JP2014141585A - 熱架橋促進剤、これを含有するポリシロキサン含有レジスト下層膜形成用組成物、及びこれを用いたパターン形成方法 - Google Patents
熱架橋促進剤、これを含有するポリシロキサン含有レジスト下層膜形成用組成物、及びこれを用いたパターン形成方法 Download PDFInfo
- Publication number
- JP2014141585A JP2014141585A JP2013010814A JP2013010814A JP2014141585A JP 2014141585 A JP2014141585 A JP 2014141585A JP 2013010814 A JP2013010814 A JP 2013010814A JP 2013010814 A JP2013010814 A JP 2013010814A JP 2014141585 A JP2014141585 A JP 2014141585A
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- film
- polysiloxane
- group
- underlayer film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- -1 polysiloxane Polymers 0.000 title claims abstract description 121
- 229920001296 polysiloxane Polymers 0.000 title claims abstract description 109
- 238000000034 method Methods 0.000 title claims abstract description 71
- 238000004132 cross linking Methods 0.000 title claims abstract description 30
- 239000000203 mixture Substances 0.000 title claims description 63
- 125000004432 carbon atom Chemical group C* 0.000 claims abstract description 42
- 150000001875 compounds Chemical class 0.000 claims abstract description 39
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims abstract description 21
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 18
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 18
- 239000010703 silicon Substances 0.000 claims abstract description 18
- 125000005843 halogen group Chemical group 0.000 claims abstract description 13
- 125000003118 aryl group Chemical group 0.000 claims abstract description 10
- 125000003545 alkoxy group Chemical group 0.000 claims abstract description 9
- 125000003710 aryl alkyl group Chemical group 0.000 claims abstract description 9
- 125000006165 cyclic alkyl group Chemical group 0.000 claims abstract description 9
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 claims abstract description 6
- 229910052744 lithium Inorganic materials 0.000 claims abstract description 6
- 239000003960 organic solvent Substances 0.000 claims description 58
- 229920002120 photoresistant polymer Polymers 0.000 claims description 29
- 238000001312 dry etching Methods 0.000 claims description 26
- 238000001459 lithography Methods 0.000 claims description 21
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims description 20
- 229910052733 gallium Inorganic materials 0.000 claims description 20
- 238000006460 hydrolysis reaction Methods 0.000 claims description 19
- 229910052751 metal Inorganic materials 0.000 claims description 18
- 239000002184 metal Substances 0.000 claims description 18
- 230000007062 hydrolysis Effects 0.000 claims description 17
- 239000000758 substrate Substances 0.000 claims description 15
- 238000010438 heat treatment Methods 0.000 claims description 13
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 10
- 229910052782 aluminium Inorganic materials 0.000 claims description 10
- 229910052719 titanium Inorganic materials 0.000 claims description 10
- 239000010936 titanium Substances 0.000 claims description 10
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 9
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 9
- 229910052799 carbon Inorganic materials 0.000 claims description 9
- 125000000962 organic group Chemical group 0.000 claims description 9
- 125000003342 alkenyl group Chemical group 0.000 claims description 8
- 125000000217 alkyl group Chemical group 0.000 claims description 8
- 125000002947 alkylene group Chemical group 0.000 claims description 8
- 125000003277 amino group Chemical group 0.000 claims description 8
- 125000005355 arylox oalkyl group Chemical group 0.000 claims description 8
- 229910052735 hafnium Inorganic materials 0.000 claims description 8
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 8
- 125000005188 oxoalkyl group Chemical group 0.000 claims description 8
- 125000000026 trimethylsilyl group Chemical group [H]C([H])([H])[Si]([*])(C([H])([H])[H])C([H])([H])[H] 0.000 claims description 8
- 229910052732 germanium Inorganic materials 0.000 claims description 7
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims description 7
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 6
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims description 6
- 230000007261 regionalization Effects 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 6
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 claims description 5
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 claims description 5
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims description 5
- 239000003513 alkali Substances 0.000 claims description 5
- 229910052792 caesium Inorganic materials 0.000 claims description 5
- TVFDJXOCXUVLDH-UHFFFAOYSA-N caesium atom Chemical compound [Cs] TVFDJXOCXUVLDH-UHFFFAOYSA-N 0.000 claims description 5
- 150000002500 ions Chemical class 0.000 claims description 5
- 229910052700 potassium Inorganic materials 0.000 claims description 5
- 239000011591 potassium Substances 0.000 claims description 5
- 229910052708 sodium Inorganic materials 0.000 claims description 5
- 239000011734 sodium Substances 0.000 claims description 5
- 229910052715 tantalum Inorganic materials 0.000 claims description 5
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 5
- 229910052726 zirconium Inorganic materials 0.000 claims description 5
- 229910052785 arsenic Inorganic materials 0.000 claims description 4
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 claims description 4
- 239000011651 chromium Substances 0.000 claims description 4
- 229910052802 copper Inorganic materials 0.000 claims description 4
- 239000010949 copper Substances 0.000 claims description 4
- 229910052721 tungsten Inorganic materials 0.000 claims description 4
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 3
- 229910045601 alloy Inorganic materials 0.000 claims description 3
- 239000000956 alloy Substances 0.000 claims description 3
- 229910052804 chromium Inorganic materials 0.000 claims description 3
- 238000010894 electron beam technology Methods 0.000 claims description 3
- 229910052738 indium Inorganic materials 0.000 claims description 3
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 3
- 229910052741 iridium Inorganic materials 0.000 claims description 3
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 claims description 3
- 229910052742 iron Inorganic materials 0.000 claims description 3
- 229910044991 metal oxide Inorganic materials 0.000 claims description 3
- 150000004706 metal oxides Chemical class 0.000 claims description 3
- 229910052750 molybdenum Inorganic materials 0.000 claims description 3
- 239000011733 molybdenum Substances 0.000 claims description 3
- 238000001127 nanoimprint lithography Methods 0.000 claims description 3
- 150000004767 nitrides Chemical class 0.000 claims description 3
- 229910052763 palladium Inorganic materials 0.000 claims description 3
- 238000001338 self-assembly Methods 0.000 claims description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 3
- 239000010937 tungsten Substances 0.000 claims description 3
- 238000005229 chemical vapour deposition Methods 0.000 claims description 2
- KPUWHANPEXNPJT-UHFFFAOYSA-N disiloxane Chemical class [SiH3]O[SiH3] KPUWHANPEXNPJT-UHFFFAOYSA-N 0.000 claims 2
- 125000001183 hydrocarbyl group Chemical group 0.000 claims 1
- 238000005530 etching Methods 0.000 abstract description 26
- 125000004122 cyclic group Chemical group 0.000 abstract description 2
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 87
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 71
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 47
- 239000000178 monomer Substances 0.000 description 44
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 42
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 42
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 39
- 239000002904 solvent Substances 0.000 description 34
- 239000010410 layer Substances 0.000 description 32
- 239000000243 solution Substances 0.000 description 32
- JOLQKTGDSGKSKJ-UHFFFAOYSA-N 1-ethoxypropan-2-ol Chemical compound CCOCC(C)O JOLQKTGDSGKSKJ-UHFFFAOYSA-N 0.000 description 25
- 238000006243 chemical reaction Methods 0.000 description 23
- NTIZESTWPVYFNL-UHFFFAOYSA-N Methyl isobutyl ketone Chemical compound CC(C)CC(C)=O NTIZESTWPVYFNL-UHFFFAOYSA-N 0.000 description 22
- UIHCLUNTQKBZGK-UHFFFAOYSA-N Methyl isobutyl ketone Natural products CCC(C)C(C)=O UIHCLUNTQKBZGK-UHFFFAOYSA-N 0.000 description 22
- SKTCDJAMAYNROS-UHFFFAOYSA-N methoxycyclopentane Chemical compound COC1CCCC1 SKTCDJAMAYNROS-UHFFFAOYSA-N 0.000 description 22
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 22
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 21
- 239000003054 catalyst Substances 0.000 description 21
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 19
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 17
- ARXJGSRGQADJSQ-UHFFFAOYSA-N 1-methoxypropan-2-ol Chemical compound COCC(C)O ARXJGSRGQADJSQ-UHFFFAOYSA-N 0.000 description 16
- LDMRLRNXHLPZJN-UHFFFAOYSA-N 3-propoxypropan-1-ol Chemical compound CCCOCCCO LDMRLRNXHLPZJN-UHFFFAOYSA-N 0.000 description 16
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 16
- 239000007789 gas Substances 0.000 description 16
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 15
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 15
- BTANRVKWQNVYAZ-UHFFFAOYSA-N butan-2-ol Chemical compound CCC(C)O BTANRVKWQNVYAZ-UHFFFAOYSA-N 0.000 description 15
- YEYKMVJDLWJFOA-UHFFFAOYSA-N 2-propoxyethanol Chemical compound CCCOCCO YEYKMVJDLWJFOA-UHFFFAOYSA-N 0.000 description 14
- 238000005406 washing Methods 0.000 description 13
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 12
- WEVYAHXRMPXWCK-UHFFFAOYSA-N Acetonitrile Chemical compound CC#N WEVYAHXRMPXWCK-UHFFFAOYSA-N 0.000 description 12
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 12
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 12
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 12
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 12
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 12
- 238000009833 condensation Methods 0.000 description 11
- 230000005494 condensation Effects 0.000 description 11
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 10
- 239000003377 acid catalyst Substances 0.000 description 10
- 238000011161 development Methods 0.000 description 10
- 230000018109 developmental process Effects 0.000 description 10
- ZXEKIIBDNHEJCQ-UHFFFAOYSA-N isobutanol Chemical compound CC(C)CO ZXEKIIBDNHEJCQ-UHFFFAOYSA-N 0.000 description 10
- 230000015572 biosynthetic process Effects 0.000 description 9
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexyloxide Natural products O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 9
- 238000003786 synthesis reaction Methods 0.000 description 9
- YEJRWHAVMIAJKC-UHFFFAOYSA-N 4-Butyrolactone Chemical compound O=C1CCCO1 YEJRWHAVMIAJKC-UHFFFAOYSA-N 0.000 description 8
- OFOBLEOULBTSOW-UHFFFAOYSA-N Malonic acid Chemical compound OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 8
- AFVFQIVMOAPDHO-UHFFFAOYSA-N Methanesulfonic acid Chemical compound CS(O)(=O)=O AFVFQIVMOAPDHO-UHFFFAOYSA-N 0.000 description 8
- 239000008367 deionised water Substances 0.000 description 8
- 229910021641 deionized water Inorganic materials 0.000 description 8
- XBDQKXXYIPTUBI-UHFFFAOYSA-N dimethylselenoniopropionate Natural products CCC(O)=O XBDQKXXYIPTUBI-UHFFFAOYSA-N 0.000 description 8
- BDAGIHXWWSANSR-UHFFFAOYSA-N methanoic acid Natural products OC=O BDAGIHXWWSANSR-UHFFFAOYSA-N 0.000 description 8
- 238000012545 processing Methods 0.000 description 8
- 239000011541 reaction mixture Substances 0.000 description 8
- 239000000126 substance Substances 0.000 description 8
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 8
- HMNZROFMBSUMAB-UHFFFAOYSA-N 1-ethoxybutan-1-ol Chemical compound CCCC(O)OCC HMNZROFMBSUMAB-UHFFFAOYSA-N 0.000 description 7
- APFRUMUZEFOCFO-UHFFFAOYSA-N 1-methoxybutan-1-ol Chemical compound CCCC(O)OC APFRUMUZEFOCFO-UHFFFAOYSA-N 0.000 description 7
- WDJHALXBUFZDSR-UHFFFAOYSA-M acetoacetate Chemical compound CC(=O)CC([O-])=O WDJHALXBUFZDSR-UHFFFAOYSA-M 0.000 description 7
- 238000006482 condensation reaction Methods 0.000 description 7
- LEEANUDEDHYDTG-UHFFFAOYSA-N 1,2-dimethoxypropane Chemical compound COCC(C)OC LEEANUDEDHYDTG-UHFFFAOYSA-N 0.000 description 6
