JP2014111385A - エッジ明瞭性が向上した構造の製造方法 - Google Patents
エッジ明瞭性が向上した構造の製造方法 Download PDFInfo
- Publication number
- JP2014111385A JP2014111385A JP2014022569A JP2014022569A JP2014111385A JP 2014111385 A JP2014111385 A JP 2014111385A JP 2014022569 A JP2014022569 A JP 2014022569A JP 2014022569 A JP2014022569 A JP 2014022569A JP 2014111385 A JP2014111385 A JP 2014111385A
- Authority
- JP
- Japan
- Prior art keywords
- emitted light
- output
- scanning
- radiation beam
- focal point
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70375—Multiphoton lithography or multiphoton photopolymerization; Imaging systems comprising means for converting one type of radiation into another type of radiation
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Abstract
【解決手段】多光子硬化性光反応性組成物に対して放射光線を走査することを含む方法である。放射光線は、所定体積の多光子硬化性光反応性組成物を少なくとも部分的に硬化させるために充分な出力を有する。本方法は更に、放射光線が走査される際に放射光線の特性を改変することを含む。
【選択図】図12
Description
65 焦点
121 正方形
123 矢印
124 縁部
125 隅部
126 縁部
129 辺
Claims (18)
- 方法であって、多光子硬化性光反応性組成物に対して放射光線を走査する工程であって、前記放射光線が所定体積の前記多光子硬化性光反応性組成物を少なくとも部分的に硬化させるために充分な出力を有する工程と、
前記放射光線が走査される際に前記放射光線の特性を改変する工程と、を含む方法。 - 前記放射光線の特性を改変する工程によって、構造のエッジ明瞭性が変化する、請求項1に記載の方法。
- 前記放射光線の特性を改変する工程が、前記光線の出力を改変することを含む、請求項1に記載の方法。
- 前記放射光線の特性を改変する工程が、
前記放射光線の出力を測定することと、
前記放射光線の測定された出力を前記放射光線の所望の出力と比較することと、
前記放射光線の測定された出力が前記放射光線の所望の出力とほぼ等しくなるように前記放射光線の出力を変化させることと、を更に含む、請求項3に記載の方法。 - 前記放射光線の特性を改変する工程が、少なくとも部分的に硬化されたボクセルのサイズがほぼ一定に維持されるように前記放射光線の出力を改変することを含む、請求項3に記載の方法。
- 前記放射光線の特性を改変する工程が、前記放射光線の焦点の走査速度の変化に応じて前記放射光線の出力を改変することを含む、請求項3に記載の方法。
- 前記放射光線の特性を改変する工程が、前記光線の走査速度を改変することを含む、請求項1に記載の方法。
- 前記放射光線の特性を改変する工程が、前記放射光線を少なくとも1つの軸方向にディザリングすることを含む、請求項1に記載の方法。
- 前記放射光線の特性を改変する工程が、前記光線の焦点を空間変調することを含む、請求項1に記載の方法。
- 前記放射光線の特性を改変する工程によって、構造の表面粗さが低下する、請求項1に記載の方法。
- 前記放射光線の特性を改変する工程が、構造の縁部に達した時点で光線のシャッターを閉じることを含む、請求項1に記載の方法。
- 方法であって、多光子硬化性光反応性組成物の内部で放射光線の焦点を走査することによって所定体積の前記多光子硬化性光反応性組成物を多光子吸収により少なくとも部分的に硬化させる工程と、
前記焦点を走査するのと同時に前記放射光線の少なくとも一部の出力を測定する工程と、
前記放射光線の前記少なくとも一部の前記測定された出力を前記放射光線の所望の出力と比較する工程と、
前記測定された出力と前記所望の出力との間の差に基づいて、前記焦点を走査するのと同時に前記放射光線の出力を調節する工程と、を含む方法。 - 放射光線の焦点を走査する工程が、前記放射光線の前記焦点の走査速度を変化させることを含み、前記放射光線の前記所望の出力が、前記走査速度が変化する際に変化する、請求項12に記載の方法。
- 前記放射光線の前記出力を調節する工程が、ほぼ一定のボクセルサイズが維持されるように前記放射光線の前記出力を調節することを更に含む、請求項12に記載の方法。
- 方法であって、多光子硬化性光反応性組成物に対して放射光線の焦点を走査する工程であって、前記放射光線が前記焦点の近傍の所定体積の前記多光子硬化性光反応性組成物を少なくとも部分的に硬化させるために充分な出力を有する工程と、
前記焦点を走査するのと同時に前記放射光線の前記焦点を少なくとも1つの軸に沿ってディザリングする工程と、を含む方法。 - 前記放射光線の前記焦点が走査される際に前記放射光線の前記出力を改変することを更に含む、請求項15に記載の方法。
- 前記放射光線の前記焦点をディザリングする工程が、所定の体積の表面に沿ってあるいはその付近に前記焦点が走査される場合には前記放射光線の前記焦点をディザリングするが、前記所定体積内を走査する場合には前記放射光線の前記焦点をディザリングしないことを含む、請求項15に記載の方法。
- 方法であって、
多光子硬化性光反応性組成物内に境界を有する領域を特定する工程と、
前記特定された領域内の多光子硬化性光反応性組成物に対して放射光線を走査する工程であって、前記放射光線が所定体積の前記多光子硬化性光反応性組成物を少なくとも部分的に硬化させるために充分な出力を有する工程と、
前記放射光線を、前記境界を超えて前記特定された領域の外部へと走査する工程と、
前記放射光線が前記特定された領域の外部に達した時点で前記放射光線のシャッターを閉じる工程と、
前記放射光線を、前記境界を越えて前記特定された領域の内部へと走査する工程であって、前記放射光線が前記特定された領域の内部に達した時点で前記放射光線のシャッターが開かれ、前記放射光線の走査速度が、光線が前記境界を越えて走査される際に変化しない工程と、を含む方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US1312107P | 2007-12-12 | 2007-12-12 | |
US61/013,121 | 2007-12-12 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010538011A Division JP5524856B2 (ja) | 2007-12-12 | 2008-11-06 | エッジ明瞭性が向上した構造の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2014111385A true JP2014111385A (ja) | 2014-06-19 |
JP5806348B2 JP5806348B2 (ja) | 2015-11-10 |
Family
ID=40755815
