JP2014017438A - パターン形成方法及び基板処理システム - Google Patents
パターン形成方法及び基板処理システム Download PDFInfo
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- JP2014017438A JP2014017438A JP2012155359A JP2012155359A JP2014017438A JP 2014017438 A JP2014017438 A JP 2014017438A JP 2012155359 A JP2012155359 A JP 2012155359A JP 2012155359 A JP2012155359 A JP 2012155359A JP 2014017438 A JP2014017438 A JP 2014017438A
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- gas
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- silicon
- etching
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- 229910052814 silicon oxide Inorganic materials 0.000 claims abstract description 33
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 31
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims abstract description 31
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- KWEKXPWNFQBJAY-UHFFFAOYSA-N (dimethyl-$l^{3}-silanyl)oxy-dimethylsilicon Chemical compound C[Si](C)O[Si](C)C KWEKXPWNFQBJAY-UHFFFAOYSA-N 0.000 description 1
- LGPPATCNSOSOQH-UHFFFAOYSA-N 1,1,2,3,4,4-hexafluorobuta-1,3-diene Chemical compound FC(F)=C(F)C(F)=C(F)F LGPPATCNSOSOQH-UHFFFAOYSA-N 0.000 description 1
- PUNGSQUVTIDKNU-UHFFFAOYSA-N 2,4,6,8,10-pentamethyl-1,3,5,7,9,2$l^{3},4$l^{3},6$l^{3},8$l^{3},10$l^{3}-pentaoxapentasilecane Chemical compound C[Si]1O[Si](C)O[Si](C)O[Si](C)O[Si](C)O1 PUNGSQUVTIDKNU-UHFFFAOYSA-N 0.000 description 1
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- 229910021529 ammonia Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
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- 238000005137 deposition process Methods 0.000 description 1
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- KPUWHANPEXNPJT-UHFFFAOYSA-N disiloxane Chemical compound [SiH3]O[SiH3] KPUWHANPEXNPJT-UHFFFAOYSA-N 0.000 description 1
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- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- HTDJPCNNEPUOOQ-UHFFFAOYSA-N hexamethylcyclotrisiloxane Chemical compound C[Si]1(C)O[Si](C)(C)O[Si](C)(C)O1 HTDJPCNNEPUOOQ-UHFFFAOYSA-N 0.000 description 1
- UQEAIHBTYFGYIE-UHFFFAOYSA-N hexamethyldisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)C UQEAIHBTYFGYIE-UHFFFAOYSA-N 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- OFLMWACNYIOTNX-UHFFFAOYSA-N methyl(methylsilyloxy)silane Chemical compound C[SiH2]O[SiH2]C OFLMWACNYIOTNX-UHFFFAOYSA-N 0.000 description 1