- YYVRSUMXFIIYRW-UHFFFAOYSA-N 1-propoxybutan-1-ol Chemical compound CCCOC(O)CCC YYVRSUMXFIIYRW-UHFFFAOYSA-N 0.000 description 6
- WWZKQHOCKIZLMA-UHFFFAOYSA-N Caprylic acid Natural products CCCCCCCC(O)=O WWZKQHOCKIZLMA-UHFFFAOYSA-N 0.000 description 6
- 239000002253 acid Substances 0.000 description 6
- 239000002585 base Substances 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 6
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 6
- SBZXBUIDTXKZTM-UHFFFAOYSA-N diglyme Chemical compound COCCOCCOC SBZXBUIDTXKZTM-UHFFFAOYSA-N 0.000 description 6
- 230000000694 effects Effects 0.000 description 6
- 238000000605 extraction Methods 0.000 description 6
- FUZZWVXGSFPDMH-UHFFFAOYSA-N hexanoic acid Chemical compound CCCCCC(O)=O FUZZWVXGSFPDMH-UHFFFAOYSA-N 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- 229920000642 polymer Polymers 0.000 description 6
- 238000012360 testing method Methods 0.000 description 6
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 6
- 229910052727 yttrium Inorganic materials 0.000 description 6
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 6
- LIPRQQHINVWJCH-UHFFFAOYSA-N 1-ethoxypropan-2-yl acetate Chemical compound CCOCC(C)OC(C)=O LIPRQQHINVWJCH-UHFFFAOYSA-N 0.000 description 5
- 239000004793 Polystyrene Substances 0.000 description 5
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 5
- 239000006227 byproduct Substances 0.000 description 5
- 238000006386 neutralization reaction Methods 0.000 description 5
- 229920002223 polystyrene Polymers 0.000 description 5
- GQCZPFJGIXHZMB-UHFFFAOYSA-N 1-tert-Butoxy-2-propanol Chemical compound CC(O)COC(C)(C)C GQCZPFJGIXHZMB-UHFFFAOYSA-N 0.000 description 4
- WXUAQHNMJWJLTG-UHFFFAOYSA-N 2-methylbutanedioic acid Chemical compound OC(=O)C(C)CC(O)=O WXUAQHNMJWJLTG-UHFFFAOYSA-N 0.000 description 4
- OSWFIVFLDKOXQC-UHFFFAOYSA-N 4-(3-methoxyphenyl)aniline Chemical compound COC1=CC=CC(C=2C=CC(N)=CC=2)=C1 OSWFIVFLDKOXQC-UHFFFAOYSA-N 0.000 description 4
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 description 4
- DKPFZGUDAPQIHT-UHFFFAOYSA-N Butyl acetate Natural products CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 4
- FERIUCNNQQJTOY-UHFFFAOYSA-N Butyric acid Chemical compound CCCC(O)=O FERIUCNNQQJTOY-UHFFFAOYSA-N 0.000 description 4
- XXRCUYVCPSWGCC-UHFFFAOYSA-N Ethyl pyruvate Chemical compound CCOC(=O)C(C)=O XXRCUYVCPSWGCC-UHFFFAOYSA-N 0.000 description 4
- VZCYOOQTPOCHFL-OWOJBTEDSA-N Fumaric acid Chemical compound OC(=O)\C=C\C(O)=O VZCYOOQTPOCHFL-OWOJBTEDSA-N 0.000 description 4
- KKEYFWRCBNTPAC-UHFFFAOYSA-N Terephthalic acid Chemical compound OC(=O)C1=CC=C(C(O)=O)C=C1 KKEYFWRCBNTPAC-UHFFFAOYSA-N 0.000 description 4
- DTQVDTLACAAQTR-UHFFFAOYSA-N Trifluoroacetic acid Chemical compound OC(=O)C(F)(F)F DTQVDTLACAAQTR-UHFFFAOYSA-N 0.000 description 4
- 235000011054 acetic acid Nutrition 0.000 description 4
- 150000007513 acids Chemical class 0.000 description 4
- WNLRTRBMVRJNCN-UHFFFAOYSA-N adipic acid Chemical compound OC(=O)CCCCC(O)=O WNLRTRBMVRJNCN-UHFFFAOYSA-N 0.000 description 4
- WPYMKLBDIGXBTP-UHFFFAOYSA-N benzoic acid Chemical compound OC(=O)C1=CC=CC=C1 WPYMKLBDIGXBTP-UHFFFAOYSA-N 0.000 description 4
- JXTHNDFMNIQAHM-UHFFFAOYSA-N dichloroacetic acid Chemical compound OC(=O)C(Cl)Cl JXTHNDFMNIQAHM-UHFFFAOYSA-N 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- BHXIWUJLHYHGSJ-UHFFFAOYSA-N ethyl 3-ethoxypropanoate Chemical compound CCOCCC(=O)OCC BHXIWUJLHYHGSJ-UHFFFAOYSA-N 0.000 description 4
- 229940117360 ethyl pyruvate Drugs 0.000 description 4
- 235000019253 formic acid Nutrition 0.000 description 4
- CATSNJVOTSVZJV-UHFFFAOYSA-N heptan-2-one Chemical compound CCCCCC(C)=O CATSNJVOTSVZJV-UHFFFAOYSA-N 0.000 description 4
- QQVIHTHCMHWDBS-UHFFFAOYSA-N isophthalic acid Chemical compound OC(=O)C1=CC=CC(C(O)=O)=C1 QQVIHTHCMHWDBS-UHFFFAOYSA-N 0.000 description 4
- VZCYOOQTPOCHFL-UPHRSURJSA-N maleic acid Chemical compound OC(=O)\C=C/C(O)=O VZCYOOQTPOCHFL-UPHRSURJSA-N 0.000 description 4
- 239000011976 maleic acid Substances 0.000 description 4
- 229940098779 methanesulfonic acid Drugs 0.000 description 4
- BDJSOPWXYLFTNW-UHFFFAOYSA-N methyl 3-methoxypropanoate Chemical compound COCCC(=O)OC BDJSOPWXYLFTNW-UHFFFAOYSA-N 0.000 description 4
- 238000002156 mixing Methods 0.000 description 4
- FBUKVWPVBMHYJY-UHFFFAOYSA-N nonanoic acid Chemical compound CCCCCCCCC(O)=O FBUKVWPVBMHYJY-UHFFFAOYSA-N 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
- 150000007524 organic acids Chemical class 0.000 description 4
- 235000006408 oxalic acid Nutrition 0.000 description 4
- 238000000059 patterning Methods 0.000 description 4
- XNGIFLGASWRNHJ-UHFFFAOYSA-N phthalic acid Chemical compound OC(=O)C1=CC=CC=C1C(O)=O XNGIFLGASWRNHJ-UHFFFAOYSA-N 0.000 description 4
- 235000019260 propionic acid Nutrition 0.000 description 4
- IUVKMZGDUIUOCP-BTNSXGMBSA-N quinbolone Chemical compound O([C@H]1CC[C@H]2[C@H]3[C@@H]([C@]4(C=CC(=O)C=C4CC3)C)CC[C@@]21C)C1=CCCC1 IUVKMZGDUIUOCP-BTNSXGMBSA-N 0.000 description 4
- 239000002994 raw material Substances 0.000 description 4
- YGSDEFSMJLZEOE-UHFFFAOYSA-N salicylic acid Chemical compound OC(=O)C1=CC=CC=C1O YGSDEFSMJLZEOE-UHFFFAOYSA-N 0.000 description 4
- 239000003381 stabilizer Substances 0.000 description 4
- 125000001424 substituent group Chemical group 0.000 description 4
- 150000005846 sugar alcohols Polymers 0.000 description 4
- WMOVHXAZOJBABW-UHFFFAOYSA-N tert-butyl acetate Chemical compound CC(=O)OC(C)(C)C WMOVHXAZOJBABW-UHFFFAOYSA-N 0.000 description 4
- JAELLLITIZHOGQ-UHFFFAOYSA-N tert-butyl propanoate Chemical compound CCC(=O)OC(C)(C)C JAELLLITIZHOGQ-UHFFFAOYSA-N 0.000 description 4
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 4
- ZNOCGWVLWPVKAO-UHFFFAOYSA-N trimethoxy(phenyl)silane Chemical compound CO[Si](OC)(OC)C1=CC=CC=C1 ZNOCGWVLWPVKAO-UHFFFAOYSA-N 0.000 description 4
- NQPDZGIKBAWPEJ-UHFFFAOYSA-N valeric acid Chemical compound CCCCC(O)=O NQPDZGIKBAWPEJ-UHFFFAOYSA-N 0.000 description 4
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical group C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 3
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 3
- WMFOQBRAJBCJND-UHFFFAOYSA-M Lithium hydroxide Chemical compound [Li+].[OH-] WMFOQBRAJBCJND-UHFFFAOYSA-M 0.000 description 3
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- RWRDLPDLKQPQOW-UHFFFAOYSA-N Pyrrolidine Chemical compound C1CCNC1 RWRDLPDLKQPQOW-UHFFFAOYSA-N 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 3
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 3
- 239000000654 additive Substances 0.000 description 3
- 230000000996 additive effect Effects 0.000 description 3
- 150000001346 alkyl aryl ethers Chemical class 0.000 description 3
- 239000007864 aqueous solution Substances 0.000 description 3
- 229910052796 boron Inorganic materials 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 238000005227 gel permeation chromatography Methods 0.000 description 3
- 230000003301 hydrolyzing effect Effects 0.000 description 3
- 238000000671 immersion lithography Methods 0.000 description 3
- 230000007935 neutral effect Effects 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- 239000002210 silicon-based material Substances 0.000 description 3
- 238000004528 spin coating Methods 0.000 description 3
- 229910021642 ultra pure water Inorganic materials 0.000 description 3
- 239000012498 ultrapure water Substances 0.000 description 3
- OYHQOLUKZRVURQ-NTGFUMLPSA-N (9Z,12Z)-9,10,12,13-tetratritiooctadeca-9,12-dienoic acid Chemical compound C(CCCCCCC\C(=C(/C\C(=C(/CCCCC)\[3H])\[3H])\[3H])\[3H])(=O)O OYHQOLUKZRVURQ-NTGFUMLPSA-N 0.000 description 2
- WRIDQFICGBMAFQ-UHFFFAOYSA-N (E)-8-Octadecenoic acid Natural products CCCCCCCCCC=CCCCCCCC(O)=O WRIDQFICGBMAFQ-UHFFFAOYSA-N 0.000 description 2
- UKMREQGLUGCCRY-BTJKTKAUSA-M (z)-4-hydroxy-4-oxobut-2-enoate;triphenylsulfanium Chemical compound OC(=O)\C=C/C([O-])=O.C1=CC=CC=C1[S+](C=1C=CC=CC=1)C1=CC=CC=C1 UKMREQGLUGCCRY-BTJKTKAUSA-M 0.000 description 2
- GYSCBCSGKXNZRH-UHFFFAOYSA-N 1-benzothiophene-2-carboxamide Chemical compound C1=CC=C2SC(C(=O)N)=CC2=C1 GYSCBCSGKXNZRH-UHFFFAOYSA-N 0.000 description 2
- RTBFRGCFXZNCOE-UHFFFAOYSA-N 1-methylsulfonylpiperidin-4-one Chemical compound CS(=O)(=O)N1CCC(=O)CC1 RTBFRGCFXZNCOE-UHFFFAOYSA-N 0.000 description 2
- LTMRRSWNXVJMBA-UHFFFAOYSA-N 2,2-diethylpropanedioic acid Chemical compound CCC(CC)(C(O)=O)C(O)=O LTMRRSWNXVJMBA-UHFFFAOYSA-N 0.000 description 2
- JAHNSTQSQJOJLO-UHFFFAOYSA-N 2-(3-fluorophenyl)-1h-imidazole Chemical compound FC1=CC=CC(C=2NC=CN=2)=C1 JAHNSTQSQJOJLO-UHFFFAOYSA-N 0.000 description 2
- MCRZWYDXIGCFKO-UHFFFAOYSA-N 2-butylpropanedioic acid Chemical compound CCCCC(C(O)=O)C(O)=O MCRZWYDXIGCFKO-UHFFFAOYSA-N 0.000 description 2
- LQJBNNIYVWPHFW-UHFFFAOYSA-N 20:1omega9c fatty acid Natural products CCCCCCCCCCC=CCCCCCCCC(O)=O LQJBNNIYVWPHFW-UHFFFAOYSA-N 0.000 description 2
- KLFHRQOZJWCFOI-UHFFFAOYSA-N 3-methyl-1-[(3-methylpiperidin-1-yl)methyl]piperidine Chemical compound C1C(C)CCCN1CN1CC(C)CCC1 KLFHRQOZJWCFOI-UHFFFAOYSA-N 0.000 description 2
- AWQSAIIDOMEEOD-UHFFFAOYSA-N 5,5-Dimethyl-4-(3-oxobutyl)dihydro-2(3H)-furanone Chemical compound CC(=O)CCC1CC(=O)OC1(C)C AWQSAIIDOMEEOD-UHFFFAOYSA-N 0.000 description 2
- QSBYPNXLFMSGKH-UHFFFAOYSA-N 9-Heptadecensaeure Natural products CCCCCCCC=CCCCCCCCC(O)=O QSBYPNXLFMSGKH-UHFFFAOYSA-N 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- PAYRUJLWNCNPSJ-UHFFFAOYSA-N Aniline Chemical compound NC1=CC=CC=C1 PAYRUJLWNCNPSJ-UHFFFAOYSA-N 0.000 description 2
- 239000005711 Benzoic acid Substances 0.000 description 2
- LSNNMFCWUKXFEE-UHFFFAOYSA-M Bisulfite Chemical compound OS([O-])=O LSNNMFCWUKXFEE-UHFFFAOYSA-M 0.000 description 2
- WGWPCFWJFBMYQZ-UHFFFAOYSA-N CCCCO[Ta] Chemical compound CCCCO[Ta] WGWPCFWJFBMYQZ-UHFFFAOYSA-N 0.000 description 2
- FZEGQDZWOCMALB-UHFFFAOYSA-N CCCO[Ta] Chemical compound CCCO[Ta] FZEGQDZWOCMALB-UHFFFAOYSA-N 0.000 description 2
- DJCDXWHFUVBGLR-UHFFFAOYSA-N CCO[Ta] Chemical compound CCO[Ta] DJCDXWHFUVBGLR-UHFFFAOYSA-N 0.000 description 2
- DCZATVBQAVOLBH-UHFFFAOYSA-N CO[Ta] Chemical compound CO[Ta] DCZATVBQAVOLBH-UHFFFAOYSA-N 0.000 description 2
- GHVNFZFCNZKVNT-UHFFFAOYSA-N Decanoic acid Natural products CCCCCCCCCC(O)=O GHVNFZFCNZKVNT-UHFFFAOYSA-N 0.000 description 2
- ROSDSFDQCJNGOL-UHFFFAOYSA-N Dimethylamine Chemical compound CNC ROSDSFDQCJNGOL-UHFFFAOYSA-N 0.000 description 2
- QUSNBJAOOMFDIB-UHFFFAOYSA-N Ethylamine Chemical compound CCN QUSNBJAOOMFDIB-UHFFFAOYSA-N 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- 229910016006 MoSi Inorganic materials 0.000 description 2
- JLTDJTHDQAWBAV-UHFFFAOYSA-N N,N-dimethylaniline Chemical compound CN(C)C1=CC=CC=C1 JLTDJTHDQAWBAV-UHFFFAOYSA-N 0.000 description 2
- 239000005642 Oleic acid Substances 0.000 description 2
- ZQPPMHVWECSIRJ-UHFFFAOYSA-N Oleic acid Natural products CCCCCCCCC=CCCCCCCCC(O)=O ZQPPMHVWECSIRJ-UHFFFAOYSA-N 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- GLUUGHFHXGJENI-UHFFFAOYSA-N Piperazine Chemical compound C1CNCCN1 GLUUGHFHXGJENI-UHFFFAOYSA-N 0.000 description 2
- NQRYJNQNLNOLGT-UHFFFAOYSA-N Piperidine Chemical compound C1CCNCC1 NQRYJNQNLNOLGT-UHFFFAOYSA-N 0.000 description 2
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical compound C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 2
- KAESVJOAVNADME-UHFFFAOYSA-N Pyrrole Chemical compound C=1C=CNC=1 KAESVJOAVNADME-UHFFFAOYSA-N 0.000 description 2
- 229910004541 SiN Inorganic materials 0.000 description 2
- 235000021355 Stearic acid Nutrition 0.000 description 2
- KDYFGRWQOYBRFD-UHFFFAOYSA-N Succinic acid Natural products OC(=O)CCC(O)=O KDYFGRWQOYBRFD-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- GQQZZPPGARCSJA-UHFFFAOYSA-M [Ta]OC1=CC=CC=C1 Chemical compound [Ta]OC1=CC=CC=C1 GQQZZPPGARCSJA-UHFFFAOYSA-M 0.000 description 2
- 230000002378 acidificating effect Effects 0.000 description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 2
- 239000001361 adipic acid Substances 0.000 description 2
- 235000011037 adipic acid Nutrition 0.000 description 2
- OBETXYAYXDNJHR-UHFFFAOYSA-N alpha-ethylcaproic acid Natural products CCCCC(CC)C(O)=O OBETXYAYXDNJHR-UHFFFAOYSA-N 0.000 description 2
- DTOSIQBPPRVQHS-PDBXOOCHSA-N alpha-linolenic acid Chemical compound CC\C=C/C\C=C/C\C=C/CCCCCCCC(O)=O DTOSIQBPPRVQHS-PDBXOOCHSA-N 0.000 description 2
- 235000020661 alpha-linolenic acid Nutrition 0.000 description 2
