JP2013535562A5 - - Google Patents
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- JP2013535562A5 JP2013535562A5 JP2013524128A JP2013524128A JP2013535562A5 JP 2013535562 A5 JP2013535562 A5 JP 2013535562A5 JP 2013524128 A JP2013524128 A JP 2013524128A JP 2013524128 A JP2013524128 A JP 2013524128A JP 2013535562 A5 JP2013535562 A5 JP 2013535562A5
- Authority
- JP
- Japan
- Prior art keywords
- polymer composition
- phenyl
- tris
- formula
- exo
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 229920000642 polymer Polymers 0.000 claims description 83
- 239000000203 mixture Substances 0.000 claims description 50
- 239000000178 monomer Substances 0.000 claims description 44
- 229920000515 polycarbonate Polymers 0.000 claims description 34
- 239000004417 polycarbonate Substances 0.000 claims description 34
- -1 polycyclic diol Chemical class 0.000 claims description 27
- 238000000034 method Methods 0.000 claims description 25
- 239000000758 substrate Substances 0.000 claims description 21
- 239000002253 acid Substances 0.000 claims description 15
- NFHFRUOZVGFOOS-UHFFFAOYSA-N palladium;triphenylphosphane Chemical compound [Pd].C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1 NFHFRUOZVGFOOS-UHFFFAOYSA-N 0.000 claims description 14
- 229910052739 hydrogen Inorganic materials 0.000 claims description 12
- 239000001257 hydrogen Substances 0.000 claims description 12
- LWNGJAHMBMVCJR-UHFFFAOYSA-N (2,3,4,5,6-pentafluorophenoxy)boronic acid Chemical compound OB(O)OC1=C(F)C(F)=C(F)C(F)=C1F LWNGJAHMBMVCJR-UHFFFAOYSA-N 0.000 claims description 10
- 150000002009 diols Chemical class 0.000 claims description 10
- 125000000217 alkyl group Chemical group 0.000 claims description 9
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 8
- 125000003710 aryl alkyl group Chemical group 0.000 claims description 7
- 125000003118 aryl group Chemical group 0.000 claims description 7
- 125000000753 cycloalkyl group Chemical group 0.000 claims description 7
- 125000004404 heteroalkyl group Chemical group 0.000 claims description 7
- 125000001072 heteroaryl group Chemical group 0.000 claims description 7
- 125000000592 heterocycloalkyl group Chemical group 0.000 claims description 7
- 125000003367 polycyclic group Chemical group 0.000 claims description 7
- 239000007983 Tris buffer Substances 0.000 claims description 6
- 150000001450 anions Chemical class 0.000 claims description 6
- LGRLWUINFJPLSH-UHFFFAOYSA-N methanide Chemical compound [CH3-] LGRLWUINFJPLSH-UHFFFAOYSA-N 0.000 claims description 6
- WLOQLWBIJZDHET-UHFFFAOYSA-N triphenylsulfonium Chemical compound C1=CC=CC=C1[S+](C=1C=CC=CC=1)C1=CC=CC=C1 WLOQLWBIJZDHET-UHFFFAOYSA-N 0.000 claims description 6
- 239000012953 triphenylsulfonium Substances 0.000 claims description 6
- QKAIFCSOWIMRJG-UHFFFAOYSA-N (4-methylphenyl)-(4-propan-2-ylphenyl)iodanium Chemical compound C1=CC(C(C)C)=CC=C1[I+]C1=CC=C(C)C=C1 QKAIFCSOWIMRJG-UHFFFAOYSA-N 0.000 claims description 5
- DNFSNYQTQMVTOK-UHFFFAOYSA-N bis(4-tert-butylphenyl)iodanium Chemical compound C1=CC(C(C)(C)C)=CC=C1[I+]C1=CC=C(C(C)(C)C)C=C1 DNFSNYQTQMVTOK-UHFFFAOYSA-N 0.000 claims description 5
