JP2012525713A5 - - Google Patents

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Publication number
JP2012525713A5
JP2012525713A5 JP2012508596A JP2012508596A JP2012525713A5 JP 2012525713 A5 JP2012525713 A5 JP 2012525713A5 JP 2012508596 A JP2012508596 A JP 2012508596A JP 2012508596 A JP2012508596 A JP 2012508596A JP 2012525713 A5 JP2012525713 A5 JP 2012525713A5
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layer
iii
group
substrates
chamber
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JP2012508596A
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JP2012525713A (ja
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Priority claimed from US12/751,692 external-priority patent/US8183132B2/en
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Publication of JP2012525713A5 publication Critical patent/JP2012525713A5/ja
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JP2012508596A 2009-04-28 2010-04-27 Ｌｅｄ向けのクラスタツール Pending JP2012525713A (ja)

Applications Claiming Priority (9)

Application Number Priority Date Filing Date Title
US17353609P 2009-04-28 2009-04-28
US61/173,536 2009-04-28
US17709809P 2009-05-11 2009-05-11
US61/177,098 2009-05-11
US23087709P 2009-08-03 2009-08-03
US61/230,877 2009-08-03
US12/751,692 2010-03-31
US12/751,692 US8183132B2 (en) 2009-04-10 2010-03-31 Methods for fabricating group III nitride structures with a cluster tool
PCT/US2010/032597 WO2010129292A2 (en) 2009-04-28 2010-04-27 Cluster tool for leds

Publications (2)

Publication Number Publication Date
JP2012525713A JP2012525713A (ja) 2012-10-22
JP2012525713A5 true JP2012525713A5 (enExample) 2013-06-20

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JP2012508596A Pending JP2012525713A (ja) 2009-04-28 2010-04-27 Ｌｅｄ向けのクラスタツール

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US (1) US8183132B2 (enExample)
EP (1) EP2425463A2 (enExample)
JP (1) JP2012525713A (enExample)
KR (1) KR20120003495A (enExample)
CN (1) CN102414844B (enExample)
TW (1) TW201106502A (enExample)
WO (1) WO2010129292A2 (enExample)

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