JP2012511251A - 炭化ケイ素膜を選択的に研磨する方法 - Google Patents
炭化ケイ素膜を選択的に研磨する方法 Download PDFInfo
- Publication number
- JP2012511251A JP2012511251A JP2011539510A JP2011539510A JP2012511251A JP 2012511251 A JP2012511251 A JP 2012511251A JP 2011539510 A JP2011539510 A JP 2011539510A JP 2011539510 A JP2011539510 A JP 2011539510A JP 2012511251 A JP2012511251 A JP 2012511251A
- Authority
- JP
- Japan
- Prior art keywords
- polishing
- composition
- silicon carbide
- silicon dioxide
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005498 polishing Methods 0.000 title claims abstract description 202
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims abstract description 113
- 229910010271 silicon carbide Inorganic materials 0.000 title claims abstract description 112
- 238000000034 method Methods 0.000 title claims abstract description 93
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 297
- 239000000203 mixture Substances 0.000 claims abstract description 146
- 239000000377 silicon dioxide Substances 0.000 claims abstract description 134
- 235000012239 silicon dioxide Nutrition 0.000 claims abstract description 102
- 239000000758 substrate Substances 0.000 claims abstract description 71
- 239000000872 buffer Substances 0.000 claims abstract description 59
- 239000002245 particle Substances 0.000 claims description 40
- 230000002378 acidificating effect Effects 0.000 claims description 37
- 239000008119 colloidal silica Substances 0.000 claims description 25
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 claims description 21
- 239000000463 material Substances 0.000 claims description 18
- 150000007524 organic acids Chemical class 0.000 claims description 13
- DHMQDGOQFOQNFH-UHFFFAOYSA-N Glycine Chemical compound NCC(O)=O DHMQDGOQFOQNFH-UHFFFAOYSA-N 0.000 claims description 12
- 239000000126 substance Substances 0.000 claims description 12
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 claims description 10
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 8
- 150000001413 amino acids Chemical class 0.000 claims description 8
- 150000001732 carboxylic acid derivatives Chemical class 0.000 claims description 8
- DBVJJBKOTRCVKF-UHFFFAOYSA-N Etidronic acid Chemical compound OP(=O)(O)C(O)(C)P(O)(O)=O DBVJJBKOTRCVKF-UHFFFAOYSA-N 0.000 claims description 6
- 239000004471 Glycine Substances 0.000 claims description 6
- ABLZXFCXXLZCGV-UHFFFAOYSA-N Phosphorous acid Chemical compound OP(O)=O ABLZXFCXXLZCGV-UHFFFAOYSA-N 0.000 claims description 6
- 239000003795 chemical substances by application Substances 0.000 claims description 6
- 229910000147 aluminium phosphate Inorganic materials 0.000 claims description 5
- 239000004094 surface-active agent Substances 0.000 claims description 5
- 229910021485 fumed silica Inorganic materials 0.000 claims description 4
- 150000007522 mineralic acids Chemical class 0.000 claims description 4
- 239000007800 oxidant agent Substances 0.000 claims description 4
- 230000008569 process Effects 0.000 claims description 4
- 238000005299 abrasion Methods 0.000 claims description 2
- 230000001939 inductive effect Effects 0.000 claims 1
- 239000011368 organic material Substances 0.000 claims 1
- 239000006179 pH buffering agent Substances 0.000 claims 1
- 239000012736 aqueous medium Substances 0.000 abstract description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 27
- 235000012431 wafers Nutrition 0.000 description 24
- 239000010410 layer Substances 0.000 description 15
- 229910052757 nitrogen Inorganic materials 0.000 description 14
- 239000002002 slurry Substances 0.000 description 14
- 229910052581 Si3N4 Inorganic materials 0.000 description 12
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 12
- 239000004065 semiconductor Substances 0.000 description 11
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 239000002253 acid Substances 0.000 description 7
