JP2014078712A - プラズマエッチングの方法 - Google Patents
プラズマエッチングの方法 Download PDFInfo
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- JP2014078712A JP2014078712A JP2013207997A JP2013207997A JP2014078712A JP 2014078712 A JP2014078712 A JP 2014078712A JP 2013207997 A JP2013207997 A JP 2013207997A JP 2013207997 A JP2013207997 A JP 2013207997A JP 2014078712 A JP2014078712 A JP 2014078712A
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- Prior art keywords
- etching
- gas
- mask
- fluorine
- plasma
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- 238000000034 method Methods 0.000 title claims abstract description 88
- 238000001020 plasma etching Methods 0.000 title claims abstract description 19
- 230000008569 process Effects 0.000 claims abstract description 64
- 239000007789 gas Substances 0.000 claims abstract description 49
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims abstract description 39
- 229910010271 silicon carbide Inorganic materials 0.000 claims abstract description 39
- 238000005530 etching Methods 0.000 claims abstract description 38
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims abstract description 21
- 239000011737 fluorine Substances 0.000 claims abstract description 21
- 229910052731 fluorine Inorganic materials 0.000 claims abstract description 21
- 239000000203 mixture Substances 0.000 claims abstract description 17
- 239000000463 material Substances 0.000 claims abstract description 13
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 6
- 239000001301 oxygen Substances 0.000 claims abstract description 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 10
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 8
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 8
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 8
- 229910052786 argon Inorganic materials 0.000 claims description 6
- 229910052759 nickel Inorganic materials 0.000 claims description 5
- 238000005086 pumping Methods 0.000 claims description 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 4
- 239000012159 carrier gas Substances 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 2
- 229910052751 metal Inorganic materials 0.000 claims description 2
- 229910052756 noble gas Inorganic materials 0.000 claims description 2
- 230000007547 defect Effects 0.000 abstract description 26
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 abstract 1
- 230000015572 biosynthetic process Effects 0.000 description 11
- 229920002120 photoresistant polymer Polymers 0.000 description 8
- 238000000879 optical micrograph Methods 0.000 description 5
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 4
- 239000010931 gold Substances 0.000 description 4
- 229910052737 gold Inorganic materials 0.000 description 4
- 238000009616 inductively coupled plasma Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 125000004429 atom Chemical group 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 239000003085 diluting agent Substances 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 125000001153 fluoro group Chemical group F* 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- KFZUDNZQQCWGKF-UHFFFAOYSA-M sodium;4-methylbenzenesulfinate Chemical compound [Na+].CC1=CC=C(S([O-])=O)C=C1 KFZUDNZQQCWGKF-UHFFFAOYSA-M 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/10—Etching compositions
- C23F1/12—Gaseous compositions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3065—Plasma etching; Reactive-ion etching
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F4/00—Processes for removing metallic material from surfaces, not provided for in group C23F1/00 or C23F3/00