- JFCQEDHGNNZCLN-UHFFFAOYSA-N anhydrous glutaric acid Natural products OC(=O)CCCC(O)=O JFCQEDHGNNZCLN-UHFFFAOYSA-N 0.000 description 2
- 229920005601 base polymer Polymers 0.000 description 2
- 235000010233 benzoic acid Nutrition 0.000 description 2
- GONOPSZTUGRENK-UHFFFAOYSA-N benzyl(trichloro)silane Chemical compound Cl[Si](Cl)(Cl)CC1=CC=CC=C1 GONOPSZTUGRENK-UHFFFAOYSA-N 0.000 description 2
- 230000008033 biological extinction Effects 0.000 description 2
- HQABUPZFAYXKJW-UHFFFAOYSA-N butan-1-amine Chemical compound CCCCN HQABUPZFAYXKJW-UHFFFAOYSA-N 0.000 description 2
- KDYFGRWQOYBRFD-NUQCWPJISA-N butanedioic acid Chemical compound O[14C](=O)CC[14C](O)=O KDYFGRWQOYBRFD-NUQCWPJISA-N 0.000 description 2
- FOCAUTSVDIKZOP-UHFFFAOYSA-N chloroacetic acid Chemical compound OC(=O)CCl FOCAUTSVDIKZOP-UHFFFAOYSA-N 0.000 description 2
- HNEGQIOMVPPMNR-IHWYPQMZSA-N citraconic acid Chemical compound OC(=O)C(/C)=C\C(O)=O HNEGQIOMVPPMNR-IHWYPQMZSA-N 0.000 description 2
- 229940018557 citraconic acid Drugs 0.000 description 2
- 235000015165 citric acid Nutrition 0.000 description 2
- 150000004292 cyclic ethers Chemical class 0.000 description 2
- PAFZNILMFXTMIY-UHFFFAOYSA-N cyclohexylamine Chemical compound NC1CCCCC1 PAFZNILMFXTMIY-UHFFFAOYSA-N 0.000 description 2
- YEMJITXWLIHJHJ-UHFFFAOYSA-N di(propan-2-yloxy)silane Chemical compound CC(C)O[SiH2]OC(C)C YEMJITXWLIHJHJ-UHFFFAOYSA-N 0.000 description 2
- 229960005215 dichloroacetic acid Drugs 0.000 description 2
- ZVMRWPHIZSSUKP-UHFFFAOYSA-N dicyclohexyl(dimethoxy)silane Chemical compound C1CCCCC1[Si](OC)(OC)C1CCCCC1 ZVMRWPHIZSSUKP-UHFFFAOYSA-N 0.000 description 2
- ZXPDYFSTVHQQOI-UHFFFAOYSA-N diethoxysilane Chemical compound CCO[SiH2]OCC ZXPDYFSTVHQQOI-UHFFFAOYSA-N 0.000 description 2
- DVYUOQXRGHUWKE-UHFFFAOYSA-N dimethyl(2-phenylethoxy)silane Chemical compound C[SiH](C)OCCC1=CC=CC=C1 DVYUOQXRGHUWKE-UHFFFAOYSA-N 0.000 description 2
- OREAFAJWWJHCOT-UHFFFAOYSA-N dimethylmalonic acid Chemical compound OC(=O)C(C)(C)C(O)=O OREAFAJWWJHCOT-UHFFFAOYSA-N 0.000 description 2
- SACPKRUZWRIEBW-UHFFFAOYSA-N dipropoxysilane Chemical compound CCCO[SiH2]OCCC SACPKRUZWRIEBW-UHFFFAOYSA-N 0.000 description 2
- POLCUAVZOMRGSN-UHFFFAOYSA-N dipropyl ether Chemical compound CCCOCCC POLCUAVZOMRGSN-UHFFFAOYSA-N 0.000 description 2
- SZXQTJUDPRGNJN-UHFFFAOYSA-N dipropylene glycol Chemical compound OCCCOCCCO SZXQTJUDPRGNJN-UHFFFAOYSA-N 0.000 description 2
- UKFXDFUAPNAMPJ-UHFFFAOYSA-N ethylmalonic acid Chemical compound CCC(C(O)=O)C(O)=O UKFXDFUAPNAMPJ-UHFFFAOYSA-N 0.000 description 2
- 230000002431 foraging effect Effects 0.000 description 2
- 238000005194 fractionation Methods 0.000 description 2
- 239000001530 fumaric acid Substances 0.000 description 2
- VKYKSIONXSXAKP-UHFFFAOYSA-N hexamethylenetetramine Chemical compound C1N(C2)CN3CN1CN2C3 VKYKSIONXSXAKP-UHFFFAOYSA-N 0.000 description 2
- NAQMVNRVTILPCV-UHFFFAOYSA-N hexane-1,6-diamine Chemical compound NCCCCCCN NAQMVNRVTILPCV-UHFFFAOYSA-N 0.000 description 2
- 150000002430 hydrocarbons Chemical group 0.000 description 2
- 238000007654 immersion Methods 0.000 description 2
- QXJSBBXBKPUZAA-UHFFFAOYSA-N isooleic acid Natural products CCCCCCCC=CCCCCCCCCC(O)=O QXJSBBXBKPUZAA-UHFFFAOYSA-N 0.000 description 2
- KQQKGWQCNNTQJW-UHFFFAOYSA-N linolenic acid Natural products CC=CCCC=CCC=CCCCCCCCC(O)=O KQQKGWQCNNTQJW-UHFFFAOYSA-N 0.000 description 2
- 229960004488 linolenic acid Drugs 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 150000002736 metal compounds Chemical class 0.000 description 2
- LVHBHZANLOWSRM-UHFFFAOYSA-N methylenebutanedioic acid Natural products OC(=O)CC(=C)C(O)=O LVHBHZANLOWSRM-UHFFFAOYSA-N 0.000 description 2
- ZIYVHBGGAOATLY-UHFFFAOYSA-N methylmalonic acid Chemical compound OC(=O)C(C)C(O)=O ZIYVHBGGAOATLY-UHFFFAOYSA-N 0.000 description 2
- QIQXTHQIDYTFRH-UHFFFAOYSA-N octadecanoic acid Chemical compound CCCCCCCCCCCCCCCCCC(O)=O QIQXTHQIDYTFRH-UHFFFAOYSA-N 0.000 description 2
- OQCDKBAXFALNLD-UHFFFAOYSA-N octadecanoic acid Natural products CCCCCCCC(C)CCCCCCCCC(O)=O OQCDKBAXFALNLD-UHFFFAOYSA-N 0.000 description 2
- ZQPPMHVWECSIRJ-KTKRTIGZSA-N oleic acid Chemical compound CCCCCCCC\C=C/CCCCCCCC(O)=O ZQPPMHVWECSIRJ-KTKRTIGZSA-N 0.000 description 2
- 235000021313 oleic acid Nutrition 0.000 description 2
- FJKROLUGYXJWQN-UHFFFAOYSA-N papa-hydroxy-benzoic acid Natural products OC(=O)C1=CC=C(O)C=C1 FJKROLUGYXJWQN-UHFFFAOYSA-N 0.000 description 2
- VLTRZXGMWDSKGL-UHFFFAOYSA-N perchloric acid Chemical compound OCl(=O)(=O)=O VLTRZXGMWDSKGL-UHFFFAOYSA-N 0.000 description 2
- 230000000737 periodic effect Effects 0.000 description 2
- IKNCGYCHMGNBCP-UHFFFAOYSA-N propan-1-olate Chemical compound CCC[O-] IKNCGYCHMGNBCP-UHFFFAOYSA-N 0.000 description 2
- WGYKZJWCGVVSQN-UHFFFAOYSA-N propylamine Chemical compound CCCN WGYKZJWCGVVSQN-UHFFFAOYSA-N 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000010979 ruby Substances 0.000 description 2
- 229910001750 ruby Inorganic materials 0.000 description 2
- 229960004889 salicylic acid Drugs 0.000 description 2
- 238000004904 shortening Methods 0.000 description 2
- 150000003377 silicon compounds Chemical class 0.000 description 2
- 239000008117 stearic acid Substances 0.000 description 2
- VDZOOKBUILJEDG-UHFFFAOYSA-M tetrabutylammonium hydroxide Chemical compound [OH-].CCCC[N+](CCCC)(CCCC)CCCC VDZOOKBUILJEDG-UHFFFAOYSA-M 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- YNJBWRMUSHSURL-UHFFFAOYSA-N trichloroacetic acid Chemical compound OC(=O)C(Cl)(Cl)Cl YNJBWRMUSHSURL-UHFFFAOYSA-N 0.000 description 2
- BDZBKCUKTQZUTL-UHFFFAOYSA-N triethyl phosphite Chemical compound CCOP(OCC)OCC BDZBKCUKTQZUTL-UHFFFAOYSA-N 0.000 description 2
- ZIBGPFATKBEMQZ-UHFFFAOYSA-N triethylene glycol Chemical compound OCCOCCOCCO ZIBGPFATKBEMQZ-UHFFFAOYSA-N 0.000 description 2
- CYTQBVOFDCPGCX-UHFFFAOYSA-N trimethyl phosphite Chemical compound COP(OC)OC CYTQBVOFDCPGCX-UHFFFAOYSA-N 0.000 description 2
- GETQZCLCWQTVFV-UHFFFAOYSA-N trimethylamine Chemical compound CN(C)C GETQZCLCWQTVFV-UHFFFAOYSA-N 0.000 description 2
- QOPBTFMUVTXWFF-UHFFFAOYSA-N tripropyl phosphite Chemical compound CCCOP(OCCC)OCCC QOPBTFMUVTXWFF-UHFFFAOYSA-N 0.000 description 2
- 229910052720 vanadium Inorganic materials 0.000 description 2
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 description 2
- NWUYHJFMYQTDRP-UHFFFAOYSA-N 1,2-bis(ethenyl)benzene;1-ethenyl-2-ethylbenzene;styrene Chemical compound C=CC1=CC=CC=C1.CCC1=CC=CC=C1C=C.C=CC1=CC=CC=C1C=C NWUYHJFMYQTDRP-UHFFFAOYSA-N 0.000 description 1
- NFDXQGNDWIPXQL-UHFFFAOYSA-N 1-cyclooctyldiazocane Chemical compound C1CCCCCCC1N1NCCCCCC1 NFDXQGNDWIPXQL-UHFFFAOYSA-N 0.000 description 1
- CAFAOQIVXSSFSY-UHFFFAOYSA-N 1-ethoxyethanol Chemical compound CCOC(C)O CAFAOQIVXSSFSY-UHFFFAOYSA-N 0.000 description 1
- ANNXCVXJYNOQMC-UHFFFAOYSA-N 1-ethoxyethanolate hafnium(4+) Chemical compound C(C)OC([O-])C.[Hf+4].C(C)OC([O-])C.C(C)OC([O-])C.C(C)OC([O-])C ANNXCVXJYNOQMC-UHFFFAOYSA-N 0.000 description 1
- GNFIHZDKQDJZBM-UHFFFAOYSA-N 1-ethoxypropan-2-yl acetate;1-methoxypropan-2-yl acetate Chemical compound COCC(C)OC(C)=O.CCOCC(C)OC(C)=O GNFIHZDKQDJZBM-UHFFFAOYSA-N 0.000 description 1
- GEGLCBTXYBXOJA-UHFFFAOYSA-N 1-methoxyethanol Chemical compound COC(C)O GEGLCBTXYBXOJA-UHFFFAOYSA-N 0.000 description 1
- HOSCYKXPGYWDSF-UHFFFAOYSA-N 1-methoxyethanolate titanium(4+) Chemical compound COC([O-])C.[Ti+4].COC([O-])C.COC([O-])C.COC([O-])C HOSCYKXPGYWDSF-UHFFFAOYSA-N 0.000 description 1
- ZXEHLAPOJGDPLC-UHFFFAOYSA-N 1-methoxyethanolate;yttrium(3+) Chemical compound [Y+3].COC(C)[O-].COC(C)[O-].COC(C)[O-] ZXEHLAPOJGDPLC-UHFFFAOYSA-N 0.000 description 1
- AOPDRZXCEAKHHW-UHFFFAOYSA-N 1-pentoxypentane Chemical compound CCCCCOCCCCC AOPDRZXCEAKHHW-UHFFFAOYSA-N 0.000 description 1
- PEMKDLXNZSXEFF-UHFFFAOYSA-N 1-pentoxypentane yttrium Chemical compound C(CCCC)OCCCCC.[Y] PEMKDLXNZSXEFF-UHFFFAOYSA-N 0.000 description 1
- CXIMASKUSRFXJH-UHFFFAOYSA-N 1-pentoxypentane;titanium Chemical compound [Ti].CCCCCOCCCCC CXIMASKUSRFXJH-UHFFFAOYSA-N 0.000 description 1
- SYDOCKQIFFRAET-UHFFFAOYSA-N 2,2-dibutoxyethyl 3-oxobutanoate;yttrium Chemical compound [Y].CCCCOC(OCCCC)COC(=O)CC(C)=O SYDOCKQIFFRAET-UHFFFAOYSA-N 0.000 description 1
- UFQFKHLOJDUSSU-UHFFFAOYSA-N 2,2-dipropoxyethyl 3-oxobutanoate Chemical compound CCCOC(OCCC)COC(=O)CC(C)=O UFQFKHLOJDUSSU-UHFFFAOYSA-N 0.000 description 1
- FKDHPROTDZPUBZ-UHFFFAOYSA-N 2,2-dipropoxyethyl 3-oxobutanoate;yttrium Chemical compound [Y].CCCOC(OCCC)COC(=O)CC(C)=O FKDHPROTDZPUBZ-UHFFFAOYSA-N 0.000 description 1
- HMBHAQMOBKLWRX-UHFFFAOYSA-N 2,3-dihydro-1,4-benzodioxine-3-carboxylic acid Chemical compound C1=CC=C2OC(C(=O)O)COC2=C1 HMBHAQMOBKLWRX-UHFFFAOYSA-N 0.000 description 1
- FEWRHJNMGQIBPK-UHFFFAOYSA-N 2-(cyclohexen-1-yl)ethyl-tri(propan-2-yloxy)silane Chemical compound CC(C)O[Si](OC(C)C)(OC(C)C)CCC1=CCCCC1 FEWRHJNMGQIBPK-UHFFFAOYSA-N 0.000 description 1
- MLXMQBGBMIFRSY-UHFFFAOYSA-N 2-(cyclohexen-1-yl)ethyl-triethoxysilane Chemical compound CCO[Si](OCC)(OCC)CCC1=CCCCC1 MLXMQBGBMIFRSY-UHFFFAOYSA-N 0.000 description 1
- HXSQYLVIFHUAEI-UHFFFAOYSA-N 2-(cyclohexen-1-yl)ethyl-trimethoxysilane Chemical compound CO[Si](OC)(OC)CCC1=CCCCC1 HXSQYLVIFHUAEI-UHFFFAOYSA-N 0.000 description 1
- QUEWFZLDCBHIBL-UHFFFAOYSA-N 2-(cyclohexen-1-yl)ethyl-tripropoxysilane Chemical compound CCCO[Si](OCCC)(OCCC)CCC1=CCCCC1 QUEWFZLDCBHIBL-UHFFFAOYSA-N 0.000 description 1
- HZAXFHJVJLSVMW-UHFFFAOYSA-N 2-Aminoethan-1-ol Chemical compound NCCO HZAXFHJVJLSVMW-UHFFFAOYSA-N 0.000 description 1
- LBLYYCQCTBFVLH-UHFFFAOYSA-N 2-Methylbenzenesulfonic acid Chemical compound CC1=CC=CC=C1S(O)(=O)=O LBLYYCQCTBFVLH-UHFFFAOYSA-N 0.000 description 1
- BSKHPKMHTQYZBB-UHFFFAOYSA-N 2-methylpyridine Chemical compound CC1=CC=CC=N1 BSKHPKMHTQYZBB-UHFFFAOYSA-N 0.000 description 1
- IILARKMORLDWRB-UHFFFAOYSA-N 2-phenylethyl(tripropoxy)silane Chemical compound CCCO[Si](OCCC)(OCCC)CCC1=CC=CC=C1 IILARKMORLDWRB-UHFFFAOYSA-N 0.000 description 1
- WADSJYLPJPTMLN-UHFFFAOYSA-N 3-(cycloundecen-1-yl)-1,2-diazacycloundec-2-ene Chemical compound C1CCCCCCCCC=C1C1=NNCCCCCCCC1 WADSJYLPJPTMLN-UHFFFAOYSA-N 0.000 description 1
- BMYNFMYTOJXKLE-UHFFFAOYSA-N 3-azaniumyl-2-hydroxypropanoate Chemical compound NCC(O)C(O)=O BMYNFMYTOJXKLE-UHFFFAOYSA-N 0.000 description 1
- AVZCDBSGOSIHRC-UHFFFAOYSA-N 3-cyclopenta-2,4-dien-1-ylpropyl(triethoxy)silane Chemical compound CCO[Si](OCC)(OCC)CCCC1C=CC=C1 AVZCDBSGOSIHRC-UHFFFAOYSA-N 0.000 description 1
- RJBMHACAOZWSRH-UHFFFAOYSA-N 3-cyclopenta-2,4-dien-1-ylpropyl(trimethoxy)silane Chemical compound CO[Si](OC)(OC)CCCC1C=CC=C1 RJBMHACAOZWSRH-UHFFFAOYSA-N 0.000 description 1
- HHKDWDAAEFGBAC-UHFFFAOYSA-N 5-bicyclo[2.2.1]hept-2-enyl(triethoxy)silane Chemical compound C1C2C([Si](OCC)(OCC)OCC)CC1C=C2 HHKDWDAAEFGBAC-UHFFFAOYSA-N 0.000 description 1
- HRJSLUPAMXKPPM-UHFFFAOYSA-N 5-methyl-2-(3-methylphenyl)pyrazol-3-amine Chemical compound N1=C(C)C=C(N)N1C1=CC=CC(C)=C1 HRJSLUPAMXKPPM-UHFFFAOYSA-N 0.000 description 1
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 229910018125 Al-Si Inorganic materials 0.000 description 1
- DEVXQDKRGJCZMV-UHFFFAOYSA-K Aluminum acetoacetate Chemical compound [Al+3].CC(=O)CC([O-])=O.CC(=O)CC([O-])=O.CC(=O)CC([O-])=O DEVXQDKRGJCZMV-UHFFFAOYSA-K 0.000 description 1
- 229910018520 Al—Si Inorganic materials 0.000 description 1
- FIPWRIJSWJWJAI-UHFFFAOYSA-N Butyl carbitol 6-propylpiperonyl ether Chemical compound C1=C(CCC)C(COCCOCCOCCCC)=CC2=C1OCO2 FIPWRIJSWJWJAI-UHFFFAOYSA-N 0.000 description 1
- AGDHZKMIELIVMM-UHFFFAOYSA-N C(C)OC([O-])C.[Ge+2].C(C)OC([O-])C Chemical compound C(C)OC([O-])C.[Ge+2].C(C)OC([O-])C AGDHZKMIELIVMM-UHFFFAOYSA-N 0.000 description 1
- XRXOJSFPPFDQKU-UHFFFAOYSA-N C(C)OC([O-])C.[Ti+4].C(C)OC([O-])C.C(C)OC([O-])C.C(C)OC([O-])C Chemical compound C(C)OC([O-])C.[Ti+4].C(C)OC([O-])C.C(C)OC([O-])C.C(C)OC([O-])C XRXOJSFPPFDQKU-UHFFFAOYSA-N 0.000 description 1
- RUOJGXGKGKBUFR-UHFFFAOYSA-J C(CC)OC(C(=O)[O-])(C(=O)C(CC)CC)OCCC.[Hf+4].C(CC)OC(C(=O)[O-])(C(=O)C(CC)CC)OCCC.C(CC)OC(C(=O)[O-])(C(=O)C(CC)CC)OCCC.C(CC)OC(C(=O)[O-])(C(=O)C(CC)CC)OCCC Chemical compound C(CC)OC(C(=O)[O-])(C(=O)C(CC)CC)OCCC.[Hf+4].C(CC)OC(C(=O)[O-])(C(=O)C(CC)CC)OCCC.C(CC)OC(C(=O)[O-])(C(=O)C(CC)CC)OCCC.C(CC)OC(C(=O)[O-])(C(=O)C(CC)CC)OCCC RUOJGXGKGKBUFR-UHFFFAOYSA-J 0.000 description 1
- TTYDDLRUFIHAIJ-UHFFFAOYSA-N C(CC)O[Nb] Chemical compound C(CC)O[Nb] TTYDDLRUFIHAIJ-UHFFFAOYSA-N 0.000 description 1