- 229910052782 aluminium Inorganic materials 0.000 description 7
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 7
- 229910000077 silane Inorganic materials 0.000 description 7
- 239000010703 silicon Substances 0.000 description 7
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000003082 abrasive agent Substances 0.000 description 5
- 235000001014 amino acid Nutrition 0.000 description 5
- 229940024606 amino acid Drugs 0.000 description 5
- 239000008365 aqueous carrier Substances 0.000 description 5
- 239000006172 buffering agent Substances 0.000 description 5
- 238000007517 polishing process Methods 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 4
- 229910004298 SiO 2 Inorganic materials 0.000 description 4
- 150000007513 acids Chemical class 0.000 description 4
- UCMIRNVEIXFBKS-UHFFFAOYSA-N beta-alanine Chemical compound NCCC(O)=O UCMIRNVEIXFBKS-UHFFFAOYSA-N 0.000 description 4
- 230000008859 change Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 229910017604 nitric acid Inorganic materials 0.000 description 4
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 3
- OFOBLEOULBTSOW-UHFFFAOYSA-N Malonic acid Chemical compound OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 3
- 230000003139 buffering effect Effects 0.000 description 3
- -1 but not limited to Chemical class 0.000 description 3
- CETPSERCERDGAM-UHFFFAOYSA-N ceric oxide Chemical compound O=[Ce]=O CETPSERCERDGAM-UHFFFAOYSA-N 0.000 description 3
- 229910000422 cerium(IV) oxide Inorganic materials 0.000 description 3
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 239000008367 deionised water Substances 0.000 description 3
- 229910021641 deionized water Inorganic materials 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 3
- 239000010408 film Substances 0.000 description 3
- 238000009472 formulation Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 3
- 239000000725 suspension Substances 0.000 description 3
- LNETULKMXZVUST-UHFFFAOYSA-N 1-naphthoic acid Chemical compound C1=CC=C2C(C(=O)O)=CC=CC2=C1 LNETULKMXZVUST-UHFFFAOYSA-N 0.000 description 2
- WXTMDXOMEHJXQO-UHFFFAOYSA-N 2,5-dihydroxybenzoic acid Chemical compound OC(=O)C1=CC(O)=CC=C1O WXTMDXOMEHJXQO-UHFFFAOYSA-N 0.000 description 2
- BTBUEUYNUDRHOZ-UHFFFAOYSA-N Borate Chemical compound [O-]B([O-])[O-] BTBUEUYNUDRHOZ-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- VZCYOOQTPOCHFL-OWOJBTEDSA-N Fumaric acid Chemical compound OC(=O)\C=C\C(O)=O VZCYOOQTPOCHFL-OWOJBTEDSA-N 0.000 description 2
- WHUUTDBJXJRKMK-UHFFFAOYSA-N Glutamic acid Natural products OC(=O)C(N)CCC(O)=O WHUUTDBJXJRKMK-UHFFFAOYSA-N 0.000 description 2
- AEMRFAOFKBGASW-UHFFFAOYSA-N Glycolic acid Chemical compound OCC(O)=O AEMRFAOFKBGASW-UHFFFAOYSA-N 0.000 description 2
- ONIBWKKTOPOVIA-BYPYZUCNSA-N L-Proline Chemical compound OC(=O)[C@@H]1CCCN1 ONIBWKKTOPOVIA-BYPYZUCNSA-N 0.000 description 2
- CKLJMWTZIZZHCS-REOHCLBHSA-N L-aspartic acid Chemical compound OC(=O)[C@@H](N)CC(O)=O CKLJMWTZIZZHCS-REOHCLBHSA-N 0.000 description 2
- WHUUTDBJXJRKMK-VKHMYHEASA-N L-glutamic acid Chemical compound OC(=O)[C@@H](N)CCC(O)=O WHUUTDBJXJRKMK-VKHMYHEASA-N 0.000 description 2
- ZDXPYRJPNDTMRX-VKHMYHEASA-N L-glutamine Chemical compound OC(=O)[C@@H](N)CCC(N)=O ZDXPYRJPNDTMRX-VKHMYHEASA-N 0.000 description 2
- COLNVLDHVKWLRT-QMMMGPOBSA-N L-phenylalanine Chemical compound OC(=O)[C@@H](N)CC1=CC=CC=C1 COLNVLDHVKWLRT-QMMMGPOBSA-N 0.000 description 2
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 2
- ONIBWKKTOPOVIA-UHFFFAOYSA-N Proline Natural products OC(=O)C1CCCN1 ONIBWKKTOPOVIA-UHFFFAOYSA-N 0.000 description 2
- KKEYFWRCBNTPAC-UHFFFAOYSA-N Terephthalic acid Chemical compound OC(=O)C1=CC=C(C(O)=O)C=C1 KKEYFWRCBNTPAC-UHFFFAOYSA-N 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- HMDDXIMCDZRSNE-UHFFFAOYSA-N [C].[Si] Chemical compound [C].[Si] HMDDXIMCDZRSNE-UHFFFAOYSA-N 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- WNLRTRBMVRJNCN-UHFFFAOYSA-N adipic acid Chemical compound OC(=O)CCCCC(O)=O WNLRTRBMVRJNCN-UHFFFAOYSA-N 0.000 description 2