- UIUXUFNYAYAMOE-UHFFFAOYSA-N methylsilane Chemical compound [SiH3]C UIUXUFNYAYAMOE-UHFFFAOYSA-N 0.000 description 1
- 239000002052 molecular layer Substances 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 229960001730 nitrous oxide Drugs 0.000 description 1
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- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Inorganic materials [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/04—Coating on selected surface areas, e.g. using masks
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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Abstract
【解決手段】フッ化炭素(CF)系ガスを含むエッチングガスから生成されたプラズマにより、マスクを介して基板上のシリコン含有膜をエッチングし、該シリコン含有膜に所定パターンの凹みを形成するエッチング工程と、
シリコン化合物ガスを使用して前記所定パターンの凹みの表面に吸着された層を、酸化性ガス又は窒化性ガスから生成されたプラズマにより酸化又は窒化させ、前記所定パターンの凹みの表面にシリコン酸化膜又はシリコン窒化膜を成膜する成膜工程と、
を含むことを特徴とするパターン形成方法が提供される。
【選択図】図3
Description
フッ化炭素(CF)系ガスを含むエッチングガスから生成されたプラズマにより、マスクを介して基板上のシリコン含有膜をエッチングし、該シリコン含有膜に所定パターンの凹みを形成するエッチング工程と、
シリコン化合物ガスを使用して前記所定パターンの凹みの表面に吸着された層を、酸化性ガス又は窒化性ガスから生成されたプラズマにより酸化又は窒化させ、前記所定パターンの凹みの表面にシリコン酸化膜又はシリコン窒化膜を成膜する成膜工程と、
を含むことを特徴とするパターン形成方法が提供される。
高いアスペクト比(Aspect Ratio:AR)を有するコンタクトホール(穴)をプラズマによりエッチングする場合、ホール底が深くなるに従いプラズマのラジカルが穴の底に到達する量が減少し、エッチングレートが低くなる。この現象について、図1及び図2を参照しながら説明する。図1は、コンタクトホールのエッチング深さとエッチングレートとの関係を示した図である。図2は、コンタクトホールのアスペクト比の定義と、ボーイング形状を説明するための図である。
<第1実施形態>
第1実施形態に係るパターン形成方法では、図3(a)に示したように、シリコン基板(Si)25上にシリコン酸化膜(SiO2)26、シリコン窒化膜(SiN)27、ポリシリコンマスク28が順に積層された初期状態において、図4に示したパターン形成処理を行う。図4は、第1実施形態に係るパターン形成処理を示したフローチャートである。なお、ポリシリコンマスク28には、フォトリソグラフィー技術を用いて直径φが25nmのホールのパターンが形成されている。
[パターン形成処理]
(エッチング処理)
図4に示したパターン形成処理が開始されると、ステップS10にてエッチング処理が実行される。この実験では、平行平板プラズマにおいて下部2周波数印加型の平行平板エッチング装置(図10参照)が用いられる。エッチングのプロセス条件は、圧力が2.27Pa、プラズマ生成用の高周波電力HFの周波数が60MHz、パワーが1500W、イオン引き込み用の高周波電力LFの周波数が400kHz、パワーが7800W、ガス種がC4F6/C3F8/Ar/O2の混合ガスである。この条件でポリシリコンマスク28を介してシリコン含有膜30(シリコン窒化膜27及びシリコン酸化膜26)をエッチングする。
(マスク除去処理)
次に、ステップS12にてマスク除去処理が実行される場合がある。このマスク除去処理は、エッチング処理のマスクがレジストマスクの場合、実行される。
(成膜処理)
次に、ステップS14にてALDによる成膜処理(ALD処理)が実行される。ここでは、マイクロ波プラズマ装置(図11参照)が成膜装置として使用される。成膜処理(S14)は、図5に示したように、ステップS20のガス吸着工程、ステップS22の第1の排気工程、ステップS24のプラズマ処理工程、ステップS26の第2の排気工程の順に実行される。
1.ガス吸着工程(ステップS20)