- SXNWLEDJVHLLCV-UHFFFAOYSA-J C(CCC)OC(C(=O)[O-])(C(=O)C(CC)CC)OCCCC.[Hf+4].C(CCC)OC(C(=O)[O-])(C(=O)C(CC)CC)OCCCC.C(CCC)OC(C(=O)[O-])(C(=O)C(CC)CC)OCCCC.C(CCC)OC(C(=O)[O-])(C(=O)C(CC)CC)OCCCC Chemical compound C(CCC)OC(C(=O)[O-])(C(=O)C(CC)CC)OCCCC.[Hf+4].C(CCC)OC(C(=O)[O-])(C(=O)C(CC)CC)OCCCC.C(CCC)OC(C(=O)[O-])(C(=O)C(CC)CC)OCCCC.C(CCC)OC(C(=O)[O-])(C(=O)C(CC)CC)OCCCC SXNWLEDJVHLLCV-UHFFFAOYSA-J 0.000 description 1
- RWKWKKRCEHESNL-UHFFFAOYSA-N C(CCCC)OCCCCC.[Ge] Chemical compound C(CCCC)OCCCCC.[Ge] RWKWKKRCEHESNL-UHFFFAOYSA-N 0.000 description 1
- YGEOTTQAEXRAHW-UHFFFAOYSA-N C(CCCC)OCCCCC.[Hf] Chemical compound C(CCCC)OCCCCC.[Hf] YGEOTTQAEXRAHW-UHFFFAOYSA-N 0.000 description 1
- SLUKMKGBVRCXPF-UHFFFAOYSA-N C1(C=CC=C1)CCC[SiH](OC(C)C)OC(C)C Chemical compound C1(C=CC=C1)CCC[SiH](OC(C)C)OC(C)C SLUKMKGBVRCXPF-UHFFFAOYSA-N 0.000 description 1
- HLDAFUAKBBDUGQ-UHFFFAOYSA-N C1(C=CC=C1)CCC[Si](OC(C)C)(OC(C)C)OC(C)C Chemical compound C1(C=CC=C1)CCC[Si](OC(C)C)(OC(C)C)OC(C)C HLDAFUAKBBDUGQ-UHFFFAOYSA-N 0.000 description 1
- JWWOMOLAWHUFHR-UHFFFAOYSA-N C1(C=CC=C1)CCC[Si](OCCC)(OCCC)OCCC Chemical compound C1(C=CC=C1)CCC[Si](OCCC)(OCCC)OCCC JWWOMOLAWHUFHR-UHFFFAOYSA-N 0.000 description 1
- DGNRPPARWAUISQ-UHFFFAOYSA-N C1(CC1)[SiH](OCCC)OCCC Chemical compound C1(CC1)[SiH](OCCC)OCCC DGNRPPARWAUISQ-UHFFFAOYSA-N 0.000 description 1
- PMCGGXSVIIECGJ-UHFFFAOYSA-N CC(C)O[SiH2]OC(C)C.C1CCC=C(CC1)C1=CCCCCC1.C1CCC=C(CC1)C1=CCCCCC1 Chemical compound CC(C)O[SiH2]OC(C)C.C1CCC=C(CC1)C1=CCCCCC1.C1CCC=C(CC1)C1=CCCCCC1 PMCGGXSVIIECGJ-UHFFFAOYSA-N 0.000 description 1
- RYBOKNMXUZHPCC-UHFFFAOYSA-N CC(C)O[SiH2]OC(C)C.C1CCCC(CC1)C1CCCCCC1.C1CCCC(CC1)C1CCCCCC1 Chemical compound CC(C)O[SiH2]OC(C)C.C1CCCC(CC1)C1CCCCCC1.C1CCCC(CC1)C1CCCCCC1 RYBOKNMXUZHPCC-UHFFFAOYSA-N 0.000 description 1
- NIDDALIDHRPGRQ-UHFFFAOYSA-N CCCCO[As] Chemical compound CCCCO[As] NIDDALIDHRPGRQ-UHFFFAOYSA-N 0.000 description 1
- QLZQOSLRZMTCRA-UHFFFAOYSA-N CCCCO[Bi] Chemical compound CCCCO[Bi] QLZQOSLRZMTCRA-UHFFFAOYSA-N 0.000 description 1
- CXLATMDDROQJAI-UHFFFAOYSA-N CCCCO[Nb] Chemical compound CCCCO[Nb] CXLATMDDROQJAI-UHFFFAOYSA-N 0.000 description 1
- YQEVIZPKEOELNL-UHFFFAOYSA-N CCCCO[Zr] Chemical compound CCCCO[Zr] YQEVIZPKEOELNL-UHFFFAOYSA-N 0.000 description 1
- YXZGROCVKZSUAG-UHFFFAOYSA-N CCCO[As] Chemical compound CCCO[As] YXZGROCVKZSUAG-UHFFFAOYSA-N 0.000 description 1
- DYASSRLBQILNPO-UHFFFAOYSA-N CCCO[SiH2]OCCC.C1CCC=C(CC1)C1=CCCCCC1.C1CCC=C(CC1)C1=CCCCCC1 Chemical compound CCCO[SiH2]OCCC.C1CCC=C(CC1)C1=CCCCCC1.C1CCC=C(CC1)C1=CCCCCC1 DYASSRLBQILNPO-UHFFFAOYSA-N 0.000 description 1
- POMIRUBDTVIJBH-UHFFFAOYSA-N CCCO[SiH2]OCCC.C1CCCC(CC1)C1CCCCCC1.C1CCCC(CC1)C1CCCCCC1 Chemical compound CCCO[SiH2]OCCC.C1CCCC(CC1)C1CCCCCC1.C1CCCC(CC1)C1CCCCCC1 POMIRUBDTVIJBH-UHFFFAOYSA-N 0.000 description 1
- POWLNZLBDWXMTR-UHFFFAOYSA-N CCCO[Sn] Chemical compound CCCO[Sn] POWLNZLBDWXMTR-UHFFFAOYSA-N 0.000 description 1
- GWYDZVYZTDJZQB-UHFFFAOYSA-N CCCO[Zr] Chemical compound CCCO[Zr] GWYDZVYZTDJZQB-UHFFFAOYSA-N 0.000 description 1
- CWQBKGXWSRADMS-UHFFFAOYSA-N CCO[Nb] Chemical compound CCO[Nb] CWQBKGXWSRADMS-UHFFFAOYSA-N 0.000 description 1
- MPNBIQIMQQOUTJ-UHFFFAOYSA-N CCO[SiH2]OCC.C1CCC=C(CC1)C1=CCCCCC1.C1CCC=C(CC1)C1=CCCCCC1 Chemical compound CCO[SiH2]OCC.C1CCC=C(CC1)C1=CCCCCC1.C1CCC=C(CC1)C1=CCCCCC1 MPNBIQIMQQOUTJ-UHFFFAOYSA-N 0.000 description 1
- DSUNKLRZKQXDCZ-UHFFFAOYSA-N CCO[SiH2]OCC.C1CCCC(CC1)C1CCCCCC1.C1CCCC(CC1)C1CCCCCC1 Chemical compound CCO[SiH2]OCC.C1CCCC(CC1)C1CCCCCC1.C1CCCC(CC1)C1CCCCCC1 DSUNKLRZKQXDCZ-UHFFFAOYSA-N 0.000 description 1
- SFAMGCXGKVMOHI-UHFFFAOYSA-N CCO[Zr] Chemical compound CCO[Zr] SFAMGCXGKVMOHI-UHFFFAOYSA-N 0.000 description 1
- JCUGQEOXNVXQFJ-UHFFFAOYSA-N COC([O-])C.[Ge+2].COC([O-])C Chemical compound COC([O-])C.[Ge+2].COC([O-])C JCUGQEOXNVXQFJ-UHFFFAOYSA-N 0.000 description 1
- GSPAYKGJWZHXMX-UHFFFAOYSA-N COC([O-])C.[Hf+4].COC([O-])C.COC([O-])C.COC([O-])C Chemical compound COC([O-])C.[Hf+4].COC([O-])C.COC([O-])C.COC([O-])C GSPAYKGJWZHXMX-UHFFFAOYSA-N 0.000 description 1
- GIAZZNVBUAVULU-UHFFFAOYSA-N CO[Nb] Chemical compound CO[Nb] GIAZZNVBUAVULU-UHFFFAOYSA-N 0.000 description 1
- QNBQBLHJONLQLE-UHFFFAOYSA-N CO[SiH2]OC.C1CCC=C(CC1)C1=CCCCCC1.C1CCC=C(CC1)C1=CCCCCC1 Chemical compound CO[SiH2]OC.C1CCC=C(CC1)C1=CCCCCC1.C1CCC=C(CC1)C1=CCCCCC1 QNBQBLHJONLQLE-UHFFFAOYSA-N 0.000 description 1
- DRDOPWYXMQIUSW-UHFFFAOYSA-N CO[SiH2]OC.C1CCCC(CC1)C1CCCCCC1.C1CCCC(CC1)C1CCCCCC1 Chemical compound CO[SiH2]OC.C1CCCC(CC1)C1CCCCCC1.C1CCCC(CC1)C1CCCCCC1 DRDOPWYXMQIUSW-UHFFFAOYSA-N 0.000 description 1
- HJPIBCYETOGAPH-UHFFFAOYSA-N CO[Zr] Chemical compound CO[Zr] HJPIBCYETOGAPH-UHFFFAOYSA-N 0.000 description 1
- VGGRYGMJQLYNCE-UHFFFAOYSA-N C[SiH](C)OCCCC1=CC=CC=C1 Chemical compound C[SiH](C)OCCCC1=CC=CC=C1 VGGRYGMJQLYNCE-UHFFFAOYSA-N 0.000 description 1
- 229910004261 CaF 2 Inorganic materials 0.000 description 1
- 206010010071 Coma Diseases 0.000 description 1
- XBPCUCUWBYBCDP-UHFFFAOYSA-N Dicyclohexylamine Chemical compound C1CCCCC1NC1CCCCC1 XBPCUCUWBYBCDP-UHFFFAOYSA-N 0.000 description 1
- LCGLNKUTAGEVQW-UHFFFAOYSA-N Dimethyl ether Chemical compound COC LCGLNKUTAGEVQW-UHFFFAOYSA-N 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- IAYPIBMASNFSPL-UHFFFAOYSA-N Ethylene oxide Chemical compound C1CO1 IAYPIBMASNFSPL-UHFFFAOYSA-N 0.000 description 1
- PIICEJLVQHRZGT-UHFFFAOYSA-N Ethylenediamine Chemical compound NCCN PIICEJLVQHRZGT-UHFFFAOYSA-N 0.000 description 1
- 101000692259 Homo sapiens Phosphoprotein associated with glycosphingolipid-enriched microdomains 1 Proteins 0.000 description 1
- UEEJHVSXFDXPFK-UHFFFAOYSA-N N-dimethylaminoethanol Chemical compound CN(C)CCO UEEJHVSXFDXPFK-UHFFFAOYSA-N 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 102100026066 Phosphoprotein associated with glycosphingolipid-enriched microdomains 1 Human genes 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- GOOHAUXETOMSMM-UHFFFAOYSA-N Propylene oxide Chemical compound CC1CO1 GOOHAUXETOMSMM-UHFFFAOYSA-N 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 101000987219 Sus scrofa Pregnancy-associated glycoprotein 1 Proteins 0.000 description 1
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 description 1
- 229910008938 W—Si Inorganic materials 0.000 description 1
- OXMKQIVTFWEMRJ-UHFFFAOYSA-N [B+3].CCCC[O-].CCCC[O-].CCCC[O-] Chemical compound [B+3].CCCC[O-].CCCC[O-].CCCC[O-] OXMKQIVTFWEMRJ-UHFFFAOYSA-N 0.000 description 1
- HFRDIOLOKCMOCE-UHFFFAOYSA-K [B+3].[O-]C1=CC=CC=C1.[O-]C1=CC=CC=C1.[O-]C1=CC=CC=C1 Chemical compound [B+3].[O-]C1=CC=CC=C1.[O-]C1=CC=CC=C1.[O-]C1=CC=CC=C1 HFRDIOLOKCMOCE-UHFFFAOYSA-K 0.000 description 1
- XVUDBSAOAVIAMO-UHFFFAOYSA-N [B].CCCCCOCCCCC Chemical compound [B].CCCCCOCCCCC XVUDBSAOAVIAMO-UHFFFAOYSA-N 0.000 description 1
- CNNYQGIUGXJEJJ-UHFFFAOYSA-N [Ge+2].C[O-].C[O-] Chemical compound [Ge+2].C[O-].C[O-] CNNYQGIUGXJEJJ-UHFFFAOYSA-N 0.000 description 1
- QFBYBEDCELVEAJ-UHFFFAOYSA-L [Ge+2].[O-]C1=CC=CC=C1.[O-]C1=CC=CC=C1 Chemical compound [Ge+2].[O-]C1=CC=CC=C1.[O-]C1=CC=CC=C1 QFBYBEDCELVEAJ-UHFFFAOYSA-L 0.000 description 1
- NYLCNGGPDSDGAT-UHFFFAOYSA-M [Nb]Oc1ccccc1 Chemical compound [Nb]Oc1ccccc1 NYLCNGGPDSDGAT-UHFFFAOYSA-M 0.000 description 1
- ZMYZKNHXZLWPEB-UHFFFAOYSA-N [O--].[O--].[O--].[O--].[O--].[O--].[Ti+4].[Ti+4].[Ti+4] Chemical compound [O--].[O--].[O--].[O--].[O--].[O--].[Ti+4].[Ti+4].[Ti+4] ZMYZKNHXZLWPEB-UHFFFAOYSA-N 0.000 description 1
- WLZJIQDPYBPISH-UHFFFAOYSA-N [O-2].[O-2].[O-2].[O-2].[O-2].[O-2].[Hf+4].[Hf+4].[Hf+4] Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[O-2].[Hf+4].[Hf+4].[Hf+4] WLZJIQDPYBPISH-UHFFFAOYSA-N 0.000 description 1
- ZKOJILGDAIBQJI-UHFFFAOYSA-N [O-2].[O-2].[O-2].[O-2].[O-2].[O-2].[Y+3].[Y+3].[Y+3].[Y+3] Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[O-2].[Y+3].[Y+3].[Y+3].[Y+3] ZKOJILGDAIBQJI-UHFFFAOYSA-N 0.000 description 1
- XHCLAFWTIXFWPH-UHFFFAOYSA-N [O-2].[O-2].[O-2].[O-2].[O-2].[V+5].[V+5] Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[V+5].[V+5] XHCLAFWTIXFWPH-UHFFFAOYSA-N 0.000 description 1
- QUEDYRXQWSDKKG-UHFFFAOYSA-M [O-2].[O-2].[V+5].[OH-] Chemical compound [O-2].[O-2].[V+5].[OH-] QUEDYRXQWSDKKG-UHFFFAOYSA-M 0.000 description 1
- FRICJWHSKNRMRI-UHFFFAOYSA-N [O-]CCC.[Ge+2].[O-]CCC Chemical compound [O-]CCC.[Ge+2].[O-]CCC FRICJWHSKNRMRI-UHFFFAOYSA-N 0.000 description 1
- PUZPSEGLMUDFOY-UHFFFAOYSA-N [O-]CCCC.[Ge+2].[O-]CCCC Chemical compound [O-]CCCC.[Ge+2].[O-]CCCC PUZPSEGLMUDFOY-UHFFFAOYSA-N 0.000 description 1
- QYIBXNARBGCCNX-UHFFFAOYSA-N [V+3].CCCC[O-].CCCC[O-].CCCC[O-] Chemical compound [V+3].CCCC[O-].CCCC[O-].CCCC[O-] QYIBXNARBGCCNX-UHFFFAOYSA-N 0.000 description 1
- YOBBVVOZJQVABN-UHFFFAOYSA-K [Y+3].CC(=O)CC([O-])=O.CC(=O)CC([O-])=O.CC(=O)CC([O-])=O Chemical compound [Y+3].CC(=O)CC([O-])=O.CC(=O)CC([O-])=O.CC(=O)CC([O-])=O YOBBVVOZJQVABN-UHFFFAOYSA-K 0.000 description 1
- RNXCVEJDFWAVFE-UHFFFAOYSA-N [Y+3].CCOC(C)[O-].CCOC(C)[O-].CCOC(C)[O-] Chemical compound [Y+3].CCOC(C)[O-].CCOC(C)[O-].CCOC(C)[O-] RNXCVEJDFWAVFE-UHFFFAOYSA-N 0.000 description 1
- JDOPTLDATIMJDC-UHFFFAOYSA-N [Zr+2].CCC[O-].CCC[O-] Chemical compound [Zr+2].CCC[O-].CCC[O-] JDOPTLDATIMJDC-UHFFFAOYSA-N 0.000 description 1
- XULVCGCFBVVYIA-UHFFFAOYSA-M [Zr]Oc1ccccc1 Chemical compound [Zr]Oc1ccccc1 XULVCGCFBVVYIA-UHFFFAOYSA-M 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 125000002723 alicyclic group Chemical group 0.000 description 1
- 125000001931 aliphatic group Chemical group 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- JPUHCPXFQIXLMW-UHFFFAOYSA-N aluminium triethoxide Chemical compound CCO[Al](OCC)OCC JPUHCPXFQIXLMW-UHFFFAOYSA-N 0.000 description 1
- AAXXDQSJBBUYAB-UHFFFAOYSA-N aluminum 1-ethoxyethanolate Chemical compound [Al+3].CCOC(C)[O-].CCOC(C)[O-].CCOC(C)[O-] AAXXDQSJBBUYAB-UHFFFAOYSA-N 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 150000008064 anhydrides Chemical class 0.000 description 1
- 150000001450 anions Chemical group 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 239000011260 aqueous acid Substances 0.000 description 1
- RQPZNWPYLFFXCP-UHFFFAOYSA-L barium dihydroxide Chemical compound [OH-].[OH-].[Ba+2] RQPZNWPYLFFXCP-UHFFFAOYSA-L 0.000 description 1
- 229910001863 barium hydroxide Inorganic materials 0.000 description 1
- SRSXLGNVWSONIS-UHFFFAOYSA-N benzenesulfonic acid Chemical compound OS(=O)(=O)C1=CC=CC=C1 SRSXLGNVWSONIS-UHFFFAOYSA-N 0.000 description 1
- 229940092714 benzenesulfonic acid Drugs 0.000 description 1
- CPLASELWOOUNGW-UHFFFAOYSA-N benzyl(triethoxy)silane Chemical compound CCO[Si](OCC)(OCC)CC1=CC=CC=C1 CPLASELWOOUNGW-UHFFFAOYSA-N 0.000 description 1
- GQVVQDJHRQBZNG-UHFFFAOYSA-N benzyl(trimethoxy)silane Chemical compound CO[Si](OC)(OC)CC1=CC=CC=C1 GQVVQDJHRQBZNG-UHFFFAOYSA-N 0.000 description 1
- KGHAWANAXTWFBP-UHFFFAOYSA-N benzyl(tripropoxy)silane Chemical compound CCCO[Si](OCCC)(OCCC)CC1=CC=CC=C1 KGHAWANAXTWFBP-UHFFFAOYSA-N 0.000 description 1
- SBJRJOGHMYNSCQ-UHFFFAOYSA-N benzyl-tri(propan-2-yloxy)silane Chemical compound CC(C)O[Si](OC(C)C)(OC(C)C)CC1=CC=CC=C1 SBJRJOGHMYNSCQ-UHFFFAOYSA-N 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 description 1
- 239000004327 boric acid Substances 0.000 description 1
- 229910052810 boron oxide Inorganic materials 0.000 description 1
- UDJBGDKOPXLQJA-UHFFFAOYSA-N boron;cyclohexyloxycyclohexane Chemical compound [B].C1CCCCC1OC1CCCCC1 UDJBGDKOPXLQJA-UHFFFAOYSA-N 0.000 description 1
- 150000001642 boronic acid derivatives Chemical class 0.000 description 1
- 239000005380 borophosphosilicate glass Substances 0.000 description 1
- CKEGKURXFKLBDX-UHFFFAOYSA-N butan-1-ol;hafnium Chemical compound [Hf].CCCCO.CCCCO.CCCCO.CCCCO CKEGKURXFKLBDX-UHFFFAOYSA-N 0.000 description 1
- DFOMPYFFBAELGP-UHFFFAOYSA-N butan-1-ol;yttrium Chemical compound [Y].CCCCO.CCCCO.CCCCO DFOMPYFFBAELGP-UHFFFAOYSA-N 0.000 description 1
- YHWCPXVTRSHPNY-UHFFFAOYSA-N butan-1-olate;titanium(4+) Chemical compound [Ti+4].CCCC[O-].CCCC[O-].CCCC[O-].CCCC[O-] YHWCPXVTRSHPNY-UHFFFAOYSA-N 0.000 description 1
- LQJIYGHLYACICO-UHFFFAOYSA-N butan-2-yl(triethoxy)silane Chemical compound CCO[Si](OCC)(OCC)C(C)CC LQJIYGHLYACICO-UHFFFAOYSA-N 0.000 description 1
- AMSAPKJTBARTTR-UHFFFAOYSA-N butan-2-yl(trimethoxy)silane Chemical compound CCC(C)[Si](OC)(OC)OC AMSAPKJTBARTTR-UHFFFAOYSA-N 0.000 description 1
- DNYVMXJXGNLANE-UHFFFAOYSA-N butan-2-yl(tripropoxy)silane Chemical compound CCCO[Si](OCCC)(OCCC)C(C)CC DNYVMXJXGNLANE-UHFFFAOYSA-N 0.000 description 1