- 235000003704 aspartic acid Nutrition 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- WPYMKLBDIGXBTP-UHFFFAOYSA-N benzoic acid Chemical compound OC(=O)C1=CC=CC=C1 WPYMKLBDIGXBTP-UHFFFAOYSA-N 0.000 description 2
- 229940000635 beta-alanine Drugs 0.000 description 2
- OQFSQFPPLPISGP-UHFFFAOYSA-N beta-carboxyaspartic acid Natural products OC(=O)C(N)C(C(O)=O)C(O)=O OQFSQFPPLPISGP-UHFFFAOYSA-N 0.000 description 2
- 150000001735 carboxylic acids Chemical class 0.000 description 2
- 229910000420 cerium oxide Inorganic materials 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 230000006835 compression Effects 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 230000000875 corresponding effect Effects 0.000 description 2
- 235000013922 glutamic acid Nutrition 0.000 description 2
- 239000004220 glutamic acid Substances 0.000 description 2
- ZDXPYRJPNDTMRX-UHFFFAOYSA-N glutamine Natural products OC(=O)C(N)CCC(N)=O ZDXPYRJPNDTMRX-UHFFFAOYSA-N 0.000 description 2
- 235000004554 glutamine Nutrition 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- QQVIHTHCMHWDBS-UHFFFAOYSA-N isophthalic acid Chemical compound OC(=O)C1=CC=CC(C(O)=O)=C1 QQVIHTHCMHWDBS-UHFFFAOYSA-N 0.000 description 2
- JVTAAEKCZFNVCJ-UHFFFAOYSA-N lactic acid Chemical compound CC(O)C(O)=O JVTAAEKCZFNVCJ-UHFFFAOYSA-N 0.000 description 2
- BDAGIHXWWSANSR-UHFFFAOYSA-N methanoic acid Natural products OC=O BDAGIHXWWSANSR-UHFFFAOYSA-N 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 2
- COLNVLDHVKWLRT-UHFFFAOYSA-N phenylalanine Natural products OC(=O)C(N)CC1=CC=CC=C1 COLNVLDHVKWLRT-UHFFFAOYSA-N 0.000 description 2
- 235000008729 phenylalanine Nutrition 0.000 description 2
- 150000003009 phosphonic acids Chemical class 0.000 description 2
- XUYJLQHKOGNDPB-UHFFFAOYSA-N phosphonoacetic acid Chemical compound OC(=O)CP(O)(O)=O XUYJLQHKOGNDPB-UHFFFAOYSA-N 0.000 description 2
- XNGIFLGASWRNHJ-UHFFFAOYSA-N phthalic acid Chemical compound OC(=O)C1=CC=CC=C1C(O)=O XNGIFLGASWRNHJ-UHFFFAOYSA-N 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 235000013930 proline Nutrition 0.000 description 2
- WRHZVMBBRYBTKZ-UHFFFAOYSA-N pyrrole-2-carboxylic acid Chemical compound OC(=O)C1=CC=CN1 WRHZVMBBRYBTKZ-UHFFFAOYSA-N 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 2
- QBYIENPQHBMVBV-HFEGYEGKSA-N (2R)-2-hydroxy-2-phenylacetic acid Chemical compound O[C@@H](C(O)=O)c1ccccc1.O[C@@H](C(O)=O)c1ccccc1 QBYIENPQHBMVBV-HFEGYEGKSA-N 0.000 description 1
- ISQSUCKLLKRTBZ-UHFFFAOYSA-N (phosphonomethylamino)methylphosphonic acid Chemical compound OP(O)(=O)CNCP(O)(O)=O ISQSUCKLLKRTBZ-UHFFFAOYSA-N 0.000 description 1
- JAHNSTQSQJOJLO-UHFFFAOYSA-N 2-(3-fluorophenyl)-1h-imidazole Chemical compound FC1=CC=CC(C=2NC=CN=2)=C1 JAHNSTQSQJOJLO-UHFFFAOYSA-N 0.000 description 1
- CABMTIJINOIHOD-UHFFFAOYSA-N 2-[4-methyl-5-oxo-4-(propan-2-yl)-4,5-dihydro-1H-imidazol-2-yl]quinoline-3-carboxylic acid Chemical compound N1C(=O)C(C(C)C)(C)N=C1C1=NC2=CC=CC=C2C=C1C(O)=O CABMTIJINOIHOD-UHFFFAOYSA-N 0.000 description 1
- RLHGFJMGWQXPBW-UHFFFAOYSA-N 2-hydroxy-3-(1h-imidazol-5-ylmethyl)benzamide Chemical compound NC(=O)C1=CC=CC(CC=2NC=NC=2)=C1O RLHGFJMGWQXPBW-UHFFFAOYSA-N 0.000 description 1
- UOBYKYZJUGYBDK-UHFFFAOYSA-N 2-naphthoic acid Chemical compound C1=CC=CC2=CC(C(=O)O)=CC=C21 UOBYKYZJUGYBDK-UHFFFAOYSA-N 0.000 description 1
- WLJVXDMOQOGPHL-PPJXEINESA-N 2-phenylacetic acid Chemical compound O[14C](=O)CC1=CC=CC=C1 WLJVXDMOQOGPHL-PPJXEINESA-N 0.000 description 1
- OSWFIVFLDKOXQC-UHFFFAOYSA-N 4-(3-methoxyphenyl)aniline Chemical compound COC1=CC=CC(C=2C=CC(N)=CC=2)=C1 OSWFIVFLDKOXQC-UHFFFAOYSA-N 0.000 description 1
- 229910018182 Al—Cu Inorganic materials 0.000 description 1
