JP2013170118A5 - - Google Patents

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Publication number
JP2013170118A5
JP2013170118A5 JP2012037161A JP2012037161A JP2013170118A5 JP 2013170118 A5 JP2013170118 A5 JP 2013170118A5 JP 2012037161 A JP2012037161 A JP 2012037161A JP 2012037161 A JP2012037161 A JP 2012037161A JP 2013170118 A5 JP2013170118 A5 JP 2013170118A5
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JP
Japan
Prior art keywords
frequency
polycrystalline silicon
silicon rod
frequency current
current
Prior art date
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Application number
JP2012037161A
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English (en)
Japanese (ja)
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JP2013170118A (ja
JP5792658B2 (ja
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Priority claimed from JP2012037161A external-priority patent/JP5792658B2/ja
Priority to JP2012037161A priority Critical patent/JP5792658B2/ja
Priority to CN201380006277.9A priority patent/CN104066678B/zh
Priority to EP13751609.2A priority patent/EP2818449B1/en
Priority to KR1020147019668A priority patent/KR20140128300A/ko
Priority to PCT/JP2013/000893 priority patent/WO2013125208A1/ja
Priority to US14/379,429 priority patent/US20150037516A1/en
Priority to MYPI2014702227A priority patent/MY171531A/en
Priority to CN201710117230.XA priority patent/CN106947955A/zh
Publication of JP2013170118A publication Critical patent/JP2013170118A/ja
Publication of JP2013170118A5 publication Critical patent/JP2013170118A5/ja
Publication of JP5792658B2 publication Critical patent/JP5792658B2/ja
Application granted granted Critical
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Anticipated expiration legal-status Critical

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JP2012037161A 2012-02-23 2012-02-23 多結晶シリコン棒の製造方法 Active JP5792658B2 (ja)

Priority Applications (8)

Application Number Priority Date Filing Date Title
JP2012037161A JP5792658B2 (ja) 2012-02-23 2012-02-23 多結晶シリコン棒の製造方法
MYPI2014702227A MY171531A (en) 2012-02-23 2013-02-19 Polycrystalline silicon rod manufacturing method
EP13751609.2A EP2818449B1 (en) 2012-02-23 2013-02-19 Polycrystalline silicon rod manufacturing method
KR1020147019668A KR20140128300A (ko) 2012-02-23 2013-02-19 다결정 실리콘 봉의 제조 방법
PCT/JP2013/000893 WO2013125208A1 (ja) 2012-02-23 2013-02-19 多結晶シリコン棒の製造方法
US14/379,429 US20150037516A1 (en) 2012-02-23 2013-02-19 Polycrystalline silicon rod manufacturing method
CN201380006277.9A CN104066678B (zh) 2012-02-23 2013-02-19 多晶硅棒的制造方法
CN201710117230.XA CN106947955A (zh) 2012-02-23 2013-02-19 多晶硅棒的制造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012037161A JP5792658B2 (ja) 2012-02-23 2012-02-23 多結晶シリコン棒の製造方法

Publications (3)

Publication Number Publication Date
JP2013170118A JP2013170118A (ja) 2013-09-02
JP2013170118A5 true JP2013170118A5 (https=) 2014-01-23
JP5792658B2 JP5792658B2 (ja) 2015-10-14

Family

ID=49005404

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012037161A Active JP5792658B2 (ja) 2012-02-23 2012-02-23 多結晶シリコン棒の製造方法

Country Status (7)

Country Link
US (1) US20150037516A1 (https=)
EP (1) EP2818449B1 (https=)
JP (1) JP5792658B2 (https=)
KR (1) KR20140128300A (https=)
CN (2) CN104066678B (https=)
MY (1) MY171531A (https=)
WO (1) WO2013125208A1 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6418778B2 (ja) * 2014-05-07 2018-11-07 信越化学工業株式会社 多結晶シリコン棒、多結晶シリコン棒の製造方法、および、単結晶シリコン
JP6314097B2 (ja) * 2015-02-19 2018-04-18 信越化学工業株式会社 多結晶シリコン棒
JP7191780B2 (ja) 2019-06-17 2022-12-19 信越化学工業株式会社 多結晶シリコンロッドの製造方法
CN114150372A (zh) * 2022-02-10 2022-03-08 杭州中欣晶圆半导体股份有限公司 一种横向磁场变频电流控制系统及单晶生长缺陷控制方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2831816A1 (de) 1978-07-19 1980-01-31 Siemens Ag Verfahren zum abscheiden von silicium in feinkristalliner form
JPS6374909A (ja) 1986-09-19 1988-04-05 Shin Etsu Handotai Co Ltd 大直径多結晶シリコン棒の製造方法
DE19882883B4 (de) 1997-12-15 2009-02-26 Advanced Silicon Materials LLC, (n.d.Ges.d.Staates Delaware), Moses Lake System für die chemische Abscheidung aus der Gasphase zum Herstellen polykristalliner Siliziumstangen
RU2499768C2 (ru) * 2008-03-10 2013-11-27 Аег Пауэр Солюшнс Б.В. Устройство и способ равномерного электропитания кремниевого стержня

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