- TWWATCWHACTGNY-UHFFFAOYSA-N butan-2-yl-tri(propan-2-yloxy)silane Chemical compound CCC(C)[Si](OC(C)C)(OC(C)C)OC(C)C TWWATCWHACTGNY-UHFFFAOYSA-N 0.000 description 1
- CDQSJQSWAWPGKG-UHFFFAOYSA-N butane-1,1-diol Chemical compound CCCC(O)O CDQSJQSWAWPGKG-UHFFFAOYSA-N 0.000 description 1
- 125000004106 butoxy group Chemical group [*]OC([H])([H])C([H])([H])C(C([H])([H])[H])([H])[H] 0.000 description 1
- BJVKGSNLIFBPMO-UHFFFAOYSA-N butoxyantimony Chemical compound CCCCO[Sb] BJVKGSNLIFBPMO-UHFFFAOYSA-N 0.000 description 1
- DOBSQSLSWMMIEM-UHFFFAOYSA-N butoxytin Chemical compound CCCCO[Sn] DOBSQSLSWMMIEM-UHFFFAOYSA-N 0.000 description 1
- XGZGKDQVCBHSGI-UHFFFAOYSA-N butyl(triethoxy)silane Chemical compound CCCC[Si](OCC)(OCC)OCC XGZGKDQVCBHSGI-UHFFFAOYSA-N 0.000 description 1
- SXPLZNMUBFBFIA-UHFFFAOYSA-N butyl(trimethoxy)silane Chemical compound CCCC[Si](OC)(OC)OC SXPLZNMUBFBFIA-UHFFFAOYSA-N 0.000 description 1
- GNRBSDIBKIHSJH-UHFFFAOYSA-N butyl(tripropoxy)silane Chemical compound CCCC[Si](OCCC)(OCCC)OCCC GNRBSDIBKIHSJH-UHFFFAOYSA-N 0.000 description 1
- OOWHVJAPAMPBEX-UHFFFAOYSA-N butyl-tri(propan-2-yloxy)silane Chemical compound CCCC[Si](OC(C)C)(OC(C)C)OC(C)C OOWHVJAPAMPBEX-UHFFFAOYSA-N 0.000 description 1
- AXCZMVOFGPJBDE-UHFFFAOYSA-L calcium dihydroxide Chemical compound [OH-].[OH-].[Ca+2] AXCZMVOFGPJBDE-UHFFFAOYSA-L 0.000 description 1
- 239000000920 calcium hydroxide Substances 0.000 description 1
- 229910001861 calcium hydroxide Inorganic materials 0.000 description 1
- 125000002091 cationic group Chemical group 0.000 description 1
- 150000001768 cations Chemical group 0.000 description 1
- 239000007810 chemical reaction solvent Substances 0.000 description 1
- 229940075419 choline hydroxide Drugs 0.000 description 1
- 238000004587 chromatography analysis Methods 0.000 description 1
- 150000001925 cycloalkenes Chemical class 0.000 description 1
- ZDAHXLJSCWTZSQ-UHFFFAOYSA-N cyclobutyl(triethoxy)silane Chemical compound CCO[Si](OCC)(OCC)C1CCC1 ZDAHXLJSCWTZSQ-UHFFFAOYSA-N 0.000 description 1
- CCRJEJIPEOBMFG-UHFFFAOYSA-N cyclobutyl(trimethoxy)silane Chemical compound CO[Si](OC)(OC)C1CCC1 CCRJEJIPEOBMFG-UHFFFAOYSA-N 0.000 description 1
- UNXDKLTYXUQGSO-UHFFFAOYSA-N cyclobutyl(tripropoxy)silane Chemical compound CCCO[Si](OCCC)(OCCC)C1CCC1 UNXDKLTYXUQGSO-UHFFFAOYSA-N 0.000 description 1
- VZNWNVAEUAWHSO-UHFFFAOYSA-N cyclohexen-1-yl(triethoxy)silane Chemical compound CCO[Si](OCC)(OCC)C1=CCCCC1 VZNWNVAEUAWHSO-UHFFFAOYSA-N 0.000 description 1
- MIZPLDZQVGUDMR-UHFFFAOYSA-N cyclohexen-1-yl(trimethoxy)silane Chemical compound CO[Si](OC)(OC)C1=CCCCC1 MIZPLDZQVGUDMR-UHFFFAOYSA-N 0.000 description 1
- PPEZMSQHYPCVQF-UHFFFAOYSA-N cyclohexen-1-yl(tripropoxy)silane Chemical compound CCCO[Si](OCCC)(OCCC)C1=CCCCC1 PPEZMSQHYPCVQF-UHFFFAOYSA-N 0.000 description 1
- NBBOMIYNYXXQNB-UHFFFAOYSA-N cyclohexen-1-yl-tri(propan-2-yloxy)silane Chemical compound CC(C)O[Si](OC(C)C)(OC(C)C)C1=CCCCC1 NBBOMIYNYXXQNB-UHFFFAOYSA-N 0.000 description 1
- ATGKAFZFOALBOF-UHFFFAOYSA-N cyclohexyl(triethoxy)silane Chemical compound CCO[Si](OCC)(OCC)C1CCCCC1 ATGKAFZFOALBOF-UHFFFAOYSA-N 0.000 description 1
- MEWFSXFFGFDHGV-UHFFFAOYSA-N cyclohexyl(trimethoxy)silane Chemical compound CO[Si](OC)(OC)C1CCCCC1 MEWFSXFFGFDHGV-UHFFFAOYSA-N 0.000 description 1
- OWTZOBMYFOECIQ-UHFFFAOYSA-N cyclohexyl(tripropoxy)silane Chemical compound CCCO[Si](OCCC)(OCCC)C1CCCCC1 OWTZOBMYFOECIQ-UHFFFAOYSA-N 0.000 description 1
- INSXTGYCCLLLAJ-UHFFFAOYSA-N cyclohexyl-tri(propan-2-yloxy)silane Chemical compound CC(C)O[Si](OC(C)C)(OC(C)C)C1CCCCC1 INSXTGYCCLLLAJ-UHFFFAOYSA-N 0.000 description 1
- 125000002933 cyclohexyloxy group Chemical group C1(CCCCC1)O* 0.000 description 1
- OCDXZFSOHJRGIL-UHFFFAOYSA-N cyclohexyloxycyclohexane Chemical compound C1CCCCC1OC1CCCCC1 OCDXZFSOHJRGIL-UHFFFAOYSA-N 0.000 description 1
- SQNHRXQHIQQDGS-UHFFFAOYSA-N cyclohexyloxycyclohexane;germanium Chemical compound [Ge].C1CCCCC1OC1CCCCC1 SQNHRXQHIQQDGS-UHFFFAOYSA-N 0.000 description 1
- HYDSXWCJQHRYFK-UHFFFAOYSA-N cyclohexyloxycyclohexane;hafnium Chemical compound [Hf].C1CCCCC1OC1CCCCC1 HYDSXWCJQHRYFK-UHFFFAOYSA-N 0.000 description 1
- FJFKIPQEUBVHPU-UHFFFAOYSA-N cyclohexyloxycyclohexane;titanium Chemical compound [Ti].C1CCCCC1OC1CCCCC1 FJFKIPQEUBVHPU-UHFFFAOYSA-N 0.000 description 1
- XFNFKPXLEHXAKO-UHFFFAOYSA-N cyclohexyloxycyclohexane;yttrium Chemical compound [Y].C1CCCCC1OC1CCCCC1 XFNFKPXLEHXAKO-UHFFFAOYSA-N 0.000 description 1
- YHBLFIGZJGXPEZ-UHFFFAOYSA-N cyclooctyl(triethoxy)silane Chemical compound CCO[Si](OCC)(OCC)C1CCCCCCC1 YHBLFIGZJGXPEZ-UHFFFAOYSA-N 0.000 description 1
- AQSVOHKIXIEQIK-UHFFFAOYSA-N cyclooctyl(trimethoxy)silane Chemical compound CO[Si](OC)(OC)C1CCCCCCC1 AQSVOHKIXIEQIK-UHFFFAOYSA-N 0.000 description 1
- KIMSOWDBJDLHIT-UHFFFAOYSA-N cyclooctyl(tripropoxy)silane Chemical compound CCCO[Si](OCCC)(OCCC)C1CCCCCCC1 KIMSOWDBJDLHIT-UHFFFAOYSA-N 0.000 description 1
- SMVMIYKGGFDRJX-UHFFFAOYSA-N cyclooctyl-tri(propan-2-yloxy)silane Chemical compound CC(C)O[Si](OC(C)C)(OC(C)C)C1CCCCCCC1 SMVMIYKGGFDRJX-UHFFFAOYSA-N 0.000 description 1
- XOVJAYNMQDTIJD-UHFFFAOYSA-N cyclopentobarbital Chemical compound C1CC=CC1C1(CC=C)C(=O)NC(=O)NC1=O XOVJAYNMQDTIJD-UHFFFAOYSA-N 0.000 description 1
- MGGAITMRMJXXMT-UHFFFAOYSA-N cyclopentyl(triethoxy)silane Chemical compound CCO[Si](OCC)(OCC)C1CCCC1 MGGAITMRMJXXMT-UHFFFAOYSA-N 0.000 description 1
- YRMPTIHEUZLTDO-UHFFFAOYSA-N cyclopentyl(trimethoxy)silane Chemical compound CO[Si](OC)(OC)C1CCCC1 YRMPTIHEUZLTDO-UHFFFAOYSA-N 0.000 description 1
- WTLFDDHWPXQUJA-UHFFFAOYSA-N cyclopentyl(tripropoxy)silane Chemical compound CCCO[Si](OCCC)(OCCC)C1CCCC1 WTLFDDHWPXQUJA-UHFFFAOYSA-N 0.000 description 1
- XBAHPWBMWKWZHA-UHFFFAOYSA-N cyclopentyl-tri(propan-2-yloxy)silane Chemical compound CC(C)O[Si](OC(C)C)(OC(C)C)C1CCCC1 XBAHPWBMWKWZHA-UHFFFAOYSA-N 0.000 description 1
- 125000001887 cyclopentyloxy group Chemical group C1(CCCC1)O* 0.000 description 1
- PROCFPHHUVOPIT-UHFFFAOYSA-N cyclopropyl(triethoxy)silane Chemical compound CCO[Si](OCC)(OCC)C1CC1 PROCFPHHUVOPIT-UHFFFAOYSA-N 0.000 description 1
- FWCBQAXNMWDAFK-UHFFFAOYSA-N cyclopropyl(trimethoxy)silane Chemical compound CO[Si](OC)(OC)C1CC1 FWCBQAXNMWDAFK-UHFFFAOYSA-N 0.000 description 1
- VEZLGDIZAYOBII-UHFFFAOYSA-N cyclopropyl(tripropoxy)silane Chemical compound CCCO[Si](OCCC)(OCCC)C1CC1 VEZLGDIZAYOBII-UHFFFAOYSA-N 0.000 description 1
- AMNIDILVZMEABP-UHFFFAOYSA-N cyclopropyl-tri(propan-2-yloxy)silane Chemical compound CC(C)O[Si](OC(C)C)(OC(C)C)C1CC1 AMNIDILVZMEABP-UHFFFAOYSA-N 0.000 description 1
- SNEGIHORRGJSED-UHFFFAOYSA-N di(butan-2-yl)-di(propan-2-yloxy)silane Chemical compound CCC(C)[Si](OC(C)C)(OC(C)C)C(C)CC SNEGIHORRGJSED-UHFFFAOYSA-N 0.000 description 1
- VSLASQQLPGVYSK-UHFFFAOYSA-N di(butan-2-yl)-diethoxysilane Chemical compound CCO[Si](OCC)(C(C)CC)C(C)CC VSLASQQLPGVYSK-UHFFFAOYSA-N 0.000 description 1
- HVHRIKGOFGJBFM-UHFFFAOYSA-N di(butan-2-yl)-dimethoxysilane Chemical compound CCC(C)[Si](OC)(OC)C(C)CC HVHRIKGOFGJBFM-UHFFFAOYSA-N 0.000 description 1
- LAGUJICBGGFHSR-UHFFFAOYSA-N di(butan-2-yl)-dipropoxysilane Chemical compound CCCO[Si](C(C)CC)(C(C)CC)OCCC LAGUJICBGGFHSR-UHFFFAOYSA-N 0.000 description 1
- CUZXOUPGUAZNDT-UHFFFAOYSA-N di(cyclobutyl)-di(propan-2-yloxy)silane Chemical compound C1CCC1[Si](OC(C)C)(OC(C)C)C1CCC1 CUZXOUPGUAZNDT-UHFFFAOYSA-N 0.000 description 1
- IHUIEBZUNDVFFW-UHFFFAOYSA-N di(cyclobutyl)-diethoxysilane Chemical compound C1CCC1[Si](OCC)(OCC)C1CCC1 IHUIEBZUNDVFFW-UHFFFAOYSA-N 0.000 description 1
- IZYWPGNHVHQGAG-UHFFFAOYSA-N di(cyclobutyl)-dimethoxysilane Chemical compound C1CCC1[Si](OC)(OC)C1CCC1 IZYWPGNHVHQGAG-UHFFFAOYSA-N 0.000 description 1
- TZBKGPBJAJPEEY-UHFFFAOYSA-N di(cyclobutyl)-dipropoxysilane Chemical compound C1CCC1[Si](OCCC)(OCCC)C1CCC1 TZBKGPBJAJPEEY-UHFFFAOYSA-N 0.000 description 1
- XTAWVQKUWKBXKT-UHFFFAOYSA-N di(cyclooctyl)-di(propan-2-yloxy)silane Chemical compound C1CCCCCCC1[Si](OC(C)C)(OC(C)C)C1CCCCCCC1 XTAWVQKUWKBXKT-UHFFFAOYSA-N 0.000 description 1
- NDSVNQADHJTDGA-UHFFFAOYSA-N di(cyclooctyl)-dimethoxysilane Chemical compound C1CCCCCCC1[Si](OC)(OC)C1CCCCCCC1 NDSVNQADHJTDGA-UHFFFAOYSA-N 0.000 description 1
- YIAZAYXLZQZTBX-UHFFFAOYSA-N di(cyclooctyl)-dipropoxysilane Chemical compound C1CCCCCCC1[Si](OCCC)(OCCC)C1CCCCCCC1 YIAZAYXLZQZTBX-UHFFFAOYSA-N 0.000 description 1
- LLBLHAHQBJSHED-UHFFFAOYSA-N di(propan-2-yl)-dipropoxysilane Chemical compound CCCO[Si](C(C)C)(C(C)C)OCCC LLBLHAHQBJSHED-UHFFFAOYSA-N 0.000 description 1
- SHZPQCKUFYRFBI-UHFFFAOYSA-N di(propan-2-yloxy)-dipropylsilane Chemical compound CCC[Si](CCC)(OC(C)C)OC(C)C SHZPQCKUFYRFBI-UHFFFAOYSA-N 0.000 description 1
- XUPOZSRKIBXQCQ-UHFFFAOYSA-K di(propanoyloxy)stibanyl propanoate Chemical compound [Sb+3].CCC([O-])=O.CCC([O-])=O.CCC([O-])=O XUPOZSRKIBXQCQ-UHFFFAOYSA-K 0.000 description 1
- JVLRYPRBKSMEBF-UHFFFAOYSA-K diacetyloxystibanyl acetate Chemical compound [Sb+3].CC([O-])=O.CC([O-])=O.CC([O-])=O JVLRYPRBKSMEBF-UHFFFAOYSA-K 0.000 description 1
- 239000012973 diazabicyclooctane Substances 0.000 description 1
- JKWMSGQKBLHBQQ-UHFFFAOYSA-N diboron trioxide Chemical compound O=BOB=O JKWMSGQKBLHBQQ-UHFFFAOYSA-N 0.000 description 1
- DGPFXVBYDAVXLX-UHFFFAOYSA-N dibutyl(diethoxy)silane Chemical compound CCCC[Si](OCC)(OCC)CCCC DGPFXVBYDAVXLX-UHFFFAOYSA-N 0.000 description 1
- YPENMAABQGWRBR-UHFFFAOYSA-N dibutyl(dimethoxy)silane Chemical compound CCCC[Si](OC)(OC)CCCC YPENMAABQGWRBR-UHFFFAOYSA-N 0.000 description 1
- CGYGEZLIGMBRKL-UHFFFAOYSA-N dicyclohexyl(diethoxy)silane Chemical compound C1CCCCC1[Si](OCC)(OCC)C1CCCCC1 CGYGEZLIGMBRKL-UHFFFAOYSA-N 0.000 description 1
- XDDJJEBKCSSOLY-UHFFFAOYSA-N dicyclohexyl(dipropoxy)silane Chemical compound C1CCCCC1[Si](OCCC)(OCCC)C1CCCCC1 XDDJJEBKCSSOLY-UHFFFAOYSA-N 0.000 description 1
- ZFFHLHOYJTZOIP-UHFFFAOYSA-N dicyclohexyl-di(propan-2-yloxy)silane Chemical compound C1CCCCC1[Si](OC(C)C)(OC(C)C)C1CCCCC1 ZFFHLHOYJTZOIP-UHFFFAOYSA-N 0.000 description 1
- FVAXOELGJXMINU-UHFFFAOYSA-N dicyclopentyl(diethoxy)silane Chemical compound C1CCCC1[Si](OCC)(OCC)C1CCCC1 FVAXOELGJXMINU-UHFFFAOYSA-N 0.000 description 1
- JWCYDYZLEAQGJJ-UHFFFAOYSA-N dicyclopentyl(dimethoxy)silane Chemical compound C1CCCC1[Si](OC)(OC)C1CCCC1 JWCYDYZLEAQGJJ-UHFFFAOYSA-N 0.000 description 1
- PFOATQACJVLYBZ-UHFFFAOYSA-N dicyclopentyl(dipropoxy)silane Chemical compound C1CCCC1[Si](OCCC)(OCCC)C1CCCC1 PFOATQACJVLYBZ-UHFFFAOYSA-N 0.000 description 1
- GFCLACALZBXETA-UHFFFAOYSA-N dicyclopentyl-di(propan-2-yloxy)silane Chemical compound C1CCCC1[Si](OC(C)C)(OC(C)C)C1CCCC1 GFCLACALZBXETA-UHFFFAOYSA-N 0.000 description 1
- ZCSLFHYAKIOHIX-UHFFFAOYSA-N dicyclopropyl(diethoxy)silane Chemical compound C1CC1[Si](OCC)(OCC)C1CC1 ZCSLFHYAKIOHIX-UHFFFAOYSA-N 0.000 description 1
- FITBVULBQAQPQH-UHFFFAOYSA-N dicyclopropyl(dimethoxy)silane Chemical compound C1CC1[Si](OC)(OC)C1CC1 FITBVULBQAQPQH-UHFFFAOYSA-N 0.000 description 1
- ZSSPJMAMZYYXLH-UHFFFAOYSA-N dicyclopropyl-di(propan-2-yloxy)silane Chemical compound C1CC1[Si](OC(C)C)(OC(C)C)C1CC1 ZSSPJMAMZYYXLH-UHFFFAOYSA-N 0.000 description 1
- ZBCBWPMODOFKDW-UHFFFAOYSA-N diethanolamine Chemical compound OCCNCCO ZBCBWPMODOFKDW-UHFFFAOYSA-N 0.000 description 1
- ZMAPKOCENOWQRE-UHFFFAOYSA-N diethoxy(diethyl)silane Chemical compound CCO[Si](CC)(CC)OCC ZMAPKOCENOWQRE-UHFFFAOYSA-N 0.000 description 1
- ZZNQQQWFKKTOSD-UHFFFAOYSA-N diethoxy(diphenyl)silane Chemical compound C=1C=CC=CC=1[Si](OCC)(OCC)C1=CC=CC=C1 ZZNQQQWFKKTOSD-UHFFFAOYSA-N 0.000 description 1
- HZLIIKNXMLEWPA-UHFFFAOYSA-N diethoxy(dipropyl)silane Chemical compound CCC[Si](CCC)(OCC)OCC HZLIIKNXMLEWPA-UHFFFAOYSA-N 0.000 description 1
- ZWTJVXCCMKLQKS-UHFFFAOYSA-N diethoxy(ethyl)silicon Chemical compound CCO[Si](CC)OCC ZWTJVXCCMKLQKS-UHFFFAOYSA-N 0.000 description 1
- VVKJJEAEVBNODX-UHFFFAOYSA-N diethoxy-di(propan-2-yl)silane Chemical compound CCO[Si](C(C)C)(C(C)C)OCC VVKJJEAEVBNODX-UHFFFAOYSA-N 0.000 description 1
- UWGJCHRFALXDAR-UHFFFAOYSA-N diethoxy-ethyl-methylsilane Chemical compound CCO[Si](C)(CC)OCC UWGJCHRFALXDAR-UHFFFAOYSA-N 0.000 description 1
- MNFGEHQPOWJJBH-UHFFFAOYSA-N diethoxy-methyl-phenylsilane Chemical compound CCO[Si](C)(OCC)C1=CC=CC=C1 MNFGEHQPOWJJBH-UHFFFAOYSA-N 0.000 description 1
- VSYLGGHSEIWGJV-UHFFFAOYSA-N diethyl(dimethoxy)silane Chemical compound CC[Si](CC)(OC)OC VSYLGGHSEIWGJV-UHFFFAOYSA-N 0.000 description 1
- BZCJJERBERAQKQ-UHFFFAOYSA-N diethyl(dipropoxy)silane Chemical compound CCCO[Si](CC)(CC)OCCC BZCJJERBERAQKQ-UHFFFAOYSA-N 0.000 description 1