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- DCXYFEDJOCDNAF-UHFFFAOYSA-N Asparagine Natural products OC(=O)C(N)CC(N)=O DCXYFEDJOCDNAF-UHFFFAOYSA-N 0.000 description 1
- 239000005711 Benzoic acid Substances 0.000 description 1
- FEWJPZIEWOKRBE-JCYAYHJZSA-N Dextrotartaric acid Chemical compound OC(=O)[C@H](O)[C@@H](O)C(O)=O FEWJPZIEWOKRBE-JCYAYHJZSA-N 0.000 description 1
- WJJMNDUMQPNECX-UHFFFAOYSA-N Dipicolinic acid Natural products OC(=O)C1=CC=CC(C(O)=O)=N1 WJJMNDUMQPNECX-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- QNAYBMKLOCPYGJ-REOHCLBHSA-N L-alanine Chemical compound C[C@H](N)C(O)=O QNAYBMKLOCPYGJ-REOHCLBHSA-N 0.000 description 1
- DCXYFEDJOCDNAF-REOHCLBHSA-N L-asparagine Chemical compound OC(=O)[C@@H](N)CC(N)=O DCXYFEDJOCDNAF-REOHCLBHSA-N 0.000 description 1
- 239000004677 Nylon Substances 0.000 description 1
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004721 Polyphenylene oxide Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- IWYDHOAUDWTVEP-UHFFFAOYSA-N R-2-phenyl-2-hydroxyacetic acid Natural products OC(=O)C(O)C1=CC=CC=C1 IWYDHOAUDWTVEP-UHFFFAOYSA-N 0.000 description 1
- KDYFGRWQOYBRFD-UHFFFAOYSA-N Succinic acid Natural products OC(=O)CCC(O)=O KDYFGRWQOYBRFD-UHFFFAOYSA-N 0.000 description 1
- YSMRWXYRXBRSND-UHFFFAOYSA-N TOTP Chemical compound CC1=CC=CC=C1OP(=O)(OC=1C(=CC=CC=1)C)OC1=CC=CC=C1C YSMRWXYRXBRSND-UHFFFAOYSA-N 0.000 description 1
- FEWJPZIEWOKRBE-UHFFFAOYSA-N Tartaric acid Natural products [H+].[H+].[O-]C(=O)C(O)C(O)C([O-])=O FEWJPZIEWOKRBE-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
- UMVBXBACMIOFDO-UHFFFAOYSA-N [N].[Si] Chemical compound [N].[Si] UMVBXBACMIOFDO-UHFFFAOYSA-N 0.000 description 1
- 239000008351 acetate buffer Substances 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 239000001361 adipic acid Substances 0.000 description 1
- 235000011037 adipic acid Nutrition 0.000 description 1
- 235000004279 alanine Nutrition 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 239000003125 aqueous solvent Substances 0.000 description 1
- 235000009582 asparagine Nutrition 0.000 description 1
- 229960001230 asparagine Drugs 0.000 description 1
- 239000002585 base Substances 0.000 description 1
- 238000010923 batch production Methods 0.000 description 1
- 235000010233 benzoic acid Nutrition 0.000 description 1
- 239000007853 buffer solution Substances 0.000 description 1
- KDYFGRWQOYBRFD-NUQCWPJISA-N butanedioic acid Chemical compound O[14C](=O)CC[14C](O)=O KDYFGRWQOYBRFD-NUQCWPJISA-N 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 235000015165 citric acid Nutrition 0.000 description 1
- 239000000084 colloidal system Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000003750 conditioning effect Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000010924 continuous production Methods 0.000 description 1
- 230000002596 correlated effect Effects 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000011982 device technology Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- DUYCTCQXNHFCSJ-UHFFFAOYSA-N dtpmp Chemical compound OP(=O)(O)CN(CP(O)(O)=O)CCN(CP(O)(=O)O)CCN(CP(O)(O)=O)CP(O)(O)=O DUYCTCQXNHFCSJ-UHFFFAOYSA-N 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- XUCNUKMRBVNAPB-UHFFFAOYSA-N fluoroethene Chemical compound FC=C XUCNUKMRBVNAPB-UHFFFAOYSA-N 0.000 description 1
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 1
- 235000019253 formic acid Nutrition 0.000 description 1
- 239000001530 fumaric acid Substances 0.000 description 1
- 235000011087 fumaric acid Nutrition 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 230000007062 hydrolysis Effects 0.000 description 1
- 238000006460 hydrolysis reaction Methods 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 239000004310 lactic acid Substances 0.000 description 1
- 235000014655 lactic acid Nutrition 0.000 description 1
- 238000002356 laser light scattering Methods 0.000 description 1
- VZCYOOQTPOCHFL-UPHRSURJSA-N maleic acid Chemical compound OC(=O)\C=C/C(O)=O VZCYOOQTPOCHFL-UPHRSURJSA-N 0.000 description 1