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010538011A Active JP5524856B2 (ja) | 2007-12-12 | 2008-11-06 | エッジ明瞭性が向上した構造の製造方法 |
JP2014022569A Active JP5806348B2 (ja) | 2007-12-12 | 2014-02-07 | エッジ明瞭性が向上した構造の製造方法 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010538011A Active JP5524856B2 (ja) | 2007-12-12 | 2008-11-06 | エッジ明瞭性が向上した構造の製造方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US8455846B2 (ja) |
EP (1) | EP2232531B1 (ja) |
JP (2) | JP5524856B2 (ja) |
CN (1) | CN101946305B (ja) |
WO (1) | WO2009075970A1 (ja) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016150553A (ja) * | 2015-02-19 | 2016-08-22 | セイコーエプソン株式会社 | 立体物造形装置、立体物造形装置の制御方法、及び、立体物造形装置の制御プログラム |
JP2016210189A (ja) * | 2015-05-13 | 2016-12-15 | ナノスクライブ ゲーエムベーハーNanoscribe GmbH | 三次元の構造を製作する方法 |
KR101766327B1 (ko) * | 2015-07-03 | 2017-08-09 | 진광식 | 자동 노광 제어 기능을 갖는 3차원 프린터 |
KR20190142337A (ko) * | 2017-05-11 | 2019-12-26 | 나노스크라이브 게엠베하 | 레이저 리소그래피에 의한 3d 구조를 제조하기 위한 방법, 및 해당 컴퓨터 프로그램 제품 |
JP2020032561A (ja) * | 2018-08-28 | 2020-03-05 | 富士ゼロックス株式会社 | 三次元形状データの生成装置、三次元造形装置、及び三次元形状データの生成プログラム |
JP2023521002A (ja) * | 2020-03-31 | 2023-05-23 | アップナノ ゲーエムベーハー | 3次元部品をリソグラフィに基づいて生成して製造するための方法及び装置 |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20100080785A (ko) | 2007-09-06 | 2010-07-12 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | 광 출력의 영역 제어를 제공하는 광 추출 구조물을 갖는 도광체 |
JP5161310B2 (ja) | 2007-09-06 | 2013-03-13 | スリーエム イノベイティブ プロパティズ カンパニー | 成形型を形成する方法及び前記成形型を使用して物品を形成する方法 |
EP2208100B8 (en) | 2007-10-11 | 2017-08-16 | 3M Innovative Properties Company | Chromatic confocal sensor |
CN101960385B (zh) * | 2008-02-26 | 2012-11-07 | 3M创新有限公司 | 多光子曝光系统 |
EP2228817B1 (en) * | 2009-03-09 | 2012-07-18 | IMS Nanofabrication AG | Global point spreading function in multi-beam patterning |
WO2014031793A2 (en) * | 2012-08-21 | 2014-02-27 | Massachusetts Institute Of Technology | Electromagnetic digital materials |
US9855698B2 (en) * | 2013-08-07 | 2018-01-02 | Massachusetts Institute Of Technology | Automatic process control of additive manufacturing device |
US10591815B2 (en) * | 2018-06-28 | 2020-03-17 | Applied Materials, Inc. | Shifting of patterns to reduce line waviness |
KR102239441B1 (ko) | 2018-08-22 | 2021-04-12 | 주식회사 엘지화학 | 마스크 필름을 이용한 편광판의 제조방법 및 그 편광판 |
LU101723B1 (en) * | 2020-03-31 | 2021-09-30 | Univ Hamburg | Microchannel sensor and method of manufacturing the same |
LU101722B1 (en) * | 2020-03-31 | 2021-09-30 | Univ Hamburg | Step-wise formation of a three-dimensional structure employing different resolutions |
CN113954359A (zh) * | 2021-10-29 | 2022-01-21 | 江苏迪盛智能科技有限公司 | 一种扫描式光固化3d打印装置及其方法 |
WO2023248159A1 (en) | 2022-06-23 | 2023-12-28 | 3M Innovative Properties Company | Methods and devices for removing particles from fluids |
WO2024107373A1 (en) | 2022-11-15 | 2024-05-23 | Solventum Intellectual Properties Company | Methods and kits for removing particles from fluids |
WO2024105470A1 (en) | 2022-11-15 | 2024-05-23 | Solventum Intellectual Properties Company | Microstructured substrate including connected wells |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01228828A (ja) * | 1988-03-08 | 1989-09-12 | Osaka Prefecture | 光学的造形法 |
JPH03193434A (ja) * | 1989-12-25 | 1991-08-23 | Matsushita Electric Works Ltd | 三次元形状の形成方法 |
JPH07137141A (ja) * | 1993-11-16 | 1995-05-30 | C Met Kk | ミラー式光硬化造形装置 |
JPH0999490A (ja) * | 1995-10-06 | 1997-04-15 | Sony Corp | 立体形状造形方法並びにその装置 |
