JP2013536539A5 - - Google Patents

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Publication number
JP2013536539A5
JP2013536539A5 JP2013512105A JP2013512105A JP2013536539A5 JP 2013536539 A5 JP2013536539 A5 JP 2013536539A5 JP 2013512105 A JP2013512105 A JP 2013512105A JP 2013512105 A JP2013512105 A JP 2013512105A JP 2013536539 A5 JP2013536539 A5 JP 2013536539A5
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JP
Japan
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coolant
plasma
temperature
flow rate
input
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JP2013512105A
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English (en)
Japanese (ja)
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JP2013536539A (ja
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Priority claimed from US13/040,149 external-priority patent/US8880227B2/en
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Publication of JP2013536539A publication Critical patent/JP2013536539A/ja
Publication of JP2013536539A5 publication Critical patent/JP2013536539A5/ja
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JP2013512105A 2010-05-27 2011-05-20 クーラント流量の制御及びヒーターのデューティーサイクルの制御による部品温度制御 Pending JP2013536539A (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US34907310P 2010-05-27 2010-05-27
US61/349,073 2010-05-27
US13/040,149 2011-03-03
US13/040,149 US8880227B2 (en) 2010-05-27 2011-03-03 Component temperature control by coolant flow control and heater duty cycle control
PCT/US2011/037436 WO2011149790A2 (en) 2010-05-27 2011-05-20 Component temperature control by coolant flow control and heater duty cycle control

Publications (2)

Publication Number Publication Date
JP2013536539A JP2013536539A (ja) 2013-09-19
JP2013536539A5 true JP2013536539A5 (enExample) 2014-07-24

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JP2013512105A Pending JP2013536539A (ja) 2010-05-27 2011-05-20 クーラント流量の制御及びヒーターのデューティーサイクルの制御による部品温度制御

Country Status (6)

Country Link
US (2) US8880227B2 (enExample)
JP (1) JP2013536539A (enExample)
KR (1) KR101476727B1 (enExample)
CN (2) CN106842966B (enExample)
TW (3) TWI564930B (enExample)
WO (1) WO2011149790A2 (enExample)

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