JP2014160068A5 - - Google Patents

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Publication number
JP2014160068A5
JP2014160068A5 JP2014023470A JP2014023470A JP2014160068A5 JP 2014160068 A5 JP2014160068 A5 JP 2014160068A5 JP 2014023470 A JP2014023470 A JP 2014023470A JP 2014023470 A JP2014023470 A JP 2014023470A JP 2014160068 A5 JP2014160068 A5 JP 2014160068A5
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JP
Japan
Prior art keywords
sample
vacuum chamber
fluorescent marker
pressure
image
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Application number
JP2014023470A
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English (en)
Japanese (ja)
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JP2014160068A (ja
JP6393445B2 (ja
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Priority claimed from US13/770,765 external-priority patent/US8872105B2/en
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Publication of JP2014160068A publication Critical patent/JP2014160068A/ja
Publication of JP2014160068A5 publication Critical patent/JP2014160068A5/ja
Application granted granted Critical
Publication of JP6393445B2 publication Critical patent/JP6393445B2/ja
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JP2014023470A 2013-02-19 2014-02-10 蛍光マーカの原位置再活性化 Active JP6393445B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US13/770,765 US8872105B2 (en) 2013-02-19 2013-02-19 In situ reactivation of fluorescence marker
US13/770,765 2013-02-19

Publications (3)

Publication Number Publication Date
JP2014160068A JP2014160068A (ja) 2014-09-04
JP2014160068A5 true JP2014160068A5 (enExample) 2017-04-06
JP6393445B2 JP6393445B2 (ja) 2018-09-19

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ID=50101798

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014023470A Active JP6393445B2 (ja) 2013-02-19 2014-02-10 蛍光マーカの原位置再活性化

Country Status (4)

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US (2) US8872105B2 (enExample)
EP (1) EP2767823B1 (enExample)
JP (1) JP6393445B2 (enExample)
CN (1) CN103994987B (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9368321B1 (en) * 2014-12-22 2016-06-14 Fei Company Fiducial-based correlative microscopy
EP3043372B1 (en) 2015-01-12 2017-01-04 Fei Company Method of modifying a sample surface layer from a microscopic sample
EP3159728A1 (en) 2015-10-21 2017-04-26 FEI Company Standing wave interferometric microscope
CN209591971U (zh) * 2018-03-22 2019-11-05 邑流微测股份有限公司 显微镜
CN115335151B (zh) 2020-04-08 2024-06-18 杰弗里·维克多·贝尔克 破碎机、操作破碎机的方法和用于破碎机的密封件
NL2026054B1 (en) * 2020-07-13 2022-03-15 Delmic Ip B V Method and apparatus for micromachining a sample using a Focused Ion Beam
TWI830680B (zh) * 2021-05-07 2024-01-21 由田新技股份有限公司 螢光檢測方法
JP7285884B2 (ja) * 2021-06-04 2023-06-02 日本電子株式会社 試料加工装置および試料加工方法

Family Cites Families (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2596863B1 (fr) 1986-04-07 1988-06-17 Centre Nat Rech Scient Dispositif de microscopie analytique, propre a former a la fois une sonde raman et une sonde electronique
DE4233686A1 (de) 1992-10-02 1994-04-07 Ism Ingenieurbuero Fuer Spezia Verfahren zur selektiven optischen Darstellung bzw. Markierung vorbestimmter Atome, Moleküle oder Molekülgruppen
US5435850A (en) 1993-09-17 1995-07-25 Fei Company Gas injection system
NL9400111A (nl) 1994-01-24 1995-09-01 Biomat Res Group Stichting Azl Elektronenmicroscoop met Ramanspectroscopie.
US6259104B1 (en) 1994-07-15 2001-07-10 Stephen C. Baer Superresolution in optical microscopy and microlithography
US5479024A (en) 1994-08-11 1995-12-26 The Regents Of The University Of California Method and apparatus for performing near-field optical microscopy
US5851413A (en) * 1996-06-19 1998-12-22 Micrion Corporation Gas delivery systems for particle beam processing
US6002471A (en) 1996-11-04 1999-12-14 California Institute Of Technology High resolution scanning raman microscope
EP0969493A1 (en) * 1998-07-03 2000-01-05 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Apparatus and method for examining specimen with a charged particle beam
DE10017825C2 (de) 2000-04-10 2003-05-08 Till I D Gmbh Polychromatische Fluoreszenz-Meßvorrichtung
IL156027A0 (en) * 2000-12-01 2003-12-23 El Mul Technologies Ltd Device and method for the examination of samples in a non-vacuum environment using a scanning electron microscope
JP4046612B2 (ja) * 2001-05-04 2008-02-13 ニトン・コーポレーション レーザー誘起蛍光量子分析装置と組み合わせた蛍光ｘ線分析装置
US7053370B2 (en) * 2001-10-05 2006-05-30 Canon Kabushiki Kaisha Information acquisition apparatus, cross section evaluating apparatus, cross section evaluating method, and cross section working apparatus
EP1451849B1 (en) * 2001-10-05 2011-12-14 Canon Kabushiki Kaisha Information acquisition apparatus, cross section evaluating apparatus, and cross section evaluating method
NL1027462C2 (nl) * 2004-11-09 2006-05-10 Koninkl Philips Electronics Nv Werkwijze voor het lokaliseren van fluorescente markers.
JP4723414B2 (ja) * 2006-04-27 2011-07-13 株式会社日立ハイテクノロジーズ 走査電子顕微鏡
EP1890136A1 (en) * 2006-08-16 2008-02-20 FEI Company Method for obtaining images from slices of a specimen
EP1956633A3 (en) * 2007-02-06 2009-12-16 FEI Company Particle-optical apparatus for simultaneous observing a sample with particles and photons
JP4953074B2 (ja) * 2007-05-23 2012-06-13 公立大学法人首都大学東京 レーザ誘起蛍光法による大気中の窒素酸化物濃度測定方法及び装置
ATE439579T1 (de) * 2007-06-29 2009-08-15 Fei Co Verfahren zum befestigen einer probe an einem manipulator
JP2010008406A (ja) * 2008-05-30 2010-01-14 Shinichiro Isobe 多光源顕微鏡
JP5208825B2 (ja) * 2008-09-12 2013-06-12 オリンパス株式会社 光学顕微鏡
US8486708B2 (en) * 2009-01-30 2013-07-16 University Of Utah Research Foundation Perylene nanofiber fluorescent sensor for highly sensitive and selective sensing of amines
US8664596B2 (en) * 2009-06-23 2014-03-04 Hermes Microvision, Inc. Method for characterizing identified defects during charged particle beam inspection and application thereof
US20110203931A1 (en) * 2009-07-13 2011-08-25 Enertechnix, Inc Particle Interrogation Devices and Methods
US8617668B2 (en) * 2009-09-23 2013-12-31 Fei Company Method of using nitrogen based compounds to reduce contamination in beam-induced thin film deposition
EP3764080A1 (en) * 2010-02-04 2021-01-13 Spectra Systems Corporation Gas activated changes to light absorption and emission characteristics for security articles
WO2012038484A1 (en) 2010-09-21 2012-03-29 University Of Utrecht Holding B.V. Method of preparing a biological sample for inspection with electron microscopy and fluorescent light microscopy
US8319181B2 (en) * 2011-01-30 2012-11-27 Fei Company System and method for localization of large numbers of fluorescent markers in biological samples
US9255339B2 (en) 2011-09-19 2016-02-09 Fei Company Localized, in-vacuum modification of small structures
US9044781B2 (en) * 2012-12-04 2015-06-02 Fei Company Microfluidics delivery systems

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