JP2001158050A (ja) * | 1999-12-02 | 2001-06-12 | Japan Science & Technology Corp | 2光子マイクロ光造形方法およびその装置、2光子マイクロ光造形法によって形成した部品および可動機構 |
JP2003321704A (ja) * | 2002-05-01 | 2003-11-14 | Hitachi Ltd | 積層造形法およびそれに用いる積層造形装置 |
JP2006082559A (ja) * | 1999-02-08 | 2006-03-30 | Three D Syst Inc | 3次元物体の造形方法 |
JP2007175887A (ja) * | 2005-12-27 | 2007-07-12 | Cmet Inc | 光造形装置とオフセット距離設定方法 |
Family Cites Families (114)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3018262A (en) * | 1957-05-01 | 1962-01-23 | Shell Oil Co | Curing polyepoxides with certain metal salts of inorganic acids |
US3808006A (en) * | 1971-12-06 | 1974-04-30 | Minnesota Mining & Mfg | Photosensitive material containing a diaryliodium compound, a sensitizer and a color former |
US3729313A (en) | 1971-12-06 | 1973-04-24 | Minnesota Mining & Mfg | Novel photosensitive systems comprising diaryliodonium compounds and their use |
US3779778A (en) * | 1972-02-09 | 1973-12-18 | Minnesota Mining & Mfg | Photosolubilizable compositions and elements |
US3741769A (en) * | 1972-10-24 | 1973-06-26 | Minnesota Mining & Mfg | Novel photosensitive polymerizable systems and their use |
AU497960B2 (en) * | 1974-04-11 | 1979-01-25 | Minnesota Mining And Manufacturing Company | Photopolymerizable compositions |
US4250053A (en) * | 1979-05-21 | 1981-02-10 | Minnesota Mining And Manufacturing Company | Sensitized aromatic iodonium or aromatic sulfonium salt photoinitiator systems |
US4249011A (en) * | 1979-06-25 | 1981-02-03 | Minnesota Mining And Manufacturing Company | Poly(ethylenically unsaturated alkoxy) heterocyclic compounds |
US4262072A (en) * | 1979-06-25 | 1981-04-14 | Minnesota Mining And Manufacturing Company | Poly(ethylenically unsaturated alkoxy) heterocyclic protective coatings |
US4279717A (en) * | 1979-08-03 | 1981-07-21 | General Electric Company | Ultraviolet curable epoxy silicone coating compositions |
US4491628A (en) * | 1982-08-23 | 1985-01-01 | International Business Machines Corporation | Positive- and negative-working resist compositions with acid generating photoinitiator and polymer with acid labile groups pendant from polymer backbone |
US4668601A (en) * | 1985-01-18 | 1987-05-26 | Minnesota Mining And Manufacturing Company | Protective coating for phototools |
US4642126A (en) * | 1985-02-11 | 1987-02-10 | Norton Company | Coated abrasives with rapidly curable adhesives and controllable curvature |
US4652274A (en) * | 1985-08-07 | 1987-03-24 | Minnesota Mining And Manufacturing Company | Coated abrasive product having radiation curable binder |
CA1323949C (en) * | 1987-04-02 | 1993-11-02 | Michael C. Palazzotto | Ternary photoinitiator system for addition polymerization |
US5182055A (en) * | 1988-04-18 | 1993-01-26 | 3D Systems, Inc. | Method of making a three-dimensional object by stereolithography |
US4859572A (en) * | 1988-05-02 | 1989-08-22 | Eastman Kodak Company | Dye sensitized photographic imaging system |
JP2613928B2 (ja) * | 1988-10-13 | 1997-05-28 | 松下電工株式会社 | 三次元形状の形成方法および装置 |
WO1991002992A1 (en) * | 1989-08-21 | 1991-03-07 | Amos Carl R | Methods of and apparatus for manipulating electromagnetic phenomenon |
JP2724232B2 (ja) * | 1990-05-02 | 1998-03-09 | 株式会社日立製作所 | 自動焦点手段およびその自動焦点手段を用いた光ディスク装置 |
US5235015A (en) * | 1991-02-21 | 1993-08-10 | Minnesota Mining And Manufacturing Company | High speed aqueous solvent developable photopolymer compositions |
