FR2596863B1 - Dispositif de microscopie analytique, propre a former a la fois une sonde raman et une sonde electronique - Google Patents

Dispositif de microscopie analytique, propre a former a la fois une sonde raman et une sonde electronique

Info

Publication number
FR2596863B1
FR2596863B1 FR8604947A FR8604947A FR2596863B1 FR 2596863 B1 FR2596863 B1 FR 2596863B1 FR 8604947 A FR8604947 A FR 8604947A FR 8604947 A FR8604947 A FR 8604947A FR 2596863 B1 FR2596863 B1 FR 2596863B1
Authority
FR
France
Prior art keywords
probe
forming
device capable
microscopy device
electronic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8604947A
Other languages
English (en)
Other versions
FR2596863A1 (fr
Inventor
Michel Delhaye
Michel Truchet
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Original Assignee
Centre National de la Recherche Scientifique CNRS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS filed Critical Centre National de la Recherche Scientifique CNRS
Priority to FR8604947A priority Critical patent/FR2596863B1/fr
Publication of FR2596863A1 publication Critical patent/FR2596863A1/fr
Application granted granted Critical
Publication of FR2596863B1 publication Critical patent/FR2596863B1/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical or photographic arrangements associated with the tube
    • H01J37/226—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object
    • H01J37/228—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object whereby illumination and light collection take place in the same area of the discharge
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/44—Raman spectrometry; Scattering spectrometry ; Fluorescence spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/65—Raman scattering
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/2206—Combination of two or more measurements, at least one measurement being that of secondary emission, e.g. combination of secondary electron [SE] measurement and back-scattered electron [BSE] measurement
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0004—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed
    • G02B19/0019—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having reflective surfaces only (e.g. louvre systems, systems with multiple planar reflectors)
    • G02B19/0023—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having reflective surfaces only (e.g. louvre systems, systems with multiple planar reflectors) at least one surface having optical power
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
    • G02B19/0047—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source
    • G02B19/0071—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source adapted to illuminate a complete hemisphere or a plane extending 360 degrees around the source
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/65—Raman scattering
    • G01N2021/653—Coherent methods [CARS]
    • G01N2021/656—Raman microprobe
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/65—Raman scattering
    • G01N21/658—Raman scattering enhancement Raman, e.g. surface plasmons
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/28—Scanning microscopes
    • H01J2237/2803—Scanning microscopes characterised by the imaging method
    • H01J2237/2808—Cathodoluminescence

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
FR8604947A 1986-04-07 1986-04-07 Dispositif de microscopie analytique, propre a former a la fois une sonde raman et une sonde electronique Expired FR2596863B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR8604947A FR2596863B1 (fr) 1986-04-07 1986-04-07 Dispositif de microscopie analytique, propre a former a la fois une sonde raman et une sonde electronique

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8604947A FR2596863B1 (fr) 1986-04-07 1986-04-07 Dispositif de microscopie analytique, propre a former a la fois une sonde raman et une sonde electronique

Publications (2)

Publication Number Publication Date
FR2596863A1 FR2596863A1 (fr) 1987-10-09
FR2596863B1 true FR2596863B1 (fr) 1988-06-17

Family

ID=9333973

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8604947A Expired FR2596863B1 (fr) 1986-04-07 1986-04-07 Dispositif de microscopie analytique, propre a former a la fois une sonde raman et une sonde electronique

Country Status (1)

Country Link
FR (1) FR2596863B1 (fr)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2617985B1 (fr) * 1987-07-10 1991-09-13 Centre Nat Rech Scient Dispositif optique de collection de lumiere formant objectif a miroir de grande ouverture numerique
GB9112343D0 (en) * 1991-06-08 1991-07-31 Renishaw Transducer Syst Surface analysis apparatus
US5510894A (en) * 1988-12-22 1996-04-23 Renishaw Plc Spectroscopic apparatus and methods
DE3904032A1 (de) * 1989-02-10 1990-08-16 Max Planck Gesellschaft Elektronenmikroskop zur untersuchung von festkoerperoberflaechen
NL9400111A (nl) * 1994-01-24 1995-09-01 Biomat Res Group Stichting Azl Elektronenmicroscoop met Ramanspectroscopie.
US6885445B2 (en) 1998-05-09 2005-04-26 Renishaw Plc Electron microscope and spectroscopy system
JP4392990B2 (ja) * 1998-05-09 2010-01-06 レニショウ パブリック リミテッド カンパニー 電子顕微鏡および分光システム
TWI283296B (en) * 2002-02-04 2007-07-01 Ortho Mcneil Pharm Inc Method and apparatus for obtaining molecular data from a pharmaceutical specimen
US6654118B2 (en) * 2002-02-04 2003-11-25 Ortho-Mcneil Pharmaceutical, Inc. Method and apparatus for obtaining molecular data from a pharmaceutical specimen
NL1027462C2 (nl) 2004-11-09 2006-05-10 Koninkl Philips Electronics Nv Werkwijze voor het lokaliseren van fluorescente markers.
EP1953791A1 (fr) * 2007-02-05 2008-08-06 FEI Company Appareil pour observer un échantillon avec un faicesau de particules et avec un microscope optique
DE102009015341A1 (de) * 2009-03-27 2010-10-07 Carl Zeiss Ag Verfahren und Vorrichtungen zur optischen Untersuchung von Proben
WO2011126041A1 (fr) * 2010-04-06 2011-10-13 大学共同利用機関法人自然科学研究機構 Dispositif de microscope composé
WO2012093474A1 (fr) * 2011-01-05 2012-07-12 Isobe Shinichiro Microscope à multiples sources de lumière
US8872105B2 (en) 2013-02-19 2014-10-28 Fei Company In situ reactivation of fluorescence marker
CZ305388B6 (cs) 2014-03-26 2015-08-26 Tescan Orsay Holding, A.S. Analytický systém s Ramanovým mikroskopem a elektronovým mikroskopem
CN111856078B (zh) * 2019-10-16 2022-05-24 中国科学院物理研究所 一种用于透射电镜系统的样品杆及相应透射电镜系统
US20220137380A1 (en) * 2020-10-30 2022-05-05 Kla Corporation Reflective compact lens for magneto-optic kerr effect metrology system

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2173436A5 (fr) * 1972-02-24 1973-10-05 Cameca
FR2356931A1 (fr) * 1976-07-02 1978-01-27 Anvar Microsonde microscope optique moleculaire a effet raman excitee par laser
FR2498767A1 (fr) * 1981-01-23 1982-07-30 Cameca Micro-analyseur a sonde electronique comportant un systeme d'observation a double grandissement

Also Published As

Publication number Publication date
FR2596863A1 (fr) 1987-10-09

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Legal Events

Date Code Title Description
ST Notification of lapse