- ZWPNXHXXRLYCHZ-UHFFFAOYSA-N diethyl-di(propan-2-yloxy)silane Chemical compound CC(C)O[Si](CC)(CC)OC(C)C ZWPNXHXXRLYCHZ-UHFFFAOYSA-N 0.000 description 1
- HPNMFZURTQLUMO-UHFFFAOYSA-N diethylamine Chemical compound CCNCC HPNMFZURTQLUMO-UHFFFAOYSA-N 0.000 description 1
- JJQZDUKDJDQPMQ-UHFFFAOYSA-N dimethoxy(dimethyl)silane Chemical compound CO[Si](C)(C)OC JJQZDUKDJDQPMQ-UHFFFAOYSA-N 0.000 description 1
- AHUXYBVKTIBBJW-UHFFFAOYSA-N dimethoxy(diphenyl)silane Chemical compound C=1C=CC=CC=1[Si](OC)(OC)C1=CC=CC=C1 AHUXYBVKTIBBJW-UHFFFAOYSA-N 0.000 description 1
- JVUVKQDVTIIMOD-UHFFFAOYSA-N dimethoxy(dipropyl)silane Chemical compound CCC[Si](OC)(OC)CCC JVUVKQDVTIIMOD-UHFFFAOYSA-N 0.000 description 1
- VHPUZTHRFWIGAW-UHFFFAOYSA-N dimethoxy-di(propan-2-yl)silane Chemical compound CO[Si](OC)(C(C)C)C(C)C VHPUZTHRFWIGAW-UHFFFAOYSA-N 0.000 description 1
- CVQVSVBUMVSJES-UHFFFAOYSA-N dimethoxy-methyl-phenylsilane Chemical compound CO[Si](C)(OC)C1=CC=CC=C1 CVQVSVBUMVSJES-UHFFFAOYSA-N 0.000 description 1
- YQGOWXYZDLJBFL-UHFFFAOYSA-N dimethoxysilane Chemical compound CO[SiH2]OC YQGOWXYZDLJBFL-UHFFFAOYSA-N 0.000 description 1
- ZIDTUTFKRRXWTK-UHFFFAOYSA-N dimethyl(dipropoxy)silane Chemical compound CCCO[Si](C)(C)OCCC ZIDTUTFKRRXWTK-UHFFFAOYSA-N 0.000 description 1
- BPXCAJONOPIXJI-UHFFFAOYSA-N dimethyl-di(propan-2-yloxy)silane Chemical compound CC(C)O[Si](C)(C)OC(C)C BPXCAJONOPIXJI-UHFFFAOYSA-N 0.000 description 1
- YYLGKUPAFFKGRQ-UHFFFAOYSA-N dimethyldiethoxysilane Chemical compound CCO[Si](C)(C)OCC YYLGKUPAFFKGRQ-UHFFFAOYSA-N 0.000 description 1
- SLAYMDSSGGBWQB-UHFFFAOYSA-N diphenyl(dipropoxy)silane Chemical compound C=1C=CC=CC=1[Si](OCCC)(OCCC)C1=CC=CC=C1 SLAYMDSSGGBWQB-UHFFFAOYSA-N 0.000 description 1
- QAPWZQHBOVKNHP-UHFFFAOYSA-N diphenyl-di(propan-2-yloxy)silane Chemical compound C=1C=CC=CC=1[Si](OC(C)C)(OC(C)C)C1=CC=CC=C1 QAPWZQHBOVKNHP-UHFFFAOYSA-N 0.000 description 1
- AVBCBOQFOQZNFK-UHFFFAOYSA-N dipropoxy(dipropyl)silane Chemical compound CCCO[Si](CCC)(CCC)OCCC AVBCBOQFOQZNFK-UHFFFAOYSA-N 0.000 description 1
- GWCASPKBFBALDG-UHFFFAOYSA-N ditert-butyl(diethoxy)silane Chemical compound CCO[Si](C(C)(C)C)(C(C)(C)C)OCC GWCASPKBFBALDG-UHFFFAOYSA-N 0.000 description 1
- OANIYCQMEVXZCJ-UHFFFAOYSA-N ditert-butyl(dimethoxy)silane Chemical compound CO[Si](OC)(C(C)(C)C)C(C)(C)C OANIYCQMEVXZCJ-UHFFFAOYSA-N 0.000 description 1
- AUSJIUIFKLDCQZ-UHFFFAOYSA-N ditert-butyl(dipropoxy)silane Chemical compound CCCO[Si](C(C)(C)C)(C(C)(C)C)OCCC AUSJIUIFKLDCQZ-UHFFFAOYSA-N 0.000 description 1
- HZTYWQHBJNMFSW-UHFFFAOYSA-N ditert-butyl-di(propan-2-yloxy)silane Chemical compound CC(C)O[Si](C(C)(C)C)(C(C)(C)C)OC(C)C HZTYWQHBJNMFSW-UHFFFAOYSA-N 0.000 description 1
- 239000012156 elution solvent Substances 0.000 description 1
- PDEQRROLMQDPND-UHFFFAOYSA-N ethanolate;methanolate;tin(2+) Chemical compound [Sn+2].[O-]C.CC[O-] PDEQRROLMQDPND-UHFFFAOYSA-N 0.000 description 1
- XCKWFNSALCEAPW-UHFFFAOYSA-N ethanolate;tin(2+) Chemical compound [Sn+2].CC[O-].CC[O-] XCKWFNSALCEAPW-UHFFFAOYSA-N 0.000 description 1
- KEQVPIDOPAGWCP-UHFFFAOYSA-N ethanolate;yttrium(3+) Chemical compound [Y+3].CC[O-].CC[O-].CC[O-] KEQVPIDOPAGWCP-UHFFFAOYSA-N 0.000 description 1
- FWDBOZPQNFPOLF-UHFFFAOYSA-N ethenyl(triethoxy)silane Chemical compound CCO[Si](OCC)(OCC)C=C FWDBOZPQNFPOLF-UHFFFAOYSA-N 0.000 description 1
- NKSJNEHGWDZZQF-UHFFFAOYSA-N ethenyl(trimethoxy)silane Chemical compound CO[Si](OC)(OC)C=C NKSJNEHGWDZZQF-UHFFFAOYSA-N 0.000 description 1
- NNBRCHPBPDRPIT-UHFFFAOYSA-N ethenyl(tripropoxy)silane Chemical compound CCCO[Si](OCCC)(OCCC)C=C NNBRCHPBPDRPIT-UHFFFAOYSA-N 0.000 description 1
- MABAWBWRUSBLKQ-UHFFFAOYSA-N ethenyl-tri(propan-2-yloxy)silane Chemical compound CC(C)O[Si](OC(C)C)(OC(C)C)C=C MABAWBWRUSBLKQ-UHFFFAOYSA-N 0.000 description 1
- 150000002170 ethers Chemical class 0.000 description 1
- 125000001301 ethoxy group Chemical group [H]C([H])([H])C([H])([H])O* 0.000 description 1
- RSIHJDGMBDPTIM-UHFFFAOYSA-N ethoxy(trimethyl)silane Chemical compound CCO[Si](C)(C)C RSIHJDGMBDPTIM-UHFFFAOYSA-N 0.000 description 1
- FKDLBUPSJQZYFZ-UHFFFAOYSA-N ethoxy-ethyl-dimethylsilane Chemical compound CCO[Si](C)(C)CC FKDLBUPSJQZYFZ-UHFFFAOYSA-N 0.000 description 1
- XLCHFELJBBOTSX-UHFFFAOYSA-N ethoxyantimony Chemical compound CCO[Sb] XLCHFELJBBOTSX-UHFFFAOYSA-N 0.000 description 1
- LRANRHDJNHABBA-UHFFFAOYSA-N ethoxyarsenic Chemical compound CCO[As] LRANRHDJNHABBA-UHFFFAOYSA-N 0.000 description 1
- OHVMRALFLUMPGF-UHFFFAOYSA-N ethoxybismuth Chemical compound CCO[Bi] OHVMRALFLUMPGF-UHFFFAOYSA-N 0.000 description 1
- CWAFVXWRGIEBPL-UHFFFAOYSA-N ethoxysilane Chemical compound CCO[SiH3] CWAFVXWRGIEBPL-UHFFFAOYSA-N 0.000 description 1
- FANAUDUYRDVPHX-UHFFFAOYSA-N ethoxytin Chemical compound CCO[Sn] FANAUDUYRDVPHX-UHFFFAOYSA-N 0.000 description 1
- YSLVSGVAVRTLAV-UHFFFAOYSA-N ethyl(dimethoxy)silane Chemical compound CC[SiH](OC)OC YSLVSGVAVRTLAV-UHFFFAOYSA-N 0.000 description 1
- BNFBSHKADAKNSK-UHFFFAOYSA-N ethyl(dipropoxy)silane Chemical compound CCCO[SiH](CC)OCCC BNFBSHKADAKNSK-UHFFFAOYSA-N 0.000 description 1
- SBRXLTRZCJVAPH-UHFFFAOYSA-N ethyl(trimethoxy)silane Chemical compound CC[Si](OC)(OC)OC SBRXLTRZCJVAPH-UHFFFAOYSA-N 0.000 description 1
- KUCGHDUQOVVQED-UHFFFAOYSA-N ethyl(tripropoxy)silane Chemical compound CCCO[Si](CC)(OCCC)OCCC KUCGHDUQOVVQED-UHFFFAOYSA-N 0.000 description 1
- SXYSRMWUAIQOEL-UHFFFAOYSA-N ethyl-di(propan-2-yloxy)silane Chemical compound CC(C)O[SiH](CC)OC(C)C SXYSRMWUAIQOEL-UHFFFAOYSA-N 0.000 description 1
- HTSRFYSEWIPFNI-UHFFFAOYSA-N ethyl-dimethoxy-methylsilane Chemical compound CC[Si](C)(OC)OC HTSRFYSEWIPFNI-UHFFFAOYSA-N 0.000 description 1
- SUHRFYWSDBWMFS-UHFFFAOYSA-N ethyl-methoxy-dimethylsilane Chemical compound CC[Si](C)(C)OC SUHRFYWSDBWMFS-UHFFFAOYSA-N 0.000 description 1
- MYEJNNDSIXAGNK-UHFFFAOYSA-N ethyl-tri(propan-2-yloxy)silane Chemical compound CC(C)O[Si](CC)(OC(C)C)OC(C)C MYEJNNDSIXAGNK-UHFFFAOYSA-N 0.000 description 1
- LIWAQLJGPBVORC-UHFFFAOYSA-N ethylmethylamine Chemical compound CCNC LIWAQLJGPBVORC-UHFFFAOYSA-N 0.000 description 1
- 238000001900 extreme ultraviolet lithography Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910021480 group 4 element Inorganic materials 0.000 description 1
- 229910021478 group 5 element Inorganic materials 0.000 description 1
- WZRQWSBPAXNLDT-UHFFFAOYSA-J hafnium(4+) tetraphenoxide Chemical compound [Hf+4].[O-]C1=CC=CC=C1.[O-]C1=CC=CC=C1.[O-]C1=CC=CC=C1.[O-]C1=CC=CC=C1 WZRQWSBPAXNLDT-UHFFFAOYSA-J 0.000 description 1
- KIXLEMHCRGHACT-UHFFFAOYSA-N hafnium(4+);methanolate Chemical compound [Hf+4].[O-]C.[O-]C.[O-]C.[O-]C KIXLEMHCRGHACT-UHFFFAOYSA-N 0.000 description 1
- SEKCULWEIYBRLO-UHFFFAOYSA-N hafnium(4+);propan-1-olate Chemical compound [Hf+4].CCC[O-].CCC[O-].CCC[O-].CCC[O-] SEKCULWEIYBRLO-UHFFFAOYSA-N 0.000 description 1
- 239000004312 hexamethylene tetramine Substances 0.000 description 1
- 235000010299 hexamethylene tetramine Nutrition 0.000 description 1
- 125000003707 hexyloxy group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])O* 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000005342 ion exchange Methods 0.000 description 1
- 239000003456 ion exchange resin Substances 0.000 description 1
- 229920003303 ion-exchange polymer Polymers 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- LFETXMWECUPHJA-UHFFFAOYSA-N methanamine;hydrate Chemical compound O.NC LFETXMWECUPHJA-UHFFFAOYSA-N 0.000 description 1
- ZEIWWVGGEOHESL-UHFFFAOYSA-N methanol;titanium Chemical compound [Ti].OC.OC.OC.OC ZEIWWVGGEOHESL-UHFFFAOYSA-N 0.000 description 1
- WVLGTKBIJRAYME-UHFFFAOYSA-N methanolate;yttrium(3+) Chemical compound [Y+3].[O-]C.[O-]C.[O-]C WVLGTKBIJRAYME-UHFFFAOYSA-N 0.000 description 1
- 125000000956 methoxy group Chemical group [H]C([H])([H])O* 0.000 description 1
- POPACFLNWGUDSR-UHFFFAOYSA-N methoxy(trimethyl)silane Chemical compound CO[Si](C)(C)C POPACFLNWGUDSR-UHFFFAOYSA-N 0.000 description 1
- YLALLIMOALRHHM-UHFFFAOYSA-N methoxy-dimethyl-(2-phenylethyl)silane Chemical compound CO[Si](C)(C)CCC1=CC=CC=C1 YLALLIMOALRHHM-UHFFFAOYSA-N 0.000 description 1
- REQXNMOSXYEQLM-UHFFFAOYSA-N methoxy-dimethyl-phenylsilane Chemical compound CO[Si](C)(C)C1=CC=CC=C1 REQXNMOSXYEQLM-UHFFFAOYSA-N 0.000 description 1
- HLHZMRQHTSYSST-UHFFFAOYSA-N methoxyantimony Chemical compound CO[Sb] HLHZMRQHTSYSST-UHFFFAOYSA-N 0.000 description 1
- GHAMDDWKPOYZGV-UHFFFAOYSA-N methoxyarsenic Chemical compound CO[As] GHAMDDWKPOYZGV-UHFFFAOYSA-N 0.000 description 1
- QDIOCYAAOUVXIR-UHFFFAOYSA-N methoxybismuth Chemical compound CO[Bi] QDIOCYAAOUVXIR-UHFFFAOYSA-N 0.000 description 1
- QQKLEWWGQDVDND-UHFFFAOYSA-N methoxytin Chemical compound CO[Sn] QQKLEWWGQDVDND-UHFFFAOYSA-N 0.000 description 1
- CRVGTESFCCXCTH-UHFFFAOYSA-N methyl diethanolamine Chemical compound OCCN(C)CCO CRVGTESFCCXCTH-UHFFFAOYSA-N 0.000 description 1
- RJMRIDVWCWSWFR-UHFFFAOYSA-N methyl(tripropoxy)silane Chemical compound CCCO[Si](C)(OCCC)OCCC RJMRIDVWCWSWFR-UHFFFAOYSA-N 0.000 description 1
- HLXDKGBELJJMHR-UHFFFAOYSA-N methyl-tri(propan-2-yloxy)silane Chemical compound CC(C)O[Si](C)(OC(C)C)OC(C)C HLXDKGBELJJMHR-UHFFFAOYSA-N 0.000 description 1
- 125000000250 methylamino group Chemical group [H]N(*)C([H])([H])[H] 0.000 description 1
- BFXIKLCIZHOAAZ-UHFFFAOYSA-N methyltrimethoxysilane Chemical compound CO[Si](C)(OC)OC BFXIKLCIZHOAAZ-UHFFFAOYSA-N 0.000 description 1
- 150000007522 mineralic acids Chemical class 0.000 description 1
- BAVYZALUXZFZLV-UHFFFAOYSA-N mono-methylamine Natural products NC BAVYZALUXZFZLV-UHFFFAOYSA-N 0.000 description 1
- PSHKMPUSSFXUIA-UHFFFAOYSA-N n,n-dimethylpyridin-2-amine Chemical compound CN(C)C1=CC=CC=N1 PSHKMPUSSFXUIA-UHFFFAOYSA-N 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 239000010955 niobium Substances 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 239000012044 organic layer Substances 0.000 description 1
- 125000004115 pentoxy group Chemical group [*]OC([H])([H])C([H])([H])C([H])([H])C(C([H])([H])[H])([H])[H] 0.000 description 1
- 230000010363 phase shift Effects 0.000 description 1
- IFFPHDYFQRRKPZ-UHFFFAOYSA-N phenol;titanium Chemical compound [Ti].OC1=CC=CC=C1.OC1=CC=CC=C1.OC1=CC=CC=C1.OC1=CC=CC=C1 IFFPHDYFQRRKPZ-UHFFFAOYSA-N 0.000 description 1
- ISWSIDIOOBJBQZ-UHFFFAOYSA-M phenolate Chemical compound [O-]C1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-M 0.000 description 1
- 125000000951 phenoxy group Chemical group [H]C1=C([H])C([H])=C(O*)C([H])=C1[H] 0.000 description 1
- ZCCUMCLOSRETFE-UHFFFAOYSA-M phenoxyantimony Chemical compound [Sb]OC1=CC=CC=C1 ZCCUMCLOSRETFE-UHFFFAOYSA-M 0.000 description 1
- AVKUWNUBPFREQI-UHFFFAOYSA-N phenoxyarsenic Chemical compound [As]OC1=CC=CC=C1 AVKUWNUBPFREQI-UHFFFAOYSA-N 0.000 description 1
- OXYGVVKTGSCLGP-UHFFFAOYSA-M phenoxybismuth Chemical compound [Bi]OC1=CC=CC=C1 OXYGVVKTGSCLGP-UHFFFAOYSA-M 0.000 description 1
- CSRCVZZUZZRSEH-UHFFFAOYSA-M phenoxytin Chemical compound [Sn]OC1=CC=CC=C1 CSRCVZZUZZRSEH-UHFFFAOYSA-M 0.000 description 1
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 1
- FABOKLHQXVRECE-UHFFFAOYSA-N phenyl(tripropoxy)silane Chemical compound CCCO[Si](OCCC)(OCCC)C1=CC=CC=C1 FABOKLHQXVRECE-UHFFFAOYSA-N 0.000 description 1
- VPLNCHFJAOKWBT-UHFFFAOYSA-N phenyl-tri(propan-2-yloxy)silane Chemical compound CC(C)O[Si](OC(C)C)(OC(C)C)C1=CC=CC=C1 VPLNCHFJAOKWBT-UHFFFAOYSA-N 0.000 description 1
- 229960004838 phosphoric acid Drugs 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229960005235 piperonyl butoxide Drugs 0.000 description 1
- 229920000636 poly(norbornene) polymer Polymers 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- WUBJXWWQGDPUCE-UHFFFAOYSA-N propan-1-olate yttrium(3+) Chemical compound [Y+3].CCC[O-].CCC[O-].CCC[O-] WUBJXWWQGDPUCE-UHFFFAOYSA-N 0.000 description 1
- HKJYVRJHDIPMQB-UHFFFAOYSA-N propan-1-olate;titanium(4+) Chemical compound CCCO[Ti](OCCC)(OCCC)OCCC HKJYVRJHDIPMQB-UHFFFAOYSA-N 0.000 description 1
- SZEGZMUSBCXNLO-UHFFFAOYSA-N propan-2-yl(tripropoxy)silane Chemical compound CCCO[Si](OCCC)(OCCC)C(C)C SZEGZMUSBCXNLO-UHFFFAOYSA-N 0.000 description 1
- 125000002572 propoxy group Chemical group [*]OC([H])([H])C(C([H])([H])[H])([H])[H] 0.000 description 1
- NCLVBCYENVSYCE-UHFFFAOYSA-N propoxyantimony Chemical compound CCCO[Sb] NCLVBCYENVSYCE-UHFFFAOYSA-N 0.000 description 1
- PLZKKYRVPOUZSL-UHFFFAOYSA-N propoxybismuth Chemical compound CCCO[Bi] PLZKKYRVPOUZSL-UHFFFAOYSA-N 0.000 description 1