- 150000003949 imides Chemical class 0.000 claims description 5
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 claims description 3
- RWSOTUBLDIXVET-UHFFFAOYSA-N Dihydrogen sulfide Chemical class S RWSOTUBLDIXVET-UHFFFAOYSA-N 0.000 claims description 3
- SJWNMXYJLKDWOG-UHFFFAOYSA-N [2-(4-methoxynaphthalen-1-yl)-2-oxoethyl]-dimethylsulfanium Chemical compound C1=CC=C2C(OC)=CC=C(C(=O)C[S+](C)C)C2=C1 SJWNMXYJLKDWOG-UHFFFAOYSA-N 0.000 claims description 3
- HFKJQIJFRMRSKM-UHFFFAOYSA-N [3,5-bis(trifluoromethyl)phenoxy]boronic acid Chemical compound OB(O)OC1=CC(C(F)(F)F)=CC(C(F)(F)F)=C1 HFKJQIJFRMRSKM-UHFFFAOYSA-N 0.000 claims description 3
- VGZKCAUAQHHGDK-UHFFFAOYSA-M bis(4-tert-butylphenyl)iodanium;trifluoromethanesulfonate Chemical compound [O-]S(=O)(=O)C(F)(F)F.C1=CC(C(C)(C)C)=CC=C1[I+]C1=CC=C(C(C)(C)C)C=C1 VGZKCAUAQHHGDK-UHFFFAOYSA-M 0.000 claims description 3
- UQWLFOMXECTXNQ-UHFFFAOYSA-N bis(trifluoromethylsulfonyl)methylsulfonyl-trifluoromethane Chemical compound FC(F)(F)S(=O)(=O)[C-](S(=O)(=O)C(F)(F)F)S(=O)(=O)C(F)(F)F UQWLFOMXECTXNQ-UHFFFAOYSA-N 0.000 claims description 3
- 150000001768 cations Chemical class 0.000 claims description 3
- ZOBIQZZKCFPQAR-UHFFFAOYSA-N dimethyl-(2-oxo-2-phenanthren-2-ylethyl)sulfanium Chemical compound C1=CC=C2C3=CC=C(C(=O)C[S+](C)C)C=C3C=CC2=C1 ZOBIQZZKCFPQAR-UHFFFAOYSA-N 0.000 claims description 3
- ACCDBHBOYZJSDT-UHFFFAOYSA-N n-(4-bromophenyl)-2-fluoroacetamide Chemical compound FCC(=O)NC1=CC=C(Br)C=C1 ACCDBHBOYZJSDT-UHFFFAOYSA-N 0.000 claims description 3
- YFSUTJLHUFNCNZ-UHFFFAOYSA-N perfluorooctane-1-sulfonic acid Chemical compound OS(=O)(=O)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F YFSUTJLHUFNCNZ-UHFFFAOYSA-N 0.000 claims description 3
- JUJWROOIHBZHMG-UHFFFAOYSA-O pyridinium Chemical compound C1=CC=[NH+]C=C1 JUJWROOIHBZHMG-UHFFFAOYSA-O 0.000 claims description 3
- 150000003839 salts Chemical class 0.000 claims description 3
- RWSOTUBLDIXVET-UHFFFAOYSA-O sulfonium Chemical compound [SH3+] RWSOTUBLDIXVET-UHFFFAOYSA-O 0.000 claims description 3
- ITMCEJHCFYSIIV-UHFFFAOYSA-M triflate Chemical compound [O-]S(=O)(=O)C(F)(F)F ITMCEJHCFYSIIV-UHFFFAOYSA-M 0.000 claims description 3
- IWBWUYDWYFYWIO-UHFFFAOYSA-N triphenacylsulfanium Chemical compound C=1C=CC=CC=1C(=O)C[S+](CC(=O)C=1C=CC=CC=1)CC(=O)C1=CC=CC=C1 IWBWUYDWYFYWIO-UHFFFAOYSA-N 0.000 claims description 3
- ZMOJTPABCOWEOS-UHFFFAOYSA-N tris(4-tert-butylphenyl)sulfanium Chemical compound C1=CC(C(C)(C)C)=CC=C1[S+](C=1C=CC(=CC=1)C(C)(C)C)C1=CC=C(C(C)(C)C)C=C1 ZMOJTPABCOWEOS-UHFFFAOYSA-N 0.000 claims description 3
- BXGYYDRIMBPOMN-UHFFFAOYSA-N 2-(hydroxymethoxy)ethoxymethanol Chemical compound OCOCCOCO BXGYYDRIMBPOMN-UHFFFAOYSA-N 0.000 claims 8
- XALRUHBKYUUYEF-UHFFFAOYSA-N bis(trifluoromethylsulfonyl)methylsulfonyl-trifluoromethane;tris[4-(4-acetylphenyl)sulfanylphenyl]sulfanium Chemical compound FC(F)(F)S(=O)(=O)[C-](S(=O)(=O)C(F)(F)F)S(=O)(=O)C(F)(F)F.C1=CC(C(=O)C)=CC=C1SC1=CC=C([S+](C=2C=CC(SC=3C=CC(=CC=3)C(C)=O)=CC=2)C=2C=CC(SC=3C=CC(=CC=3)C(C)=O)=CC=2)C=C1 XALRUHBKYUUYEF-UHFFFAOYSA-N 0.000 claims 5
- 150000002431 hydrogen Chemical class 0.000 claims 4
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 claims 4
