JP2012507037A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2012507037A5 JP2012507037A5 JP2011547833A JP2011547833A JP2012507037A5 JP 2012507037 A5 JP2012507037 A5 JP 2012507037A5 JP 2011547833 A JP2011547833 A JP 2011547833A JP 2011547833 A JP2011547833 A JP 2011547833A JP 2012507037 A5 JP2012507037 A5 JP 2012507037A5
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- hydrogen sensor
- sensor according
- manufacturing
- hydrogen
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 claims description 45
- 239000001257 hydrogen Substances 0.000 claims description 44
- 229910052739 hydrogen Inorganic materials 0.000 claims description 44
- 150000002431 hydrogen Chemical class 0.000 claims description 34
- 239000000758 substrate Substances 0.000 claims description 26
- 229910045601 alloy Inorganic materials 0.000 claims description 20
- 239000000956 alloy Substances 0.000 claims description 20
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 13
- 239000007789 gas Substances 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 claims 19
- 229910052723 transition metal Inorganic materials 0.000 claims 7
- 150000003624 transition metals Chemical class 0.000 claims 7
- 229910052748 manganese Inorganic materials 0.000 claims 6
- 238000000034 method Methods 0.000 claims 6
- 229910052709 silver Inorganic materials 0.000 claims 6
- 229910052719 titanium Inorganic materials 0.000 claims 6
- 229910052725 zinc Inorganic materials 0.000 claims 6
- 229910052759 nickel Inorganic materials 0.000 claims 4
- 229910052763 palladium Inorganic materials 0.000 claims 4
- 229910052697 platinum Inorganic materials 0.000 claims 4
- 229910001252 Pd alloy Inorganic materials 0.000 claims 3
- 229910021069 Pd—Co Inorganic materials 0.000 claims 2
- 229910021065 Pd—Fe Inorganic materials 0.000 claims 2
- 229910002845 Pt–Ni Inorganic materials 0.000 claims 2
- 229910018885 Pt—Au Inorganic materials 0.000 claims 2
- 229910018879 Pt—Pd Inorganic materials 0.000 claims 2
- 229910052782 aluminium Inorganic materials 0.000 claims 2
- 229910052737 gold Inorganic materials 0.000 claims 2
- 229910052738 indium Inorganic materials 0.000 claims 2
- 229910052742 iron Inorganic materials 0.000 claims 2
- 238000000992 sputter etching Methods 0.000 claims 2
- 229910052721 tungsten Inorganic materials 0.000 claims 2
- 244000043261 Hevea brasiliensis Species 0.000 claims 1
- 229920003052 natural elastomer Polymers 0.000 claims 1
- 229920001194 natural rubber Polymers 0.000 claims 1
- 229920000642 polymer Polymers 0.000 claims 1
- 229920003051 synthetic elastomer Polymers 0.000 claims 1
- 239000005061 synthetic rubber Substances 0.000 claims 1
- 238000001514 detection method Methods 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 239000004205 dimethyl polysiloxane Substances 0.000 description 1
- 235000013870 dimethyl polysiloxane Nutrition 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- CXQXSVUQTKDNFP-UHFFFAOYSA-N octamethyltrisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)O[Si](C)(C)C CXQXSVUQTKDNFP-UHFFFAOYSA-N 0.000 description 1
- 238000004987 plasma desorption mass spectroscopy Methods 0.000 description 1
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 description 1
- 230000035484 reaction time Effects 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Applications Claiming Priority (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020090132402A KR101067557B1 (ko) | 2009-12-29 | 2009-12-29 | 수소 센서 및 그 제조방법 |
| KR10-2009-0132402 | 2009-12-29 | ||
| KR10-2010-0039531 | 2010-04-28 | ||
| KR20100039531A KR101130084B1 (ko) | 2010-04-28 | 2010-04-28 | 수소 센서 및 그 제조방법 |
| KR20100081180A KR101151662B1 (ko) | 2010-08-23 | 2010-08-23 | 수소 센서 및 그 제조방법 |
| KR10-2010-0081180 | 2010-08-23 | ||
| PCT/KR2010/008618 WO2011081308A2 (ko) | 2009-12-29 | 2010-12-03 | 수소 센서 및 그 제조 방법 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2012507037A JP2012507037A (ja) | 2012-03-22 |
| JP2012507037A5 true JP2012507037A5 (enExample) | 2012-12-06 |
| JP5145463B2 JP5145463B2 (ja) | 2013-02-20 |
Family
ID=44226943
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011547833A Expired - Fee Related JP5145463B2 (ja) | 2009-12-29 | 2010-12-03 | 水素センサー及びその製造方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US8468872B2 (enExample) |
| EP (1) | EP2520928B1 (enExample) |
| JP (1) | JP5145463B2 (enExample) |
| WO (1) | WO2011081308A2 (enExample) |
Families Citing this family (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010064650A1 (ja) * | 2008-12-02 | 2010-06-10 | 株式会社村田製作所 | ガスセンサ |
| US8839659B2 (en) | 2010-10-08 | 2014-09-23 | Board Of Trustees Of Northern Illinois University | Sensors and devices containing ultra-small nanowire arrays |
| WO2015179751A1 (en) | 2012-03-14 | 2015-11-26 | Anastasia Rigas | Breath analyzer and breath test methods |
| US20150250407A1 (en) * | 2012-03-14 | 2015-09-10 | Anastasia Rigas | Breath analyzer and breath test methods |
| KR101358245B1 (ko) * | 2012-03-19 | 2014-02-07 | 연세대학교 산학협력단 | 수소 센서 및 수소 센서 제조 방법 |
| CN105075405B (zh) * | 2012-12-31 | 2018-01-30 | 宜普电源转换公司 | 多层半导体器件的寄生电感减小电路板布局设计 |
| US9618465B2 (en) * | 2013-05-01 | 2017-04-11 | Board Of Trustees Of Northern Illinois University | Hydrogen sensor |
| WO2015083874A1 (ko) | 2013-12-03 | 2015-06-11 | 재단법인 멀티스케일 에너지시스템 연구단 | 크랙 함유 전도성 박막을 구비하는 고감도 센서 및 그의 제조방법 |
| JP6372794B2 (ja) * | 2014-02-07 | 2018-08-15 | 国立大学法人富山大学 | 水素応答素子 |
| KR101610629B1 (ko) * | 2014-02-18 | 2016-04-21 | 연세대학교 산학협력단 | 수소 센서 |
| KR101683977B1 (ko) | 2014-08-21 | 2016-12-20 | 현대자동차주식회사 | 수소 센서 및 그 제조 방법 |
| US10502725B2 (en) | 2015-10-13 | 2019-12-10 | University Of Utah Research Foundation | Ultra-low power digital chemical analyzers |
| JP6784486B2 (ja) * | 2015-10-13 | 2020-11-11 | 株式会社ミクニ | 水素センサおよびその製造方法 |
| US10502724B2 (en) | 2015-10-13 | 2019-12-10 | University Of Utah Research Foundation | Ultra-low power digital chemical analyzers |
| JP6926040B2 (ja) * | 2018-09-10 | 2021-08-25 | 株式会社東芝 | 水素センサ、水素検出方法およびプログラム |
| US12414710B2 (en) | 2018-12-10 | 2025-09-16 | Anastasia Rigas | Breath analyzer devices and breath test methods |
| WO2020123555A1 (en) | 2018-12-10 | 2020-06-18 | Heteron Biotechnologies, Llc | Hydrogen breath analyzer and breath test method |
| CN109708817A (zh) * | 2018-12-28 | 2019-05-03 | 衢州学院 | 微纳米显色模块、显色微纳米膜和微量气体泄露检测方法 |
| JP2020134388A (ja) * | 2019-02-22 | 2020-08-31 | 功 村上 | 水素ガス検知装置 |
| EP3754329B1 (de) * | 2019-06-21 | 2023-07-26 | Materion GmbH | Wasserstoffsensor und verfahren zu dessen herstellung, messvorrichtung und verfahren zum messen einer wasserstoffkonzentration |
| KR20230060124A (ko) * | 2021-10-27 | 2023-05-04 | 현대자동차주식회사 | 수소 센서 및 수소 센서 제조방법 |
| DE102024126239A1 (de) | 2024-09-12 | 2026-03-12 | Tdk Electronics Ag | Sensorvorrichtung |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7186381B2 (en) * | 2001-07-20 | 2007-03-06 | Regents Of The University Of California | Hydrogen gas sensor |
| US6849911B2 (en) * | 2002-08-30 | 2005-02-01 | Nano-Proprietary, Inc. | Formation of metal nanowires for use as variable-range hydrogen sensors |
| US7237429B2 (en) * | 2002-08-30 | 2007-07-03 | Nano-Proprietary, Inc. | Continuous-range hydrogen sensors |
| US7340941B1 (en) * | 2002-10-01 | 2008-03-11 | Xsilogy, Inc. | Dense thin film-based chemical sensors and methods for making and using same |
| KR20060111296A (ko) * | 2005-04-22 | 2006-10-27 | 엘지전자 주식회사 | 수소 센서 및 그 제조 방법 |
| JP4661493B2 (ja) * | 2005-09-26 | 2011-03-30 | パナソニック電工株式会社 | 水素ガス漏れ検知器及び水素ガス漏れ制御装置 |
| KR100849384B1 (ko) * | 2005-10-21 | 2008-07-31 | 한국생명공학연구원 | 나노갭 및 나노갭 센서의 제조방법 |
| KR100757389B1 (ko) * | 2005-12-06 | 2007-09-11 | 한국전자통신연구원 | 나노갭 전극을 갖는 센서 및 그 제조 방법 |
| JP4900954B2 (ja) * | 2007-05-31 | 2012-03-21 | 独立行政法人産業技術総合研究所 | マグネシウム・ニオブ合金薄膜を用いた水素センサ |
| KR100900904B1 (ko) * | 2007-08-31 | 2009-06-03 | 연세대학교 산학협력단 | 팔라듐-니켈 합금 박막을 이용한 수소 센서 제조 방법 및상기 방법을 이용하여 제조되는 수소 센서 |
| US7818993B2 (en) * | 2007-09-27 | 2010-10-26 | Uchicago Argonne, Llc | High-performance flexible hydrogen sensors |
-
2010
- 2010-12-03 JP JP2011547833A patent/JP5145463B2/ja not_active Expired - Fee Related
- 2010-12-03 WO PCT/KR2010/008618 patent/WO2011081308A2/ko not_active Ceased
- 2010-12-03 EP EP10813060.0A patent/EP2520928B1/en not_active Not-in-force
- 2010-12-03 US US13/059,882 patent/US8468872B2/en not_active Expired - Fee Related
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Lee et al. | Hydrogen gas sensors using palladium nanogaps on an elastomeric substrate | |
| EP2520928B1 (en) | Method for manufacturing a hydrogen sensor | |
| Han et al. | MEMS-based Pt film temperature sensor on an alumina substrate | |
| Sharma et al. | Pd/Ag alloy as an application for hydrogen sensing | |
| US20100012919A1 (en) | Gas sensor having zinc oxide nano-structures and method of fabricating the same | |
| JP7312726B2 (ja) | 水素センサおよび水素センサの生産方法、測定デバイスならびに水素濃度を測定する方法 | |
| Roy et al. | A highly sensitive methane sensor with nickel alloy microheater on micromachined Si substrate | |
| Del Orbe et al. | Low-power thermocatalytic hydrogen sensor based on electrodeposited cauliflower-like nanostructured Pt black | |
| CN101124476A (zh) | 连续范围氢传感器 | |
| Lee et al. | Stress-engineered palladium nanowires for wide range (0.1%–3.9%) of H 2 detection with high durability | |
| KR101067557B1 (ko) | 수소 센서 및 그 제조방법 | |
| WO2008038547A1 (fr) | Détecteur d'hydrogène | |
| KR101618337B1 (ko) | 센서의 제조방법 및 이에 의하여 제조된 센서 | |
| JP2019035613A (ja) | 膜型表面応力センサーを用いた水素センサー及び水素検出方法 | |
| US12078605B2 (en) | Methods of fabrication of nano-sensor and nano-sensor array | |
| US8512641B2 (en) | Modulation of step function phenomena by varying nanoparticle size | |
| KR101499511B1 (ko) | 수소 센서 및 그 제조 방법 | |
| JP4915648B2 (ja) | 水素検知素子 | |
| KR101775825B1 (ko) | 수소 센서 및 이의 제조방법 | |
| KR102265670B1 (ko) | 고감도 온도 센서 및 이의 제조방법 | |
| Hoffmann et al. | MEMS-Based Hydrogen Sensors: A State of the Art Review | |
| JP4547974B2 (ja) | 流量センサおよびその製造方法 | |
| RU2221241C1 (ru) | Быстродействующий резистивный датчик взрывоопасных концентраций водорода (варианты) и способ его изготовления | |
| KR101990121B1 (ko) | 가스센서 | |
| Sharma et al. | Multilayer thin film deposition of Pd/Ag alloy as an application for hydrogen sensing |