図5に示すように、ガス吸着工程では、成膜ガスとして、前駆体(プリカーサ)ガスとしてBTBAS(bis−tertiaryl−buthyl−amino−silane)及びアルゴンガス(Ar)が供給される。これにより、BTBASに含まれるシリコン原子が穴の表面に化学的に吸着される。
2.第1の排気工程(ステップS22)
第1の排気工程では、余剰に吸着した成膜ガスを除去する。具体的には、第1の排気工程では、パージガスとしてアルゴンガス(Ar)を供給しながら排気装置を用いて処理容器内の排気が行われる。これにより、穴の表面に過剰に化学的に吸着したケイ素(Si)をパージ(除去)することができる。これにより、穴の表面にはケイ素(Si)の原子層が形成される。ここでいう原子層は、ケイ素(Si)の原子が1原子分だけ層になったもののみならず、複数原子分の層も含む。
3.プラズマ処理工程(ステップS24)
プラズマ処理工程では、マイクロ波によるプラズマ処理を行う。具体的には、プラズマ処理工程では、反応性ガスとして酸素ガス(O2)がアルゴンガス(Ar)と共にプラズマ処理ガスとして処理容器内に供給される。また、マイクロ波が処理容器内に供給される。マイクロ波の電界エネルギーにより、プラズマ処理ガスは電離及び解離され、これによりプラズマが生成される。生成されたプラズマ中の酸素ラジカル(O*)により、穴の表面に吸着した原子層が酸化される。これにより、穴の表面には、シリコン酸化膜(SiO2)が成膜される。
4.第2の排気工程(ステップS26)
第2の排気工程では、未反応のプラズマ処理ガスを除去する。具体的には、第2の排気工程では、第1の排気工程と同様に、パージガスとしてアルゴンガス(Ar)を供給しながら排気装置を用いて処理容器内の排気を行う。これにより、未反応のプラズマ処理ガスが排気される。
[実験結果]
図6に上記パターン形成方法による実験結果を示す。図6の左側に示した「エッチングプロセス」は、シリコン含有膜30(シリコン酸化膜26及びシリコン窒化膜27)を被エッチング対象膜として、図4のエッチング処理(ステップS10)を実行した後の穴の断面図を示す。このとき、ポリシリコンマスク28に替えてレジストマスクが用いられる場合、マスク除去処理(ステップS12)を実行してマスクを除去してもよい。
(成膜処理の変形例)
ALDによる成膜処理(ステップS14)の変形例としては、シリコン酸化膜に替えてシリコン窒化膜を成膜してもよい。被エッチング対象膜とALDにより積層される膜との関係は、被エッチング処理膜がシリコン酸化膜の場合、ALDによる膜はシリコン酸化膜であってもよいし、シリコン窒化膜であってもよいが、シリコン酸化膜であることが好ましい。また、被エッチング処理膜がシリコン窒化膜の場合、ALDによる膜はシリコン酸化膜であってもよいし、シリコン窒化膜であってもよいが、シリコン窒化膜であることが好ましい。つまり、被エッチング処理膜とALDにより積層される膜とは同じ膜であることが好ましい。
1.ガス吸着工程
シリコン窒化膜を成膜する場合、図5のステップS20のガス吸着工程では、穴の表面に前駆体ガスであるDCS(Dichlorosilane、ジクロロシラン)が供給される。これにより、DCSに含まれるケイ素(Si)が穴の表面に化学的に吸着される。
2.第1の排気工程
次に、第1の排気工程では、穴の表面に窒素ガス(N2)、アンモニアガス(NH3)及びアルゴンガス(Ar)を供給する。これにより、第1の排気工程では、穴の表面に過剰に化学的に吸着したケイ素(Si)が除去され、ケイ素(Si)の原子層が形成される。
3.プラズマ処理工程
次に、プラズマ処理工程では、穴の表面に反応性ガスとして、窒素ガス(N2)及びアンモニアガス(NH3)をアルゴンガス(Ar)と共に供給し、マイクロ波を処理容器内に供給する。これにより、マイクロ波によるプラズマ処理が行われ、穴の表面には、シリコン窒化膜(SiN)が成膜される。シリコン窒化膜(SiN)は、図3(c)の穴形状を修復するための修復膜29の一例である。
4.第2の排気工程
プラズマ処理後、第2の排気工程では、未反応のプラズマ処理ガスを除去する。具体的には、第2の排気工程では、第1の排気工程と同様に、アルゴンガス(Ar)を供給しながら排気装置を用いて処理容器内の排気を行う。これにより、未反応のプラズマ処理ガスが排気される。
ヘキサメチルシクロトリシロキサン(−Si(CH3)2−O−)3−環状、
1,3,5,7−テトラメチルシクロテトラシロキサン(TMCTS)(−SiH(CH3)−O−)4−環状、
オクタメチルシクロテトラシロキサン(OMCTS)(−Si(CH3)2−O−)4−環状、および
1,3,5,7,9−ペンタメチルシクロペンタシロキサン(−SiH(CH3)−O−)5環状。
<第2実施形態>
次に、第2実施形態に係るパターン形成方法について、図8を参照しながら説明する。図8は、第2実施形態に係るパターン形成処理を示したフローチャートである。第2実施形態に係るパターン形成処理では、図4に示した第1実施形態に係るパターン形成処理のステップS10、S12、S14に加えて、ステップS30、S32のALD処理の繰り返し回数の算出処理が実行される。