- 239000011976 maleic acid Substances 0.000 description 1
- 229960002510 mandelic acid Drugs 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- LVHBHZANLOWSRM-UHFFFAOYSA-N methylenebutanedioic acid Natural products OC(=O)CC(=C)C(O)=O LVHBHZANLOWSRM-UHFFFAOYSA-N 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 150000002763 monocarboxylic acids Chemical class 0.000 description 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 1
- 229920001778 nylon Polymers 0.000 description 1
- 235000006408 oxalic acid Nutrition 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 230000020477 pH reduction Effects 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 229920000058 polyacrylate Polymers 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 238000012643 polycondensation polymerization Methods 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920000570 polyether Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- DOYOPBSXEIZLRE-UHFFFAOYSA-N pyrrole-3-carboxylic acid Natural products OC(=O)C=1C=CNC=1 DOYOPBSXEIZLRE-UHFFFAOYSA-N 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 239000011975 tartaric acid Substances 0.000 description 1
- 235000002906 tartaric acid Nutrition 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/31051—Planarisation of the insulating layers
- H01L21/31053—Planarisation of the insulating layers involving a dielectric removal step
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09G—POLISHING COMPOSITIONS; SKI WAXES
- C09G1/00—Polishing compositions
- C09G1/02—Polishing compositions containing abrasives or grinding agents
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/32115—Planarisation
- H01L21/3212—Planarisation by chemical mechanical polishing [CMP]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/16—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic Table
- H01L29/1608—Silicon carbide
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Mechanical Engineering (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
【選択図】 図1
Description
一般的な手順に従って、本発明の組成物と方法の研磨特性を確認した。特に、炭化ケイ素ウエハと二酸化ケイ素ウエハ(直径200mm)を1.65平方インチのサイズに切断し、様々な成分を有する研磨組成物で研磨した。
例1の一般的手順に従って、異なる酸性緩衝剤を含有する4つの組成物について炭化ケイ素と二酸化ケイ素(SiCN:SiO2)の選択比を評価した。4つの組成物はすべて、平均粒径約50nmのコロイド状シリカを約0.5重量パーセント含有していた。各組成物pHは、水酸化カリウム(KOH)や硝酸(HNO3)を適宜付加することにより約0.5pH単位の増分で約3〜5で調節した。表2〜5には、各組成物の使用による半導体ウエハからの炭化ケイ素と二酸化ケイ素の研磨速度を毎分オングストローム(Å/min)で示している。表1には、各組成物の酸性緩衝剤を示している。
例1の一般的手順に従って、異なる濃度のヒドロキシエチリデン−1,1−ジホスホン酸を含有する組成物の炭化ケイ素と二酸化ケイ素の選択比を測定した。組成物は約2.5のpHであり、平均粒径約50nmのコロイド状シリカを約0.5重量パーセント含有していた。ヒドロキシエチリデン−1,1−ジホスホン酸の量は、活性重量に基づき約50〜3000ppmの間で変化させた。各組成物pHは、水酸化カリウム(KOH)や硝酸(HNO3)を適宜付加することにより約2.5に調節した。各組成物の使用による半導体ウエハからの炭化ケイ素と二酸化ケイ素の研磨速度をÅ/min単位で報告する。結果は、表8に示す通りである。
例1の一般的手順に従って、異なる種類の粒子研磨剤を含有する4つの組成物について炭化ケイ素と二酸化ケイ素の研磨速度を測定した。4つの組成物はすべて、表9〜12に示す通り約0.5重量パーセントの研磨剤と酢酸の酸性緩衝材を含有していた。組成物pHは、酢酸を付加することにより約4〜7の間で変更した。
窒素のほとんどない炭化ケイ素材料を含有するウエハの炭化ケイ素研磨速度についても、測定を実施した。2社の異なる製造者から炭化ケイ素ブランケットウエハを入手し、例1の一般的手順に従って炭化ケイ素ブランケットウエハを比較分析した。2社の製造者から入手したこれらのウエハは、表13〜15にM1およびM2として示している。PETEOS系二酸化ケイ素ブランケットウエハも例1の一般的手順に従って分析し、同一の研磨条件下で二酸化ケイ素研磨速度を測定した。
また、炭化ケイ素を含有するウエハの炭化ケイ素研磨速度について、アミノ酸を含む種々の酸性緩衝剤で測定を実施した。炭化ケイ素、PETEOS系二酸化ケイ素およびシラン系二酸化ケイ素(ソフト酸化物)のブランケットウエハを約2重量パーセントのアルミニウムドープコロイド状シリカ(平均粒径約40〜50nmおよびアルミニウム濃度が粒子固体重量で約650〜750ppm)を含む研磨スラリーおよび表16に示す酸性緩衝剤で研磨した。研磨条件は、ロジテック社製研磨装置ポリテックスREG E1120パッド使用、ダウンフォース=3psi、プラテン速度=90rpm、キャリア速度=84rpm、研磨時間=60秒および研磨スラリー流速=80mL/minである。表16には、緩衝剤、緩衝剤濃度、スラリーpHおよび観察された研磨速度を示している。表16から明らかなように、すべての緩衝剤についてPETEOS系二酸化ケイ素研磨に対する炭化ケイ素研磨の選択比が非常に高かった。特に、アミノ酸緩衝剤(グリシン、ベータアラニン、プロリン、グルタミン、フェニルアラニンなど)については、シラン系二酸化ケイ素研磨に対する炭化ケイ素研磨の選択比が顕著に高かった。
Claims (33)
- 二酸化ケイ素に優先して基板表面から炭化ケイ素を選択的に除去する化学的機械的研磨(CMP)方法であり、
(a)研磨パッドと水性CMP組成物を前記基板表面に接触させる手順と、
(b)前記基板に存在する炭化ケイ素の少なくても一部を前記表面から摩耗させるに十分な時間、前記CMP組成物の一部を前記研磨パッドと前記基板との間で前記基板に接触した状態に維持しつつ前記基板と前記研磨パッドとの間に相対運動を引き起こす手順とを有し、
