JP2013534695A5 - - Google Patents

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Publication number
JP2013534695A5
JP2013534695A5 JP2013514239A JP2013514239A JP2013534695A5 JP 2013534695 A5 JP2013534695 A5 JP 2013534695A5 JP 2013514239 A JP2013514239 A JP 2013514239A JP 2013514239 A JP2013514239 A JP 2013514239A JP 2013534695 A5 JP2013534695 A5 JP 2013534695A5
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JP
Japan
Prior art keywords
heat transfer
transfer fluid
valves
fluid container
chuck
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JP2013514239A
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English (en)
Japanese (ja)
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JP2013534695A (ja
JP6077995B2 (ja
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Priority claimed from US13/111,334 external-priority patent/US8916793B2/en
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Publication of JP2013534695A5 publication Critical patent/JP2013534695A5/ja
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JP2013514239A 2010-06-08 2011-06-03 パルス状の熱伝導流体の流れを用いたプラズマ処理装置における温度制御 Active JP6077995B2 (ja)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
US35277910P 2010-06-08 2010-06-08
US61/352,779 2010-06-08
US36223210P 2010-07-07 2010-07-07
US61/362,232 2010-07-07
US13/111,334 US8916793B2 (en) 2010-06-08 2011-05-19 Temperature control in plasma processing apparatus using pulsed heat transfer fluid flow
US13/111,334 2011-05-19
PCT/US2011/039182 WO2011156239A2 (en) 2010-06-08 2011-06-03 Temperature control in plasma processing apparatus using pulsed heat transfer fluid flow

Publications (3)

Publication Number Publication Date
JP2013534695A JP2013534695A (ja) 2013-09-05
JP2013534695A5 true JP2013534695A5 (enExample) 2015-11-19
JP6077995B2 JP6077995B2 (ja) 2017-02-08

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JP2013514239A Active JP6077995B2 (ja) 2010-06-08 2011-06-03 パルス状の熱伝導流体の流れを用いたプラズマ処理装置における温度制御

Country Status (6)

Country Link
US (2) US8916793B2 (enExample)
JP (1) JP6077995B2 (enExample)
KR (1) KR101801070B1 (enExample)
CN (1) CN102907180B (enExample)
TW (1) TWI445459B (enExample)
WO (1) WO2011156239A2 (enExample)

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