JP6642865B2 - はんだ接合部 - Google Patents
はんだ接合部 Download PDFInfo
- Publication number
- JP6642865B2 JP6642865B2 JP2018523574A JP2018523574A JP6642865B2 JP 6642865 B2 JP6642865 B2 JP 6642865B2 JP 2018523574 A JP2018523574 A JP 2018523574A JP 2018523574 A JP2018523574 A JP 2018523574A JP 6642865 B2 JP6642865 B2 JP 6642865B2
- Authority
- JP
- Japan
- Prior art keywords
- solder
- mass
- interface
- joint
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
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- 229910000679 solder Inorganic materials 0.000 title claims description 210
- 239000000463 material Substances 0.000 claims description 71
- 229910052802 copper Inorganic materials 0.000 claims description 53
- 150000001875 compounds Chemical class 0.000 claims description 50
- 229910052718 tin Inorganic materials 0.000 claims description 42
- 229910052787 antimony Inorganic materials 0.000 claims description 37
- 239000004065 semiconductor Substances 0.000 claims description 35
- 229910052759 nickel Inorganic materials 0.000 claims description 34
- 229910000881 Cu alloy Inorganic materials 0.000 claims description 12
- 239000012535 impurity Substances 0.000 claims description 12
- 238000009941 weaving Methods 0.000 claims 2
- 239000010949 copper Substances 0.000 description 130
- 239000000203 mixture Substances 0.000 description 37
- 229910000765 intermetallic Inorganic materials 0.000 description 27
- 230000000052 comparative effect Effects 0.000 description 20
- 238000012360 testing method Methods 0.000 description 20
- 239000000758 substrate Substances 0.000 description 19
- 239000000523 sample Substances 0.000 description 18
- 238000010586 diagram Methods 0.000 description 13
- 230000015572 biosynthetic process Effects 0.000 description 10
- 238000002844 melting Methods 0.000 description 10
- 230000035939 shock Effects 0.000 description 10
- 230000008018 melting Effects 0.000 description 9
- 230000006378 damage Effects 0.000 description 8
- 238000010438 heat treatment Methods 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 8
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 7
- 238000005304 joining Methods 0.000 description 7
- 239000002245 particle Substances 0.000 description 7
- 229910045601 alloy Inorganic materials 0.000 description 6
- 239000000956 alloy Substances 0.000 description 6
- 230000008901 benefit Effects 0.000 description 6
- 230000000694 effects Effects 0.000 description 6
- 230000004907 flux Effects 0.000 description 6
- 239000007788 liquid Substances 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 230000035882 stress Effects 0.000 description 6
- HMUNWXXNJPVALC-UHFFFAOYSA-N 1-[4-[2-(2,3-dihydro-1H-inden-2-ylamino)pyrimidin-5-yl]piperazin-1-yl]-2-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)ethanone Chemical compound C1C(CC2=CC=CC=C12)NC1=NC=C(C=N1)N1CCN(CC1)C(CN1CC2=C(CC1)NN=N2)=O HMUNWXXNJPVALC-UHFFFAOYSA-N 0.000 description 5
- 229910052782 aluminium Inorganic materials 0.000 description 5
- 230000007423 decrease Effects 0.000 description 5
- 238000011156 evaluation Methods 0.000 description 5
- 238000001000 micrograph Methods 0.000 description 5
- 229910052763 palladium Inorganic materials 0.000 description 5
- 229910052697 platinum Inorganic materials 0.000 description 5
- 229910052703 rhodium Inorganic materials 0.000 description 5