前記CMP組成物が約0.1〜5重量パーセントの範囲の濃度で存在する粒子状シリカ研磨剤と約2〜7の範囲のpHを提供する酸性緩衝剤とを含有し、前記CMP組成物が前記基板表面に存在する二酸化ケイ素の同時的な摩耗よりも速い研磨速度で前記基板表面に存在する炭化ケイ素を摩耗させることができる方法。 - 前記酸性緩衝剤が有機酸を含む請求項1に記載の方法。
- 前記有機酸がカルボン酸、ホスホン酸または両者の組合せを含む請求項2に記載の方法。
- 前記有機酸が酢酸を含む請求項2に記載の方法。
- 前記有機酸が1−ヒドロキシエチリデン−1,1−ジホスホン酸を含む請求項2に記載の方法。
- 前記有機酸がアミノ酸を含む請求項2に記載の方法。
- 前記CMP組成物が約0.5重量パーセント未満の有機剤を含有する請求項1に記載の方法。
- 前記酸性緩衝剤が無機酸を含む請求項1に記載の方法。
- 前記酸性緩衝剤がリン酸を含む請求項1に記載の方法。
- シリカが約0.1〜2重量パーセントの範囲の濃度で存在する請求項1に記載の方法。
- 前記シリカがコロイド状シリカ、ヒュームドシリカ、アルミナドープシリカおよびこれらの2つ以上の組合せから成る群から選択される請求項1に記載の方法。
- 前記シリカが平均粒径約40〜150ナノメートルの範囲のアルミナドープコロイド状シリカを含む請求項1に記載の方法。
- 前記シリカが平均粒径約20〜150ナノメートルの範囲である請求項1に記載の方法。
- 前記シリカが平均粒径約25〜75ナノメートルの範囲である請求項1に記載の方法。
- 前記シリカが平均粒径約80〜140ナノメートルの範囲である請求項1に記載の方法。
- pH緩衝剤が約2〜5の範囲のpHを提供する請求項1に記載の方法。
- 前記CMP組成物が界面活性剤と酸化剤を含有しない請求項1に記載の方法。
- 二酸化ケイ素がPETROS系二酸化ケイ素よりも容易に摩耗できる材料であり、組成物pHが約3〜7の範囲である請求項1に記載の方法。
- 前記組成物pHが3.5超である請求項18に記載の方法。
- 二酸化ケイ素に優先して基板表面から炭化ケイ素を選択的に除去する化学的機械的研磨(CMP)方法であり、
(a)研磨パッドと水性CMP組成物を前記基板表面に接触させる手順と、
(b)前記基板に存在する炭化ケイ素の少なくても一部を前記表面から摩耗させるに十分な時間、前記CMP組成物の一部を前記研磨パッドと前記基板との間で前記基板に接触した状態に維持しつつ前記基板と前記研磨パッドとの間に相対運動を引き起こす手順とを含み、
CMP組成物が平均粒径約40〜150ナノメートルの範囲のアルミナドープコロイド状シリカを約0.1〜1重量パーセント含有し、また、有機酸を含む緩衝剤を含有し、前記緩衝剤が約2〜5の範囲のpHを提供し、前記CMP組成物が前記基板表面に存在する二酸化ケイ素の同時的な摩耗よりも速い研磨速度で前記基板表面に存在する炭化ケイ素を摩耗させることができる方法。 - 前記有機酸がカルボン酸、ホスホン酸または両者の組合せを含む請求項20に記載の方法。
- 前記有機酸がカルボン酸を含む請求項20に記載の方法。
- 前記カルボン酸がアミノ酸を含む請求項22に記載の方法。
- 前記アミノ酸がグリシンを含む請求項23に記載の方法。
- 前記有機酸がホスホン酸を含む請求項20に記載の方法。
- 前記CMP組成物が約0.5重量パーセント未満の有機物質を含有する請求項20に記載の方法。
- 二酸化ケイ素がPETROS系二酸化ケイ素よりも容易に摩耗できる材料であり、組成物pHが約3〜7の範囲である請求項20に記載の方法。
- 前記組成物pHが3.5超である請求項27に記載の方法。
- CMPプロセスにおいて基板表面からの二酸化ケイ素研磨に対する炭化ケイ素研磨の選択比を調節する化学的機械的研磨(CMP)方法であり、
(a)事前に設定された研磨条件下で粒子状シリカ研磨剤と酸性緩衝剤を含むCMP組成物により炭化ケイ素基板と二酸化ケイ素基板を研磨する手順と、
(b)手順(a)において研磨される基板における炭化ケイ素と二酸化ケイ素の研磨速度比を決定する手順と、
(c)二酸化ケイ素に対する炭化ケイ素の研磨速度比を所望により増減させるために研磨パラメータを変更する手順とを含み、
変更される前記研磨パラメータが組成物pH、前記組成物中の緩衝剤濃度、前記組成物中のシリカ濃度またはそれらの2つ以上の組合せから成る群から選択される方法。 - 変更される前記パラメータが前記組成物中の緩衝剤濃度である請求項29に記載の方法。
- 変更される前記パラメータが前記組成物pHである請求項30に記載の方法。
- 変更される前記パラメータが前記組成物中のシリカ濃度である請求項30に記載の方法。
- 前記粒子状シリカ研磨剤が平均粒径約40〜150ナノメートルの範囲のアルミナドープコロイド状シリカを含む請求項30に記載の方法。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US20081208P | 2008-12-04 | 2008-12-04 | |
US61/200,812 | 2008-12-04 | ||
US12/630,288 US9548211B2 (en) | 2008-12-04 | 2009-12-03 | Method to selectively polish silicon carbide films |
US12/630,288 | 2009-12-03 | ||
PCT/US2009/006380 WO2010065125A1 (en) | 2008-12-04 | 2009-12-04 | Method to selectively polish silicon carbide films |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2012511251A true JP2012511251A (ja) | 2012-05-17 |
JP2012511251A5 JP2012511251A5 (ja) | 2013-12-19 |
JP5491520B2 JP5491520B2 (ja) | 2014-05-14 |
Family
ID=42231565
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011539510A Active JP5491520B2 (ja) | 2008-12-04 | 2009-12-04 | 炭化ケイ素膜を選択的に研磨する方法 |
Country Status (9)
Country | Link |
---|---|
US (1) | US9548211B2 (ja) |
EP (1) | EP2384258B1 (ja) |
JP (1) | JP5491520B2 (ja) |
KR (1) | KR101671042B1 (ja) |
CN (2) | CN104835732B (ja) |
MY (1) | MY153077A (ja) |
SG (1) | SG171909A1 (ja) |
TW (1) | TWI398918B (ja) |
WO (1) | WO2010065125A1 (ja) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102010013519B4 (de) * | 2010-03-31 | 2012-12-27 | Siltronic Ag | Verfahren zum Polieren einer Halbleiterscheibe |
JP5695367B2 (ja) * | 2010-08-23 | 2015-04-01 | 株式会社フジミインコーポレーテッド | 研磨用組成物及びそれを用いた研磨方法 |
US8497210B2 (en) * | 2010-10-04 | 2013-07-30 | International Business Machines Corporation | Shallow trench isolation chemical mechanical planarization |
CN102172851B (zh) * | 2011-03-03 | 2013-03-27 | 李子恒 | 等离子脱膜抛光机 |
US8999193B2 (en) | 2012-05-10 | 2015-04-07 | Air Products And Chemicals, Inc. | Chemical mechanical polishing composition having chemical additives and methods for using same |
EP3333232B1 (en) | 2012-05-10 | 2020-03-04 | Versum Materials US, LLC | Chemical mechanical polishing composition having chemical additives and methods for using |
JP6106419B2 (ja) * | 2012-12-12 | 2017-03-29 | 昭和電工株式会社 | SiC基板の製造方法 |
US9803109B2 (en) | 2015-02-03 | 2017-10-31 | Cabot Microelectronics Corporation | CMP composition for silicon nitride removal |
US9944829B2 (en) * | 2015-12-03 | 2018-04-17 | Treliant Fang | Halite salts as silicon carbide etchants for enhancing CMP material removal rate for SiC wafer |
KR102462501B1 (ko) | 2016-01-15 | 2022-11-02 | 삼성전자주식회사 | 슬러리 조성물을 이용하는 집적회로 소자의 제조 방법 |
US10294399B2 (en) * | 2017-01-05 | 2019-05-21 | Cabot Microelectronics Corporation | Composition and method for polishing silicon carbide |
KR102410551B1 (ko) * | 2017-08-09 | 2022-06-16 | 쇼와덴코머티리얼즈가부시끼가이샤 | 연마액 및 연마 방법 |
US11931855B2 (en) * | 2019-06-17 | 2024-03-19 | Applied Materials, Inc. | Planarization methods for packaging substrates |
CN114621683A (zh) * | 2020-12-11 | 2022-06-14 | 安集微电子(上海)有限公司 | 一种化学机械抛光液及其使用方法 |
CN114407547B (zh) * | 2021-12-29 | 2023-03-07 | 江苏泰佳新材料科技有限公司 | 一种耐水洗防伪烫印膜及其制备方法 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003238944A (ja) * | 2002-02-07 | 2003-08-27 | Degussa Ag | 酸化物表面の化学的−機械的磨き仕上げのための水性分散液、その製法および使用 |
WO2007029465A1 (ja) * | 2005-09-09 | 2007-03-15 | Asahi Glass Company, Limited | 研磨剤、被研磨面の研磨方法および半導体集積回路装置の製造方法 |
JP2007123759A (ja) * | 2005-10-31 | 2007-05-17 | Nitta Haas Inc | 半導体研磨用組成物および研磨方法 |
JP2007533141A (ja) * | 2004-04-08 | 2007-11-15 | トゥー‐シックス・インコーポレイテッド | コロイド状研磨材と組み合わせて過酸化水素またはオゾン化水溶液を用いたSiC表面の化学機械的研磨 |
JP2008516465A (ja) * | 2004-10-12 | 2008-05-15 | キャボット マイクロエレクトロニクス コーポレイション | 貴金属研磨のためのポリマー添加剤を伴うcmp組成物 |
JP2008519466A (ja) * | 2004-11-05 | 2008-06-05 | キャボット マイクロエレクトロニクス コーポレイション | 窒化ケイ素の除去速度が酸化ケイ素と比べて高い研磨組成物及び方法 |
JP2008166329A (ja) * | 2006-12-27 | 2008-07-17 | Showa Denko Kk | 炭化珪素単結晶基板の研磨用水系研磨スラリー及び研磨法。 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5759917A (en) * | 1996-12-30 | 1998-06-02 | Cabot Corporation | Composition for oxide CMP |
US6491843B1 (en) | 1999-12-08 | 2002-12-10 | Eastman Kodak Company | Slurry for chemical mechanical polishing silicon dioxide |
US20030139069A1 (en) | 2001-12-06 | 2003-07-24 | Block Kelly H. | Planarization of silicon carbide hardmask material |
JP3748410B2 (ja) * | 2001-12-27 | 2006-02-22 | 株式会社東芝 | 研磨方法及び半導体装置の製造方法 |
CN100336179C (zh) | 2002-04-30 | 2007-09-05 | 日立化成工业株式会社 | 研磨液及研磨方法 |
US7101832B2 (en) | 2003-06-19 | 2006-09-05 | Johnsondiversey, Inc. | Cleaners containing peroxide bleaching agents for cleaning paper making equipment and method |
US7018560B2 (en) | 2003-08-05 | 2006-03-28 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Composition for polishing semiconductor layers |
US7300603B2 (en) | 2003-08-05 | 2007-11-27 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Chemical mechanical planarization compositions for reducing erosion in semiconductor wafers |
US20070037892A1 (en) * | 2004-09-08 | 2007-02-15 | Irina Belov | Aqueous slurry containing metallate-modified silica particles |
US20070218811A1 (en) | 2004-09-27 | 2007-09-20 | Hitachi Chemical Co., Ltd. | Cmp polishing slurry and method of polishing substrate |
US7803203B2 (en) * | 2005-09-26 | 2010-09-28 | Cabot Microelectronics Corporation | Compositions and methods for CMP of semiconductor materials |
JP2007157841A (ja) * | 2005-12-01 | 2007-06-21 | Toshiba Corp | Cmp用水系分散液、研磨方法、および半導体装置の製造方法 |
US7781388B2 (en) | 2006-05-04 | 2010-08-24 | American Sterilizer Company | Cleaning compositions for hard to remove organic material |
US7678700B2 (en) * | 2006-09-05 | 2010-03-16 | Cabot Microelectronics Corporation | Silicon carbide polishing method utilizing water-soluble oxidizers |
US7998866B2 (en) | 2006-09-05 | 2011-08-16 | Cabot Microelectronics Corporation | Silicon carbide polishing method utilizing water-soluble oxidizers |
US20090269923A1 (en) * | 2008-04-25 | 2009-10-29 | Lee Sang M | Adhesion and electromigration improvement between dielectric and conductive layers |
-
2009
- 2009-12-03 US US12/630,288 patent/US9548211B2/en active Active
- 2009-12-04 TW TW098141546A patent/TWI398918B/zh active
- 2009-12-04 MY MYPI20112519 patent/MY153077A/en unknown
- 2009-12-04 CN CN201510122961.4A patent/CN104835732B/zh active Active
- 2009-12-04 CN CN2009801551460A patent/CN102292190A/zh active Pending
- 2009-12-04 JP JP2011539510A patent/JP5491520B2/ja active Active
- 2009-12-04 KR KR1020117015241A patent/KR101671042B1/ko active IP Right Grant
- 2009-12-04 SG SG2011040094A patent/SG171909A1/en unknown
- 2009-12-04 EP EP09830728.3A patent/EP2384258B1/en active Active
- 2009-12-04 WO PCT/US2009/006380 patent/WO2010065125A1/en active Application Filing
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003238944A (ja) * | 2002-02-07 | 2003-08-27 | Degussa Ag | 酸化物表面の化学的−機械的磨き仕上げのための水性分散液、その製法および使用 |
JP2007533141A (ja) * | 2004-04-08 | 2007-11-15 | トゥー‐シックス・インコーポレイテッド | コロイド状研磨材と組み合わせて過酸化水素またはオゾン化水溶液を用いたSiC表面の化学機械的研磨 |
JP2008516465A (ja) * | 2004-10-12 | 2008-05-15 | キャボット マイクロエレクトロニクス コーポレイション | 貴金属研磨のためのポリマー添加剤を伴うcmp組成物 |
JP2008519466A (ja) * | 2004-11-05 | 2008-06-05 | キャボット マイクロエレクトロニクス コーポレイション | 窒化ケイ素の除去速度が酸化ケイ素と比べて高い研磨組成物及び方法 |
WO2007029465A1 (ja) * | 2005-09-09 | 2007-03-15 | Asahi Glass Company, Limited | 研磨剤、被研磨面の研磨方法および半導体集積回路装置の製造方法 |
JP2007123759A (ja) * | 2005-10-31 | 2007-05-17 | Nitta Haas Inc | 半導体研磨用組成物および研磨方法 |
JP2008166329A (ja) * | 2006-12-27 | 2008-07-17 | Showa Denko Kk | 炭化珪素単結晶基板の研磨用水系研磨スラリー及び研磨法。 |
Also Published As
Publication number | Publication date |
---|---|
KR20110106864A (ko) | 2011-09-29 |
CN104835732A (zh) | 2015-08-12 |
TW201030832A (en) | 2010-08-16 |
EP2384258B1 (en) | 2016-11-23 |
EP2384258A1 (en) | 2011-11-09 |
US9548211B2 (en) | 2017-01-17 |
CN102292190A (zh) | 2011-12-21 |
JP5491520B2 (ja) | 2014-05-14 |
WO2010065125A1 (en) | 2010-06-10 |
US20100144149A1 (en) | 2010-06-10 |
TWI398918B (zh) | 2013-06-11 |
CN104835732B (zh) | 2017-11-14 |
EP2384258A4 (en) | 2012-07-18 |
MY153077A (en) | 2014-12-31 |
SG171909A1 (en) | 2011-07-28 |
KR101671042B1 (ko) | 2016-10-31 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5491520B2 (ja) | 炭化ケイ素膜を選択的に研磨する方法 | |
JP6392913B2 (ja) | 研磨組成物およびアミノシランを用いて処理された研削剤粒子の使用方法 | |
US8759216B2 (en) | Compositions and methods for polishing silicon nitride materials | |
TWI428436B (zh) | 拋光組合物及使用經胺基矽烷處理之研磨顆粒的方法 | |
KR101477360B1 (ko) | 폴리규소 제거 속도를 억제하기 위한 cmp 조성물 및 방법 | |
US8808573B2 (en) | Compositions and methods for selective polishing of silicon nitride materials | |
KR102192003B1 (ko) | 질화규소 물질의 선택적 연마를 위한 조성물 및 방법 | |
JP2009538236A (ja) | 酸化アルミニウムおよび酸窒化アルミニウム基材を研磨するための組成物、方法およびシステム | |
JP2010153782A (ja) | 基板の研磨方法 | |
JP5861906B2 (ja) | 酸化ケイ素除去を増大させるように適合した研磨組成物で基体を化学機械研磨する方法 | |
WO2008103549A2 (en) | Auto-stopping slurries for chemical-mechanical polishing of topographic dielectric silicon dioxide | |
JP2008098652A (ja) | 化学機械研磨用スラリおよび半導体装置の製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20120316 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20120316 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20120403 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20130806 |
|
A524 | Written submission of copy of amendment under article 19 pct |
Free format text: JAPANESE INTERMEDIATE CODE: A524 Effective date: 20131101 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20140225 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20140227 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5491520 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
S533 | Written request for registration of change of name |
Free format text: JAPANESE INTERMEDIATE CODE: R313533 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
S533 | Written request for registration of change of name |
Free format text: JAPANESE INTERMEDIATE CODE: R313533 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |