JP2012522385A5 - - Google Patents

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Publication number
JP2012522385A5
JP2012522385A5 JP2012502404A JP2012502404A JP2012522385A5 JP 2012522385 A5 JP2012522385 A5 JP 2012522385A5 JP 2012502404 A JP2012502404 A JP 2012502404A JP 2012502404 A JP2012502404 A JP 2012502404A JP 2012522385 A5 JP2012522385 A5 JP 2012522385A5
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JP
Japan
Prior art keywords
ridges
wafer
disposed
gravity gripper
gripper
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2012502404A
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English (en)
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JP5696135B2 (ja
JP2012522385A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/CA2010/000487 external-priority patent/WO2010111781A1/en
Publication of JP2012522385A publication Critical patent/JP2012522385A/ja
Publication of JP2012522385A5 publication Critical patent/JP2012522385A5/ja
Application granted granted Critical
Publication of JP5696135B2 publication Critical patent/JP5696135B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Claims (1)

  1. 前記重力グリッパは２つの隆起部を有し、前記２つの隆起部は、前記ウエハーの角が前記２つの隆起部の間にはまった状態で前記ウエハーが配置されるように、前記重力グリッパの両側に配置され、かつ遠端部に対し一定の角度に向けられる、請求項１４に記載の装置。
JP2012502404A 2009-03-30 2010-03-30 ウエハーハンドリングシステムおよびその方法 Expired - Fee Related JP5696135B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US16463909P 2009-03-30 2009-03-30
US61/164,639 2009-03-30
PCT/CA2010/000487 WO2010111781A1 (en) 2009-03-30 2010-03-30 Systems and methods for handling wafers

Publications (3)

Publication Number Publication Date
JP2012522385A JP2012522385A (ja) 2012-09-20
JP2012522385A5 true JP2012522385A5 (ja) 2013-05-23
JP5696135B2 JP5696135B2 (ja) 2015-04-08

Family

ID=42827441

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012502404A Expired - Fee Related JP5696135B2 (ja) 2009-03-30 2010-03-30 ウエハーハンドリングシステムおよびその方法

Country Status (9)

Country Link
US (1) US9184079B2 (ja)
EP (1) EP2415074B1 (ja)
JP (1) JP5696135B2 (ja)
KR (1) KR101695434B1 (ja)
CN (1) CN102369595B (ja)
CA (1) CA2756831C (ja)
MY (1) MY161955A (ja)
TW (1) TW201044487A (ja)
WO (1) WO2010111781A1 (ja)

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US8828776B2 (en) 2009-04-16 2014-09-09 Tp Solar, Inc. Diffusion furnaces employing ultra low mass transport systems and methods of wafer rapid diffusion processing
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US10510573B2 (en) * 2017-11-14 2019-12-17 Taiwan Semiconductor Manufacturing Co., Ltd. Loading apparatus and operating method thereof
CN108382782B (zh) * 2018-01-09 2021-02-12 惠科股份有限公司 一种基板的仓储方法和仓储系统
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