JP2012510368A - 真空下でワークピースを加工するため、ハウジングに対して回転可能なハウジング底部を有する装置 - Google Patents

真空下でワークピースを加工するため、ハウジングに対して回転可能なハウジング底部を有する装置 Download PDF

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Publication number
JP2012510368A
JP2012510368A JP2011537898A JP2011537898A JP2012510368A JP 2012510368 A JP2012510368 A JP 2012510368A JP 2011537898 A JP2011537898 A JP 2011537898A JP 2011537898 A JP2011537898 A JP 2011537898A JP 2012510368 A JP2012510368 A JP 2012510368A
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JP
Japan
Prior art keywords
housing
rotor
opening
workpiece
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2011537898A
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English (en)
Japanese (ja)
Inventor
ヴォクルカ フランツ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Global Beam Technologies Ag
Original Assignee
Global Beam Technologies Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Global Beam Technologies Ag filed Critical Global Beam Technologies Ag
Publication of JP2012510368A publication Critical patent/JP2012510368A/ja
Pending legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K15/00—Electron-beam welding or cutting
    • B23K15/06—Electron-beam welding or cutting within a vacuum chamber
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K15/00—Electron-beam welding or cutting
    • B23K15/0046—Welding
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/16—Vessels; Containers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
    • H01J37/185—Means for transferring objects between different enclosures of different pressure or atmosphere
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/315—Electron-beam or ion-beam tubes for localised treatment of objects for welding

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Welding Or Cutting Using Electron Beams (AREA)
JP2011537898A 2008-12-01 2009-11-30 真空下でワークピースを加工するため、ハウジングに対して回転可能なハウジング底部を有する装置 Pending JP2012510368A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102008059741.4A DE102008059741B4 (de) 2008-12-01 2008-12-01 Vorrichtung zur Bearbeitung von Werkstücken unter Vakuum
DE102008059741.4 2008-12-01
PCT/EP2009/008519 WO2010063436A1 (de) 2008-12-01 2009-11-30 Vorrichtung zur bearbeitung von werkstücken unter vakuum mit einem relativ zu dem gehäuse drehbaren gehäuseboden

Publications (1)

Publication Number Publication Date
JP2012510368A true JP2012510368A (ja) 2012-05-10

Family

ID=41716666

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011537898A Pending JP2012510368A (ja) 2008-12-01 2009-11-30 真空下でワークピースを加工するため、ハウジングに対して回転可能なハウジング底部を有する装置

Country Status (3)

Country Link
JP (1) JP2012510368A (de)
DE (1) DE102008059741B4 (de)
WO (1) WO2010063436A1 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014012816A1 (de) * 2014-08-28 2016-03-03 Global Beam Technologies Ag Teilchenstrahlbearbeitungsvorrichtung
CN110560872A (zh) * 2019-10-18 2019-12-13 太仓束捍机电科技有限公司 一种用于真空束焊机的环状连续送料隧道

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1997172U (de) * 1962-07-11 1968-11-21 Carl Zeiss In Heidenheim An De Verfahren und vorrichtung zur bearbeitung von werkstuecken mittels eines ladungstraegerstrahles
JPS4923088B1 (de) * 1970-06-06 1974-06-13
US4162391A (en) 1977-12-19 1979-07-24 Sciaky Bros., Inc. Sliding vacuum seal means
JPS5561387A (en) * 1978-10-31 1980-05-09 Toyoda Mach Works Ltd Turntable type electron beam welding apparatus
JPS59104282A (ja) * 1982-12-07 1984-06-16 Mitsubishi Electric Corp 電子ビ−ム溶接装置
JP2006095553A (ja) * 2004-09-29 2006-04-13 F C C:Kk 電子ビーム溶接装置
DE102006027820B4 (de) * 2006-06-16 2008-04-03 All Welding Technologies Ag Kammeranordnung zur Verwendung bei der Elektronenstrahlbearbeitung

Also Published As

Publication number Publication date
WO2010063436A1 (de) 2010-06-10
DE102008059741B4 (de) 2017-06-01
DE102008059741A1 (de) 2010-06-02

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