- LDXJRKWFNNFDSA-UHFFFAOYSA-N 2-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)-1-[4-[2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidin-5-yl]piperazin-1-yl]ethanone Chemical compound C1CN(CC2=NNN=C21)CC(=O)N3CCN(CC3)C4=CN=C(N=C4)NCC5=CC(=CC=C5)OC(F)(F)F LDXJRKWFNNFDSA-UHFFFAOYSA-N 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 238000007796 conventional method Methods 0.000 description 4
- 238000001816 cooling Methods 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 4
- 229910052737 gold Inorganic materials 0.000 description 4
- 230000020169 heat generation Effects 0.000 description 4
- 238000007689 inspection Methods 0.000 description 4
- 230000003647 oxidation Effects 0.000 description 4
- 238000007254 oxidation reaction Methods 0.000 description 4
- 238000001878 scanning electron micrograph Methods 0.000 description 4
- 229910052709 silver Inorganic materials 0.000 description 4
- 229910005887 NiSn Inorganic materials 0.000 description 3
- 229910020935 Sn-Sb Inorganic materials 0.000 description 3
- 229910020932 Sn-Sb-Ag Inorganic materials 0.000 description 3
- 229910008757 Sn—Sb Inorganic materials 0.000 description 3
- 241000519995 Stachys sylvatica Species 0.000 description 3
- 238000005336 cracking Methods 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- 238000004626 scanning electron microscopy Methods 0.000 description 3
- 238000007711 solidification Methods 0.000 description 3
- 230000008023 solidification Effects 0.000 description 3
- 230000008646 thermal stress Effects 0.000 description 3
- 229910017937 Ag-Ni Inorganic materials 0.000 description 2
- 229910017984 Ag—Ni Inorganic materials 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 229910020836 Sn-Ag Inorganic materials 0.000 description 2
- 229910020988 Sn—Ag Inorganic materials 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 239000006071 cream Substances 0.000 description 2
- 238000004090 dissolution Methods 0.000 description 2
- 238000002149 energy-dispersive X-ray emission spectroscopy Methods 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 238000005324 grain boundary diffusion Methods 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- BDAGIHXWWSANSR-UHFFFAOYSA-N methanoic acid Natural products OC=O BDAGIHXWWSANSR-UHFFFAOYSA-N 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000003566 sealing material Substances 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 238000004627 transmission electron microscopy Methods 0.000 description 2
- 229910052725 zinc Inorganic materials 0.000 description 2
- OSWFIVFLDKOXQC-UHFFFAOYSA-N 4-(3-methoxyphenyl)aniline Chemical compound COC1=CC=CC(C=2C=CC(N)=CC=2)=C1 OSWFIVFLDKOXQC-UHFFFAOYSA-N 0.000 description 1
- RSWGJHLUYNHPMX-UHFFFAOYSA-N Abietic-Saeure Natural products C12CCC(C(C)C)=CC2=CCC2C1(C)CCCC2(C)C(O)=O RSWGJHLUYNHPMX-UHFFFAOYSA-N 0.000 description 1
- 229910017944 Ag—Cu Inorganic materials 0.000 description 1
- 229910017482 Cu 6 Sn 5 Inorganic materials 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- 229910018054 Ni-Cu Inorganic materials 0.000 description 1
- 229910018481 Ni—Cu Inorganic materials 0.000 description 1
- KHPCPRHQVVSZAH-HUOMCSJISA-N Rosin Natural products O(C/C=C/c1ccccc1)[C@H]1[C@H](O)[C@@H](O)[C@@H](O)[C@@H](CO)O1 KHPCPRHQVVSZAH-HUOMCSJISA-N 0.000 description 1
- 229910020816 Sn Pb Inorganic materials 0.000 description 1
- 229910020922 Sn-Pb Inorganic materials 0.000 description 1
