JP2014123782A5 - - Google Patents
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- Publication number
- JP2014123782A5 JP2014123782A5 JP2014069932A JP2014069932A JP2014123782A5 JP 2014123782 A5 JP2014123782 A5 JP 2014123782A5 JP 2014069932 A JP2014069932 A JP 2014069932A JP 2014069932 A JP2014069932 A JP 2014069932A JP 2014123782 A5 JP2014123782 A5 JP 2014123782A5
- Authority
- JP
- Japan
- Prior art keywords
- line
- gate
- common
- electrical connection
- transistor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims description 20
- 239000010410 layer Substances 0.000 claims description 17
- 239000011229 interlayer Substances 0.000 claims description 10
- 239000012535 impurity Substances 0.000 claims 21
- 239000002356 single layer Substances 0.000 claims 6
- 238000005530 etching Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000010363 phase shift Effects 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014069932A JP5674249B2 (ja) | 1998-05-01 | 2014-03-28 | 半導体記憶装置 |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12254298 | 1998-05-01 | ||
JP1998122542 | 1998-05-01 | ||
JP2014069932A JP5674249B2 (ja) | 1998-05-01 | 2014-03-28 | 半導体記憶装置 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012202822A Division JP2013016846A (ja) | 1998-05-01 | 2012-09-14 | 半導体記憶装置 |
Related Child Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2014177296A Division JP5674251B2 (ja) | 1998-05-01 | 2014-09-01 | 半導体記憶装置 |
JP2014177297A Division JP2014222787A (ja) | 1998-05-01 | 2014-09-01 | 半導体記憶装置 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2014123782A JP2014123782A (ja) | 2014-07-03 |
JP2014123782A5 true JP2014123782A5 (enrdf_load_stackoverflow) | 2014-10-16 |
JP5674249B2 JP5674249B2 (ja) | 2015-02-25 |
Family
ID=41031892
Family Applications (8)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009083754A Withdrawn JP2009177200A (ja) | 1998-05-01 | 2009-03-30 | 半導体記憶装置 |
JP2012102233A Expired - Lifetime JP5035764B2 (ja) | 1998-05-01 | 2012-04-27 | 半導体記憶装置 |
JP2012149324A Expired - Lifetime JP5131407B2 (ja) | 1998-05-01 | 2012-07-03 | 半導体記憶装置 |
JP2012202822A Withdrawn JP2013016846A (ja) | 1998-05-01 | 2012-09-14 | 半導体記憶装置 |
JP2014069932A Expired - Lifetime JP5674249B2 (ja) | 1998-05-01 | 2014-03-28 | 半導体記憶装置 |
JP2014177297A Withdrawn JP2014222787A (ja) | 1998-05-01 | 2014-09-01 | 半導体記憶装置 |
JP2014177296A Expired - Lifetime JP5674251B2 (ja) | 1998-05-01 | 2014-09-01 | 半導体記憶装置 |
JP2015188669A Withdrawn JP2016021590A (ja) | 1998-05-01 | 2015-09-25 | 半導体記憶装置 |
Family Applications Before (4)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009083754A Withdrawn JP2009177200A (ja) | 1998-05-01 | 2009-03-30 | 半導体記憶装置 |
JP2012102233A Expired - Lifetime JP5035764B2 (ja) | 1998-05-01 | 2012-04-27 | 半導体記憶装置 |
JP2012149324A Expired - Lifetime JP5131407B2 (ja) | 1998-05-01 | 2012-07-03 | 半導体記憶装置 |
JP2012202822A Withdrawn JP2013016846A (ja) | 1998-05-01 | 2012-09-14 | 半導体記憶装置 |
Family Applications After (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2014177297A Withdrawn JP2014222787A (ja) | 1998-05-01 | 2014-09-01 | 半導体記憶装置 |
JP2014177296A Expired - Lifetime JP5674251B2 (ja) | 1998-05-01 | 2014-09-01 | 半導体記憶装置 |
JP2015188669A Withdrawn JP2016021590A (ja) | 1998-05-01 | 2015-09-25 | 半導体記憶装置 |
Country Status (1)
Country | Link |
---|---|
JP (8) | JP2009177200A (enrdf_load_stackoverflow) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7369471B2 (ja) * | 2019-07-11 | 2023-10-26 | ユニサンティス エレクトロニクス シンガポール プライベート リミテッド | 柱状半導体装置と、その製造方法 |
