KR101521345B1 - 글래스 기판의 제조 방법 - Google Patents

글래스 기판의 제조 방법 Download PDF

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Publication number
KR101521345B1
KR101521345B1 KR1020130099615A KR20130099615A KR101521345B1 KR 101521345 B1 KR101521345 B1 KR 101521345B1 KR 1020130099615 A KR1020130099615 A KR 1020130099615A KR 20130099615 A KR20130099615 A KR 20130099615A KR 101521345 B1 KR101521345 B1 KR 101521345B1
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South Korea
Prior art keywords
glass substrate
etching
cleaning
treatment
roughened
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KR1020130099615A
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English (en)
Korean (ko)
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KR20140029214A (ko
Inventor
오사무 이까이
다쯔야 후꾸시마
영태 박
Original Assignee
아반스트레이트 가부시키가이샤
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Publication of KR20140029214A publication Critical patent/KR20140029214A/ko
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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67063—Apparatus for fluid treatment for etching
    • H01L21/67069—Apparatus for fluid treatment for etching for drying etching
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
    • C03C23/0005—Other surface treatment of glass not in the form of fibres or filaments by irradiation
    • C03C23/006—Other surface treatment of glass not in the form of fibres or filaments by irradiation by plasma or corona discharge
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
    • C03C23/0075—Cleaning of glass
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K13/00—Etching, surface-brightening or pickling compositions
    • C09K13/04—Etching, surface-brightening or pickling compositions containing an inorganic acid
    • C09K13/08—Etching, surface-brightening or pickling compositions containing an inorganic acid containing a fluorine compound

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Plasma & Fusion (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Toxicology (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Health & Medical Sciences (AREA)
  • Power Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Surface Treatment Of Glass (AREA)
  • Drying Of Semiconductors (AREA)
  • Liquid Crystal (AREA)
  • Cleaning In General (AREA)
KR1020130099615A 2012-08-29 2013-08-22 글래스 기판의 제조 방법 Active KR101521345B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2012-189288 2012-08-29
JP2012189288A JP5774562B2 (ja) 2012-08-29 2012-08-29 ガラス基板の製造方法

Publications (2)

Publication Number Publication Date
KR20140029214A KR20140029214A (ko) 2014-03-10
KR101521345B1 true KR101521345B1 (ko) 2015-05-18

Family

ID=50607128

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KR1020130099615A Active KR101521345B1 (ko) 2012-08-29 2013-08-22 글래스 기판의 제조 방법

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JP (1) JP5774562B2 (enExample)
KR (1) KR101521345B1 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017073580A1 (ja) * 2015-10-29 2017-05-04 旭硝子株式会社 ディスプレイ用ガラス基板、及びディスプレイ用ガラス基板の製造方法
WO2022185557A1 (ja) * 2021-03-05 2022-09-09 ナルックス株式会社 ガラス基板に微細凹凸表面構造を製造する方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20060058672A (ko) * 2003-09-22 2006-05-30 에아.워타 가부시키가이샤 난대전 유리기판의 제법과 이에 의해 얻어진 난대전유리기판
KR20120023027A (ko) * 2009-05-07 2012-03-12 니폰 덴키 가라스 가부시키가이샤 유리 기판 및 그 제조 방법

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4448458B2 (ja) * 2005-02-04 2010-04-07 エア・ウォーター株式会社 基板洗浄方法および基板洗浄装置
CN102770944B (zh) * 2010-02-25 2013-11-06 积水化学工业株式会社 蚀刻方法及装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20060058672A (ko) * 2003-09-22 2006-05-30 에아.워타 가부시키가이샤 난대전 유리기판의 제법과 이에 의해 얻어진 난대전유리기판
KR20120023027A (ko) * 2009-05-07 2012-03-12 니폰 덴키 가라스 가부시키가이샤 유리 기판 및 그 제조 방법

Also Published As

Publication number Publication date
JP5774562B2 (ja) 2015-09-09
KR20140029214A (ko) 2014-03-10
JP2014047086A (ja) 2014-03-17

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