JP2015062995A - インクジェットヘッドの製造方法及びインクジェットヘッド - Google Patents

インクジェットヘッドの製造方法及びインクジェットヘッド Download PDF

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Publication number
JP2015062995A
JP2015062995A JP2012011578A JP2012011578A JP2015062995A JP 2015062995 A JP2015062995 A JP 2015062995A JP 2012011578 A JP2012011578 A JP 2012011578A JP 2012011578 A JP2012011578 A JP 2012011578A JP 2015062995 A JP2015062995 A JP 2015062995A
Authority
JP
Japan
Prior art keywords
silicon layer
groove
jet head
ink jet
pressure chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2012011578A
Other languages
English (en)
Japanese (ja)
Inventor
篤郎 梁田
Atsuro Yanata
篤郎 梁田
西　泰男
Yasuo Nishi
泰男 西
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Konica Minolta Inc
Original Assignee
Konica Minolta Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Konica Minolta Inc filed Critical Konica Minolta Inc
Priority to JP2012011578A priority Critical patent/JP2015062995A/ja
Priority to PCT/JP2012/082777 priority patent/WO2013111477A1/fr
Publication of JP2015062995A publication Critical patent/JP2015062995A/ja
Pending legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/11—Embodiments of or processes related to ink-jet heads characterised by specific geometrical characteristics

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
JP2012011578A 2012-01-23 2012-01-23 インクジェットヘッドの製造方法及びインクジェットヘッド Pending JP2015062995A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2012011578A JP2015062995A (ja) 2012-01-23 2012-01-23 インクジェットヘッドの製造方法及びインクジェットヘッド
PCT/JP2012/082777 WO2013111477A1 (fr) 2012-01-23 2012-12-18 Procédé de fabrication d'une tête à jet d'encre et tête à jet d'encre

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012011578A JP2015062995A (ja) 2012-01-23 2012-01-23 インクジェットヘッドの製造方法及びインクジェットヘッド

Publications (1)

Publication Number Publication Date
JP2015062995A true JP2015062995A (ja) 2015-04-09

Family

ID=48873216

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012011578A Pending JP2015062995A (ja) 2012-01-23 2012-01-23 インクジェットヘッドの製造方法及びインクジェットヘッド

Country Status (2)

Country Link
JP (1) JP2015062995A (fr)
WO (1) WO2013111477A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6201784B2 (ja) * 2014-01-23 2017-09-27 ブラザー工業株式会社 液体吐出装置、及び、液体吐出装置の製造方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4462777B2 (ja) * 2001-03-14 2010-05-12 株式会社リコー インクジェットヘッド
JP3951933B2 (ja) * 2002-02-19 2007-08-01 ブラザー工業株式会社 インクジェットヘッド及びこれを有するインクジェットプリンタ
JP2005041054A (ja) * 2003-07-25 2005-02-17 Kyocera Corp 印刷ヘッド及びその製造方法、並びにインクジェットプリンタ
KR100738102B1 (ko) * 2006-02-01 2007-07-12 삼성전자주식회사 압전 방식의 잉크젯 프린트헤드
JP2010220348A (ja) * 2009-03-16 2010-09-30 Brother Ind Ltd 圧電アクチュエータの製造方法、及び、圧電アクチュエータ

Also Published As

Publication number Publication date
WO2013111477A1 (fr) 2013-08-01

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