- 229910008783 Sn—Pb Inorganic materials 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 229940125898 compound 5 Drugs 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000032798 delamination Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 235000019253 formic acid Nutrition 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 150000007524 organic acids Chemical class 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 229910002059 quaternary alloy Inorganic materials 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- KHPCPRHQVVSZAH-UHFFFAOYSA-N trans-cinnamyl beta-D-glucopyranoside Natural products OC1C(O)C(O)C(CO)OC1OCC=CC1=CC=CC=C1 KHPCPRHQVVSZAH-UHFFFAOYSA-N 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L24/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
- H01L24/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/02—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape
- B23K35/0222—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape for use in soldering, brazing
- B23K35/0233—Sheets, foils
- B23K35/0238—Sheets, foils layered
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
- B23K35/24—Selection of soldering or welding materials proper
- B23K35/26—Selection of soldering or welding materials proper with the principal constituent melting at less than 400 degrees C
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
- B23K35/24—Selection of soldering or welding materials proper
- B23K35/26—Selection of soldering or welding materials proper with the principal constituent melting at less than 400 degrees C
- B23K35/262—Sn as the principal constituent
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
- B23K35/24—Selection of soldering or welding materials proper
- B23K35/30—Selection of soldering or welding materials proper with the principal constituent melting at less than 1550 degrees C
- B23K35/302—Cu as the principal constituent
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C13/00—Alloys based on tin
- C22C13/02—Alloys based on tin with antimony or bismuth as the next major constituent
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/52—Mounting semiconductor bodies in containers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
- H01L23/3735—Laminates or multilayers, e.g. direct bond copper ceramic substrates
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/73—Means for bonding being of different types provided for in two or more of groups H01L24/10, H01L24/18, H01L24/26, H01L24/34, H01L24/42, H01L24/50, H01L24/63, H01L24/71
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/36—Electric or electronic devices
- B23K2101/40—Semiconductor devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/08—Non-ferrous metals or alloys
- B23K2103/12—Copper or alloys thereof
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
- H01L2224/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
- H01L2224/29001—Core members of the layer connector
- H01L2224/29099—Material
- H01L2224/291—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/29101—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of less than 400°C
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
- H01L2224/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
- H01L2224/29001—Core members of the layer connector
- H01L2224/29099—Material
- H01L2224/291—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/29101—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of less than 400°C
