JP2012523565A5 - - Google Patents

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Publication number
JP2012523565A5
JP2012523565A5 JP2012504695A JP2012504695A JP2012523565A5 JP 2012523565 A5 JP2012523565 A5 JP 2012523565A5 JP 2012504695 A JP2012504695 A JP 2012504695A JP 2012504695 A JP2012504695 A JP 2012504695A JP 2012523565 A5 JP2012523565 A5 JP 2012523565A5
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JP
Japan
Prior art keywords
node
capacitive network
drive
parasitic
capacitance
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JP2012504695A
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English (en)
Japanese (ja)
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JP2012523565A (ja
JP5557354B2 (ja
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Priority claimed from US12/421,513 external-priority patent/US8096179B2/en
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Publication of JP2012523565A5 publication Critical patent/JP2012523565A5/ja
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Publication of JP5557354B2 publication Critical patent/JP5557354B2/ja
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JP2012504695A 2009-04-09 2010-03-23 寄生容量により誘導される誤差が減少されたセンサデバイス Active JP5557354B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US12/421,513 2009-04-09
US12/421,513 US8096179B2 (en) 2009-04-09 2009-04-09 Sensor device with reduced parasitic-induced error
PCT/US2010/028282 WO2010117615A2 (en) 2009-04-09 2010-03-23 Sensor device with reduced parasitic-induced error

Publications (3)

Publication Number Publication Date
JP2012523565A JP2012523565A (ja) 2012-10-04
JP2012523565A5 true JP2012523565A5 (enExample) 2013-05-09
JP5557354B2 JP5557354B2 (ja) 2014-07-23

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ID=42933902

Family Applications (1)

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JP2012504695A Active JP5557354B2 (ja) 2009-04-09 2010-03-23 寄生容量により誘導される誤差が減少されたセンサデバイス

Country Status (6)

Country Link
US (1) US8096179B2 (enExample)
EP (1) EP2417054B1 (enExample)
JP (1) JP5557354B2 (enExample)
CN (1) CN102365229B (enExample)
TW (1) TWI502885B (enExample)
WO (1) WO2010117615A2 (enExample)

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US8714012B2 (en) * 2010-02-16 2014-05-06 Stmicroelectronics S.R.L. Microelectromechanical gyroscope with inversion of actuation forces, and method for actuating a microelectromechanical gyroscope
ITTO20110688A1 (it) * 2011-07-28 2013-01-29 St Microelectronics Srl Giroscopio microelettromeccanico con funzione di autocalibrazione e metodo di calibrazione di un giroscopio microelettromeccanico
TWI416070B (zh) 2011-12-26 2013-11-21 Ind Tech Res Inst 陀螺儀的讀取電路
US9562767B2 (en) 2014-08-12 2017-02-07 Honeywell International Inc. Systems and methods for improving MEMS gyroscope start time
JP6413462B2 (ja) 2014-08-15 2018-10-31 セイコーエプソン株式会社 物理量センサー、物理量センサー装置、電子機器および移動体
US10317252B2 (en) 2015-04-20 2019-06-11 Infineon Technologies Ag System and method for a capacitive sensor
KR101880911B1 (ko) * 2017-02-21 2018-07-23 한국기술교육대학교 산학협력단 정전 용량형 mems 공진기
CN106993355A (zh) * 2017-04-06 2017-07-28 深圳格林绿梵生能源股份有限公司 一种基于均衡电容的多路反激led驱动器
FR3079026B1 (fr) * 2018-03-15 2021-01-01 Sysnav Procede de calibration d'un gyrometre equipant un vehicule
JP7119478B2 (ja) 2018-03-23 2022-08-17 セイコーエプソン株式会社 回路装置、物理量測定装置、電子機器及び移動体
US11820649B2 (en) 2018-05-18 2023-11-21 Lawrence Livermore National Security, Llc Position sensing circuit for an electrostatically driven MEMS device
US20190352174A1 (en) * 2018-05-18 2019-11-21 Lawrence Livermore National Security, Llc Position sensing circuit for an electronically driven mems device
US11119606B2 (en) * 2019-08-20 2021-09-14 Synaptics Incorporated Background capacitance compensation
CN112782427A (zh) * 2019-11-07 2021-05-11 霍尼韦尔国际公司 用于避免振梁加速度计的电容馈通的谐振器电极配置
FR3108897B1 (fr) * 2020-04-03 2022-04-08 Commissariat Energie Atomique Procédé de commande d’un capteur
WO2022183030A1 (en) * 2021-02-26 2022-09-01 Lawrence Livermore National Security, Llc Position sensing circuit for an electrostatically driven mems device
IT202100024644A1 (it) 2021-09-27 2023-03-27 St Microelectronics Srl Circuito di controllo di un giroscopio mems, giroscopio mems e metodo di controllo

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