JP2012511251A5 - - Google Patents
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- Publication number
- JP2012511251A5 JP2012511251A5 JP2011539510A JP2011539510A JP2012511251A5 JP 2012511251 A5 JP2012511251 A5 JP 2012511251A5 JP 2011539510 A JP2011539510 A JP 2011539510A JP 2011539510 A JP2011539510 A JP 2011539510A JP 2012511251 A5 JP2012511251 A5 JP 2012511251A5
- Authority
- JP
- Japan
- Prior art keywords
- polishing
- composition
- substrate
- silicon dioxide
- range
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 59
- 238000005498 polishing Methods 0.000 claims description 33
- 239000000377 silicon dioxide Substances 0.000 claims description 25
- 239000000203 mixture Substances 0.000 claims description 23
- 235000012239 silicon dioxide Nutrition 0.000 claims description 20
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 18
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 18
- 239000000872 buffer Substances 0.000 claims description 11
- 239000008119 colloidal silica Substances 0.000 claims description 8
- 230000002378 acidificating effect Effects 0.000 claims description 7
- 239000002245 particle Substances 0.000 claims description 7
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 claims description 6
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 6
- 239000006172 buffering agent Substances 0.000 claims description 4
- 150000001413 amino acids Chemical class 0.000 claims description 3
- 239000011368 organic material Substances 0.000 claims description 2
- 238000000034 method Methods 0.000 claims 21
- 239000000758 substrate Substances 0.000 claims 11
- 150000007524 organic acids Chemical class 0.000 claims 3
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 claims 2
- 150000001735 carboxylic acids Chemical class 0.000 claims 2
- 239000000126 substance Substances 0.000 claims 2
- DBVJJBKOTRCVKF-UHFFFAOYSA-N Etidronic acid Chemical compound OP(=O)(O)C(O)(C)P(O)(O)=O DBVJJBKOTRCVKF-UHFFFAOYSA-N 0.000 claims 1
- ABLZXFCXXLZCGV-UHFFFAOYSA-N Phosphorous acid Chemical compound OP(O)=O ABLZXFCXXLZCGV-UHFFFAOYSA-N 0.000 claims 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 150000007522 mineralic acids Chemical class 0.000 claims 1
- 239000007800 oxidant agent Substances 0.000 claims 1
- 239000004094 surface-active agent Substances 0.000 claims 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 3
- 229910000077 silane Inorganic materials 0.000 description 3
- DHMQDGOQFOQNFH-UHFFFAOYSA-N Glycine Chemical compound NCC(O)=O DHMQDGOQFOQNFH-UHFFFAOYSA-N 0.000 description 2
- UCMIRNVEIXFBKS-UHFFFAOYSA-N beta-alanine Chemical compound NCCC(O)=O UCMIRNVEIXFBKS-UHFFFAOYSA-N 0.000 description 2
- CETPSERCERDGAM-UHFFFAOYSA-N ceric oxide Chemical compound O=[Ce]=O CETPSERCERDGAM-UHFFFAOYSA-N 0.000 description 2
- 229910000422 cerium(IV) oxide Inorganic materials 0.000 description 2
- 239000002002 slurry Substances 0.000 description 2
- 239000004471 Glycine Substances 0.000 description 1
- ONIBWKKTOPOVIA-BYPYZUCNSA-N L-Proline Chemical compound OC(=O)[C@@H]1CCCN1 ONIBWKKTOPOVIA-BYPYZUCNSA-N 0.000 description 1
- ZDXPYRJPNDTMRX-VKHMYHEASA-N L-glutamine Chemical compound OC(=O)[C@@H](N)CCC(N)=O ZDXPYRJPNDTMRX-VKHMYHEASA-N 0.000 description 1
- COLNVLDHVKWLRT-QMMMGPOBSA-N L-phenylalanine Chemical compound OC(=O)[C@@H](N)CC1=CC=CC=C1 COLNVLDHVKWLRT-QMMMGPOBSA-N 0.000 description 1
- ONIBWKKTOPOVIA-UHFFFAOYSA-N Proline Natural products OC(=O)C1CCCN1 ONIBWKKTOPOVIA-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 229940000635 beta-alanine Drugs 0.000 description 1