- ZMYXZXUHYAGGKG-UHFFFAOYSA-N propoxysilane Chemical compound CCCO[SiH3] ZMYXZXUHYAGGKG-UHFFFAOYSA-N 0.000 description 1
- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 description 1
- 238000001953 recrystallisation Methods 0.000 description 1
- 230000001846 repelling effect Effects 0.000 description 1
- 238000007152 ring opening metathesis polymerisation reaction Methods 0.000 description 1
- 229910052701 rubidium Inorganic materials 0.000 description 1
- IGLNJRXAVVLDKE-UHFFFAOYSA-N rubidium atom Chemical compound [Rb] IGLNJRXAVVLDKE-UHFFFAOYSA-N 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 125000000123 silicon containing inorganic group Chemical group 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- ASEHKQZNVUOPRW-UHFFFAOYSA-N tert-butyl(triethoxy)silane Chemical compound CCO[Si](OCC)(OCC)C(C)(C)C ASEHKQZNVUOPRW-UHFFFAOYSA-N 0.000 description 1
- HXLWJGIPGJFBEZ-UHFFFAOYSA-N tert-butyl(trimethoxy)silane Chemical compound CO[Si](OC)(OC)C(C)(C)C HXLWJGIPGJFBEZ-UHFFFAOYSA-N 0.000 description 1
- UTIRVQGNGQSJNF-UHFFFAOYSA-N tert-butyl(tripropoxy)silane Chemical compound CCCO[Si](OCCC)(OCCC)C(C)(C)C UTIRVQGNGQSJNF-UHFFFAOYSA-N 0.000 description 1
- HVEXJEOBOQONBC-UHFFFAOYSA-N tert-butyl-tri(propan-2-yloxy)silane Chemical compound CC(C)O[Si](OC(C)C)(OC(C)C)C(C)(C)C HVEXJEOBOQONBC-UHFFFAOYSA-N 0.000 description 1
- GXMNGLIMQIPFEB-UHFFFAOYSA-N tetraethoxygermane Chemical compound CCO[Ge](OCC)(OCC)OCC GXMNGLIMQIPFEB-UHFFFAOYSA-N 0.000 description 1
- LPSKDVINWQNWFE-UHFFFAOYSA-M tetrapropylazanium;hydroxide Chemical compound [OH-].CCC[N+](CCC)(CCC)CCC LPSKDVINWQNWFE-UHFFFAOYSA-M 0.000 description 1
- 230000003685 thermal hair damage Effects 0.000 description 1
- JMXKSZRRTHPKDL-UHFFFAOYSA-N titanium ethoxide Chemical compound [Ti+4].CC[O-].CC[O-].CC[O-].CC[O-] JMXKSZRRTHPKDL-UHFFFAOYSA-N 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- WOZZOSDBXABUFO-UHFFFAOYSA-N tri(butan-2-yloxy)alumane Chemical compound [Al+3].CCC(C)[O-].CCC(C)[O-].CCC(C)[O-] WOZZOSDBXABUFO-UHFFFAOYSA-N 0.000 description 1
- MQVCTPXBBSKLFS-UHFFFAOYSA-N tri(propan-2-yloxy)-propylsilane Chemical compound CCC[Si](OC(C)C)(OC(C)C)OC(C)C MQVCTPXBBSKLFS-UHFFFAOYSA-N 0.000 description 1
- IMFACGCPASFAPR-UHFFFAOYSA-N tributylamine Chemical compound CCCCN(CCCC)CCCC IMFACGCPASFAPR-UHFFFAOYSA-N 0.000 description 1
- VBSUMMHIJNZMRM-UHFFFAOYSA-N triethoxy(2-phenylethyl)silane Chemical compound CCO[Si](OCC)(OCC)CCC1=CC=CC=C1 VBSUMMHIJNZMRM-UHFFFAOYSA-N 0.000 description 1
- DENFJSAFJTVPJR-UHFFFAOYSA-N triethoxy(ethyl)silane Chemical compound CCO[Si](CC)(OCC)OCC DENFJSAFJTVPJR-UHFFFAOYSA-N 0.000 description 1
- CPUDPFPXCZDNGI-UHFFFAOYSA-N triethoxy(methyl)silane Chemical compound CCO[Si](C)(OCC)OCC CPUDPFPXCZDNGI-UHFFFAOYSA-N 0.000 description 1
- JCVQKRGIASEUKR-UHFFFAOYSA-N triethoxy(phenyl)silane Chemical compound CCO[Si](OCC)(OCC)C1=CC=CC=C1 JCVQKRGIASEUKR-UHFFFAOYSA-N 0.000 description 1
- BJDLPDPRMYAOCM-UHFFFAOYSA-N triethoxy(propan-2-yl)silane Chemical compound CCO[Si](OCC)(OCC)C(C)C BJDLPDPRMYAOCM-UHFFFAOYSA-N 0.000 description 1
- NBXZNTLFQLUFES-UHFFFAOYSA-N triethoxy(propyl)silane Chemical compound CCC[Si](OCC)(OCC)OCC NBXZNTLFQLUFES-UHFFFAOYSA-N 0.000 description 1
- USLHPQORLCHMOC-UHFFFAOYSA-N triethoxygallane Chemical compound CCO[Ga](OCC)OCC USLHPQORLCHMOC-UHFFFAOYSA-N 0.000 description 1
- QQQSFSZALRVCSZ-UHFFFAOYSA-N triethoxysilane Chemical compound CCO[SiH](OCC)OCC QQQSFSZALRVCSZ-UHFFFAOYSA-N 0.000 description 1
- AJSTXXYNEIHPMD-UHFFFAOYSA-N triethyl borate Chemical compound CCOB(OCC)OCC AJSTXXYNEIHPMD-UHFFFAOYSA-N 0.000 description 1
- QFCVQKSWGFVMTB-UHFFFAOYSA-N trihexoxyalumane Chemical compound [Al+3].CCCCCC[O-].CCCCCC[O-].CCCCCC[O-] QFCVQKSWGFVMTB-UHFFFAOYSA-N 0.000 description 1
- UBMUZYGBAGFCDF-UHFFFAOYSA-N trimethoxy(2-phenylethyl)silane Chemical compound CO[Si](OC)(OC)CCC1=CC=CC=C1 UBMUZYGBAGFCDF-UHFFFAOYSA-N 0.000 description 1
- LGROXJWYRXANBB-UHFFFAOYSA-N trimethoxy(propan-2-yl)silane Chemical compound CO[Si](OC)(OC)C(C)C LGROXJWYRXANBB-UHFFFAOYSA-N 0.000 description 1
- HQYALQRYBUJWDH-UHFFFAOYSA-N trimethoxy(propyl)silane Chemical compound CCC[Si](OC)(OC)OC HQYALQRYBUJWDH-UHFFFAOYSA-N 0.000 description 1
- UAEJRRZPRZCUBE-UHFFFAOYSA-N trimethoxyalumane Chemical compound [Al+3].[O-]C.[O-]C.[O-]C UAEJRRZPRZCUBE-UHFFFAOYSA-N 0.000 description 1
- XIYWAPJTMIWONS-UHFFFAOYSA-N trimethoxygallane Chemical compound [Ga+3].[O-]C.[O-]C.[O-]C XIYWAPJTMIWONS-UHFFFAOYSA-N 0.000 description 1
- YUYCVXFAYWRXLS-UHFFFAOYSA-N trimethoxysilane Chemical compound CO[SiH](OC)OC YUYCVXFAYWRXLS-UHFFFAOYSA-N 0.000 description 1
- WRECIMRULFAWHA-UHFFFAOYSA-N trimethyl borate Chemical compound COB(OC)OC WRECIMRULFAWHA-UHFFFAOYSA-N 0.000 description 1
- OPSWAWSNPREEFQ-UHFFFAOYSA-K triphenoxyalumane Chemical compound [Al+3].[O-]C1=CC=CC=C1.[O-]C1=CC=CC=C1.[O-]C1=CC=CC=C1 OPSWAWSNPREEFQ-UHFFFAOYSA-K 0.000 description 1
- ZFEAYIKULRXTAR-UHFFFAOYSA-M triphenylsulfanium;chloride Chemical compound [Cl-].C1=CC=CC=C1[S+](C=1C=CC=CC=1)C1=CC=CC=C1 ZFEAYIKULRXTAR-UHFFFAOYSA-M 0.000 description 1
- VUWVDNLZJXLQPT-UHFFFAOYSA-N tripropoxy(propyl)silane Chemical compound CCCO[Si](CCC)(OCCC)OCCC VUWVDNLZJXLQPT-UHFFFAOYSA-N 0.000 description 1
- OBROYCQXICMORW-UHFFFAOYSA-N tripropoxyalumane Chemical compound [Al+3].CCC[O-].CCC[O-].CCC[O-] OBROYCQXICMORW-UHFFFAOYSA-N 0.000 description 1
- OZWKZRFXJPGDFM-UHFFFAOYSA-N tripropoxysilane Chemical compound CCCO[SiH](OCCC)OCCC OZWKZRFXJPGDFM-UHFFFAOYSA-N 0.000 description 1
- LTEHWCSSIHAVOQ-UHFFFAOYSA-N tripropyl borate Chemical compound CCCOB(OCCC)OCCC LTEHWCSSIHAVOQ-UHFFFAOYSA-N 0.000 description 1
- YFTHZRPMJXBUME-UHFFFAOYSA-N tripropylamine Chemical compound CCCN(CCC)CCC YFTHZRPMJXBUME-UHFFFAOYSA-N 0.000 description 1
- YWIUPWSLDVUCDT-UHFFFAOYSA-N tris(1-methoxyethoxy)alumane Chemical compound [Al+3].COC(C)[O-].COC(C)[O-].COC(C)[O-] YWIUPWSLDVUCDT-UHFFFAOYSA-N 0.000 description 1
- IYGPXXORQKFXCZ-UHFFFAOYSA-N tris(2-methoxyethyl) borate Chemical compound COCCOB(OCCOC)OCCOC IYGPXXORQKFXCZ-UHFFFAOYSA-N 0.000 description 1
- RQNVJDSEWRGEQR-UHFFFAOYSA-N tris(prop-2-enyl) borate Chemical compound C=CCOB(OCC=C)OCC=C RQNVJDSEWRGEQR-UHFFFAOYSA-N 0.000 description 1
- 229910001935 vanadium oxide Inorganic materials 0.000 description 1
- HODZVVUWYZMUHG-UHFFFAOYSA-K yttrium(3+) triphenoxide Chemical compound [Y+3].[O-]C1=CC=CC=C1.[O-]C1=CC=CC=C1.[O-]C1=CC=CC=C1 HODZVVUWYZMUHG-UHFFFAOYSA-K 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
- G03F7/094—Multilayer resist systems, e.g. planarising layers
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D183/00—Coating compositions based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon, with or without sulfur, nitrogen, oxygen, or carbon only; Coating compositions based on derivatives of such polymers
- C09D183/04—Polysiloxanes
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/075—Silicon-containing compounds
- G03F7/0752—Silicon-containing compounds in non photosensitive layers or as additives, e.g. for dry lithography
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/30—Imagewise removal using liquid means
- G03F7/32—Liquid compositions therefor, e.g. developers
- G03F7/325—Non-aqueous compositions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/308—Chemical or electrical treatment, e.g. electrolytic etching using masks
- H01L21/3081—Chemical or electrical treatment, e.g. electrolytic etching using masks characterised by their composition, e.g. multilayer masks, materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31105—Etching inorganic layers
- H01L21/31111—Etching inorganic layers by chemical means
- H01L21/31116—Etching inorganic layers by chemical means by dry-etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31127—Etching organic layers
- H01L21/31133—Etching organic layers by chemical means
- H01L21/31138—Etching organic layers by chemical means by dry-etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31144—Etching the insulating layers by chemical or physical means using masks
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Architecture (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Materials Engineering (AREA)
- Wood Science & Technology (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials For Photolithography (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Silicon Polymers (AREA)
- Compositions Of Macromolecular Compounds (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
Abstract
【解決手段】ポリシロキサン化合物の熱架橋促進剤であって、下記一般式(A−1)で示されるものであることを特徴とするポリシロキサン化合物の熱架橋促進剤。
(R11、R12、R13、R14はそれぞれ、水素原子、ハロゲン原子、炭素数1〜20の直鎖状、分岐状又は環状のアルキル基等、炭素数6〜20の置換あるいは非置換のアリール基、又は炭素数7〜20のアラルキル基等を示し、これらの基の水素原子の一部又は全部がアルコキシ基等で置換されてもよい。a、b、c、dは0〜5の整数。a、b、c、dが2以上の場合は、R11、R12、R13、R14が環状構造を形成してもよい。Lはリチウム等である。)
【選択図】なし
Description
ポリシロキサン化合物の熱架橋促進剤であって、
下記一般式(A−1)で示されるものであることを特徴とするポリシロキサン化合物の熱架橋促進剤を提供する。
R1B B1R2B B2R3B B3Si(OR0B)(4−B1−B2−B3) (B−1)
(式中、R0Bは炭素数1〜6の炭化水素基であり、R1B、R2B、R3Bは水素原子または1価の有機基である。また、B1、B2、B3は0又は1であり、0≦B1+B2+B3≦3である。)
本発明の熱架橋促進剤として使用される下記一般式(A−1)で示される化合物のアニオン部分は、下記構造(A−1a)で表される。
R1B B1R2B B2R3B B3Si(OR0B)(4−B1−B2−B3) (B−1)
(式中、R0Bは炭素数1〜6の炭化水素基であり、R1B、R2B、R3Bは水素原子または1価の有機基である。また、B1、B2、B3は0又は1であり、0≦B1+B2+B3≦3である。)
前記ポリシロキサンの原料(出発物質)として使用される加水分解性ケイ素化合物(B−1)として以下のものを例示出来る。
L’(OR4B)B4(OR5B)B5(O)B6 (B−2)
(式中、R4B、R5Bは炭素数1〜30の有機基であり、B4+B5+B6はLの種類により決まる価数であり、B4、B5、B6は0以上の整数、L’は周期律表のIII族、IV族、又はV族の元素で炭素を除くものである。)
このとき使用される酸触媒は、フッ酸、塩酸、臭化水素酸、硫酸、硝酸、過塩素酸、リン酸、メタンスルホン酸、ベンゼンスルホン酸、トルエンスルホン酸等を挙げることが出来る。触媒の使用量は、モノマー1モルに対して10−6〜10モル、好ましくは10−5〜5モル、より好ましくは10−4〜1モルである。
その他に酸触媒を除去する方法として、イオン交換樹脂による方法や、エチレンオキサイド、プロピレンオキサイド等のエポキシ化合物で中和したのち除去する方法を挙げることが出来る。これらの方法は、反応に使用された酸触媒に合わせて適宜選択することが出来る。
更に、水溶性有機溶剤と水難溶性有機溶剤の混合物を使用することも可能である。
あるいは、上記有機酸を組成物のpHに換算して、好ましくは0≦pH≦7、より好ましくは0.3≦pH≦6.5、更に好ましくは0.5≦pH≦6となるように配合することがよい。
水を含む全溶剤の使用量は、前記ベースポリマー100質量部に対して100〜100,000質量部、特に200〜50,000質量部が好適である。
また、本発明における露光工程を、ArFエキシマレーザー光による露光プロセスとしてもよく、この場合上層のフォトレジスト膜としては、通常のArFエキシマレーザー光用レジスト組成物はいずれも使用可能である。
トリフェニルスルホニウムテトラフェニルボーレート(促進剤1)
[合成例1]
エタノール400g、メタンスルホン酸0.2g及び脱イオン水120gの混合物にフェニルトリメトキシシラン9.9gおよびテトラエトキシシラン197.9gの混合物を添加し、12時間、40℃に保持し、加水分解縮合させた。反応終了後、プロピレングリコールエチルエーテル(PGEE)800gを加え、副生アルコールおよび過剰の水分を減圧で留去し、ポリシロキサン1のPGEE溶液750g(化合物濃度11.5%)を得た。このもののポリスチレン換算分子量を測定したところMw=2,550であった。
エタノール400g、メタンスルホン酸0.2g及び脱イオン水120gの混合物にフェニルトリメトキシシラン11.9gおよびテトラエトキシシラン195.8gの混合物を添加し、12時間、40℃に保持し、加水分解縮合させた。反応終了後、プロピレングリコールエチルエーテル(PGEE)800gを加え、副生アルコールおよび過剰の水分を減圧で留去し、ポリシロキサン2のPGEE溶液750g(化合物濃度11.7%)を得た。このもののポリスチレン換算分子量を測定したところMw=2,500であった。
エタノール400g、メタンスルホン酸0.2g及び脱イオン水120gの混合物にフェニルトリメトキシシラン13.9gおよびテトラエトキシシラン193.7gの混合物を添加し、12時間、40℃に保持し、加水分解縮合させた。反応終了後、プロピレングリコールエチルエーテル(PGEE)800gを加え、副生アルコールおよび過剰の水分を減圧で留去し、ポリシロキサン3のPGEE溶液750g(化合物濃度11.5%)を得た。このもののポリスチレン換算分子量を測定したところMw=2,500であった。
上記合成例で得られたポリシロキサンと溶剤、架橋促進剤を表1に示す割合で混合し、0.1μmのフッ素樹脂製のフィルターで濾過することによって、ポリシロキサン含有レジスト下層膜形成用組成物溶液をそれぞれ調製し、それぞれSol.1〜9とした。
上記の試験で作成した塗布膜を下記条件(1)または下記条件(2)でドライエッチングし、エッチング速度を求めた。
装置:東京エレクトロン(株)製ドライエッチング装置Telius SP
エッチング条件(1):
チャンバー圧力 10Pa
Upper/Lower RFパワー 500W/300W
CHF3ガス流量 50ml/min
CF4ガス流量 150ml/min
Arガス流量 100ml/min
処理時間 40sec
装置:東京エレクトロン(株)製ドライエッチング装置Telius SP
エッチング条件(2):
チャンバー圧力 2Pa
Upper/Lower RFパワー 1000W/300W
O2ガス流量 300ml/min
N2ガス流量 100ml/min
Arガス流量 100ml/min
処理時間 30sec
シリコンウエハー上に、信越化学工業(株)製スピンオンカーボン膜ODL−50(カーボン含有量80質量%)を膜厚200nmで形成した。その上にポリシロキサン含有中間層材料溶液Sol.1〜5および9を塗布して240℃で60秒間加熱して、膜厚35nmのポリシロキサン含有膜Film1〜5および9を作製した。
このパターニングにより、43nm1:1のネガ型のラインアンドスペースパターンを得た。この寸法を(株)日立ハイテクノロジーズ製電子顕微鏡(CG4000)でパターン倒れを、断面形状を(株)日立製作所製電子顕微鏡(S−9380)で測定した(表6参照)。
分子量(Mw)=7,800
分散度(Mw/Mn)=1.78
分子量(Mw)=8,800
分散度(Mw/Mn)=1.69
上記、パターニング試験で作成したレジストパターンをマスクにして加工を下記条件(1)でドライエッチングし、次いで下記条件(2)でドライエッチングしスピンオンカーボン膜にパターンを転写した。得られたパターンの断面形状を(株)日立製作所製電子顕微鏡(S−9380)で、パターンラフネスを(株)日立ハイテクノロジーズ製電子顕微鏡(CG4000)でそれぞれ形状を比較し表にまとめた。
装置:東京エレクトロン(株)製ドライエッチング装置Telius SP
エッチング条件(1):
チャンバー圧力 10Pa
Upper/Lower RFパワー 500W/300W
CHF3ガス流量 50ml/min
CF4ガス流量 150ml/min
Arガス流量 100ml/min
処理時間 40sec
装置:東京エレクトロン(株)製ドライエッチング装置Telius SP
エッチング条件(2):
チャンバー圧力 2Pa
Upper/Lower RFパワー 1000W/300W
O2ガス流量 300ml/min
N2ガス流量 100ml/min
Arガス流量 100ml/min
処理時間 30sec
ポリシロキサン化合物の熱架橋促進剤であって、
下記一般式(A−1)で示されるものであることを特徴とするポリシロキサン化合物の熱架橋促進剤を提供する。
L’(OR4B)B4(OR5B)B5(O)B6 (B−2)
(式中、R4B、R5Bは炭素数1〜30の有機基であり、B4+B5+B6はL’の種類により決まる価数であり、B4、B5、B6は0以上の整数、L’は周期律表のIII族、IV族、又はV族の元素で炭素を除くものである。)
更に、水溶性有機溶剤と水難溶性有機溶剤の混合物を使用することも可能である。
あるいは、上記有機酸を組成物のpHに換算して、好ましくは0≦pH≦7、より好ましくは0.3≦pH≦6.5、更に好ましくは0.5≦pH≦6となるように配合することがよい。
