JP2014167651A - Ndフィルタ、光量絞り装置、及び撮像装置 - Google Patents
Ndフィルタ、光量絞り装置、及び撮像装置 Download PDFInfo
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- JP2014167651A JP2014167651A JP2014098640A JP2014098640A JP2014167651A JP 2014167651 A JP2014167651 A JP 2014167651A JP 2014098640 A JP2014098640 A JP 2014098640A JP 2014098640 A JP2014098640 A JP 2014098640A JP 2014167651 A JP2014167651 A JP 2014167651A
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Abstract
【解決手段】透明基板21上に、誘電体層のAl2O3膜22、光吸収層のTixOy膜23とを交互に積層した光減衰膜を設け、TixOy膜23を挟むように、水蒸気バリア層として機能するSi3N4膜24を積層し、更に最表層に反射防止膜であるMgF2膜25を成膜しND膜を形成する。Si3N4膜24により水蒸気等の浸入を防止し、光吸収層のTixOy膜23の劣化を防止する。
【選択図】図7
Description
21 透明基板
22 Al2O3膜
23 TixOy膜
24 Si3N4膜
25 MgF2膜
26 ND膜
31 SiO2膜
Claims (8)
- 透明基板上に誘電体層と光吸収層とを積層して設けた光減衰膜を備えたNDフィルタであって、前記光減衰膜のうち、前記光吸収層を含む部分を水蒸気バリア層により挟んだことを特徴とするNDフィルタ。
- 前記透明基板は透明な合成樹脂材であって、前記水蒸気バリア層は前記透明基板と前記光減衰膜との間にも形成したことを特徴とする請求項1に記載のNDフィルタ。
- 前記水蒸気バリア層は最表面を形成する反射防止膜と前記光減衰膜の最上層となる光吸収層との間に形成したことを特徴とする請求項1又は2に記載のNDフィルタ。
- 前記水蒸気バリア層は前記光減衰層の上下面に形成したことを特徴とする請求項1〜3の何れか1項に記載のNDフィルタ。
- 前記光吸収膜は酸化によって分光透過特性の変化する金属酸化物であることを特徴とする請求項1〜4の何れか1項に記載のNDフィルタ。
- 前記水蒸気バリア層はSi3N4又はSiOxNyであることを特徴とする請求項1〜5の何れか1項に記載のNDフィルタ。
- 請求項1〜6の何れか1項に記載のNDフィルタを有することを特徴とする光量絞り装置。
- 請求項7に記載の光量絞り装置を使用した撮像装置。
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JP2014098640A JP5909523B2 (ja) | 2014-05-12 | 2014-05-12 | Ndフィルタ、光量絞り装置、及び撮像装置 |
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JP2009231710A Division JP5879021B2 (ja) | 2009-10-05 | 2009-10-05 | Ndフィルタ |
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JP5909523B2 JP5909523B2 (ja) | 2016-04-26 |
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Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0716978A (ja) * | 1993-06-29 | 1995-01-20 | Asahi Glass Co Ltd | 熱線遮断透明体 |
JPH10217378A (ja) * | 1996-12-12 | 1998-08-18 | Saint Gobain Vitrage | 薄層積重体を備えた基材を含むグレージング集成体 |
JP2000147245A (ja) * | 1998-11-12 | 2000-05-26 | Mitsui Chemicals Inc | 光学フィルター |
JP2003255431A (ja) * | 2002-03-05 | 2003-09-10 | Canon Electronics Inc | フィルタおよび光量絞り装置 |
JP2003292639A (ja) * | 2002-03-29 | 2003-10-15 | Jsr Corp | 光学用フィルムおよびその製造方法並びに偏光板 |
JP2007101709A (ja) * | 2005-09-30 | 2007-04-19 | Canon Electronics Inc | Ndフィルタ、ndフィルタの製造方法、および光量絞り装置 |
JP2007199447A (ja) * | 2006-01-27 | 2007-08-09 | Canon Electronics Inc | Ndフィルタ及びその製造方法及び光量絞り装置 |
JP2007240790A (ja) * | 2006-03-08 | 2007-09-20 | Sumitomo Metal Mining Co Ltd | 吸収型多層膜ndフィルター及びその製造方法 |
JP2007298659A (ja) * | 2006-04-28 | 2007-11-15 | Japan Aviation Electronics Industry Ltd | 中性濃度フィルタ |
JP2011081083A (ja) * | 2009-10-05 | 2011-04-21 | Canon Electronics Inc | Ndフィルタ |
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2014
- 2014-05-12 JP JP2014098640A patent/JP5909523B2/ja active Active
Patent Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0716978A (ja) * | 1993-06-29 | 1995-01-20 | Asahi Glass Co Ltd | 熱線遮断透明体 |
JPH10217378A (ja) * | 1996-12-12 | 1998-08-18 | Saint Gobain Vitrage | 薄層積重体を備えた基材を含むグレージング集成体 |
JP2000147245A (ja) * | 1998-11-12 | 2000-05-26 | Mitsui Chemicals Inc | 光学フィルター |
JP2003255431A (ja) * | 2002-03-05 | 2003-09-10 | Canon Electronics Inc | フィルタおよび光量絞り装置 |
JP2003292639A (ja) * | 2002-03-29 | 2003-10-15 | Jsr Corp | 光学用フィルムおよびその製造方法並びに偏光板 |
JP2007101709A (ja) * | 2005-09-30 | 2007-04-19 | Canon Electronics Inc | Ndフィルタ、ndフィルタの製造方法、および光量絞り装置 |
JP2007199447A (ja) * | 2006-01-27 | 2007-08-09 | Canon Electronics Inc | Ndフィルタ及びその製造方法及び光量絞り装置 |
JP2007240790A (ja) * | 2006-03-08 | 2007-09-20 | Sumitomo Metal Mining Co Ltd | 吸収型多層膜ndフィルター及びその製造方法 |
JP2007298659A (ja) * | 2006-04-28 | 2007-11-15 | Japan Aviation Electronics Industry Ltd | 中性濃度フィルタ |
JP2011081083A (ja) * | 2009-10-05 | 2011-04-21 | Canon Electronics Inc | Ndフィルタ |
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