JP2013170118A5 - - Google Patents
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- Publication number
- JP2013170118A5 JP2013170118A5 JP2012037161A JP2012037161A JP2013170118A5 JP 2013170118 A5 JP2013170118 A5 JP 2013170118A5 JP 2012037161 A JP2012037161 A JP 2012037161A JP 2012037161 A JP2012037161 A JP 2012037161A JP 2013170118 A5 JP2013170118 A5 JP 2013170118A5
- Authority
- JP
- Japan
- Prior art keywords
- frequency
- polycrystalline silicon
- silicon rod
- frequency current
- current
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims 14
- 238000004519 manufacturing process Methods 0.000 claims 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 3
- 238000006243 chemical reaction Methods 0.000 claims 1
- 238000005229 chemical vapour deposition Methods 0.000 claims 1
- 238000000151 deposition Methods 0.000 claims 1
- 230000005611 electricity Effects 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 238000001556 precipitation Methods 0.000 claims 1
- 239000002994 raw material Substances 0.000 claims 1
- 229910000077 silane Inorganic materials 0.000 claims 1
- -1 silane compound Chemical class 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 claims 1
- 239000005052 trichlorosilane Substances 0.000 claims 1
Priority Applications (8)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012037161A JP5792658B2 (ja) | 2012-02-23 | 2012-02-23 | 多結晶シリコン棒の製造方法 |
| KR1020147019668A KR20140128300A (ko) | 2012-02-23 | 2013-02-19 | 다결정 실리콘 봉의 제조 방법 |
| US14/379,429 US20150037516A1 (en) | 2012-02-23 | 2013-02-19 | Polycrystalline silicon rod manufacturing method |
| PCT/JP2013/000893 WO2013125208A1 (ja) | 2012-02-23 | 2013-02-19 | 多結晶シリコン棒の製造方法 |
| EP13751609.2A EP2818449B1 (en) | 2012-02-23 | 2013-02-19 | Polycrystalline silicon rod manufacturing method |
| MYPI2014702227A MY171531A (en) | 2012-02-23 | 2013-02-19 | Polycrystalline silicon rod manufacturing method |
| CN201710117230.XA CN106947955A (zh) | 2012-02-23 | 2013-02-19 | 多晶硅棒的制造方法 |
| CN201380006277.9A CN104066678B (zh) | 2012-02-23 | 2013-02-19 | 多晶硅棒的制造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012037161A JP5792658B2 (ja) | 2012-02-23 | 2012-02-23 | 多結晶シリコン棒の製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013170118A JP2013170118A (ja) | 2013-09-02 |
| JP2013170118A5 true JP2013170118A5 (https=) | 2014-01-23 |
| JP5792658B2 JP5792658B2 (ja) | 2015-10-14 |
Family
ID=49005404
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012037161A Active JP5792658B2 (ja) | 2012-02-23 | 2012-02-23 | 多結晶シリコン棒の製造方法 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US20150037516A1 (https=) |
| EP (1) | EP2818449B1 (https=) |
| JP (1) | JP5792658B2 (https=) |
| KR (1) | KR20140128300A (https=) |
| CN (2) | CN104066678B (https=) |
| MY (1) | MY171531A (https=) |
| WO (1) | WO2013125208A1 (https=) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6418778B2 (ja) * | 2014-05-07 | 2018-11-07 | 信越化学工業株式会社 | 多結晶シリコン棒、多結晶シリコン棒の製造方法、および、単結晶シリコン |
| JP6314097B2 (ja) * | 2015-02-19 | 2018-04-18 | 信越化学工業株式会社 | 多結晶シリコン棒 |
| JP7191780B2 (ja) | 2019-06-17 | 2022-12-19 | 信越化学工業株式会社 | 多結晶シリコンロッドの製造方法 |
| CN114150372A (zh) * | 2022-02-10 | 2022-03-08 | 杭州中欣晶圆半导体股份有限公司 | 一种横向磁场变频电流控制系统及单晶生长缺陷控制方法 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2831816A1 (de) | 1978-07-19 | 1980-01-31 | Siemens Ag | Verfahren zum abscheiden von silicium in feinkristalliner form |
| JPS6374909A (ja) * | 1986-09-19 | 1988-04-05 | Shin Etsu Handotai Co Ltd | 大直径多結晶シリコン棒の製造方法 |
| US6221155B1 (en) * | 1997-12-15 | 2001-04-24 | Advanced Silicon Materials, Llc | Chemical vapor deposition system for polycrystalline silicon rod production |
| RU2499768C2 (ru) * | 2008-03-10 | 2013-11-27 | Аег Пауэр Солюшнс Б.В. | Устройство и способ равномерного электропитания кремниевого стержня |
-
2012
- 2012-02-23 JP JP2012037161A patent/JP5792658B2/ja active Active
-
2013
- 2013-02-19 WO PCT/JP2013/000893 patent/WO2013125208A1/ja not_active Ceased
- 2013-02-19 CN CN201380006277.9A patent/CN104066678B/zh active Active
- 2013-02-19 US US14/379,429 patent/US20150037516A1/en not_active Abandoned
- 2013-02-19 CN CN201710117230.XA patent/CN106947955A/zh not_active Withdrawn
- 2013-02-19 MY MYPI2014702227A patent/MY171531A/en unknown
- 2013-02-19 EP EP13751609.2A patent/EP2818449B1/en active Active
- 2013-02-19 KR KR1020147019668A patent/KR20140128300A/ko not_active Withdrawn
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