JP2013012728A - ボンディングワイヤ、接続部構造、並びに半導体装置およびその製造方法 - Google Patents
ボンディングワイヤ、接続部構造、並びに半導体装置およびその製造方法 Download PDFInfo
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- JP2013012728A JP2013012728A JP2012119699A JP2012119699A JP2013012728A JP 2013012728 A JP2013012728 A JP 2013012728A JP 2012119699 A JP2012119699 A JP 2012119699A JP 2012119699 A JP2012119699 A JP 2012119699A JP 2013012728 A JP2013012728 A JP 2013012728A
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- bonding wire
- aluminum alloy
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Abstract
【解決手段】半導体装置10は、少なくともマグネシウムおよびシリコンを含有し、且つマグネシウムおよびシリコンの含有量の合計が0.03wt%以上1.0wt%以下であるアルミニウム合金からなるボンディングワイヤ17と、このボンディングワイヤ17が接続されるシリコンチップ16と、の接続部構造15を備える。シリコンチップ16の表面には、アルミニウム−シリコンフィルム16aが形成されている。接続部構造15は、ボンディングワイヤ17を構成するマトリクス層17a内と、このマトリクス層17aおよびアルミニウム−シリコンフィルム16aの間に形成されるアルミニウム合金の微細粒層17b内と、マトリクス層17aおよび微細粒層17bの界面とに、マグネシウムおよびシリコンを含む化合物18を備えている。
【選択図】図3
Description
11 銅板(Cuプレート)
12 筐体
13 回路層(被接続部材)
15 接続部構造
16 シリコンチップ(Siチップ、被接続部材)
16a アルミニウム−シリコンフィルム(アルミニウム材料、アルミ電極パット)
17 ボンディングワイヤ(アルミニウム合金)
17a マトリクス層
17b 微細粒層
18 化合物
19 セラミックス基板
Claims (12)
- 少なくともマグネシウムおよびシリコンを含有し、且つ前記マグネシウムおよび前記シリコンの含有量の合計が0.03wt%以上1.0wt%以下であるアルミニウム合金からなることを特徴とする、
ボンディングワイヤ。 - 10μm以上500μm以下の直径を有することを特徴とする、
請求項1に記載のボンディングワイヤ。 - 時効処理による初期硬さから最大硬さまでの最大硬さ上昇量を基準として、当該最大硬さ上昇量の40%以上の硬さ上昇が得られるまで時効処理が施されていることを特徴とする、
請求項1又は2に記載のボンディングワイヤ。 - 硬さが45Hmv以下となることを特徴とする、
請求項1〜3のいずれかに記載のボンディングワイヤ。 - 硬さが35Hmv以下となることを特徴とする、
請求項4に記載のボンディングワイヤ。 - 前記アルミニウム合金は、銅を0.1wt%以上1.0wt%以下含有することを特徴とする、
請求項1〜5のいずれかに記載のボンディングワイヤ。 - 前記アルミニウム合金は、ニッケルを0.001wt%以上0.01wt%以下含有することを特徴とする、
請求項1〜6のいずれかに記載のボンディングワイヤ。 - 請求項1〜7のいずれかに記載のボンディングワイヤと、前記ボンディングワイヤが接続され、アルミニウム材料からなる被接続部材と、の接続部構造であって、
前記ボンディングワイヤを構成するマトリクス層内と、前記マトリクス層および前記被接続部材の間に形成される前記アルミニウム合金の微細粒層内と、前記マトリクス層および前記微細粒層の界面とに、マグネシウムと、シリコンと、を含む化合物が析出していることを特徴とする、
接続部構造。 - 前記化合物は、アルミニウムを含むことを特徴とする、
請求項8に記載の接続部構造。 - 前記化合物の析出量は、前記界面方向の断面の面積比率で0.5%以上であることを特徴とする、
請求項8又は9に記載の接続部構造。 - 請求項8〜10のいずれかに記載の接続部構造を備えることを特徴とする、
半導体装置。 - 請求項11に記載の半導体装置を製造する方法であって、
前記被接続部材に前記ボンディングワイヤを接続した後に、前記ボンディングワイヤに時効処理を施すことを特徴とする、
半導体装置の製造方法。
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JPS6095952A (ja) * | 1983-10-31 | 1985-05-29 | Tanaka Denshi Kogyo Kk | 半導体素子のボンデイング用Al線 |
JPS6095951A (ja) * | 1983-10-31 | 1985-05-29 | Tanaka Denshi Kogyo Kk | 半導体素子のボンデイング用Al線 |
JP2008311383A (ja) * | 2007-06-14 | 2008-12-25 | Ibaraki Univ | ボンディングワイヤ、それを使用したボンディング方法及び半導体装置並びに接続部構造 |
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JPS6159760A (ja) * | 1984-08-30 | 1986-03-27 | Mitsubishi Metal Corp | 半導体装置の結線用Al合金極細線 |
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JPS6095952A (ja) * | 1983-10-31 | 1985-05-29 | Tanaka Denshi Kogyo Kk | 半導体素子のボンデイング用Al線 |
JPS6095951A (ja) * | 1983-10-31 | 1985-05-29 | Tanaka Denshi Kogyo Kk | 半導体素子のボンデイング用Al線 |
JP2008311383A (ja) * | 2007-06-14 | 2008-12-25 | Ibaraki Univ | ボンディングワイヤ、それを使用したボンディング方法及び半導体装置並びに接続部構造 |
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