- H01L2224/29111—Tin [Sn] as principal constituent
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
- H01L2224/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
- H01L2224/29001—Core members of the layer connector
- H01L2224/29099—Material
- H01L2224/291—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/29117—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 400°C and less than 950°C
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- H—ELECTRICITY
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
- H01L2224/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
- H01L2224/29001—Core members of the layer connector
- H01L2224/29099—Material
- H01L2224/291—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/29117—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 400°C and less than 950°C
- H01L2224/2912—Antimony [Sb] as principal constituent
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- H—ELECTRICITY
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
- H01L2224/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
- H01L2224/29001—Core members of the layer connector
- H01L2224/29099—Material
- H01L2224/291—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/29138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/29139—Silver [Ag] as principal constituent
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
- H01L2224/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
- H01L2224/29001—Core members of the layer connector
- H01L2224/29099—Material
- H01L2224/291—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/29138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/29147—Copper [Cu] as principal constituent
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- H—ELECTRICITY
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
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Description
第1態様によるはんだ組成は、Sbを、5.0質量%を超えて10.0質量%以下と、Agを2.0〜4.0質量%と、Niを、0を超えて1.0質量%以下含有し、残部は、Sn及び不可避不純物からなる。Niの添加量は、Niを0.01〜0.5質量%とすることがより好ましく、0.1〜0.4質量%とすることがさらに好ましい。Sn−Sb−AgはんだにNiをこれらの範囲の量で添加することにより、Cu部材と接合した場合に、はんだ接合層に金属間化合物からなる第1組織、第2組織を形成し、異種部材接合界面の剪断強度を高くすることができるためである。さらに好ましくは、Sbを、6.0質量%〜8.0質量%含有し、Agを3.0〜4.0質量%含有し、Niを上記いずれかの範囲で含有し、残部は、Sn及び不可避不純物からなる。
第2態様によるはんだ組成は、Sbを、5.0質量%を超えて10.0質量%以下と、Agを2.0〜4.0質量%と、Niを、0を超えて、1.0質量%以下と、Geを、0.001質量%〜0.1質量%と含有し、残部は、Sn及び不可避不純物からなる。第1態様の組成に、さらにGeを添加する利点としては、Snの酸化を抑え、はんだの濡れ性の向上に大きく寄与するため、及び合金の熱拡散経路に影響を与えることができるためである。Geの添加量は、より好ましくは、0.003〜0.05質量%である。この範囲でGeを添加することにより、過剰なGeOの生成を抑制し、適切な量のGeOを生成させることにより、還元、除去しにくいSnの酸化物を抑制することができる。また、Geの添加によりボイド抑制の効果が得られる。また、この場合のNiの添加量は、Niを0.01〜0.5質量%とすることがより好ましく、0.1〜0.4質量%とすることがさらに好ましい。Niを上記添加範囲で添加する利点としては、Geの濡れ性向上効果を保持したまま、界面のはんだ強度を向上させることができるためである。また、Niは高融点材料であり、高温での強度を増すことができるという利点もある。さらにより好ましくは、Sbを、6.0質量%〜8.0質量%含有し、Agを3.0〜4.0質量%含有し、Ni及びGeを上記いずれかの範囲で含有し、残部は、Sn及び不可避不純物からなる。このような組成範囲とすることで、Snの酸化を抑えながら、温度の上昇とともに、合金の熱伝導率も上昇させることができる。
第3態様によるはんだ組成は、Sbを、5.0質量%を超えて10.0質量%以下と、Agを2.0〜4.0質量%と、Niを、0を超えて、1.0質量%以下と、Cuを、0を超えて1.2質量%以下含有し、残部は、Sn及び不可避不純物からなる。第1態様の組成に、さらにCuを添加する利点としては、合金の熱拡散経路に影響を与え、合金の熱伝導率を上昇させるとともに、濡れ性を向上させ、接合層としたときに低いボイド率が実現できるためである。上記添加範囲とするのは、Cu部材の接合において、はんだ接合層の融点が上がらず、はんだ接合層の組成に対して融点が鈍感であり、組成マージンが広く成分変動が小さいため、有利になるためである。換言すれば、はんだ材中に銅が含まれていることにより、Cu部材からのはんだ接合層へのCuの溶解速度が小さくなるため、Cuの濃度変化が少なくなる。これにより、Cuが溶解することによるはんだ接合層の融点の上昇を小さく抑えることができる。また、Cu部材からはんだ材へのCuの溶け込みを防止できる点で有利になるためである。第3態様の組成においても、Niの添加量は、0.01〜0.5質量%とすることがより好ましく、0.1〜0.4質量%とすることがさらに好ましい。さらに好ましくは、Sbを、6.0質量%〜8.0質量%含有し、Agを3.0〜4.0質量%含有し、Cuを0.1〜0.9質量%含有し、Niを上記いずれかの範囲で含有し、残部は、Sn及び不可避不純物からなる。このような組成範囲とすることで、上記に加え、さらに、特に濡れ性が良いといった利点が得られる。