GB9121789D0 (en) * | 1991-10-14 | 1991-11-27 | Minnesota Mining & Mfg | Positive-acting photothermographic materials |
EP0544332B1 (en) * | 1991-11-28 | 1997-01-29 | Enplas Corporation | Surface light source device |
TW268969B (ja) * | 1992-10-02 | 1996-01-21 | Minnesota Mining & Mfg | |
US5298741A (en) * | 1993-01-13 | 1994-03-29 | Trustees Of Tufts College | Thin film fiber optic sensor array and apparatus for concurrent viewing and chemical sensing of a sample |
US5512219A (en) * | 1994-06-03 | 1996-04-30 | Reflexite Corporation | Method of casting a microstructure sheet having an array of prism elements using a reusable polycarbonate mold |
US5856373A (en) * | 1994-10-31 | 1999-01-05 | Minnesota Mining And Manufacturing Company | Dental visible light curable epoxy system with enhanced depth of cure |
JPH1031314A (ja) * | 1996-07-17 | 1998-02-03 | Sony Corp | フォトレジストの露光方法 |
US5858624A (en) * | 1996-09-20 | 1999-01-12 | Minnesota Mining And Manufacturing Company | Method for assembling planarization and indium-tin-oxide layer on a liquid crystal display color filter with a transfer process |
US5922238A (en) * | 1997-02-14 | 1999-07-13 | Physical Optics Corporation | Method of making replicas and compositions for use therewith |
DE19713362A1 (de) * | 1997-03-29 | 1998-10-01 | Zeiss Carl Jena Gmbh | Konfokale mikroskopische Anordnung |
US5998495A (en) * | 1997-04-11 | 1999-12-07 | 3M Innovative Properties Company | Ternary photoinitiator system for curing of epoxy/polyol resin compositions |
US6025406A (en) * | 1997-04-11 | 2000-02-15 | 3M Innovative Properties Company | Ternary photoinitiator system for curing of epoxy resins |
US6001297A (en) * | 1997-04-28 | 1999-12-14 | 3D Systems, Inc. | Method for controlling exposure of a solidfiable medium using a pulsed radiation source in building a three-dimensional object using stereolithography |
US5770737A (en) * | 1997-09-18 | 1998-06-23 | The United States Of America As Represented By The Secretary Of The Air Force | Asymmetrical dyes with large two-photon absorption cross-sections |
US5859251A (en) * | 1997-09-18 | 1999-01-12 | The United States Of America As Represented By The Secretary Of The Air Force | Symmetrical dyes with large two-photon absorption cross-sections |
JP4564655B2 (ja) | 1998-04-21 | 2010-10-20 | ユニバーシティ オブ コネチカット | 多光子励起を用いたフリーフォームナノ製作 |
US6341029B1 (en) * | 1999-04-27 | 2002-01-22 | Gsi Lumonics, Inc. | Method and apparatus for shaping a laser-beam intensity profile by dithering |
US6100405A (en) * | 1999-06-15 | 2000-08-08 | The United States Of America As Represented By The Secretary Of The Air Force | Benzothiazole-containing two-photon chromophores exhibiting strong frequency upconversion |
US7046905B1 (en) * | 1999-10-08 | 2006-05-16 | 3M Innovative Properties Company | Blacklight with structured surfaces |
JP2001150451A (ja) | 1999-11-22 | 2001-06-05 | Canon Inc | 成形型およびその製造方法 |
US6288842B1 (en) | 2000-02-22 | 2001-09-11 | 3M Innovative Properties | Sheeting with composite image that floats |
US6696157B1 (en) * | 2000-03-05 | 2004-02-24 | 3M Innovative Properties Company | Diamond-like glass thin films |
US6560248B1 (en) * | 2000-06-08 | 2003-05-06 | Mania Barco Nv | System, method and article of manufacture for improved laser direct imaging a printed circuit board utilizing a mode locked laser and scophony operation |
KR100753459B1 (ko) * | 2000-06-15 | 2007-08-31 | 쓰리엠 이노베이티브 프로퍼티즈 캄파니 | 다광자 광화학 방법을 이용하는 다색 이미지화 |
US6852766B1 (en) * | 2000-06-15 | 2005-02-08 | 3M Innovative Properties Company | Multiphoton photosensitization system |
US7381516B2 (en) * | 2002-10-02 | 2008-06-03 | 3M Innovative Properties Company | Multiphoton photosensitization system |
JP2004503928A (ja) * | 2000-06-15 | 2004-02-05 | スリーエム イノベイティブ プロパティズ カンパニー | 多方向光反応吸収方法 |
ATE433129T1 (de) | 2000-06-15 | 2009-06-15 | 3M Innovative Properties Co | Mikroherstellungsverfahren für organische optische bauteile |
DE10034737C2 (de) * | 2000-07-17 | 2002-07-11 | Fraunhofer Ges Forschung | Verfahren zur Herstellung einer permanenten Entformungsschicht durch Plasmapolymerisation auf der Oberfläche eines Formteilwerkzeugs, ein nach dem Verfahren herstellbares Formteilwerkzeug und dessen Verwendung |
EP1245372B1 (en) * | 2001-03-26 | 2011-09-28 | Novartis AG | Mould and method for the production of ophthalmic lenses |
US20020192569A1 (en) * | 2001-05-15 | 2002-12-19 | The Chromaline Corporation | Devices and methods for exposure of photoreactive compositions with light emitting diodes |
TWI254815B (en) * | 2001-05-22 | 2006-05-11 | Nichia Corp | Guide-plate for a plane-luminous device |
US20040012872A1 (en) * | 2001-06-14 | 2004-01-22 | Fleming Patrick R | Multiphoton absorption method using patterned light |
US20030006535A1 (en) * | 2001-06-26 | 2003-01-09 | Michael Hennessey | Method and apparatus for forming microstructures on polymeric substrates |
DE10131156A1 (de) * | 2001-06-29 | 2003-01-16 | Fraunhofer Ges Forschung | Arikel mit plasmapolymerer Beschichtung und Verfahren zu dessen Herstellung |
US6804062B2 (en) | 2001-10-09 | 2004-10-12 | California Institute Of Technology | Nonimaging concentrator lens arrays and microfabrication of the same |
US6948448B2 (en) * | 2001-11-27 | 2005-09-27 | General Electric Company | Apparatus and method for depositing large area coatings on planar surfaces |
US7887889B2 (en) * | 2001-12-14 | 2011-02-15 | 3M Innovative Properties Company | Plasma fluorination treatment of porous materials |
US6750266B2 (en) * | 2001-12-28 | 2004-06-15 | 3M Innovative Properties Company | Multiphoton photosensitization system |
US20030155667A1 (en) * | 2002-12-12 | 2003-08-21 | Devoe Robert J | Method for making or adding structures to an article |
US7478942B2 (en) * | 2003-01-23 | 2009-01-20 | Samsung Electronics Co., Ltd. | Light guide plate with light reflection pattern |
CN100454087C (zh) * | 2003-02-28 | 2009-01-21 | 夏普株式会社 | 面辐射变换元件及其制造方法和液晶显示装置 |
JP4269745B2 (ja) * | 2003-03-31 | 2009-05-27 | 株式会社日立製作所 | スタンパ及び転写装置 |
US20040202865A1 (en) * | 2003-04-08 | 2004-10-14 | Andrew Homola | Release coating for stamper |
US7070406B2 (en) | 2003-04-29 | 2006-07-04 | Hewlett-Packard Development Company, L.P. | Apparatus for embossing a flexible substrate with a pattern carried by an optically transparent compliant media |
KR100585108B1 (ko) * | 2003-11-14 | 2006-06-01 | 삼성전자주식회사 | 스캔 방식의 노광 장치를 이용한 웨이퍼 노광 방법 |
EP1538482B1 (en) * | 2003-12-05 | 2016-02-17 | Obducat AB | Device and method for large area lithography |
US9040090B2 (en) * | 2003-12-19 | 2015-05-26 | The University Of North Carolina At Chapel Hill | Isolated and fixed micro and nano structures and methods thereof |
US7632087B2 (en) * | 2003-12-19 | 2009-12-15 | Wd Media, Inc. | Composite stamper for imprint lithography |
US20050273146A1 (en) * | 2003-12-24 | 2005-12-08 | Synecor, Llc | Liquid perfluoropolymers and medical applications incorporating same |
US20050271794A1 (en) * | 2003-12-24 | 2005-12-08 | Synecor, Llc | Liquid perfluoropolymers and medical and cosmetic applications incorporating same |
US7282324B2 (en) | 2004-01-05 | 2007-10-16 | Microchem Corp. | Photoresist compositions, hardened forms thereof, hardened patterns thereof and metal patterns formed using them |
US9039401B2 (en) * | 2006-02-27 | 2015-05-26 | Microcontinuum, Inc. | Formation of pattern replicating tools |
JP4879159B2 (ja) * | 2004-03-05 | 2012-02-22 | アプライド マテリアルズ インコーポレイテッド | アモルファス炭素膜堆積のためのcvdプロセス |
US20050254035A1 (en) * | 2004-05-11 | 2005-11-17 | Chromaplex, Inc. | Multi-photon lithography |
US20050272599A1 (en) * | 2004-06-04 | 2005-12-08 | Kenneth Kramer | Mold release layer |
JP4389791B2 (ja) | 2004-08-25 | 2009-12-24 | セイコーエプソン株式会社 | 微細構造体の製造方法および露光装置 |
JP4599553B2 (ja) * | 2004-10-01 | 2010-12-15 | 国立大学法人北海道大学 | レーザ加工方法および装置 |
JP2006165371A (ja) * | 2004-12-09 | 2006-06-22 | Canon Inc | 転写装置およびデバイス製造方法 |
JP2006227609A (ja) * | 2005-01-24 | 2006-08-31 | Fuji Photo Film Co Ltd | 露光方法、凹凸状パターンの形成方法、及び光学素子の製造方法 |
WO2006093963A1 (en) | 2005-03-02 | 2006-09-08 | The Trustees Of Boston College | Structures and methods of replicating the same |
KR100688866B1 (ko) * | 2005-04-07 | 2007-03-02 | 삼성전기주식회사 | 임프린트 장치, 시스템 및 방법 |
US7478791B2 (en) * | 2005-04-15 | 2009-01-20 | 3M Innovative Properties Company | Flexible mold comprising cured polymerizable resin composition |
KR100692742B1 (ko) * | 2005-05-13 | 2007-03-09 | 삼성전자주식회사 | 도광층을 갖는 키 패드 및 키 패드 어셈블리 |
ATE419560T1 (de) * | 2005-06-10 | 2009-01-15 | Obducat Ab | Kopieren eines musters mit hilfe eines zwischenstempels |
US7326948B2 (en) * | 2005-08-15 | 2008-02-05 | Asml Netherlands B.V. | Beam modifying device, lithographic projection apparatus, method of treating a beam, and device manufacturing method |
KR100610336B1 (ko) * | 2005-09-12 | 2006-08-09 | 김형준 | 키패드 백라이트용 도광판 및 그 제조 방법 |
US7878791B2 (en) * | 2005-11-04 | 2011-02-01 | Asml Netherlands B.V. | Imprint lithography |
US7583444B1 (en) | 2005-12-21 | 2009-09-01 | 3M Innovative Properties Company | Process for making microlens arrays and masterforms |
EP1962942A1 (en) | 2005-12-21 | 2008-09-03 | 3M Innovative Properties Company | Microneedle devices |
DE112006003494T5 (de) | 2005-12-21 | 2008-10-30 | 3M Innovative Properties Co., Saint Paul | Verfahren und Vorrichtung zur Verarbeitung von mehrphotonen-aushärtbaren photoreaktiven Zusammensetzungen |
US7545569B2 (en) * | 2006-01-13 | 2009-06-09 | Avery Dennison Corporation | Optical apparatus with flipped compound prism structures |
TWM298289U (en) * | 2006-03-17 | 2006-09-21 | Hon Hai Prec Ind Co Ltd | Light guide plates and electronic products using the same |
US20070216049A1 (en) * | 2006-03-20 | 2007-09-20 | Heptagon Oy | Method and tool for manufacturing optical elements |
WO2007112309A2 (en) | 2006-03-24 | 2007-10-04 | 3M Innovative Properties Company | Process for making microneedles, microneedle arrays, masters, and replication tools |
CN101448632B (zh) | 2006-05-18 | 2012-12-12 | 3M创新有限公司 | 用于制备具有提取结构的光导的方法以及由此方法生产的光导 |
TWI322927B (en) * | 2006-05-24 | 2010-04-01 | Ind Tech Res Inst | Roller module for microstructure thin film imprint |
TW200745490A (en) * | 2006-06-07 | 2007-12-16 | Jeng Shiang Prec Ind Co Ltd | Light guide plate |
