JP2014047086A5 - - Google Patents
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- Publication number
- JP2014047086A5 JP2014047086A5 JP2012189288A JP2012189288A JP2014047086A5 JP 2014047086 A5 JP2014047086 A5 JP 2014047086A5 JP 2012189288 A JP2012189288 A JP 2012189288A JP 2012189288 A JP2012189288 A JP 2012189288A JP 2014047086 A5 JP2014047086 A5 JP 2014047086A5
- Authority
- JP
- Japan
- Prior art keywords
- glass substrate
- etching step
- etched
- cleaning
- manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011521 glass Substances 0.000 claims 9
- 239000000758 substrate Substances 0.000 claims 9
- 238000005530 etching Methods 0.000 claims 7
- 238000004140 cleaning Methods 0.000 claims 6
- 238000004519 manufacturing process Methods 0.000 claims 6
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims 4
- 229910052786 argon Inorganic materials 0.000 claims 2
- 238000000034 method Methods 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
- 229940070337 ammonium silicofluoride Drugs 0.000 claims 1
- 239000012159 carrier gas Substances 0.000 claims 1
- 230000008021 deposition Effects 0.000 claims 1
- 238000001312 dry etching Methods 0.000 claims 1
- 239000004973 liquid crystal related substance Substances 0.000 claims 1
- TXEYQDLBPFQVAA-UHFFFAOYSA-N tetrafluoromethane Chemical compound FC(F)(F)F TXEYQDLBPFQVAA-UHFFFAOYSA-N 0.000 claims 1
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012189288A JP5774562B2 (ja) | 2012-08-29 | 2012-08-29 | ガラス基板の製造方法 |
| KR1020130099615A KR101521345B1 (ko) | 2012-08-29 | 2013-08-22 | 글래스 기판의 제조 방법 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012189288A JP5774562B2 (ja) | 2012-08-29 | 2012-08-29 | ガラス基板の製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2014047086A JP2014047086A (ja) | 2014-03-17 |
| JP2014047086A5 true JP2014047086A5 (enExample) | 2014-08-14 |
| JP5774562B2 JP5774562B2 (ja) | 2015-09-09 |
Family
ID=50607128
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012189288A Expired - Fee Related JP5774562B2 (ja) | 2012-08-29 | 2012-08-29 | ガラス基板の製造方法 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP5774562B2 (enExample) |
| KR (1) | KR101521345B1 (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017073580A1 (ja) * | 2015-10-29 | 2017-05-04 | 旭硝子株式会社 | ディスプレイ用ガラス基板、及びディスプレイ用ガラス基板の製造方法 |
| WO2022185557A1 (ja) * | 2021-03-05 | 2022-09-09 | ナルックス株式会社 | ガラス基板に微細凹凸表面構造を製造する方法 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005097018A (ja) * | 2003-09-22 | 2005-04-14 | Air Water Inc | 難帯電ガラス基板の製法およびそれによって得られた難帯電ガラス基板 |
| JP4448458B2 (ja) * | 2005-02-04 | 2010-04-07 | エア・ウォーター株式会社 | 基板洗浄方法および基板洗浄装置 |
| TWI543948B (zh) * | 2009-05-07 | 2016-08-01 | 日本電氣硝子股份有限公司 | 玻璃基板及其製造方法 |
| CN102770944B (zh) * | 2010-02-25 | 2013-11-06 | 积水化学工业株式会社 | 蚀刻方法及装置 |
-
2012
- 2012-08-29 JP JP2012189288A patent/JP5774562B2/ja not_active Expired - Fee Related
-
2013
- 2013-08-22 KR KR1020130099615A patent/KR101521345B1/ko active Active
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