次に、第1及び第2実施形態に係るパターン形成方法を実施するための基板処理システムの一例について、図9を参照しながら説明する。図9は、第1及び第2実施形態に係る基板処理システムの構成例である。基板処理システム200は、図3(a)の初期状態に示した積層膜が形成された基板に、図4及び図8のステップS10、S12、S14を実行するとともに、図8のS30、S32の処理を実行可能である。
次に、基板処理システム200のエッチング装置1の内部構成の一例を、図10に基づき説明する。図10は、第1及び第2実施形態にて図4及び図8のステップS10のエッチング処理を行うエッチング装置1の構成例である。
次に、基板処理システムに含まれる成膜装置1の一例について、図11を参照しながら説明する。図11は、第1及び第2実施形態にて図4及び図8のステップS14のALDによる成膜処理を行う成膜装置10Aの構成例である。より具体的には、図5のフローチャートの各工程を実行する成膜装置である。
Claims (9)
- フッ化炭素(CF)系ガスを含むエッチングガスから生成されたプラズマにより、マスクを介して基板上のシリコン含有膜をエッチングし、該シリコン含有膜に所定パターンの凹みを形成するエッチング工程と、
シリコン化合物ガスを使用して前記所定パターンの凹みの表面に吸着された層を、酸化性ガス又は窒化性ガスから生成されたプラズマにより酸化又は窒化させ、前記所定パターンの凹みの表面にシリコン酸化膜又はシリコン窒化膜を成膜する成膜工程と、
を含むことを特徴とするパターン形成方法。 - 前記成膜工程は、
前記シリコン化合物ガスとしてシリコン含有の前駆体ガスを供給し、前記所定パターンの凹みの表面に該前駆体ガスに含まれるケイ素(Si)を吸着させる吸着工程と、
前記反応性ガスを供給し、該反応性ガスから生成されたプラズマにより、前記所定パターンの凹みの表面に吸着された層を酸化又は窒化させ、前記シリコン酸化膜又は前記シリコン窒化膜を成膜するプラズマ処理工程と、
を含むことを特徴とする請求項1に記載のパターン形成方法。 - 前記成膜工程は、
前記吸着工程後であって前記プラズマ処理工程前にパージガスを供給し、前記所定パターンの凹みの表面をパージする第1の排気工程と、
前記プラズマ処理工程後にパージガスを供給し、前記所定パターンの凹みの表面をパージする第2の排気工程と、
を更に含むことを特徴とする請求項2に記載のパターン形成方法。 - 前記成膜工程は、
該成膜工程に含まれる各工程を一回ずつ実行した場合を1サイクルとして、予め定められた繰り返し回数又は繰り返し時間、前記サイクルを繰り返し実行することを特徴とする請求項2又は3に記載のパターン形成方法。 - 前記エッチング工程中、前記所定パターンの凹みの形状を計測する計測工程と、
前記計測工程による計測結果に基づき前記繰り返し回数又は前記繰り返し時間を算出する制御工程と、を更に含み、
前記成膜工程は、
前記制御工程により算出された前記繰り返し回数又は前記繰り返し時間、前記サイクルを繰り返し実行することを特徴とする請求項2又は3に記載のパターン形成方法。 - 前記成膜工程は、
前記所定パターンの凹みが形成されるシリコン含有膜の種類に応じて、前記酸化性ガス又は前記窒化性ガスのいずれかから選択された反応性ガスを供給することを特徴とする請求項1〜5のいずれか一項に記載のパターン形成方法。 - 前記前駆体ガスは、BTBAS(bis−tertiaryl−buthyl−amino−silane)又はジクロロシラン(DCS:Dichlorosilane)であることを特徴とする請求項2〜6のいずれか一項に記載のパターン形成方法。
- 前記エッチング工程は、
前記所定パターンの凹みを形成した後、前記マスクを除去する工程を含むことを特徴とする請求項1〜7のいずれか一項に記載のパターン形成方法。 - フッ化炭素(CF)系ガスを含むエッチングガスから生成されたプラズマにより、マスクを介して基板上のシリコン含有膜をエッチングし、該シリコン含有膜に所定パターンの凹みを形成するエッチング装置と、
シリコン化合物ガスを使用して前記所定パターンの凹みの表面に吸着された層を、酸化性ガス又は窒化性ガスから生成されたプラズマにより酸化又は窒化させ、前記所定パターンの凹みの表面にシリコン酸化膜又はシリコン窒化膜を成膜する成膜装置と、
を備える基板処理システム。
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Application Number | Priority Date | Filing Date | Title |
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CN104380440A (zh) | 2015-02-25 |
WO2014010630A1 (ja) | 2014-01-16 |
KR102080246B1 (ko) | 2020-02-21 |
TWI576914B (zh) | 2017-04-01 |
CN104380440B (zh) | 2016-12-07 |
US9279184B2 (en) | 2016-03-08 |
KR20150035593A (ko) | 2015-04-06 |
US20150167163A1 (en) | 2015-06-18 |
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