JP2013502747A - 帯状に延在するガス入口区域を有するcvd反応炉及びcvd反応炉内の基板上に層を堆積する方法 - Google Patents
帯状に延在するガス入口区域を有するcvd反応炉及びcvd反応炉内の基板上に層を堆積する方法 Download PDFInfo
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- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
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- C—CHEMISTRY; METALLURGY
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45563—Gas nozzles
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- C—CHEMISTRY; METALLURGY
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45563—Gas nozzles
- C23C16/45574—Nozzles for more than one gas
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4582—Rigid and flat substrates, e.g. plates or discs
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Abstract
【選択図】図1
Description
2 サセプタ
3 サセプタ上面
4 基板
5 ガス入口部品
6 ガス入口部品下面
7、8 分配室
9、10 供給ライン
11、12 ガス入口区域
13、14 ガス入口開口
15 分離壁
16 区域境界
Claims (10)
- プロセスチャンバ(1)を有し、前記プロセスチャンバの床(3)は層をコーティングされる基板(4)を受容するサセプタ(2)により形成されるとともに、前記プロセスチャンバの天井(6)は全面に亘って多数のガス入口開口(13、14)を具備するガス入口部品(5)の下面により形成され、前記ガス入口開口(13、14)は延在方向に沿って互いに平行に延びる帯状の第1及び第2のガス入口区域(11、12)に分割されており、前記第1のガス入口区域(11)の前記ガス入口開口(13)は第1のプロセスガスを前記プロセスチャンバ内に導入するために共通する第1のプロセスガス供給ライン(9)に接続されるとともに、前記第2のガス入口区域(12)の前記ガス入口開口(14)は第2のプロセスガスを前記プロセスチャンバ内に導入するために前記第1のプロセスガス供給ライン(9)とは異なる共通する第2のプロセスガス供給ライン(10)に接続され、かつ、前記第1及び第2のガス入口区域(11、12)は互いに沿って交互に並んでおり、前記第1及び第2のガス入口区域(11、12)の各々は延在方向に対して垂直な方向に並んだ多数の前記ガス入口開口(13、14)を有し、2つの直接隣り合う前記ガス入口開口(13、14)の間隔(D)は前記プロセスチャンバ(1)の高さ(H)のほぼ1/4であり、かつ、前記ガス入口区域(11、12)の各々の幅(W)はほぼ前記高さ(H)に相当する、CVD反応炉。
- 前記天井(6)及び前記床(3)は実質的に円形(6)であり、前記サセプタ(2)は回転軸(17)の周りで回転可能であることを特徴とする請求項1に記載のCVD反応炉。
- 前記第1のガス入口区域(11)と前記第2のガス入口区域(12)の区域境界(16)が、ガス入口部品のディスク形状の下面(6)の中心(M)を通って延び、かつ、前記サセプタの回転軸(17)が前記中心(M)を通って延びることを特徴とする請求項1又は2に記載のCVD反応炉。
- 一列に並んだ前記ガス入口開口(13、14)の間隔が約2.6mmであることを特徴とする請求項1〜3のいずれかに記載のCVD反応炉。
- 前記プロセスチャンバの高さ(H)が約11mmであることを特徴とする請求項1〜4のいずれかに記載のCVD反応炉。
- 前記プロセスチャンバの直径が約300mmより大きいことを特徴とする請求項1〜5のいずれかに記載のCVD反応炉。
- プロセスチャンバ(1)内の基板上に層を堆積する方法であって、前記プロセスチャンバの床(3)が基板(4)を載置するためのサセプタ(2)により形成され、前記プロセスチャンバの天井(6)が全面に亘って多数のガス入口開口(13、14)を具備するガス入口部品(5)の下面により形成され、前記ガス入口開口(13、14)は延在方向に沿って互いに平行に延びる帯状の第1及び第2のガス入口区域(11、12)に分割されており、前記第1のガス入口区域(11)の前記ガス入口開口(13)は第1のプロセスガスを前記プロセスチャンバ内に導入するために共通する第1のプロセスガス供給ライン(9)に接続されるとともに、前記第2のガス入口区域(12)の前記ガス入口開口(14)は第2のプロセスガスを前記プロセスチャンバ内に導入するために前記第1のプロセスガス供給ライン(9)とは異なる共通する第2のプロセスガス供給ライン(10)に接続され、かつ、前記第1及び第2のガス入口区域(11、12)は互いに沿って交互に並んでいる、前記方法において、
前記ガス入口開口(13、14)の互いの間隔(D)、前記プロセスチャンバ(1)の高さ(H)、前記ガス入口区域(11、12)の各々の幅(W)、500mbarと1,000mbarの間の範囲の全圧、前記ガス入口区域(11、12)の各々を通してプロセスガスとともに前記プロセスチャンバ(1)内に導入されるキャリアガスのマスフロー速度は互いに異なる前記第1及び第2のプロセスガスの完全な混合が前記プロセスチャンバ(1)の下半分でのみ生じるように選択され、共通するガス入口区域に割り当てられ延在方向に対して垂直な方向に並んだ多数のガス入口開口(13、14)の間隔が前記プロセスチャンバの高さ(H)のほぼ1/4であり、前記ガス入口区域(11、12)の各々の幅(W)が前記高さ(H)にほぼ相当することを特徴とする