- 229910021485 fumed silica Inorganic materials 0.000 description 1
- ZDXPYRJPNDTMRX-UHFFFAOYSA-N glutamine Natural products OC(=O)C(N)CCC(N)=O ZDXPYRJPNDTMRX-UHFFFAOYSA-N 0.000 description 1
- COLNVLDHVKWLRT-UHFFFAOYSA-N phenylalanine Natural products OC(=O)C(N)CC1=CC=CC=C1 COLNVLDHVKWLRT-UHFFFAOYSA-N 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US20081208P | 2008-12-04 | 2008-12-04 | |
| US61/200,812 | 2008-12-04 | ||
| US12/630,288 | 2009-12-03 | ||
| US12/630,288 US9548211B2 (en) | 2008-12-04 | 2009-12-03 | Method to selectively polish silicon carbide films |
| PCT/US2009/006380 WO2010065125A1 (en) | 2008-12-04 | 2009-12-04 | Method to selectively polish silicon carbide films |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2012511251A JP2012511251A (ja) | 2012-05-17 |
| JP2012511251A5 true JP2012511251A5 (enExample) | 2013-12-19 |
| JP5491520B2 JP5491520B2 (ja) | 2014-05-14 |
Family
ID=42231565
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011539510A Active JP5491520B2 (ja) | 2008-12-04 | 2009-12-04 | 炭化ケイ素膜を選択的に研磨する方法 |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US9548211B2 (enExample) |
| EP (1) | EP2384258B1 (enExample) |
| JP (1) | JP5491520B2 (enExample) |
| KR (1) | KR101671042B1 (enExample) |
| CN (2) | CN102292190A (enExample) |
| MY (1) | MY153077A (enExample) |
| SG (1) | SG171909A1 (enExample) |
| TW (1) | TWI398918B (enExample) |
| WO (1) | WO2010065125A1 (enExample) |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102010013519B4 (de) * | 2010-03-31 | 2012-12-27 | Siltronic Ag | Verfahren zum Polieren einer Halbleiterscheibe |
| JP5695367B2 (ja) * | 2010-08-23 | 2015-04-01 | 株式会社フジミインコーポレーテッド | 研磨用組成物及びそれを用いた研磨方法 |
| US8497210B2 (en) * | 2010-10-04 | 2013-07-30 | International Business Machines Corporation | Shallow trench isolation chemical mechanical planarization |
| CN102172851B (zh) * | 2011-03-03 | 2013-03-27 | 李子恒 | 等离子脱膜抛光机 |
| TWI481681B (zh) | 2012-05-10 | 2015-04-21 | Air Prod & Chem | 具有化學添加物的化學機械硏磨組合物及其使用方法 |
| US8999193B2 (en) | 2012-05-10 | 2015-04-07 | Air Products And Chemicals, Inc. | Chemical mechanical polishing composition having chemical additives and methods for using same |
| JP6106419B2 (ja) * | 2012-12-12 | 2017-03-29 | 昭和電工株式会社 | ＳｉＣ基板の製造方法 |
| US9803109B2 (en) | 2015-02-03 | 2017-10-31 | Cabot Microelectronics Corporation | CMP composition for silicon nitride removal |
| US9944829B2 (en) * | 2015-12-03 | 2018-04-17 | Treliant Fang | Halite salts as silicon carbide etchants for enhancing CMP material removal rate for SiC wafer |
| KR102462501B1 (ko) | 2016-01-15 | 2022-11-02 | 삼성전자주식회사 | 슬러리 조성물을 이용하는 집적회로 소자의 제조 방법 |
| US10294399B2 (en) * | 2017-01-05 | 2019-05-21 | Cabot Microelectronics Corporation | Composition and method for polishing silicon carbide |
| US11655394B2 (en) * | 2017-08-09 | 2023-05-23 | Resonac Corporation | Polishing solution and polishing method |
| US11931855B2 (en) * | 2019-06-17 | 2024-03-19 | Applied Materials, Inc. | Planarization methods for packaging substrates |
| CN114621683A (zh) * | 2020-12-11 | 2022-06-14 | 安集微电子（上海）有限公司 | 一种化学机械抛光液及其使用方法 |
| CN114407547B (zh) * | 2021-12-29 | 2023-03-07 | 江苏泰佳新材料科技有限公司 | 一种耐水洗防伪烫印膜及其制备方法 |
| WO2025254960A1 (en) * | 2024-06-05 | 2025-12-11 | Entegris, Inc. | Silica-based slurry for selective polishing of silicon nitride and silicon carbide |
Family Cites Families (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5759917A (en) | 1996-12-30 | 1998-06-02 | Cabot Corporation | Composition for oxide CMP |
| US6491843B1 (en) | 1999-12-08 | 2002-12-10 | Eastman Kodak Company | Slurry for chemical mechanical polishing silicon dioxide |