US20080007964A1 (en) * | 2006-07-05 | 2008-01-10 | Tai-Yen Lin | Light guiding structure |
US7551359B2 (en) * | 2006-09-14 | 2009-06-23 | 3M Innovative Properties Company | Beam splitter apparatus and system |
US20080083886A1 (en) | 2006-09-14 | 2008-04-10 | 3M Innovative Properties Company | Optical system suitable for processing multiphoton curable photoreactive compositions |
US8241713B2 (en) * | 2007-02-21 | 2012-08-14 | 3M Innovative Properties Company | Moisture barrier coatings for organic light emitting diode devices |
US7891636B2 (en) * | 2007-08-27 | 2011-02-22 | 3M Innovative Properties Company | Silicone mold and use thereof |
CN101795961B (zh) | 2007-09-06 | 2013-05-01 | 3M创新有限公司 | 用于制备微结构化制品的工具 |
KR20100080785A (ko) | 2007-09-06 | 2010-07-12 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | 광 출력의 영역 제어를 제공하는 광 추출 구조물을 갖는 도광체 |
JP5161310B2 (ja) | 2007-09-06 | 2013-03-13 | スリーエム イノベイティブ プロパティズ カンパニー | 成形型を形成する方法及び前記成形型を使用して物品を形成する方法 |
EP2208100B8 (en) | 2007-10-11 | 2017-08-16 | 3M Innovative Properties Company | Chromatic confocal sensor |
US20100227272A1 (en) | 2007-10-11 | 2010-09-09 | Innovative Properties Company | Highly Functional Multiphoton Curable Reactive Species |
CN101878438B (zh) | 2007-11-27 | 2013-09-25 | 3M创新有限公司 | 形成具有悬浮合成图像的片材以及母模具的方法 |
US8080073B2 (en) * | 2007-12-20 | 2011-12-20 | 3M Innovative Properties Company | Abrasive article having a plurality of precisely-shaped abrasive composites |
CN101960385B (zh) | 2008-02-26 | 2012-11-07 | 3M创新有限公司 | 多光子曝光系统 |
US8570270B2 (en) * | 2009-10-19 | 2013-10-29 | Apple Inc. | Backlight unit color compensation techniques |
TWM385715U (en) * | 2009-12-14 | 2010-08-01 | Chunghwa Picture Tubes Ltd | Backlight module |
-
2008
- 2008-11-06 CN CN200880126667.9A patent/CN101946305B/zh active Active
- 2008-11-06 EP EP08860374.1A patent/EP2232531B1/en active Active
- 2008-11-06 US US12/746,888 patent/US8455846B2/en active Active
- 2008-11-06 JP JP2010538011A patent/JP5524856B2/ja active Active
- 2008-11-06 WO PCT/US2008/082588 patent/WO2009075970A1/en active Application Filing
-
2014
- 2014-02-07 JP JP2014022569A patent/JP5806348B2/ja active Active
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01228828A (ja) * | 1988-03-08 | 1989-09-12 | Osaka Prefecture | 光学的造形法 |
JPH03193434A (ja) * | 1989-12-25 | 1991-08-23 | Matsushita Electric Works Ltd | 三次元形状の形成方法 |
JPH07137141A (ja) * | 1993-11-16 | 1995-05-30 | C Met Kk | ミラー式光硬化造形装置 |
JPH0999490A (ja) * | 1995-10-06 | 1997-04-15 | Sony Corp | 立体形状造形方法並びにその装置 |
JP2006082559A (ja) * | 1999-02-08 | 2006-03-30 | Three D Syst Inc | 3次元物体の造形方法 |
JP2001158050A (ja) * | 1999-12-02 | 2001-06-12 | Japan Science & Technology Corp | 2光子マイクロ光造形方法およびその装置、2光子マイクロ光造形法によって形成した部品および可動機構 |
JP2003321704A (ja) * | 2002-05-01 | 2003-11-14 | Hitachi Ltd | 積層造形法およびそれに用いる積層造形装置 |
JP2007175887A (ja) * | 2005-12-27 | 2007-07-12 | Cmet Inc | 光造形装置とオフセット距離設定方法 |
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016150553A (ja) * | 2015-02-19 | 2016-08-22 | セイコーエプソン株式会社 | 立体物造形装置、立体物造形装置の制御方法、及び、立体物造形装置の制御プログラム |
US10220604B2 (en) | 2015-02-19 | 2019-03-05 | Seiko Epson Corporation | Solid object shaping apparatus, control method for solid object shaping apparatus, and control program for solid object shaping apparatus |
JP2016210189A (ja) * | 2015-05-13 | 2016-12-15 | ナノスクライブ ゲーエムベーハーNanoscribe GmbH | 三次元の構造を製作する方法 |
KR101766327B1 (ko) * | 2015-07-03 | 2017-08-09 | 진광식 | 자동 노광 제어 기능을 갖는 3차원 프린터 |
