CN103994987B - 荧光标记的原位再活化 - Google Patents
荧光标记的原位再活化 Download PDFInfo
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- CN103994987B CN103994987B CN201410055087.2A CN201410055087A CN103994987B CN 103994987 B CN103994987 B CN 103994987B CN 201410055087 A CN201410055087 A CN 201410055087A CN 103994987 B CN103994987 B CN 103994987B
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/22—Optical, image processing or photographic arrangements associated with the tube
- H01J37/226—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/64—Fluorescence; Phosphorescence
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/64—Fluorescence; Phosphorescence
- G01N21/645—Specially adapted constructive features of fluorimeters
- G01N21/6456—Spatial resolved fluorescence measurements; Imaging
- G01N21/6458—Fluorescence microscopy
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
- G01N23/2251—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion using incident electron beams, e.g. scanning electron microscopy [SEM]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/22—Optical, image processing or photographic arrangements associated with the tube
- H01J37/226—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object
- H01J37/228—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object whereby illumination or light collection take place in the same area of the discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
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- H—ELECTRICITY
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- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/64—Fluorescence; Phosphorescence
- G01N21/6428—Measuring fluorescence of fluorescent products of reactions or of fluorochrome labelled reactive substances, e.g. measuring quenching effects, using measuring "optrodes"
- G01N2021/6439—Measuring fluorescence of fluorescent products of reactions or of fluorochrome labelled reactive substances, e.g. measuring quenching effects, using measuring "optrodes" with indicators, stains, dyes, tags, labels, marks
-
- H—ELECTRICITY
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- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/006—Details of gas supplies, e.g. in an ion source, to a beam line, to a specimen or to a workpiece
Landscapes
- Analytical Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
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- Life Sciences & Earth Sciences (AREA)
- Biochemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Sampling And Sample Adjustment (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US13/770765 | 2013-02-19 | ||
| US13/770,765 | 2013-02-19 | ||
| US13/770,765 US8872105B2 (en) | 2013-02-19 | 2013-02-19 | In situ reactivation of fluorescence marker |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103994987A CN103994987A (zh) | 2014-08-20 |
| CN103994987B true CN103994987B (zh) | 2018-10-12 |
Family
ID=50101798
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410055087.2A Active CN103994987B (zh) | 2013-02-19 | 2014-02-18 | 荧光标记的原位再活化 |
Country Status (4)
| Country | Link |
|---|---|
| US (2) | US8872105B2 (enExample) |
| EP (1) | EP2767823B1 (enExample) |
| JP (1) | JP6393445B2 (enExample) |
| CN (1) | CN103994987B (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI830680B (zh) | 2021-05-07 | 2024-01-21 | 由田新技股份有限公司 | 螢光檢測方法 |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9368321B1 (en) * | 2014-12-22 | 2016-06-14 | Fei Company | Fiducial-based correlative microscopy |
| EP3043372B1 (en) | 2015-01-12 | 2017-01-04 | Fei Company | Method of modifying a sample surface layer from a microscopic sample |
| EP3159728A1 (en) | 2015-10-21 | 2017-04-26 | FEI Company | Standing wave interferometric microscope |
| US10643817B2 (en) * | 2018-03-22 | 2020-05-05 | Flowview Tek | Microscope |
| WO2021203161A1 (en) | 2020-04-08 | 2021-10-14 | Jeffrey Victor Belke | Drive mechanism for a crusher |
| NL2026054B1 (en) * | 2020-07-13 | 2022-03-15 | Delmic Ip B V | Method and apparatus for micromachining a sample using a Focused Ion Beam |
| JP7285884B2 (ja) * | 2021-06-04 | 2023-06-02 | 日本電子株式会社 | 試料加工装置および試料加工方法 |
| EP4679056A1 (en) * | 2024-07-08 | 2026-01-14 | Fei Company | Method for creating a sample for use in a charged particle microscope |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1789982A (zh) * | 2004-11-09 | 2006-06-21 | Fei公司 | 确定荧光标记的位置的方法 |
| CN101126726A (zh) * | 2006-08-16 | 2008-02-20 | Fei公司 | 由标本切片获得图像的方法 |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2596863B1 (fr) | 1986-04-07 | 1988-06-17 | Centre Nat Rech Scient | Dispositif de microscopie analytique, propre a former a la fois une sonde raman et une sonde electronique |