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3244—Gas supply means
- H01J37/32449—Gas control, e.g. control of the gas flow
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/308—Chemical or electrical treatment, e.g. electrolytic etching using masks
- H01L21/3081—Chemical or electrical treatment, e.g. electrolytic etching using masks characterised by their composition, e.g. multilayer masks, materials
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemical & Material Sciences (AREA)
- Plasma & Fusion (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Drying Of Semiconductors (AREA)
Abstract
【解決手段】炭化ケイ素加工材料の表面にマスクを形成する工程;第1設定のプロセス条件を用いて、前記マスクした表面に初めのプラズマエッチングを行う工程(ここでこのプラズマは、i)酸素と、ii)少なくとも1種のフッ素富化ガスを含むエッチングガス混合物を用いて生成され、前記フッ素富化ガスは前記エッチングガス混合物に50%未満の体積比で存在している);前記第1設定のプロセス条件とは異なる第2設定のプロセス条件を用いて、バルクのプラズマエッチングプロセスを行う工程、からなる。
【選択図】図3
Description
前記炭化ケイ素加工材料の表面にマスクを形成する工程;
第1設定のプロセス条件を用いて、前記マスクした表面に初めのプラズマエッチングを行う工程、ここで前記プラズマは、(i)酸素と(ii)少なくとも1種のフッ素富化ガスとを含むエッチングガス混合物を用いて生成され、前記フッ素富化ガスは前記エッチングガス混合物に50%未満の体積比で存在している;そして
続いて、前記第1設定のプロセス条件とは異なる第2設定のプロセス条件を用いて、バルクのプラズマエッチング処理を行う工程。
Claims (14)
- 次の工程を含む、窒化ケイ素加工材料をプラズマエッチングする方法:
前記窒化ケイ素加工材料の表面にマスクを形成する工程;
第1設定のプロセス条件を用いて、前記マスクした表面に初めのプラズマエッチングを行う工程、ここでそのプラズマは、i)酸素と、ii)少なくとも1種のフッ素富化ガスを含む記エッチングガス混合物を用いて生成され、前記フッ素富化ガスは前記エッチングガス混合物に50%未満の体積比で存在している;そして
続いて、前記第1設定のプロセス条件とは異なる第2設定のプロセス条件を用いて、バルクのプラズマエッチングプロセスを行う工程。 - 前記フッ素富化ガスは、0.1〜20%、好ましくは0.1〜10%、より好ましくは0.5〜7%、さらに好ましくは1.0〜50%、最も好ましくは約1.5%の体積比で前記エッチングガス混合物中に存在する、請求項1に記載の方法。
- 前記エッチングガス混合物が、さらに不活性キャリアガスを含む、請求項1又は2に記載の方法。
- 前記不活性キャリアガスが希ガス、好ましくはアルゴンである、請求項3に記載の方法。
- 前記少なくとも1種のフッ素富化ガスが、CF4及び/又はSF6である、請求項1〜4のいずれか一項に記載の方法。
- 前記マスクが、金属マスクである、請求項1〜5のいずれか一項に記載の方法。
- 前記マスクが、ニッケルマスクである、請求項6に記載の方法。
- 前記マスクが形成される前記炭化ケイ素加工材料の表面が、研磨されていない、請求項1〜7のいずれか一項に記載の方法。
- 前記マスクが形成される前記炭化ケイ素加工材料の表面が、ラッピングされている、請求項8に記載の方法。
- 前記初めのプラズマエッチングを、少なくとも250nmのエッチング深さまで行う、請求項1〜9のいずれか一項に記載の方法。
- 前記初めのプラズマエッチングを、少なくとも700nmのエッチング深さまで行う、請求項10に記載の方法。
- 前記炭化ケイ素加工材料のプラズマエッチングを行って、1つ以上のビアを与える、請求項1〜11のいずれか一項に記載の方法。
- 以下を具備する、炭化ケイ素加工材料をエッチングするための装置:
チャンバー;
前記チャンバー中に位置する加工材料の支持体;
前記チャンバーにエッチングガスを提供するためのガス供給部及びポンプ設備;並びに
前記ガス供給部及びポンプ設備を含むこの装置を制御して、請求項1〜12のいずれか一項に記載の方法を行うように構成されている制御設備。 - 添付の図面を参照して明細書中に実質的に記載された方法又は装置。
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201261709259P | 2012-10-03 | 2012-10-03 | |
GB1217712.7 | 2012-10-03 | ||
GBGB1217712.7A GB201217712D0 (en) | 2012-10-03 | 2012-10-03 | methods of plasma etching |
US61/709,259 | 2012-10-03 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2014078712A true JP2014078712A (ja) | 2014-05-01 |
JP6352611B2 JP6352611B2 (ja) | 2018-07-04 |
Family
ID=47225628
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2013207997A Active JP6352611B2 (ja) | 2012-10-03 | 2013-10-03 | プラズマエッチングの方法 |
Country Status (7)
Country | Link |
---|---|
US (1) | US9040427B2 (ja) |
EP (1) | EP2717298B1 (ja) |
JP (1) | JP6352611B2 (ja) |
KR (1) | KR102225475B1 (ja) |
CN (1) | CN103794489B (ja) |
GB (1) | GB201217712D0 (ja) |
TW (1) | TWI602242B (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016157685A (ja) * | 2015-02-13 | 2016-09-01 | エスピーティーエス テクノロジーズ リミティド | プラズマ生成装置 |
JP2016207753A (ja) * | 2015-04-17 | 2016-12-08 | 株式会社日立ハイテクノロジーズ | プラズマエッチング方法 |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11049725B1 (en) * | 2014-05-29 | 2021-06-29 | Corporation For National Research Initiatives | Method for etching deep, high-aspect ratio features into silicon carbide and gallium nitride |
DE102015101966B4 (de) * | 2015-02-11 | 2021-07-08 | Infineon Technologies Austria Ag | Verfahren zum Herstellen eines Halbleiterbauelements mit Schottkykontakt und Halbleiterbauelement |
