(B)エポキシ系熱硬化性成分、(C)無機充填物、および、(D)光重合開始剤を含有する感光性樹脂組成物であって、
前記(A)カルボキシル基含有樹脂に含まれるカルボキシル基の1当量に対し、前記(B)エポキシ系熱硬化性成分に含まれるエポキシ基の当量が1.0以下であり、かつ、前記(C)無機充填物が、酸化チタンを含有することを特徴とする感光性樹脂組成物。 - 前記(B)エポキシ系熱硬化性成分が、20℃で液状であるエポキシ樹脂および40℃で固体状である固形エポキシ樹脂のうちの少なくとも一種以上を含有する請求項1記載の感光性樹脂組成物。
- 前記(A)カルボキシル基含有樹脂に含まれるカルボキシル基の当量と、前記(B)エポキシ系熱硬化性成分に含まれるエポキシ基の当量との比が、0.8以下である請求項1または2記載の感光性樹脂組成物。
- 前記(A)カルボキシル基含有樹脂がスチレンまたはスチレン誘導体から誘導されたものである請求項1〜3のうちいずれか一項記載の感光性樹脂組成物。
- キャリアフィルム上に、請求項1〜4のうちいずれか一項記載の感光性樹脂組成物を塗布、乾燥させて得られる樹脂層を有することを特徴とするドライフィルム。
- 請求項1〜4のうちいずれか一項記載の感光性樹脂組成物、または、請求項5記載のドライフィルムの前記樹脂層を、光照射により硬化して得られることを特徴とする硬化物。
- 請求項6記載の硬化物を有することを特徴とするプリント配線板。
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JP5439075B2 (ja) * | 2009-07-21 | 2014-03-12 | 太陽ホールディングス株式会社 | 光硬化性樹脂組成物 |
JP5620656B2 (ja) * | 2009-08-19 | 2014-11-05 | 太陽ホールディングス株式会社 | 光硬化性樹脂組成物 |
JP6061440B2 (ja) * | 2010-02-25 | 2017-01-18 | 太陽ホールディングス株式会社 | ポリエステル基材用樹脂組成物、それを用いたドライフィルム及びプリント配線板 |
JP5820568B2 (ja) * | 2010-03-31 | 2015-11-24 | 太陽ホールディングス株式会社 | 硬化性樹脂組成物、それを用いたドライフィルム及びプリント配線板 |
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WO2008133246A1 (ja) * | 2007-04-24 | 2008-11-06 | Panasonic Electric Works Co., Ltd. | エポキシ樹脂組成物、樹脂フィルム、プリプレグ、及び多層プリント配線板 |
WO2012131971A1 (ja) * | 2011-03-31 | 2012-10-04 | 積水化学工業株式会社 | 予備硬化物、粗化予備硬化物及び積層体 |
JP2012215717A (ja) * | 2011-03-31 | 2012-11-08 | Taiyo Ink Mfg Ltd | 硬化性樹脂組成物、それを用いたドライフィルム及びプリント配線板 |
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TWI566035B (zh) | 2017-01-11 |
TW201530256A (zh) | 2015-08-01 |
KR20150063926A (ko) | 2015-06-10 |
KR101623278B1 (ko) | 2016-05-20 |
JP5723958B1 (ja) | 2015-05-27 |
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