第4態様によるはんだ組成は、Sbを、5.0質量%を超えて10.0質量%以下と、Agを2.0〜4.0質量%と、Niを、0を超えて、1.0質量%以下と、Cuを、0を超えて1.2質量%以下と、Geを、0.001質量%〜0.1質量%含有し、残部は、Sn及び不可避不純物からなる。第3態様の組成に、さらにGeを添加する利点としては、還元、除去しにくいSnの酸化物を抑制し、ボイド抑制の効果が得られるためである。Geの添加量は、より好ましくは、0.003〜0.05質量%である。第3態様に記載した全ての組成に、この量でGeを添加することができる。
さらなる変形形態として、第1〜第4態様によるはんだ材にPを添加することができ、例えば、0.001質量%〜0.1質量%のPを含有することができる。Pは、はんだ材の酸化抑制の効果があり、濡れ性の向上に寄与しうるためである。Pは、Snよりも酸化しやすく、この添加範囲でSnの酸化を防止し、はんだ材の濡れ性を確保することができる。
試料番号7のはんだ材を用いて実施例1に係る接合部を製造した。具体的には、Sbを6質量%、Agを4質量%、Niを0.4質量%含有し、残部がSn及び不可避不純物からなる、Sn−6Sb−4Ag−0.4Niの組成を有するはんだ材を用いて、DCB(Direct Copper Bonding)基板の銅製の導電性板と、素子電極を模したNi部材を接合した。なお、DCB基板とは、アルミナ系セラミックスなどの絶縁層の両面に銅などの導電性金属板を、Direct Copper Bond法により直接接合してなる積層基板である。接合条件は、接合時間4分間、300℃以上を1分以上保持した。今回の実験では、水素雰囲気中で接合し、フラックスは使用しなかった。接合はんだ層の厚さは250μmとして、はんだ板を、素子電極を模したNi部材と同様の寸法で供給して接合した。
上記(1)と同様に、試料番号7に示すSn−6Sb−4Ag−0.4Niはんだをはんだ材として用い、銅製の導電性板と、Ni被覆Cu板を接合して、実施例2に係る接合部を製造した。また、はんだ材の組成を、試料番号4に示す9質量%のSbと、3質量%のAgを含有し、残部はSnからなるSn−9Sb−3Agはんだに変更した以外は上記(1)と同様にして、比較例2に係る接合部を製造した。それぞれの接合部を、後述する熱衝撃試験により破壊に至らせた。実施例2の接合部は550サイクルで破壊、比較例2の接合部は100サイクルで破壊した。図11(A)は本発明の実施例2にかかる接合部の破壊形態を示す写真である。はんだ接合層10の端部からクラックが伝播していることがわかる。しかし、剥離には至っておらず、軽度の故障に該当する。また、DCB基板のCu板121との界面にはクラックは見られない。図11(B)は、比較例2にかかる接合部の破壊形態を示す写真である。はんだ接合層50とDCB基板のCu板121との界面に、広範囲にわたって、クラックが進展して剥離が生じていることがわかる。この剥離はデバイスの重大故障となる。
、金属間化合物はCuよりも約4倍以上硬い。硬いものは、一定の応力ひずみが負荷された時に変形能が低いために、硬さが異なる異種材料の界面には、ひずみが発生し、硬さの違いが大きいほどその発生したひずみは大きくなる。
実施例及び比較例の接合部を作成し、耐熱性を評価した。耐熱性評価は、熱衝撃試験と高温保持試験により評価した。熱衝撃試験、高温保持試験とも、評価基準は、DCB基板側から観察した場合の白い斑点および断面SEMでクラックの有無とした。白い斑点部の断面を観察すると、図12(B)のようにクラックがある。図12(B)のようにクラックがあれば不良とした。
表1に示す試料番号1〜17までのはんだ材を用いて、DCB基板と銅製の放熱板を接合して、実施例3−1〜3−12、及び比較例3−1〜3−5の試験用サンプルを作製した。具体的には、DCB基板上に、□9.5mmで、厚さが0.25mmの板はんだを載置し、放熱板をその上に載置し、H2還元環境下で、300℃で、3分間加熱することにより接合した。
表1に示す試料番号1〜17までのはんだ材を用いて、熱衝撃試験と同じ条件で、実施例3−1〜3−12、及び比較例3−1〜3−5の試験用サンプルを作製した。これらのサンプルを175℃の恒温槽に投入し、300時間保持した。投入時と、300時間後に、超音波探傷顕微鏡にて、はんだ接合部のクラック発生による剥離を確認した。前述の評価基準による高温保持試験の結果を表2に示す。また、代表的なはんだ材組成の接合体について、高温保持試験後の超音波探傷顕微鏡写真を、図14に示す。図14(A)は、試料番号7のはんだ材を用いた実施例3−2のサンプルの恒温槽投入時、図14(B)は、実施例3−2のサンプルの300時間後、図14(C)は、試料番号1のはんだ材を用いた比較例3−1のサンプルの恒温槽投入時、図14(D)は、比較例3−1のサンプルの300時間後の写真である。写真の黒い部分がはんだ接合部で、白くなっている部分がはんだ破壊の発生した部位である。クラック判定は、初期のはんだ接合面積に対して、白い部位が多いものは、冷却性能が低下し、はんだ接合強度が低下する。白い部位が少ないもの、すなわちはんだ破壊のおきていないものが、優れた特性を示すといえる。実施例3−2のサンプルでは、300時間後でもはんだ破壊による白い部分がみられない。一方、比較例3−1のサンプルでは、明らかな剥離がみられた。
2 第2組織
3 Cu3(Sn,Sb)組織
4 金属間化合物
5 はんだ
10 はんだ接合層
11 半導体素子
12 積層基板
121 導電性板
122 絶縁基板
123 導電性板
13 放熱板
14 アルミワイヤ
15 外部端子
16 ケース
17 樹脂封止材
50 はんだ接合層
100 パワーモジュール
Claims (9)
- Sbを、5.0質量%を超えて10.0質量%以下と、Agを2.0〜4.0質量%と、Niを、0.01〜1.0質量%含有し、残部は、Sn及び不可避不純物からなるはんだ材が溶融されたはんだ接合層と、少なくとも一方がCuもしくはCu合金部材である被接合体とを含むはんだ接合部であって、
前記はんだ接合層が、前記CuもしくはCu合金部材との界面に、(Cu,Ni)6(Sn,Sb)5を含む第1組織と、(Ni,Cu)3(Sn,Sb) 4 を含む第2組織とを備える、はんだ接合部。 - 前記はんだ材が、さらに、Geを、0.001〜0.1質量%含有する、請求項1に記載のはんだ接合部。
- 前記はんだ材が、さらに、Cuを、0を超えて1.2質量%以下含有する、請求項1または2に記載のはんだ接合部。
- 前記はんだ材が、さらに、Pを、0.001〜0.1質量%含有する、請求項1〜3のいずれか1項に記載のはんだ接合部。
- 前記はんだ材の前記Niの含有量が、0.1〜0.4質量%である、請求項1〜4のいずれか1項に記載のはんだ接合部。
- 前記第1組織が粒状化合物であり、前記第2組織が針状化合物もしくは柱状化合物である、請求項1〜5のいずれか1項に記載のはんだ接合部。
- 前記第1組織が、前記はんだ接合層の前記CuもしくはCu合金部材との界面に分布し、前記第2組織が、前記第1組織と接して、前記はんだ接合層の内部に分布する、請求項1〜6のいずれか1項に記載のはんだ接合部。
- 請求項1〜7のいずれか1項に記載のはんだ接合部を備える電子機器。
- 請求項1〜7のいずれか1項に記載のはんだ接合部を備える半導体装置。
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