JP2014047086A5 - - Google Patents

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Publication number
JP2014047086A5
JP2014047086A5 JP2012189288A JP2012189288A JP2014047086A5 JP 2014047086 A5 JP2014047086 A5 JP 2014047086A5 JP 2012189288 A JP2012189288 A JP 2012189288A JP 2012189288 A JP2012189288 A JP 2012189288A JP 2014047086 A5 JP2014047086 A5 JP 2014047086A5
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JP
Japan
Prior art keywords
glass substrate
etching step
etched
cleaning
manufacturing
Prior art date
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Application number
JP2012189288A
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English (en)
Japanese (ja)
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JP5774562B2 (ja
JP2014047086A (ja
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Priority to JP2012189288A priority Critical patent/JP5774562B2/ja
Priority claimed from JP2012189288A external-priority patent/JP5774562B2/ja
Priority to KR1020130099615A priority patent/KR101521345B1/ko
Publication of JP2014047086A publication Critical patent/JP2014047086A/ja
Publication of JP2014047086A5 publication Critical patent/JP2014047086A5/ja
Application granted granted Critical
Publication of JP5774562B2 publication Critical patent/JP5774562B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2012189288A 2012-08-29 2012-08-29 ガラス基板の製造方法 Expired - Fee Related JP5774562B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2012189288A JP5774562B2 (ja) 2012-08-29 2012-08-29 ガラス基板の製造方法
KR1020130099615A KR101521345B1 (ko) 2012-08-29 2013-08-22 글래스 기판의 제조 방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012189288A JP5774562B2 (ja) 2012-08-29 2012-08-29 ガラス基板の製造方法

Publications (3)

Publication Number Publication Date
JP2014047086A JP2014047086A (ja) 2014-03-17
JP2014047086A5 true JP2014047086A5 (enExample) 2014-08-14
JP5774562B2 JP5774562B2 (ja) 2015-09-09

Family

ID=50607128

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012189288A Expired - Fee Related JP5774562B2 (ja) 2012-08-29 2012-08-29 ガラス基板の製造方法

Country Status (2)

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JP (1) JP5774562B2 (enExample)
KR (1) KR101521345B1 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017073580A1 (ja) * 2015-10-29 2017-05-04 旭硝子株式会社 ディスプレイ用ガラス基板、及びディスプレイ用ガラス基板の製造方法
WO2022185557A1 (ja) * 2021-03-05 2022-09-09 ナルックス株式会社 ガラス基板に微細凹凸表面構造を製造する方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005097018A (ja) * 2003-09-22 2005-04-14 Air Water Inc 難帯電ガラス基板の製法およびそれによって得られた難帯電ガラス基板
JP4448458B2 (ja) * 2005-02-04 2010-04-07 エア・ウォーター株式会社 基板洗浄方法および基板洗浄装置
TWI543948B (zh) * 2009-05-07 2016-08-01 日本電氣硝子股份有限公司 玻璃基板及其製造方法
CN102770944B (zh) * 2010-02-25 2013-11-06 积水化学工业株式会社 蚀刻方法及装置

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