CN114514604B (zh) * | 2019-10-11 | 2024-10-29 | 株式会社索思未来 | 半导体装置 |
JP7315016B2 (ja) * | 2019-10-11 | 2023-07-26 | 株式会社ソシオネクスト | 半導体装置 |
WO2021079511A1 (ja) * | 2019-10-25 | 2021-04-29 | 株式会社ソシオネクスト | 半導体装置 |
JP7363921B2 (ja) * | 2019-12-05 | 2023-10-18 | 株式会社ソシオネクスト | 半導体装置 |
Family Cites Families (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5055716A (en) * | 1990-05-15 | 1991-10-08 | Siarc | Basic cell for bicmos gate array |
JPH04145656A (ja) * | 1990-10-08 | 1992-05-19 | Nec Corp | 半導体記憶装置及びその製造方法 |
JPH05136373A (ja) * | 1990-11-21 | 1993-06-01 | Ricoh Co Ltd | 半導体集積回路装置及びその製造方法 |
US5287304A (en) * | 1990-12-31 | 1994-02-15 | Texas Instruments Incorporated | Memory cell circuit and array |
JPH04257258A (ja) * | 1991-02-08 | 1992-09-11 | Nec Corp | Mos型スタティックメモリ |
US5166902A (en) * | 1991-03-18 | 1992-11-24 | United Technologies Corporation | SRAM memory cell |
GB2254487B (en) * | 1991-03-23 | 1995-06-21 | Sony Corp | Full CMOS type static random access memories |
JPH05136372A (ja) * | 1991-11-12 | 1993-06-01 | Sony Corp | スタテイツクramのメモリセルおよびそのメモリセルアレイ |
EP0562207B1 (en) * | 1992-03-27 | 1996-06-05 | International Business Machines Corporation | Method of forming thin film pseudo-planar PFET devices and structures resulting therefrom |
JPH05299621A (ja) * | 1992-04-20 | 1993-11-12 | Mitsubishi Electric Corp | 半導体メモリ装置およびゲートアレイ装置 |
JPH06104420A (ja) * | 1992-09-22 | 1994-04-15 | Toshiba Corp | 半導体装置およびその製造方法 |
JP2705874B2 (ja) * | 1992-12-18 | 1998-01-28 | 川崎製鉄株式会社 | 半導体集積回路 |
JP3237346B2 (ja) * | 1993-10-29 | 2001-12-10 | ソニー株式会社 | 半導体記憶装置 |
JPH07130877A (ja) * | 1993-11-05 | 1995-05-19 | Sony Corp | 完全cmos型スタティック記憶セル |
JPH07161839A (ja) * | 1993-12-06 | 1995-06-23 | Sony Corp | 完全cmos型sram装置 |
JP3294041B2 (ja) * | 1994-02-21 | 2002-06-17 | 株式会社東芝 | 半導体装置 |
JP3426711B2 (ja) * | 1994-07-05 | 2003-07-14 | 株式会社日立製作所 | 半導体集積回路装置およびその製造方法 |
JPH08288407A (ja) * | 1995-04-12 | 1996-11-01 | Sony Corp | 半導体メモリ装置およびその製造方法 |
JPH09172078A (ja) * | 1995-12-20 | 1997-06-30 | Fujitsu Ltd | 半導体装置の配線構造及びその形成方法 |
US5719079A (en) * | 1996-05-28 | 1998-02-17 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method of making a semiconductor device having high density 4T SRAM in logic with salicide process |
JPH1056078A (ja) * | 1996-08-08 | 1998-02-24 | Fujitsu Ltd | 半導体装置 |
JPH1093024A (ja) * | 1996-09-11 | 1998-04-10 | Hitachi Ltd | 半導体集積回路装置 |
JPH10163344A (ja) * | 1996-12-05 | 1998-06-19 | Hitachi Ltd | 半導体集積回路装置およびその製造方法 |
JP3523762B2 (ja) * | 1996-12-19 | 2004-04-26 | 株式会社東芝 | 半導体記憶装置 |
JPH10326896A (ja) * | 1997-03-25 | 1998-12-08 | Toshiba Corp | 半導体装置及びその製造方法 |
US6005296A (en) * | 1997-05-30 | 1999-12-21 | Stmicroelectronics, Inc. | Layout for SRAM structure |
JP3363750B2 (ja) * | 1997-08-15 | 2003-01-08 | 株式会社日立製作所 | 半導体集積回路装置の製造方法 |
-
2009
- 2009-03-30 JP JP2009083754A patent/JP2009177200A/ja not_active Withdrawn
-
2012
- 2012-04-27 JP JP2012102233A patent/JP5035764B2/ja not_active Expired - Lifetime
- 2012-07-03 JP JP2012149324A patent/JP5131407B2/ja not_active Expired - Lifetime
- 2012-09-14 JP JP2012202822A patent/JP2013016846A/ja not_active Withdrawn
-
2014
- 2014-03-28 JP JP2014069932A patent/JP5674249B2/ja not_active Expired - Lifetime
- 2014-09-01 JP JP2014177297A patent/JP2014222787A/ja not_active Withdrawn
- 2014-09-01 JP JP2014177296A patent/JP5674251B2/ja not_active Expired - Lifetime
-
2015
- 2015-09-25 JP JP2015188669A patent/JP2016021590A/ja not_active Withdrawn
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