KR20190142337A (ko) * | 2017-05-11 | 2019-12-26 | 나노스크라이브 게엠베하 | 레이저 리소그래피에 의한 3d 구조를 제조하기 위한 방법, 및 해당 컴퓨터 프로그램 제품 |
JP2020519484A (ja) * | 2017-05-11 | 2020-07-02 | ナノスクライブ ゲーエムベーハーNanoscribe GmbH | レーザーリソグラフィによる3d構造の製造方法、及び対応するコンピュータプログラム製品 |
KR102326904B1 (ko) * | 2017-05-11 | 2021-11-17 | 나노스크라이브 홀딩 게엠베하 | 레이저 리소그래피에 의한 3d 구조를 제조하기 위한 방법, 및 해당 컴퓨터 프로그램 제품 |
US11179883B2 (en) | 2017-05-11 | 2021-11-23 | Nanoscribe Holding Gmbh | Method for producing a 3D structure by means of laser lithography, and corresponding computer program product |
JP2020032561A (ja) * | 2018-08-28 | 2020-03-05 | 富士ゼロックス株式会社 | 三次元形状データの生成装置、三次元造形装置、及び三次元形状データの生成プログラム |
JP2023521002A (ja) * | 2020-03-31 | 2023-05-23 | アップナノ ゲーエムベーハー | 3次元部品をリソグラフィに基づいて生成して製造するための方法及び装置 |
JP7420967B2 (ja) | 2020-03-31 | 2024-01-23 | アップナノ ゲーエムベーハー | 3次元部品をリソグラフィに基づいて生成して製造するための方法及び装置 |
Also Published As
Publication number | Publication date |
---|---|
EP2232531A1 (en) | 2010-09-29 |
CN101946305B (zh) | 2014-02-12 |
CN101946305A (zh) | 2011-01-12 |
WO2009075970A1 (en) | 2009-06-18 |
EP2232531B1 (en) | 2018-09-19 |
JP5806348B2 (ja) | 2015-11-10 |
JP5524856B2 (ja) | 2014-06-18 |
JP2011507031A (ja) | 2011-03-03 |
US20100294954A1 (en) | 2010-11-25 |
US8455846B2 (en) | 2013-06-04 |
EP2232531A4 (en) | 2017-08-02 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5806348B2 (ja) | エッジ明瞭性が向上した構造の製造方法 | |
US20170225393A1 (en) | Apparatus and method for forming three-dimensional objects using two-photon absorption linear solidification | |
JP6448480B2 (ja) | 多光子露光システム | |
CN111316166B (zh) | 用于可缩放亚微米增材制造的深度分辨的并行双光子聚合的系统和方法 | |
JP2019524487A (ja) | リソグラフィに基づいて三次元構成要素を生成的に製造するための方法 | |
US20180196353A1 (en) | Multiphoton absorption lithography processing system | |
US10101652B2 (en) | Exposure method, method of fabricating periodic microstructure, method of fabricating grid polarizing element and exposure apparatus | |
US20210001540A1 (en) | System and method for submicron additive manufacturing | |
Park et al. | Investigation of three-dimensional pattern collapse owing to surface tension using an imperfection finite element model | |
JP2007251015A (ja) | レーザアニール装置及びレーザアニール方法 | |
JP7420967B2 (ja) | 3次元部品をリソグラフィに基づいて生成して製造するための方法及び装置 | |
KR20140021754A (ko) | 광경화성수지를 이용한 위상격자 하이브리드 렌즈, 광경화성수지를 이용한 위상격자 하이브리드 렌즈 제조방법 | |
JP2023519543A (ja) | 連続回折光学素子を作製するための方法、作製方法を実施するための装置、および連続回折光学素子 | |
US20230369052A1 (en) | Nano-scale lithography method | |
US20100136489A1 (en) | Manufacturing device and manufacturing method for polymer waveguide device | |
KR101389320B1 (ko) | 직접레이저 노광법을 이용한 위상회절소자 제조장치, 위상회절소자 제조방법 및 직접레이저 노광법을 이용한 위상회절소자 | |
Zyla | Laser-based 3D printing of novel optical devices | |
Saghiri et al. | SU-8 multiple layer structuring by means of maskless photolithography (DWL66) | |
TW202231393A (zh) | 雷射加工設備、操作該設備的方法以及使用其加工工件的方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20140307 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20140307 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20150128 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20150203 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20150430 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20150804 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20150903 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5806348 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |