TWI502885B - 具有經降低之寄生誘導誤差之感測器裝置及實質上消除感測器裝置中之寄生電流之方法 - Google Patents

具有經降低之寄生誘導誤差之感測器裝置及實質上消除感測器裝置中之寄生電流之方法 Download PDF

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Publication number
TWI502885B
TWI502885B TW099110775A TW99110775A TWI502885B TW I502885 B TWI502885 B TW I502885B TW 099110775 A TW099110775 A TW 099110775A TW 99110775 A TW99110775 A TW 99110775A TW I502885 B TWI502885 B TW I502885B
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TW
Taiwan
Prior art keywords
parasitic
node
capacitive
capacitor
network
Prior art date
Application number
TW099110775A
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English (en)
Chinese (zh)
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TW201101682A (en
Inventor
David E Bien
Dejan Mijuskovic
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Freescale Semiconductor Inc
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Publication of TW201101682A publication Critical patent/TW201101682A/zh
Application granted granted Critical
Publication of TWI502885B publication Critical patent/TWI502885B/zh

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5776—Signal processing not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0086—Electrical characteristics, e.g. reducing driving voltage, improving resistance to peak voltage

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  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Signal Processing (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
  • Micromachines (AREA)
  • Networks Using Active Elements (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
TW099110775A 2009-04-09 2010-04-07 具有經降低之寄生誘導誤差之感測器裝置及實質上消除感測器裝置中之寄生電流之方法 TWI502885B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US12/421,513 US8096179B2 (en) 2009-04-09 2009-04-09 Sensor device with reduced parasitic-induced error

Publications (2)

Publication Number Publication Date
TW201101682A TW201101682A (en) 2011-01-01
TWI502885B true TWI502885B (zh) 2015-10-01

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
TW099110775A TWI502885B (zh) 2009-04-09 2010-04-07 具有經降低之寄生誘導誤差之感測器裝置及實質上消除感測器裝置中之寄生電流之方法

Country Status (6)

Country Link
US (1) US8096179B2 (enExample)
EP (1) EP2417054B1 (enExample)
JP (1) JP5557354B2 (enExample)
CN (1) CN102365229B (enExample)
TW (1) TWI502885B (enExample)
WO (1) WO2010117615A2 (enExample)

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US8714012B2 (en) * 2010-02-16 2014-05-06 Stmicroelectronics S.R.L. Microelectromechanical gyroscope with inversion of actuation forces, and method for actuating a microelectromechanical gyroscope
ITTO20110688A1 (it) * 2011-07-28 2013-01-29 St Microelectronics Srl Giroscopio microelettromeccanico con funzione di autocalibrazione e metodo di calibrazione di un giroscopio microelettromeccanico
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US9562767B2 (en) 2014-08-12 2017-02-07 Honeywell International Inc. Systems and methods for improving MEMS gyroscope start time
JP6413462B2 (ja) 2014-08-15 2018-10-31 セイコーエプソン株式会社 物理量センサー、物理量センサー装置、電子機器および移動体
US10317252B2 (en) 2015-04-20 2019-06-11 Infineon Technologies Ag System and method for a capacitive sensor
KR101880911B1 (ko) * 2017-02-21 2018-07-23 한국기술교육대학교 산학협력단 정전 용량형 mems 공진기
CN106993355A (zh) * 2017-04-06 2017-07-28 深圳格林绿梵生能源股份有限公司 一种基于均衡电容的多路反激led驱动器
FR3079026B1 (fr) * 2018-03-15 2021-01-01 Sysnav Procede de calibration d'un gyrometre equipant un vehicule
JP7119478B2 (ja) 2018-03-23 2022-08-17 セイコーエプソン株式会社 回路装置、物理量測定装置、電子機器及び移動体
US11820649B2 (en) 2018-05-18 2023-11-21 Lawrence Livermore National Security, Llc Position sensing circuit for an electrostatically driven MEMS device
US20190352174A1 (en) * 2018-05-18 2019-11-21 Lawrence Livermore National Security, Llc Position sensing circuit for an electronically driven mems device
US11119606B2 (en) * 2019-08-20 2021-09-14 Synaptics Incorporated Background capacitance compensation
CN112782427A (zh) * 2019-11-07 2021-05-11 霍尼韦尔国际公司 用于避免振梁加速度计的电容馈通的谐振器电极配置
FR3108897B1 (fr) * 2020-04-03 2022-04-08 Commissariat Energie Atomique Procédé de commande d’un capteur
WO2022183030A1 (en) * 2021-02-26 2022-09-01 Lawrence Livermore National Security, Llc Position sensing circuit for an electrostatically driven mems device
IT202100024644A1 (it) 2021-09-27 2023-03-27 St Microelectronics Srl Circuito di controllo di un giroscopio mems, giroscopio mems e metodo di controllo

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US20080295596A1 (en) * 2007-06-01 2008-12-04 Beijing Walkang Science And Technology Limited Company Novel silicon micromechanical gyroscope

Also Published As

Publication number Publication date
US20100259318A1 (en) 2010-10-14
WO2010117615A2 (en) 2010-10-14
CN102365229B (zh) 2015-03-25
JP2012523565A (ja) 2012-10-04
EP2417054A2 (en) 2012-02-15
CN102365229A (zh) 2012-02-29
TW201101682A (en) 2011-01-01
EP2417054B1 (en) 2019-10-02
EP2417054A4 (en) 2015-07-01
WO2010117615A3 (en) 2011-01-13
US8096179B2 (en) 2012-01-17
JP5557354B2 (ja) 2014-07-23

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