| DE4233686A1 (de) | 1992-10-02 | 1994-04-07 | Ism Ingenieurbuero Fuer Spezia | Verfahren zur selektiven optischen Darstellung bzw. Markierung vorbestimmter Atome, Moleküle oder Molekülgruppen |
| US5435850A (en) | 1993-09-17 | 1995-07-25 | Fei Company | Gas injection system |
| NL9400111A (nl) | 1994-01-24 | 1995-09-01 | Biomat Res Group Stichting Azl | Elektronenmicroscoop met Ramanspectroscopie. |
| US6259104B1 (en) | 1994-07-15 | 2001-07-10 | Stephen C. Baer | Superresolution in optical microscopy and microlithography |
| US5479024A (en) | 1994-08-11 | 1995-12-26 | The Regents Of The University Of California | Method and apparatus for performing near-field optical microscopy |
| US5851413A (en) * | 1996-06-19 | 1998-12-22 | Micrion Corporation | Gas delivery systems for particle beam processing |
| US6002471A (en) | 1996-11-04 | 1999-12-14 | California Institute Of Technology | High resolution scanning raman microscope |
| EP0969493A1 (en) * | 1998-07-03 | 2000-01-05 | ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Apparatus and method for examining specimen with a charged particle beam |
| DE10017825C2 (de) | 2000-04-10 | 2003-05-08 | Till I D Gmbh | Polychromatische Fluoreszenz-Meßvorrichtung |
| ATE510298T1 (de) * | 2000-12-01 | 2011-06-15 | Yeda Res & Dev | Einrichtung und verfahren zur untersuchung von proben in einer nicht-vakuum-umgebung unter verwendung eines rasterelektronenmikroskops |
| WO2002090955A1 (en) * | 2001-05-04 | 2002-11-14 | Niton Corporation | X-ray fluorescence combined with laser induced photon spectroscopy |
| KR100582627B1 (ko) * | 2001-10-05 | 2006-05-23 | 캐논 가부시끼가이샤 | 정보 획득 장치, 단면 평가 장치 및 단면 평가 방법 |
| US7053370B2 (en) * | 2001-10-05 | 2006-05-30 | Canon Kabushiki Kaisha | Information acquisition apparatus, cross section evaluating apparatus, cross section evaluating method, and cross section working apparatus |
| JP4723414B2 (ja) * | 2006-04-27 | 2011-07-13 | 株式会社日立ハイテクノロジーズ | 走査電子顕微鏡 |
| EP1956633A3 (en) * | 2007-02-06 | 2009-12-16 | FEI Company | Particle-optical apparatus for simultaneous observing a sample with particles and photons |
| JP4953074B2 (ja) * | 2007-05-23 | 2012-06-13 | 公立大学法人首都大学東京 | レーザ誘起蛍光法による大気中の窒素酸化物濃度測定方法及び装置 |
| DE602008000086D1 (de) * | 2007-06-29 | 2009-09-24 | Fei Co | Verfahren zum Befestigen einer Probe an einem Manipulator |
| JP2010008406A (ja) * | 2008-05-30 | 2010-01-14 | Shinichiro Isobe | 多光源顕微鏡 |
| JP5208825B2 (ja) * | 2008-09-12 | 2013-06-12 | オリンパス株式会社 | 光学顕微鏡 |
| US8486708B2 (en) * | 2009-01-30 | 2013-07-16 | University Of Utah Research Foundation | Perylene nanofiber fluorescent sensor for highly sensitive and selective sensing of amines |
| US8664596B2 (en) * | 2009-06-23 | 2014-03-04 | Hermes Microvision, Inc. | Method for characterizing identified defects during charged particle beam inspection and application thereof |
| US20110203931A1 (en) * | 2009-07-13 | 2011-08-25 | Enertechnix, Inc | Particle Interrogation Devices and Methods |
| US8617668B2 (en) * | 2009-09-23 | 2013-12-31 | Fei Company | Method of using nitrogen based compounds to reduce contamination in beam-induced thin film deposition |
| CN102906558B (zh) * | 2010-02-04 | 2015-06-03 | 光谱系统公司 | 对安全物品的光吸收及发射特性的气体激活改变 |
| EP2619541A1 (en) | 2010-09-21 | 2013-07-31 | FEI Company | Method of preparing a biological sample for inspection with electron microscopy and fluorescent light microscopy |
| US8319181B2 (en) * | 2011-01-30 | 2012-11-27 | Fei Company | System and method for localization of large numbers of fluorescent markers in biological samples |
| US9255339B2 (en) | 2011-09-19 | 2016-02-09 | Fei Company | Localized, in-vacuum modification of small structures |
| US9044781B2 (en) * | 2012-12-04 | 2015-06-02 | Fei Company | Microfluidics delivery systems |
-
2013
- 2013-02-19 US US13/770,765 patent/US8872105B2/en active Active
-
2014
- 2014-02-10 JP JP2014023470A patent/JP6393445B2/ja active Active
- 2014-02-17 EP EP14155307.3A patent/EP2767823B1/en active Active
- 2014-02-18 CN CN201410055087.2A patent/CN103994987B/zh active Active
- 2014-09-25 US US14/496,555 patent/US9269530B2/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1789982A (zh) * | 2004-11-09 | 2006-06-21 | Fei公司 | 确定荧光标记的位置的方法 |
| CN101126726A (zh) * | 2006-08-16 | 2008-02-20 | Fei公司 | 由标本切片获得图像的方法 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI830680B (zh) | 2021-05-07 | 2024-01-21 | 由田新技股份有限公司 | 螢光檢測方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| US20140231644A1 (en) | 2014-08-21 |
| US8872105B2 (en) | 2014-10-28 |
| CN103994987A (zh) | 2014-08-20 |
| JP6393445B2 (ja) | 2018-09-19 |
| EP2767823B1 (en) | 2016-09-21 |
| US9269530B2 (en) | 2016-02-23 |
| EP2767823A3 (en) | 2015-12-02 |
| EP2767823A2 (en) | 2014-08-20 |
| US20150028205A1 (en) | 2015-01-29 |
| JP2014160068A (ja) | 2014-09-04 |
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