プロセスチャンバ(1)内の基板上に層を堆積する方法。 - 前記第1のプロセスガスが、TMIn、TMGa又はTMAlである、有機金属化合物である請求項7に記載の方法。
- 前記第2のプロセスガスが、ヒ化水素、ホスフィン又はアンモニアである、水素化物である請求項7又は8に記載の方法。
- 前記ガス入口開口(13、14)を具備する前記ガス入口部品(5)の下面(6)が、第1及び第2のプロセスガスの付加物形成温度より高い温度とされることを特徴とする請求項7〜9のいずれかに記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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DE102009043840A DE102009043840A1 (de) | 2009-08-24 | 2009-08-24 | CVD-Reaktor mit streifenförmig verlaufenden Gaseintrittszonen sowie Verfahren zum Abscheiden einer Schicht auf einem Substrat in einem derartigen CVD-Reaktor |
DE102009043840.8 | 2009-08-24 | ||
PCT/EP2010/061174 WO2011023493A1 (de) | 2009-08-24 | 2010-08-02 | Cvd-reaktor und verfahren zum abscheiden einer schicht |
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JP2013502747A true JP2013502747A (ja) | 2013-01-24 |
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JP2012546391A Pending JP2013502747A (ja) | 2009-08-24 | 2010-08-02 | 帯状に延在するガス入口区域を有するcvd反応炉及びcvd反応炉内の基板上に層を堆積する方法 |
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US (1) | US20120263877A1 (ja) |
EP (1) | EP2470685B1 (ja) |
JP (1) | JP2013502747A (ja) |
KR (1) | KR101716678B1 (ja) |
CN (1) | CN102482774B (ja) |
DE (1) | DE102009043840A1 (ja) |
TW (1) | TWI537416B (ja) |
WO (1) | WO2011023493A1 (ja) |
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- 2010-08-02 US US13/391,561 patent/US20120263877A1/en not_active Abandoned
- 2010-08-02 EP EP10737914.1A patent/EP2470685B1/de not_active Not-in-force
- 2010-08-02 KR KR1020127007658A patent/KR101716678B1/ko active IP Right Grant
- 2010-08-02 CN CN201080037460.1A patent/CN102482774B/zh not_active Expired - Fee Related
- 2010-08-02 JP JP2012546391A patent/JP2013502747A/ja active Pending
- 2010-08-17 TW TW099127408A patent/TWI537416B/zh not_active IP Right Cessation
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Also Published As
Publication number | Publication date |
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KR20120073245A (ko) | 2012-07-04 |
CN102482774A (zh) | 2012-05-30 |
DE102009043840A1 (de) | 2011-03-03 |
EP2470685B1 (de) | 2018-12-12 |
WO2011023493A1 (de) | 2011-03-03 |
EP2470685A1 (de) | 2012-07-04 |
TW201120238A (en) | 2011-06-16 |
TWI537416B (zh) | 2016-06-11 |
US20120263877A1 (en) | 2012-10-18 |
CN102482774B (zh) | 2014-07-02 |
KR101716678B1 (ko) | 2017-03-15 |
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