| US20030139069A1 (en) | 2001-12-06 | 2003-07-24 | Block Kelly H. | Planarization of silicon carbide hardmask material |
| JP3748410B2 (ja) * | 2001-12-27 | 2006-02-22 | 株式会社東芝 | 研磨方法及び半導体装置の製造方法 |
| DE10205280C1 (de) * | 2002-02-07 | 2003-07-03 | Degussa | Dispersion zum chemisch-mechanischen Polieren |
| EP1505639B1 (en) | 2002-04-30 | 2008-08-06 | Hitachi Chemical Company, Ltd. | Polishing fluid and polishing method |
| US7101832B2 (en) | 2003-06-19 | 2006-09-05 | Johnsondiversey, Inc. | Cleaners containing peroxide bleaching agents for cleaning paper making equipment and method |
| US7300603B2 (en) | 2003-08-05 | 2007-11-27 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Chemical mechanical planarization compositions for reducing erosion in semiconductor wafers |
| US7018560B2 (en) | 2003-08-05 | 2006-03-28 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Composition for polishing semiconductor layers |
| EP1735826A4 (en) * | 2004-04-08 | 2010-08-18 | Ii Vi Inc | CHEMICAL-MECHANICAL POLICY OF SIC SURFACES USING HYDROGEN PEROXIDE OR OZONE WATER SOLUTION IN CONNECTION WITH COLLOIDAL POLISHING AGENT |
| US20070037892A1 (en) * | 2004-09-08 | 2007-02-15 | Irina Belov | Aqueous slurry containing metallate-modified silica particles |
| US20070218811A1 (en) | 2004-09-27 | 2007-09-20 | Hitachi Chemical Co., Ltd. | Cmp polishing slurry and method of polishing substrate |
| US7563383B2 (en) * | 2004-10-12 | 2009-07-21 | Cabot Mircroelectronics Corporation | CMP composition with a polymer additive for polishing noble metals |
| US7504044B2 (en) * | 2004-11-05 | 2009-03-17 | Cabot Microelectronics Corporation | Polishing composition and method for high silicon nitride to silicon oxide removal rate ratios |
| CN101263583B (zh) * | 2005-09-09 | 2010-05-26 | 旭硝子株式会社 | 研磨剂、研磨装置以及半导体集成电路装置 |
| US7803203B2 (en) * | 2005-09-26 | 2010-09-28 | Cabot Microelectronics Corporation | Compositions and methods for CMP of semiconductor materials |
| JP2007123759A (ja) * | 2005-10-31 | 2007-05-17 | Nitta Haas Inc | 半導体研磨用組成物および研磨方法 |
| JP2007157841A (ja) * | 2005-12-01 | 2007-06-21 | Toshiba Corp | Ｃｍｐ用水系分散液、研磨方法、および半導体装置の製造方法 |
| US7781388B2 (en) | 2006-05-04 | 2010-08-24 | American Sterilizer Company | Cleaning compositions for hard to remove organic material |
| US7998866B2 (en) | 2006-09-05 | 2011-08-16 | Cabot Microelectronics Corporation | Silicon carbide polishing method utilizing water-soluble oxidizers |
| US7678700B2 (en) * | 2006-09-05 | 2010-03-16 | Cabot Microelectronics Corporation | Silicon carbide polishing method utilizing water-soluble oxidizers |
| JP4523935B2 (ja) * | 2006-12-27 | 2010-08-11 | 昭和電工株式会社 | 炭化珪素単結晶基板の研磨用水系研磨スラリー及び研磨法。 |
| US20090269923A1 (en) * | 2008-04-25 | 2009-10-29 | Lee Sang M | Adhesion and electromigration improvement between dielectric and conductive layers |
-
2009
- 2009-12-03 US US12/630,288 patent/US9548211B2/en active Active
- 2009-12-04 KR KR1020117015241A patent/KR101671042B1/ko active Active
- 2009-12-04 WO PCT/US2009/006380 patent/WO2010065125A1/en not_active Ceased
- 2009-12-04 MY MYPI20112519 patent/MY153077A/en unknown
- 2009-12-04 JP JP2011539510A patent/JP5491520B2/ja active Active
- 2009-12-04 CN CN2009801551460A patent/CN102292190A/zh active Pending
- 2009-12-04 EP EP09830728.3A patent/EP2384258B1/en active Active
- 2009-12-04 SG SG2011040094A patent/SG171909A1/en unknown
- 2009-12-04 CN CN201510122961.4A patent/CN104835732B/zh active Active
- 2009-12-04 TW TW098141546A patent/TWI398918B/zh active
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