- WOAGDWWRYOZHDS-UHFFFAOYSA-N 4,4,5,5,6,6-hexafluoro-1,3,2-dithiazinane 1,1,3,3-tetraoxide Chemical compound FC1(F)C(F)(F)S(=O)(=O)NS(=O)(=O)C1(F)F WOAGDWWRYOZHDS-UHFFFAOYSA-N 0.000 claims 2
- KLDXJTOLSGUMSJ-JGWLITMVSA-N Isosorbide Chemical compound O[C@@H]1CO[C@@H]2[C@@H](O)CO[C@@H]21 KLDXJTOLSGUMSJ-JGWLITMVSA-N 0.000 claims 2
- ZOBVJNCEEVORQV-UHFFFAOYSA-N bis[2-(4-methoxyphenyl)-2-oxoethyl]-methylsulfanium Chemical compound C1=CC(OC)=CC=C1C(=O)C[S+](C)CC(=O)C1=CC=C(OC)C=C1 ZOBVJNCEEVORQV-UHFFFAOYSA-N 0.000 claims 2
- RLMGYIOTPQVQJR-UHFFFAOYSA-N cyclohexane-1,3-diol Chemical compound OC1CCCC(O)C1 RLMGYIOTPQVQJR-UHFFFAOYSA-N 0.000 claims 2
- 229960002479 isosorbide Drugs 0.000 claims 2
- JGTNAGYHADQMCM-UHFFFAOYSA-N perfluorobutanesulfonic acid Chemical compound OS(=O)(=O)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F JGTNAGYHADQMCM-UHFFFAOYSA-N 0.000 claims 2
- DCANOBZVYGAUDP-UHFFFAOYSA-N spiro[1,3-dioxane-5,3'-bicyclo[2.2.1]heptane]-2-one Chemical compound C1OC(=O)OCC11C(C2)CCC2C1 DCANOBZVYGAUDP-UHFFFAOYSA-N 0.000 claims 2
- 230000003213 activating effect Effects 0.000 claims 1
- 125000001183 hydrocarbyl group Chemical group 0.000 description 7
- WQVIVQDHNKQWTM-UHFFFAOYSA-N 1-tert-butyl-4-iodobenzene Chemical compound CC(C)(C)C1=CC=C(I)C=C1 WQVIVQDHNKQWTM-UHFFFAOYSA-N 0.000 description 1
- BTBUEUYNUDRHOZ-UHFFFAOYSA-N Borate Chemical compound [O-]B([O-])[O-] BTBUEUYNUDRHOZ-UHFFFAOYSA-N 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- LSDPWZHWYPCBBB-UHFFFAOYSA-O methylsulfide anion Chemical compound [SH2+]C LSDPWZHWYPCBBB-UHFFFAOYSA-O 0.000 description 1
- 125000000538 pentafluorophenyl group Chemical group FC1=C(F)C(F)=C(*)C(F)=C1F 0.000 description 1
- 125000005003 perfluorobutyl group Chemical group FC(F)(F)C(F)(F)C(F)(F)C(F)(F)* 0.000 description 1
- 229920006254 polymer film Polymers 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- BDHFUVZGWQCTTF-UHFFFAOYSA-M sulfonate Chemical compound [O-]S(=O)=O BDHFUVZGWQCTTF-UHFFFAOYSA-M 0.000 description 1
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US37121110P | 2010-08-06 | 2010-08-06 | |
| US37148910P | 2010-08-06 | 2010-08-06 | |
| US61/371,211 | 2010-08-06 | ||
| US61/371,489 | 2010-08-06 | ||
| PCT/US2011/046729 WO2012019091A1 (en) | 2010-08-06 | 2011-08-05 | Sacrificial polymer compositions including polycarbonates having repeat units derived from stereospecific polycyclic 2,3-diol monomers |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013535562A JP2013535562A (ja) | 2013-09-12 |
| JP2013535562A5 true JP2013535562A5 (cg-RX-API-DMAC7.html) | 2014-04-24 |
| JP5837069B2 JP5837069B2 (ja) | 2015-12-24 |
Family
ID=45555212
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013524128A Expired - Fee Related JP5837069B2 (ja) | 2010-08-06 | 2011-08-05 | 立体特異性多環式２，３−ジオールモノマーから誘導される繰り返し単位を有するポリカーボネートを含む犠牲ポリマー組成物 |
| JP2013524129A Expired - Fee Related JP5704495B2 (ja) | 2010-08-06 | 2011-08-05 | マイクロエレクトロニクス組立用のポリマー組成物 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013524129A Expired - Fee Related JP5704495B2 (ja) | 2010-08-06 | 2011-08-05 | マイクロエレクトロニクス組立用のポリマー組成物 |
Country Status (6)
| Country | Link |
|---|---|
