JP2014139545A - 赤外線検出素子 - Google Patents
赤外線検出素子 Download PDFInfo
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Abstract
【解決手段】赤外線検出素子20は、焦電体基板2gに2つの受光部2rが形成されている。赤外線検出素子20は、焦電体基板2gに、平面視において各受光部2rの各々の一部を除いて受光部2rを取り囲む孔2sが形成されている。受光部2rは、焦電体基板2gの表側、裏側それぞれに形成され互いに対向する第1電極2h、第2電極2iと、焦電体基板2gにおいて第1電極2hと第2電極2iとに挟まれた部分2ggとで構成される。赤外線検出素子20は、焦電体基板2gの表側に、平面視において孔2sで囲んだ領域全体を覆う赤外線吸収層26が設けられている。赤外線吸収層26は、樹脂中に、カーボン系微粉末、金属系微粉末、金属酸化物系微粉末の群から選択される少なくとも1種の導電性微粉末が分散された樹脂層からなる。
【選択図】図1
Description
以下では、本実施形態の赤外線検出素子20について図1に基づいて説明する。
1<(0.4/0.2)/{(Sd×Sρ+Ad×Aρ)/(Sd×Sρ)}
そして、この式を整理すると、
0.2/(Sd×Sρ)<0.4/(Sd×Sρ+Ad×Aρ)
となり、更に整理すると、
Ad<(Sd×Sρ)/Aρ
となる。
Ad=(Sd×Sρ)/Aρ
となる。これは、赤外線吸収層26の厚さをAdが、(Sd×Sρ)/Aρのときには感度の変化がないことを意味し、(Sd×Sρ)/Aρよりも薄ければ感度が向上することを意味している。ここで、赤外線吸収層26の厚さAdの規格化厚さをNAd=(Sd×Sρ)/Aρ、規格化厚さNAd=1のときの感度を1とする相対的な感度を規格化感度と定義する。この場合、赤外線吸収層26の規格化厚さNAdと受光部2rの規格化感度との関係は、図3に示すようになる。赤外線検出素子20は、図3から分かるように、赤外線吸収層26の規格化厚さNAdを1よりも小さくすることにより、規格化感度を1よりも大きくすることが可能となる。
(An×Ad)>(λt/4)
の関係を満たすのが好ましい。これにより、赤外線検出素子20は、赤外線吸収層26の赤外線吸収率を高めることが可能となる。
以下では、本実施形態の赤外線検出素子20について図6に基づいて説明する。
2gg 焦電体基板において第1電極と第2電極とに挟まれた部分
2s 孔
2r 受光部
2h 第1電極
2i 第2電極
2j 第1出力端子
2k 第2出力端子
2m 第1配線
2n 第2配線
20 赤外線検出素子
Claims (3)
- 焦電体基板に受光部が形成され、前記焦電体基板に、平面視において前記受光部の一部を除いて前記受光部を取り囲む孔が形成された赤外線検出素子であって、前記受光部は、前記焦電体基板の表側、裏側それぞれに形成され互いに対向する第1電極、第2電極と、前記焦電体基板において前記第1電極と前記第2電極とに挟まれた部分とで構成され、前記焦電体基板の表側には、平面視において前記孔で囲まれた領域全体を覆う赤外線吸収層が設けられており、前記赤外線吸収層は、樹脂中に、カーボン系微粉末、金属系微粉末、金属酸化物系微粉末の群から選択される少なくとも1種の導電性微粉末が分散された樹脂層からなることを特徴とする赤外線検出素子。
- 前記焦電体基板の前記表側、裏側それぞれに形成され前記第1電極、前記第2電極それぞれに電気的に接続された第1配線、第2配線を備え、前記孔は、前記第1配線及び前記第2配線を避けた位置に形成されており、前記第1電極の外周縁は、前記孔の前記第1電極側の開孔縁から離れていることを特徴とする請求項1記載の赤外線検出素子。
- 前記樹脂は、フェノール系樹脂であることを特徴とする請求項1又は2記載の赤外線検出素子。
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JP2013008646A JP2014139545A (ja) | 2013-01-21 | 2013-01-21 | 赤外線検出素子 |
CN201480005536.0A CN104937385B (zh) | 2013-01-21 | 2014-01-20 | 红外线检测元件、红外线检测器及红外线式气体传感器 |
US14/761,807 US9528879B2 (en) | 2013-01-21 | 2014-01-20 | Infrared detection element, infrared detector, and infrared type gas sensor |
EP14740724.1A EP2947432A4 (en) | 2013-01-21 | 2014-01-20 | INFRARED DETECTION ELEMENT, INFRARED SENSOR, AND INFRARED GAS SENSOR |
PCT/JP2014/000243 WO2014112392A1 (ja) | 2013-01-21 | 2014-01-20 | 赤外線検出素子、赤外線検出器及び赤外線式ガスセンサ |
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JPH01227929A (ja) * | 1988-03-09 | 1989-09-12 | Nippon Soken Inc | 熱型赤外線センサ |
JPH06307929A (ja) * | 1993-04-28 | 1994-11-04 | Shimadzu Corp | 赤外線検出器 |
JP3372180B2 (ja) * | 1996-04-15 | 2003-01-27 | 松下電工株式会社 | 焦電型赤外線検知素子及び焦電型赤外線センサ |
JP2005241457A (ja) * | 2004-02-26 | 2005-09-08 | Hamamatsu Photonics Kk | 赤外線センサ及びその製造方法 |
JP2013004780A (ja) * | 2011-06-17 | 2013-01-07 | Hitachi Cable Ltd | 焦電センサ素子及びそれを用いた検出装置 |
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Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH01227929A (ja) * | 1988-03-09 | 1989-09-12 | Nippon Soken Inc | 熱型赤外線センサ |
JPH06307929A (ja) * | 1993-04-28 | 1994-11-04 | Shimadzu Corp | 赤外線検出器 |
JP3372180B2 (ja) * | 1996-04-15 | 2003-01-27 | 松下電工株式会社 | 焦電型赤外線検知素子及び焦電型赤外線センサ |
JP2005241457A (ja) * | 2004-02-26 | 2005-09-08 | Hamamatsu Photonics Kk | 赤外線センサ及びその製造方法 |
JP2013004780A (ja) * | 2011-06-17 | 2013-01-07 | Hitachi Cable Ltd | 焦電センサ素子及びそれを用いた検出装置 |
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