JP2014177704A5 - - Google Patents
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- Publication number
- JP2014177704A5 JP2014177704A5 JP2014051819A JP2014051819A JP2014177704A5 JP 2014177704 A5 JP2014177704 A5 JP 2014177704A5 JP 2014051819 A JP2014051819 A JP 2014051819A JP 2014051819 A JP2014051819 A JP 2014051819A JP 2014177704 A5 JP2014177704 A5 JP 2014177704A5
- Authority
- JP
- Japan
- Prior art keywords
- void
- coupon
- area
- hole
- copper
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011800 void material Substances 0.000 description 7
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 5
- 229910052802 copper Inorganic materials 0.000 description 5
- 239000010949 copper Substances 0.000 description 5
- 238000007747 plating Methods 0.000 description 4
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 238000013019 agitation Methods 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US13/829,433 US20140262801A1 (en) | 2013-03-14 | 2013-03-14 | Method of filling through-holes |
| US13/829,433 | 2013-03-14 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2014177704A JP2014177704A (ja) | 2014-09-25 |
| JP2014177704A5 true JP2014177704A5 (https=) | 2018-06-14 |
| JP6423601B2 JP6423601B2 (ja) | 2018-11-14 |
Family
ID=50396860
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014051819A Expired - Fee Related JP6423601B2 (ja) | 2013-03-14 | 2014-03-14 | スルーホールのフィリング方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US20140262801A1 (https=) |
| EP (1) | EP2778261B1 (https=) |
| JP (1) | JP6423601B2 (https=) |
| KR (1) | KR20140113549A (https=) |
| CN (2) | CN110087406A (https=) |
| TW (1) | TWI506165B (https=) |
Families Citing this family (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10154598B2 (en) * | 2014-10-13 | 2018-12-11 | Rohm And Haas Electronic Materials Llc | Filling through-holes |
| CN104762643A (zh) * | 2014-12-17 | 2015-07-08 | 安捷利电子科技(苏州)有限公司 | 一种通孔、盲孔和线路共镀的镀铜药水 |
| JP6948053B2 (ja) * | 2017-01-12 | 2021-10-13 | 上村工業株式会社 | フィリングめっきシステム及びフィリングめっき方法 |
| CN109327975A (zh) | 2017-07-31 | 2019-02-12 | 奥特斯奥地利科技与系统技术有限公司 | 用于部件承载件中的孔的无缺陷铜填充的方法和镀覆装置 |
| US20190136397A1 (en) * | 2017-11-08 | 2019-05-09 | Rohm And Haas Electronic Materials Llc | Electroplated copper |
| TWI703148B (zh) * | 2017-11-08 | 2020-09-01 | 美商羅門哈斯電子材料有限公司 | 銅電鍍組合物及在基板上電鍍銅之方法 |
| US11152294B2 (en) | 2018-04-09 | 2021-10-19 | Corning Incorporated | Hermetic metallized via with improved reliability |
| WO2020061437A1 (en) | 2018-09-20 | 2020-03-26 | Industrial Technology Research Institute | Copper metallization for through-glass vias on thin glass |
| WO2020171940A1 (en) | 2019-02-21 | 2020-08-27 | Corning Incorporated | Glass or glass ceramic articles with copper-metallized through holes and processes for making the same |
| CN111867269A (zh) * | 2020-06-01 | 2020-10-30 | 东莞市斯坦得电子材料有限公司 | 高频板导通孔的除油整孔剂的制作工艺及其除油整孔过程 |
| JP7274221B2 (ja) * | 2020-11-11 | 2023-05-16 | メック株式会社 | エッチング剤及び回路基板の製造方法 |
| US20220213610A1 (en) * | 2021-01-06 | 2022-07-07 | Rohm And Haas Electronic Materials Llc | Photoresist resolution capabilities by copper electroplating anisotropically |
| CN112921367A (zh) * | 2021-01-22 | 2021-06-08 | 盐城市贝加尔电子材料有限公司 | 一种用于高密度比孔径线路板通孔电镀的镀铜工艺 |
| CN113668022A (zh) * | 2021-06-21 | 2021-11-19 | 上海天承化学有限公司 | 一种电镀液及其电镀方法和应用 |
| CN115087250A (zh) * | 2022-07-14 | 2022-09-20 | 珠海中京电子电路有限公司 | 对接钻批量报废的检查方法、装置、设备及存储介质 |
| CN115074789B (zh) * | 2022-08-22 | 2022-11-25 | 深圳市板明科技股份有限公司 | 一种线路板盲孔快速填充电镀铜溶液及快速填充方法 |
| CN117488377B (zh) * | 2023-12-29 | 2024-04-05 | 上海尚容电子科技有限公司 | 一种电镀用整平剂的制备方法及其应用 |
Family Cites Families (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5252196A (en) * | 1991-12-05 | 1993-10-12 | Shipley Company Inc. | Copper electroplating solutions and processes |
| US5547559A (en) * | 1995-07-10 | 1996-08-20 | Macdermid, Incorporated | Process for plating metals onto various substrates in an adherent fashion |
| KR100665745B1 (ko) * | 1999-01-26 | 2007-01-09 | 가부시키가이샤 에바라 세이사꾸쇼 | 구리도금방법 및 그 장치 |
| JP3124523B2 (ja) * | 1999-01-28 | 2001-01-15 | 日本エレクトロプレイテイング・エンジニヤース株式会社 | 銅メッキ方法 |
| US6444110B2 (en) * | 1999-05-17 | 2002-09-03 | Shipley Company, L.L.C. | Electrolytic copper plating method |
| US6652727B2 (en) * | 1999-10-15 | 2003-11-25 | Faraday Technology Marketing Group, Llc | Sequential electrodeposition of metals using modulated electric fields for manufacture of circuit boards having features of different sizes |
| JP3594894B2 (ja) * | 2000-02-01 | 2004-12-02 | 新光電気工業株式会社 | ビアフィリングめっき方法 |
| US6863795B2 (en) * | 2001-03-23 | 2005-03-08 | Interuniversitair Microelektronica Centrum (Imec) | Multi-step method for metal deposition |
| US20030034175A1 (en) * | 2001-08-20 | 2003-02-20 | Honeywell Advanced Circuits, Inc. | Configurations and methods for improved copper distribution uniformity in printed wiring boards |
| JP2004250777A (ja) * | 2002-06-03 | 2004-09-09 | Shipley Co Llc | レベラー化合物 |
| US7405163B1 (en) * | 2003-12-17 | 2008-07-29 | Novellus Systems, Inc. | Selectively accelerated plating of metal features |
| CN1245060C (zh) * | 2002-12-03 | 2006-03-08 | 叶清祥 | 一种镀通孔的无甲醛电解厚铜制造方法 |
| US8158532B2 (en) * | 2003-10-20 | 2012-04-17 | Novellus Systems, Inc. | Topography reduction and control by selective accelerator removal |
| US7879218B1 (en) * | 2003-12-18 | 2011-02-01 | Novellus Systems, Inc. | Deposit morphology of electroplated copper |
| US7575666B2 (en) * | 2006-04-05 | 2009-08-18 | James Watkowski | Process for electrolytically plating copper |
| JP5442188B2 (ja) * | 2007-08-10 | 2014-03-12 | ローム・アンド・ハース・エレクトロニック・マテリアルズ,エル.エル.シー. | 銅めっき液組成物 |
| JP4857317B2 (ja) * | 2008-02-26 | 2012-01-18 | 新光電気工業株式会社 | スルーホールの充填方法 |
| JP5365296B2 (ja) * | 2009-03-26 | 2013-12-11 | 富士電機株式会社 | 湿式めっき方法及び湿式めっき装置 |
| CN101772279B (zh) * | 2009-12-21 | 2013-03-06 | 艾默生网络能源有限公司 | 一种带盲孔的pcb板的制造方法 |
| US20110220512A1 (en) * | 2010-03-15 | 2011-09-15 | Rohm And Haas Electronic Materials Llc | Plating bath and method |
| EP2465976B1 (en) * | 2010-12-15 | 2013-04-03 | Rohm and Haas Electronic Materials LLC | Method of electroplating uniform copper layer on the edge and walls of though holes of a substrate. |
| EP2537962A1 (en) * | 2011-06-22 | 2012-12-26 | Atotech Deutschland GmbH | Method for copper plating |
| CN102869206B (zh) * | 2012-09-27 | 2015-04-15 | 电子科技大学 | 一种印制电路板通孔和盲孔共镀金属化方法 |
-
2013
- 2013-03-14 US US13/829,433 patent/US20140262801A1/en not_active Abandoned
-
2014
- 2014-03-14 CN CN201910388584.7A patent/CN110087406A/zh not_active Withdrawn
- 2014-03-14 EP EP14159761.7A patent/EP2778261B1/en not_active Not-in-force
- 2014-03-14 KR KR1020140030492A patent/KR20140113549A/ko not_active Abandoned
- 2014-03-14 TW TW103109384A patent/TWI506165B/zh not_active IP Right Cessation
- 2014-03-14 JP JP2014051819A patent/JP6423601B2/ja not_active Expired - Fee Related
- 2014-03-14 CN CN201410200948.1A patent/CN104053312A/zh active Pending
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