| US (4) | US8575248B2 (cg-RX-API-DMAC7.html) |
| EP (2) | EP2601239A1 (cg-RX-API-DMAC7.html) |
| JP (2) | JP5837069B2 (cg-RX-API-DMAC7.html) |
| KR (2) | KR101650893B1 (cg-RX-API-DMAC7.html) |
| CN (2) | CN103119082A (cg-RX-API-DMAC7.html) |
| WO (2) | WO2012019092A1 (cg-RX-API-DMAC7.html) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2601239A1 (en) | 2010-08-06 | 2013-06-12 | Promerus, LLC | Polymer composition for microelectronic assembly |
| US8535454B2 (en) * | 2010-11-23 | 2013-09-17 | Promerus, Llc | Polymer composition for microelectronic assembly |
| KR102148246B1 (ko) * | 2012-07-04 | 2020-08-26 | 가부시키가이샤 가네카 | 포지티브형 감광성 조성물, 박막 트랜지스터 및 화합물 |
| WO2014099614A1 (en) * | 2012-12-17 | 2014-06-26 | Promerus, Llc | Thermally decomposable polymer composition for forming microelectric assemblies |
| TW201446876A (zh) * | 2013-02-28 | 2014-12-16 | Promerus Llc | 具有聚環官能側基之高玻璃轉換溫度之光可成像聚碳酸酯類聚合物 |
| JP6612533B2 (ja) * | 2015-06-12 | 2019-11-27 | 三菱瓦斯化学株式会社 | 反応現像画像形成法、反応現像画像形成法に用いられる感光性樹脂組成物、および反応現像画像形成方法により製造された基板ならびに構造物 |
| JP6807226B2 (ja) * | 2016-12-09 | 2021-01-06 | 東京応化工業株式会社 | 基材上に平坦化膜又はマイクロレンズを形成するために用いられるエネルギー感受性組成物、硬化体の製造方法、硬化体、マイクロレンズの製造方法、及びｃｍｏｓイメージセンサ |
| KR101880151B1 (ko) * | 2017-07-12 | 2018-07-20 | 주식회사 삼양사 | 폴리노보넨-폴리카보네이트 공중합체 및 그 제조방법 |
| CN111848933B (zh) * | 2020-06-28 | 2022-08-23 | 吴君宇 | 一种可降解共聚酯的制备方法 |
| CN114161031A (zh) * | 2021-12-30 | 2022-03-11 | 广东芯聚能半导体有限公司 | 助焊剂、助焊膜、预制焊片及其应用 |
| JP2023135288A (ja) * | 2022-03-15 | 2023-09-28 | 旭化成株式会社 | メチレン鎖を含む脂環式ポリカーボネート樹脂 |
| WO2024042951A1 (ja) * | 2022-08-23 | 2024-02-29 | サンアプロ株式会社 | 酸発生剤、前記酸発生剤を含む硬化性組成物、及びその硬化物 |
| JP2023052255A (ja) * | 2022-08-23 | 2023-04-11 | サンアプロ株式会社 | 酸発生剤、前記酸発生剤を含む硬化性組成物、及びその硬化物 |
| WO2025203788A1 (ja) * | 2024-03-26 | 2025-10-02 | リンテック株式会社 | 分解性フィルムの使用方法およびレジストパターンの作製方法 |
| CN121039569A (zh) * | 2024-03-26 | 2025-11-28 | 琳得科株式会社 | 分解性膜的使用方法及抗蚀图案的制作方法 |
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-
2011
- 2011-08-05 EP EP11749044.1A patent/EP2601239A1/en not_active Withdrawn
- 2011-08-05 US US13/204,036 patent/US8575248B2/en not_active Expired - Fee Related
- 2011-08-05 JP JP2013524128A patent/JP5837069B2/ja not_active Expired - Fee Related
- 2011-08-05 KR KR1020137005707A patent/KR101650893B1/ko not_active Expired - Fee Related
- 2011-08-05 US US13/204,044 patent/US8575297B2/en not_active Expired - Fee Related
- 2011-08-05 EP EP11745659.0A patent/EP2601238B1/en not_active Not-in-force
- 2011-08-05 JP JP2013524129A patent/JP5704495B2/ja not_active Expired - Fee Related
- 2011-08-05 WO PCT/US2011/046732 patent/WO2012019092A1/en not_active Ceased
- 2011-08-05 CN CN2011800459816A patent/CN103119082A/zh active Pending
- 2011-08-05 KR KR1020137005706A patent/KR101729065B1/ko not_active Expired - Fee Related
- 2011-08-05 WO PCT/US2011/046729 patent/WO2012019091A1/en not_active Ceased
- 2011-08-05 CN CN201180045991.XA patent/CN103154081B/zh not_active Expired - Fee Related
-
2013
- 2013-09-27 US US14/038,858 patent/US8729215B2/en not_active Expired - Fee Related
- 2013-09-27 US US14/039,433 patent/US8729166B2/en not_active Expired - Fee Related
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