JP2013539543A - 空間選択的な複屈折低減を有するフィルムを使用するマスク加工 - Google Patents
空間選択的な複屈折低減を有するフィルムを使用するマスク加工 Download PDFInfo
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- JP2013539543A JP2013539543A JP2013518646A JP2013518646A JP2013539543A JP 2013539543 A JP2013539543 A JP 2013539543A JP 2013518646 A JP2013518646 A JP 2013518646A JP 2013518646 A JP2013518646 A JP 2013518646A JP 2013539543 A JP2013539543 A JP 2013539543A
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Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
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Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US36012910P | 2010-06-30 | 2010-06-30 | |
| US61/360,129 | 2010-06-30 | ||
| PCT/US2011/042368 WO2012012177A1 (en) | 2010-06-30 | 2011-06-29 | Mask processing using films with spatially selective birefringence reduction |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016068116A Division JP6297086B2 (ja) | 2010-06-30 | 2016-03-30 | 空間選択的な複屈折低減を有するフィルムを使用するマスク加工 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2013539543A true JP2013539543A (ja) | 2013-10-24 |
| JP2013539543A5 JP2013539543A5 (enExample) | 2014-08-14 |
Family
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Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013518646A Withdrawn JP2013539543A (ja) | 2010-06-30 | 2011-06-29 | 空間選択的な複屈折低減を有するフィルムを使用するマスク加工 |
| JP2016068116A Expired - Fee Related JP6297086B2 (ja) | 2010-06-30 | 2016-03-30 | 空間選択的な複屈折低減を有するフィルムを使用するマスク加工 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016068116A Expired - Fee Related JP6297086B2 (ja) | 2010-06-30 | 2016-03-30 | 空間選択的な複屈折低減を有するフィルムを使用するマスク加工 |
Country Status (7)
| Country | Link |
|---|---|
| US (3) | US9101956B2 (enExample) |
| EP (1) | EP2588903B1 (enExample) |
| JP (2) | JP2013539543A (enExample) |
| KR (2) | KR101851813B1 (enExample) |
| CN (1) | CN103038681B (enExample) |
| BR (1) | BR112012033235A2 (enExample) |
| WO (1) | WO2012012177A1 (enExample) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20190013436A (ko) * | 2017-07-27 | 2019-02-11 | 린텍 가부시키가이샤 | 적층체 및 적층체의 제조 방법 |
| KR20190013437A (ko) * | 2017-07-27 | 2019-02-11 | 린텍 가부시키가이샤 | 적층체 및 적층체의 제조 방법 |
| JP2021531502A (ja) * | 2018-07-17 | 2021-11-18 | カール ツァイス エスエムエス リミテッド | フォトリソグラフィマスクの基板に導入される１つまたは複数のピクセルの効果を決定するための方法および装置 |
| JP7257146B2 (ja) | 2016-06-03 | 2023-04-13 | スリーエム イノベイティブ プロパティズ カンパニー | 空間的に変異する微細複製層を有する光学フィルタ |
| WO2024143347A1 (ja) * | 2022-12-28 | 2024-07-04 | 富士フイルム株式会社 | 光学異方性層、積層体、導光素子、および、ａｒ表示デバイス |
| WO2024143339A1 (ja) * | 2022-12-28 | 2024-07-04 | 富士フイルム株式会社 | 光学異方性層、導光素子およびａｒ表示デバイス |
| WO2025187534A1 (ja) * | 2024-03-06 | 2025-09-12 | 富士フイルム株式会社 | 光学異方性層、積層体、導光素子、および、ヘッドマウントディスプレイ |
Families Citing this family (36)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20080271739A1 (en) | 2007-05-03 | 2008-11-06 | 3M Innovative Properties Company | Maintenance-free respirator that has concave portions on opposing sides of mask top section |
| US9770611B2 (en) | 2007-05-03 | 2017-09-26 | 3M Innovative Properties Company | Maintenance-free anti-fog respirator |
| US9279559B2 (en) | 2010-06-30 | 2016-03-08 | 3M Innovative Properties Company | Light directing film |
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| US20150301255A1 (en) | 2015-10-22 |
| KR101877209B1 (ko) | 2018-07-10 |
| US9101956B2 (en) | 2015-08-11 |
| KR20130040233A (ko) | 2013-04-23 |
| BR112012033235A2 (pt) | 2018-02-27 |
| WO2012012177A1 (en) | 2012-01-26 |
| US9423545B2 (en) | 2016-08-23 |
| KR101851813B1 (ko) | 2018-06-11 |
| US20130094084A1 (en) | 2013-04-18 |
| JP2016136278A (ja) | 2016-07-28 |
| CN103038681A (zh) | 2013-04-10 |
| KR20180014236A (ko) | 2018-02-07 |
| CN103038681B (zh) | 2016-09-28 |
| EP2588903A1 (en) | 2013-05-08 |
| JP6297086B2 (ja) | 2018-03-20 |
| US9810930B2 (en) | 2017-11-07 |
| EP2588903B1 (en) | 2021-01-20 |
| US20160334649A1 (en) | 2016-11-17 |
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