シリコンウエハー上に、信越化学工業(株)製スピンオンカーボン膜ODL−50(カーボン含有量80質量%)を膜厚200nmで形成した。その上にポリシロキサン含有レジスト下層膜形成用組成物溶液Sol.1〜5および9を塗布して240℃で60秒間加熱して、膜厚35nmのポリシロキサン含有膜Film1〜5および9を作製した。
Claims (11)
- ポリシロキサン化合物の熱架橋促進剤であって、
下記一般式(A−1)で示されるものであることを特徴とするポリシロキサン化合物の熱架橋促進剤。
- 請求項1に記載の熱架橋促進剤およびポリシロキサンを含有することを特徴とするポリシロキサン含有レジスト下層膜形成用組成物。
- 前記ポリシロキサンが下記一般式(B−1)で示される化合物、これの加水分解物、これの縮合物、これの加水分解縮合物、のうち1つ以上を含有することを特徴とする請求項2に記載のポリシロキサン含有レジスト下層膜形成用組成物。
R1B B1R2B B2R3B B3Si(OR0B)(4−B1−B2−B3) (B−1)
(式中、R0Bは炭素数1〜6の炭化水素基であり、R1B、R2B、R3Bは水素原子または1価の有機基である。また、B1、B2、B3は0又は1であり、0≦B1+B2+B3≦3である。) - 被加工体上に塗布型有機下層膜材料を用いて有機下層膜を形成し、該有機下層膜の上に請求項2又は3に記載のポリシロキサン含有レジスト下層膜形成用組成物を用いてポリシロキサン含有レジスト下層膜を形成し、該ポリシロキサン含有レジスト下層膜上にレジストパターンを形成し、該パターンが形成されたレジスト膜をマスクにして前記レジスト下層膜にドライエッチングでパターン転写し、該パターンが転写されたレジスト下層膜をマスクにして前記有機下層膜をドライエッチングでパターン転写し、さらに該パターンが転写された有機下層膜をマスクにして前記被加工体にドライエッチングでパターンを転写することを特徴とするパターン形成方法。
- 被加工体上に炭素を主成分とする有機ハードマスクをCVD法で形成し、該有機ハードマスクの上に請求項2又は3に記載のポリシロキサン含有レジスト下層膜形成用組成物を用いてポリシロキサン含有レジスト下層膜を形成し、該ポリシロキサン含有レジスト下層膜上にレジストパターンを形成し、該パターンが形成されたレジスト膜をマスクにして前記レジスト下層膜にドライエッチングでパターン転写し、該パターンが転写されたレジスト下層膜をマスクにして前記有機ハードマスクをドライエッチングでパターン転写し、さらに該パターンが転写された有機ハードマスクをマスクにして前記被加工体にドライエッチングでパターンを転写することを特徴とするパターン形成方法。
- 前記被加工体が、半導体装置基板、金属膜、金属炭化膜、金属酸化膜、金属窒化膜、金属酸化炭化膜または金属酸化窒化膜であることを特徴とする請求項4又は5に記載のパターン形成方法。
- 前記被加工体を構成する金属がケイ素、チタン、タングステン、ハフニウム、ジルコニウム、クロム、ゲルマニウム、銅、アルミニウム、インジウム、ガリウム、ヒ素、パラジウム、鉄、タンタル、イリジウム、モリブデンまたはこれらの合金であることを特徴とする請求項4〜6のいずれか1項に記載のパターン形成方法。
- 誘導自己組織化法(DSA法)またはナノインプリンティングリソグラフィー法でレジストパターンを形成することを特徴とする請求項4〜7のいずれか1項に記載のパターン形成方法。
- 前記レジストパターンの形成は、化学増幅型レジスト組成物を用いてフォトレジスト膜を形成し、加熱処理後に高エネルギー線で前記フォトレジスト膜を露光し、アルカリ現像液を用いて前記フォトレジスト膜の露光部を溶解させてポジ型パターンを形成することを特徴とする請求項4〜7のいずれか1項に記載のパターン形成方法。
- 前記レジストパターンの形成は、化学増幅型レジスト組成物を用いてフォトレジスト膜を形成し、加熱処理後に高エネルギー線で前記フォトレジスト膜を露光し、有機溶剤の現像液を用いて前記フォトレジスト膜の未露光部を溶解させることによりネガ型パターンを形成することを特徴とする請求項4〜7のいずれか1項に記載のパターン形成方法。
- 前記高エネルギー線を用いるリソグラフィー法が300nm以下の光を用いたリソグラフィー法、EUV光を用いたリソグラフィー法または電子線直接描画法であることを特徴とする請求項9又は10に記載のパターン形成方法。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013010814A JP5830041B2 (ja) | 2013-01-24 | 2013-01-24 | ポリシロキサン含有レジスト下層膜形成用組成物、及びこれを用いたパターン形成方法 |
US14/142,412 US20140205951A1 (en) | 2013-01-24 | 2013-12-27 | Thermal crosslinking accelerator, polysiloxane-containing resist underlayer film forming composition containing same, and patterning process using same |
KR1020140005927A KR101825254B1 (ko) | 2013-01-24 | 2014-01-17 | 열가교촉진제, 이것을 함유하는 폴리실록산 함유 레지스트 하층막 형성용 조성물 및 이것을 이용한 패턴 형성 방법 |
TW103102143A TWI515196B (zh) | 2013-01-24 | 2014-01-21 | 含有此熱交聯促進劑之含聚矽氧烷之光阻下層膜形成用組成物、及使用此組成物之圖案形成方法 |
US15/822,818 US20180081272A1 (en) | 2013-01-24 | 2017-11-27 | Thermal crosslinking accelerator, polysiloxane-containing resist underlayer film forming composition containing same, and patterning process using same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013010814A JP5830041B2 (ja) | 2013-01-24 | 2013-01-24 | ポリシロキサン含有レジスト下層膜形成用組成物、及びこれを用いたパターン形成方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2014141585A true JP2014141585A (ja) | 2014-08-07 |
JP5830041B2 JP5830041B2 (ja) | 2015-12-09 |
Family
ID=51207946
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013010814A Active JP5830041B2 (ja) | 2013-01-24 | 2013-01-24 | ポリシロキサン含有レジスト下層膜形成用組成物、及びこれを用いたパターン形成方法 |
Country Status (4)
Country | Link |
---|---|
US (2) | US20140205951A1 (ja) |
JP (1) | JP5830041B2 (ja) |
KR (1) | KR101825254B1 (ja) |
TW (1) | TWI515196B (ja) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20170093113A (ko) * | 2014-12-08 | 2017-08-14 | 닛산 가가쿠 고교 가부시키 가이샤 | 할로겐함유 카르본산아미드기를 가지는 가수분해성 실란을 포함하는 리소그래피용 레지스트 하층막 형성 조성물 |
US9971245B2 (en) | 2015-02-05 | 2018-05-15 | Shin-Etsu Chemical Co., Ltd. | Silicon-containing polymer, silicon-containing compound, composition for forming a resist under layer film, and patterning process |
KR20180059378A (ko) * | 2016-11-25 | 2018-06-04 | 주식회사 엘지화학 | 이온성 화합물, 이를 포함하는 코팅 조성물 및 유기 발광 소자 |
US10109485B2 (en) | 2015-11-27 | 2018-10-23 | Shin-Etsu Chemical Co., Ltd. | Silicon-containing condensate, composition for forming a silicon-containing resist under layer film, and patterning process |
WO2020036074A1 (ja) * | 2018-08-17 | 2020-02-20 | 信越化学工業株式会社 | オルガノポリシロキサン化合物を含有する組成物、その製造方法、コーティング剤及び被覆物品 |
EP3736632A1 (en) | 2019-04-26 | 2020-11-11 | Shin-Etsu Chemical Co., Ltd. | Method for measuring distance of diffusion of curing catalyst |
KR20210033922A (ko) * | 2019-09-19 | 2021-03-29 | 신에쓰 가가꾸 고교 가부시끼가이샤 | 규소 함유 레지스트 하층막 형성용 조성물 및 패턴 형성 방법 |
US12001138B2 (en) | 2019-09-19 | 2024-06-04 | Shin-Etsu Chemical Co., Ltd. | Composition for forming silicon-containing resist underlayer film and patterning process |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5642731B2 (ja) * | 2012-04-27 | 2014-12-17 | 信越化学工業株式会社 | パターン形成方法 |
JP6323295B2 (ja) * | 2014-10-20 | 2018-05-16 | 信越化学工業株式会社 | パターン形成方法及び化学増幅ネガ型レジスト組成物 |
KR102374206B1 (ko) | 2017-12-05 | 2022-03-14 | 삼성전자주식회사 | 반도체 장치 제조 방법 |
JP7282667B2 (ja) * | 2019-01-22 | 2023-05-29 | 信越化学工業株式会社 | ケイ素含有レジスト下層膜形成用組成物及びパターン形成方法 |
JP7368342B2 (ja) * | 2020-12-07 | 2023-10-24 | 信越化学工業株式会社 | ケイ素含有レジスト下層膜形成用組成物及びパターン形成方法 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05230284A (ja) * | 1992-02-19 | 1993-09-07 | Hitachi Ltd | 樹脂組成物その製造法並びに樹脂封止型半導体装置 |
JP2004238517A (ja) * | 2003-02-06 | 2004-08-26 | Shin Etsu Chem Co Ltd | エポキシ樹脂組成物の製造方法 |
JP2006113498A (ja) * | 2004-10-18 | 2006-04-27 | Jsr Corp | エッチングマスク組成物 |
JP2006188593A (ja) * | 2005-01-05 | 2006-07-20 | Dow Corning Toray Co Ltd | シリコーンレジン組成物、硬化性樹脂組成物、および硬化樹脂 |
JP2011064770A (ja) * | 2009-09-15 | 2011-03-31 | Sumitomo Chemical Co Ltd | 感光性樹脂組成物 |
JP2012057000A (ja) * | 2010-09-07 | 2012-03-22 | Shin-Etsu Chemical Co Ltd | シリコーン樹脂組成物、半導体装置の封止材、及び半導体装置 |
JP2013001776A (ja) * | 2011-06-15 | 2013-01-07 | Mitsubishi Chemicals Corp | 半導体発光装置用の樹脂成形体用材料およびその成形体 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100357656B1 (ko) * | 1995-01-31 | 2003-02-11 | 이데미쓰 고산 가부시키가이샤 | 폴리카보네이트의제조방법 |
US6461419B1 (en) * | 1999-11-01 | 2002-10-08 | 3M Innovative Properties Company | Curable inkjet printable ink compositions |
CN100556929C (zh) * | 2003-10-10 | 2009-11-04 | 陶氏康宁公司 | 含有醇官能的有机硅树脂的聚氨酯组合物 |
US8349393B2 (en) | 2004-07-29 | 2013-01-08 | Enthone Inc. | Silver plating in electronics manufacture |
US7189494B2 (en) * | 2005-05-26 | 2007-03-13 | Eastman Kodak Company | On-press developable imageable element comprising a tetraarylborate salt |
US7332253B1 (en) * | 2006-07-27 | 2008-02-19 | Eastman Kodak Company | Negative-working radiation-sensitive compositions and imageable materials |
WO2009104552A1 (ja) * | 2008-02-18 | 2009-08-27 | 日産化学工業株式会社 | 環状アミノ基を有するシリコン含有レジスト下層膜形成組成物 |
TWI521018B (zh) * | 2010-07-14 | 2016-02-11 | Jsr Corp | Poly Silicon alumoxane composition and pattern forming method |
-
2013
- 2013-01-24 JP JP2013010814A patent/JP5830041B2/ja active Active
- 2013-12-27 US US14/142,412 patent/US20140205951A1/en not_active Abandoned
-
2014
- 2014-01-17 KR KR1020140005927A patent/KR101825254B1/ko active IP Right Grant
- 2014-01-21 TW TW103102143A patent/TWI515196B/zh active
-
2017
- 2017-11-27 US US15/822,818 patent/US20180081272A1/en not_active Abandoned
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05230284A (ja) * | 1992-02-19 | 1993-09-07 | Hitachi Ltd | 樹脂組成物その製造法並びに樹脂封止型半導体装置 |
JP2004238517A (ja) * | 2003-02-06 | 2004-08-26 | Shin Etsu Chem Co Ltd | エポキシ樹脂組成物の製造方法 |
JP2006113498A (ja) * | 2004-10-18 | 2006-04-27 | Jsr Corp | エッチングマスク組成物 |
JP2006188593A (ja) * | 2005-01-05 | 2006-07-20 | Dow Corning Toray Co Ltd | シリコーンレジン組成物、硬化性樹脂組成物、および硬化樹脂 |
JP2011064770A (ja) * | 2009-09-15 | 2011-03-31 | Sumitomo Chemical Co Ltd | 感光性樹脂組成物 |
JP2012057000A (ja) * | 2010-09-07 | 2012-03-22 | Shin-Etsu Chemical Co Ltd | シリコーン樹脂組成物、半導体装置の封止材、及び半導体装置 |
JP2013001776A (ja) * | 2011-06-15 | 2013-01-07 | Mitsubishi Chemicals Corp | 半導体発光装置用の樹脂成形体用材料およびその成形体 |
Non-Patent Citations (1)
Title |
---|
JPN6015015916; Ernst A.Orthmann,Volker Enkelmann,Gerhard Wegner: 'Synthesis and Electrochemical Doping of Phthalocyaninatopolysiloxane' Makromol.Chem.,Rapid Commun. vol.4, 1983, p687-692 * |
Cited By (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20170093113A (ko) * | 2014-12-08 | 2017-08-14 | 닛산 가가쿠 고교 가부시키 가이샤 | 할로겐함유 카르본산아미드기를 가지는 가수분해성 실란을 포함하는 리소그래피용 레지스트 하층막 형성 조성물 |
KR102462194B1 (ko) | 2014-12-08 | 2022-11-02 | 닛산 가가쿠 가부시키가이샤 | 할로겐함유 카르본산아미드기를 가지는 가수분해성 실란을 포함하는 리소그래피용 레지스트 하층막 형성 조성물 |
US9971245B2 (en) | 2015-02-05 | 2018-05-15 | Shin-Etsu Chemical Co., Ltd. | Silicon-containing polymer, silicon-containing compound, composition for forming a resist under layer film, and patterning process |
US10109485B2 (en) | 2015-11-27 | 2018-10-23 | Shin-Etsu Chemical Co., Ltd. | Silicon-containing condensate, composition for forming a silicon-containing resist under layer film, and patterning process |
KR102002885B1 (ko) | 2016-11-25 | 2019-10-01 | 주식회사 엘지화학 | 코팅 조성물 및 유기 발광 소자 |
KR101999708B1 (ko) | 2016-11-25 | 2019-07-12 | 주식회사 엘지화학 | 이온성 화합물, 이를 포함하는 코팅 조성물 및 유기 발광 소자 |
US11228011B2 (en) | 2016-11-25 | 2022-01-18 | Lg Chem, Ltd. | Ionic compound, coating composition comprising same, and organic light-emitting diode |
JP2019537835A (ja) * | 2016-11-25 | 2019-12-26 | エルジー・ケム・リミテッド | イオン性化合物、これを含むコーティング組成物及び有機発光素子 |
JP2020500421A (ja) * | 2016-11-25 | 2020-01-09 | エルジー・ケム・リミテッド | コーティング組成物及び有機発光素子 |
US11765921B2 (en) | 2016-11-25 | 2023-09-19 | Lg Chem, Ltd. | Ionic compound, and coating composition and organic light-emitting device comprising same |
US11737300B2 (en) | 2016-11-25 | 2023-08-22 | Lg Chem, Ltd. | Coating composition and organic light-emitting device |
KR20180059381A (ko) * | 2016-11-25 | 2018-06-04 | 주식회사 엘지화학 | 코팅 조성물 및 유기 발광 소자 |
KR20180059378A (ko) * | 2016-11-25 | 2018-06-04 | 주식회사 엘지화학 | 이온성 화합물, 이를 포함하는 코팅 조성물 및 유기 발광 소자 |
US11165037B2 (en) | 2016-11-25 | 2021-11-02 | Lg Chem, Ltd. | Organic light-emitting diode |
JP7136208B2 (ja) | 2018-08-17 | 2022-09-13 | 信越化学工業株式会社 | オルガノポリシロキサン化合物を含有する組成物、その製造方法、コーティング剤及び被覆物品 |
JPWO2020036074A1 (ja) * | 2018-08-17 | 2021-08-10 | 信越化学工業株式会社 | オルガノポリシロキサン化合物を含有する組成物、その製造方法、コーティング剤及び被覆物品 |
WO2020036074A1 (ja) * | 2018-08-17 | 2020-02-20 | 信越化学工業株式会社 | オルガノポリシロキサン化合物を含有する組成物、その製造方法、コーティング剤及び被覆物品 |
US11592287B2 (en) | 2019-04-26 | 2023-02-28 | Shin-Etsu Chemical Co., Ltd. | Method for measuring distance of diffusion of curing catalyst |
EP3736632A1 (en) | 2019-04-26 | 2020-11-11 | Shin-Etsu Chemical Co., Ltd. | Method for measuring distance of diffusion of curing catalyst |
KR20210033922A (ko) * | 2019-09-19 | 2021-03-29 | 신에쓰 가가꾸 고교 가부시끼가이샤 | 규소 함유 레지스트 하층막 형성용 조성물 및 패턴 형성 방법 |
KR102466095B1 (ko) * | 2019-09-19 | 2022-11-10 | 신에쓰 가가꾸 고교 가부시끼가이샤 | 규소 함유 레지스트 하층막 형성용 조성물 및 패턴 형성 방법 |
US12001138B2 (en) | 2019-09-19 | 2024-06-04 | Shin-Etsu Chemical Co., Ltd. | Composition for forming silicon-containing resist underlayer film and patterning process |
Also Published As
Publication number | Publication date |
---|---|
JP5830041B2 (ja) | 2015-12-09 |
US20140205951A1 (en) | 2014-07-24 |
KR20140095431A (ko) | 2014-08-01 |
TWI515196B (zh) | 2016-01-01 |
US20180081272A1 (en) | 2018-03-22 |
TW201439101A (zh) | 2014-10-16 |
KR101825254B1 (ko) | 2018-03-14 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5830041B2 (ja) | ポリシロキサン含有レジスト下層膜形成用組成物、及びこれを用いたパターン形成方法 | |
JP5650086B2 (ja) | レジスト下層膜形成用組成物、及びパターン形成方法 | |
KR101778430B1 (ko) | 패턴 형성 방법 | |
JP5453361B2 (ja) | ケイ素含有レジスト下層膜形成用組成物、及びパターン形成方法 | |
JP5882776B2 (ja) | レジスト下層膜形成用組成物、及びパターン形成方法 | |
JP5739360B2 (ja) | ケイ素含有レジスト下層膜形成用組成物、及びパターン形成方法 | |
JP5830044B2 (ja) | レジスト下層膜形成用組成物及びパターン形成方法 | |
JP6250514B2 (ja) | 塗布型bpsg膜形成用組成物、基板、及びパターン形成方法 | |
JP5798102B2 (ja) | ケイ素含有レジスト下層膜形成用組成物及びパターン形成方法 | |
JP5746005B2 (ja) | ケイ素含有レジスト下層膜形成用組成物及びパターン形成方法 | |
JP5859466B2 (ja) | チタン含有レジスト下層膜形成用組成物及びパターン形成方法 | |
JP5830048B2 (ja) | チタン含有レジスト下層膜形成用組成物及びパターン形成方法 | |
JP6189758B2 (ja) | チタン含有レジスト下層膜形成用組成物及びパターン形成方法 | |
JP2015229640A (ja) | 4級アンモニウム塩化合物、レジスト下層膜形成用組成物、及びパターン形成方法 | |
JP6114157B2 (ja) | ケイ素含有レジスト下層膜形成用組成物及びパターン形成方法 | |
JP6196194B2 (ja) | 紫外線吸収剤、レジスト下層膜形成用組成物、及びパターン形成方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20141222 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20150410 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20150421 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20150514 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20151006 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20151023 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5830041 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |