JP2014026840A5 - - Google Patents

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Publication number
JP2014026840A5
JP2014026840A5 JP2012166492A JP2012166492A JP2014026840A5 JP 2014026840 A5 JP2014026840 A5 JP 2014026840A5 JP 2012166492 A JP2012166492 A JP 2012166492A JP 2012166492 A JP2012166492 A JP 2012166492A JP 2014026840 A5 JP2014026840 A5 JP 2014026840A5
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JP
Japan
Prior art keywords
sample
capillary
electron microscope
holding device
electron beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2012166492A
Other languages
English (en)
Japanese (ja)
Other versions
JP6169334B2 (ja
JP2014026840A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP2012166492A external-priority patent/JP6169334B2/ja
Priority to JP2012166492A priority Critical patent/JP6169334B2/ja
Priority to US14/417,345 priority patent/US9378922B2/en
Priority to PCT/JP2013/066776 priority patent/WO2014017225A1/ja
Priority to DE112013003328.3T priority patent/DE112013003328B4/de
Priority to CN201380039786.1A priority patent/CN104685603B/zh
Publication of JP2014026840A publication Critical patent/JP2014026840A/ja
Publication of JP2014026840A5 publication Critical patent/JP2014026840A5/ja
Publication of JP6169334B2 publication Critical patent/JP6169334B2/ja
Application granted granted Critical
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2012166492A 2012-07-27 2012-07-27 電子顕微鏡および電子顕微鏡用試料保持装置 Active JP6169334B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2012166492A JP6169334B2 (ja) 2012-07-27 2012-07-27 電子顕微鏡および電子顕微鏡用試料保持装置
CN201380039786.1A CN104685603B (zh) 2012-07-27 2013-06-19 电子显微镜及电子显微镜用试样保持装置
PCT/JP2013/066776 WO2014017225A1 (ja) 2012-07-27 2013-06-19 電子顕微鏡および電子顕微鏡用試料保持装置
DE112013003328.3T DE112013003328B4 (de) 2012-07-27 2013-06-19 Elektronenmikroskop und Elektronenmikroskop-Probenhalter
US14/417,345 US9378922B2 (en) 2012-07-27 2013-06-19 Electron microscope and electron microscope sample retaining device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012166492A JP6169334B2 (ja) 2012-07-27 2012-07-27 電子顕微鏡および電子顕微鏡用試料保持装置

Publications (3)

Publication Number Publication Date
JP2014026840A JP2014026840A (ja) 2014-02-06
JP2014026840A5 true JP2014026840A5 (enExample) 2015-04-16
JP6169334B2 JP6169334B2 (ja) 2017-07-26

Family

ID=49997042

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012166492A Active JP6169334B2 (ja) 2012-07-27 2012-07-27 電子顕微鏡および電子顕微鏡用試料保持装置

Country Status (5)

Country Link
US (1) US9378922B2 (enExample)
JP (1) JP6169334B2 (enExample)
CN (1) CN104685603B (enExample)
DE (1) DE112013003328B4 (enExample)
WO (1) WO2014017225A1 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI546841B (zh) * 2014-12-10 2016-08-21 財團法人工業技術研究院 具有載台的電子顯微鏡
WO2016183443A1 (en) * 2015-05-13 2016-11-17 Protochips, Inc. Method for enabling modular part replacement within an electron microscope sample holder
CN107473179B (zh) * 2016-06-08 2019-04-23 清华大学 一种表征二维纳米材料的方法
WO2019010390A1 (en) * 2017-07-06 2019-01-10 Protochips, Inc. ELECTRONIC MICROSCOPE SAMPLE HOLDER FLUID MANAGEMENT WITH INDEPENDENT PRESSURE AND FLOW CONTROL
WO2021070338A1 (ja) * 2019-10-10 2021-04-15 株式会社日立ハイテク 荷電粒子線装置
US20240186103A1 (en) * 2021-04-13 2024-06-06 Hitachi High-Tech Corporation Transmission Electron Microscope
JP7407771B2 (ja) * 2021-06-21 2024-01-04 日本電子株式会社 電子ビーム検査装置

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51267Y2 (enExample) 1971-05-28 1976-01-07
JPH051267A (ja) 1991-06-27 1993-01-08 Minnesota Mining & Mfg Co <3M> 耐熱性の優れたゴム系接着剤組成物
JP2781320B2 (ja) * 1993-01-18 1998-07-30 株式会社蛋白工学研究所 電子顕微鏡等の試料ホルダ
JPH10206748A (ja) 1997-01-17 1998-08-07 Daiichi Seimitsu Kk 顕微鏡のステージ設置用キャピラリユニット並びにキャピラリユニットを具えた顕微鏡用ステージ並びにキャピラリユニットを具えた顕微鏡
JP2003187735A (ja) 2001-12-18 2003-07-04 Jeol Ltd 試料ホルダ
EP1722397A1 (en) * 2005-05-09 2006-11-15 Lee, Bing-Huan Device for operating with gas in vacuum or low-pressure environment of electron microscopes and for observation of the operation
WO2008141147A1 (en) 2007-05-09 2008-11-20 Protochips, Inc. Microscopy support structures
JP5284699B2 (ja) * 2008-03-17 2013-09-11 日本電子株式会社 電子顕微鏡の試料装置
JP5226378B2 (ja) * 2008-04-28 2013-07-03 株式会社日立ハイテクノロジーズ 透過型電子顕微鏡、及び試料観察方法
US8059271B2 (en) * 2009-02-04 2011-11-15 The United States Of America As Represented By The Secretary Of The Army Reusable sample holding device permitting ready loading of very small wet samples
JP5124507B2 (ja) * 2009-02-16 2013-01-23 株式会社日立ハイテクノロジーズ 電子線装置および電子線装置用試料保持装置
JP5119224B2 (ja) * 2009-09-04 2013-01-16 株式会社日立ハイテクノロジーズ 電子線装置及び電子線装置用試料ホルダー
JP5442417B2 (ja) * 2009-12-14 2014-03-12 株式会社日立ハイテクノロジーズ 荷電粒子線装置及び試料観察方法
JP5476115B2 (ja) * 2009-12-21 2014-04-23 日本電子株式会社 グリッドを用いた試料ホルダ
JP5260575B2 (ja) * 2010-02-24 2013-08-14 株式会社日立ハイテクノロジーズ 電子顕微鏡、および試料ホルダ
US8178851B2 (en) 2010-07-30 2012-05-15 E.A. Fischione Instruments, Inc. In situ holder assembly
US9679741B2 (en) * 2010-11-09 2017-06-13 Fei Company Environmental cell for charged particle beam system

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