CN111128717B (zh) * | 2018-10-30 | 2022-10-04 | 株洲中车时代半导体有限公司 | 一种碳化硅沟槽结构的制造方法 |
GB201919215D0 (en) | 2019-12-23 | 2020-02-05 | Spts Technologies Ltd | Method and apparatus for plasma etching |
Citations (5)
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JP2007157806A (ja) * | 2005-12-01 | 2007-06-21 | Mitsubishi Electric Corp | 半導体装置の製造方法 |
JP2007324503A (ja) * | 2006-06-05 | 2007-12-13 | Fuji Electric Holdings Co Ltd | 炭化珪素半導体装置の製造方法 |
JP2008288475A (ja) * | 2007-05-21 | 2008-11-27 | Fuji Electric Device Technology Co Ltd | 炭化珪素半導体装置の製造方法 |
JP2008294210A (ja) * | 2007-05-24 | 2008-12-04 | Fuji Electric Device Technology Co Ltd | 炭化珪素半導体装置の製造方法 |
JP2011108813A (ja) * | 2009-11-17 | 2011-06-02 | Fujitsu Ltd | 半導体装置及びその製造方法 |
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US4946547A (en) * | 1989-10-13 | 1990-08-07 | Cree Research, Inc. | Method of preparing silicon carbide surfaces for crystal growth |
US5571374A (en) * | 1995-10-02 | 1996-11-05 | Motorola | Method of etching silicon carbide |
US6410437B1 (en) | 2000-06-30 | 2002-06-25 | Lam Research Corporation | Method for etching dual damascene structures in organosilicate glass |
JP2005056868A (ja) * | 2001-06-04 | 2005-03-03 | Matsushita Electric Ind Co Ltd | 炭化珪素半導体装置の製造方法 |
US7432207B2 (en) * | 2001-08-31 | 2008-10-07 | Tokyo Electron Limited | Method for etching object to be processed |
US6930048B1 (en) | 2002-09-18 | 2005-08-16 | Lam Research Corporation | Etching a metal hard mask for an integrated circuit structure |
WO2004097923A1 (ja) * | 2003-04-30 | 2004-11-11 | Fujitsu Limited | 半導体装置の製造方法 |
JP2006024811A (ja) * | 2004-07-09 | 2006-01-26 | Sony Corp | 半導体装置の製造方法 |
JP5072531B2 (ja) * | 2007-10-24 | 2012-11-14 | 東京エレクトロン株式会社 | プラズマエッチング方法及び記憶媒体 |
DE102009028256B4 (de) | 2009-08-05 | 2019-01-24 | Robert Bosch Gmbh | Verfahren zum Ätzen von Siliziumcarbid mittels eines Plasmaätzverfahrens und Siliziumcarbidsubstrat |
-
2012
- 2012-10-03 GB GBGB1217712.7A patent/GB201217712D0/en not_active Ceased
-
2013
- 2013-10-01 US US14/043,818 patent/US9040427B2/en active Active
- 2013-10-02 TW TW102135692A patent/TWI602242B/zh active
- 2013-10-02 KR KR1020130118098A patent/KR102225475B1/ko active IP Right Grant
- 2013-10-03 JP JP2013207997A patent/JP6352611B2/ja active Active
- 2013-10-03 EP EP13275243.7A patent/EP2717298B1/en active Active
- 2013-10-08 CN CN201310465333.7A patent/CN103794489B/zh active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2007157806A (ja) * | 2005-12-01 | 2007-06-21 | Mitsubishi Electric Corp | 半導体装置の製造方法 |
JP2007324503A (ja) * | 2006-06-05 | 2007-12-13 | Fuji Electric Holdings Co Ltd | 炭化珪素半導体装置の製造方法 |
JP2008288475A (ja) * | 2007-05-21 | 2008-11-27 | Fuji Electric Device Technology Co Ltd | 炭化珪素半導体装置の製造方法 |
JP2008294210A (ja) * | 2007-05-24 | 2008-12-04 | Fuji Electric Device Technology Co Ltd | 炭化珪素半導体装置の製造方法 |
JP2011108813A (ja) * | 2009-11-17 | 2011-06-02 | Fujitsu Ltd | 半導体装置及びその製造方法 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2016157685A (ja) * | 2015-02-13 | 2016-09-01 | エスピーティーエス テクノロジーズ リミティド | プラズマ生成装置 |
JP2016207753A (ja) * | 2015-04-17 | 2016-12-08 | 株式会社日立ハイテクノロジーズ | プラズマエッチング方法 |
Also Published As
Publication number | Publication date |
---|---|
TW201423862A (zh) | 2014-06-16 |
CN103794489B (zh) | 2019-05-14 |
CN103794489A (zh) | 2014-05-14 |
US20140097153A1 (en) | 2014-04-10 |
GB201217712D0 (en) | 2012-11-14 |
US9040427B2 (en) | 2015-05-26 |
TWI602242B (zh) | 2017-10-11 |
EP2717298A3 (en) | 2017-08-23 |
EP2717298B1 (en) | 2020-12-02 |
EP2717298A2 (en) | 2014-04-09 |
JP6352611B2 (ja) | 2018-07-04 |
KR20140043880A (ko) | 2014-04-11 |
KR102225475B1 (ko) | 2021-03-08 |
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