JP5145463B2 - 水素センサー及びその製造方法 - Google Patents
水素センサー及びその製造方法 Download PDFInfo
- Publication number
- JP5145463B2 JP5145463B2 JP2011547833A JP2011547833A JP5145463B2 JP 5145463 B2 JP5145463 B2 JP 5145463B2 JP 2011547833 A JP2011547833 A JP 2011547833A JP 2011547833 A JP2011547833 A JP 2011547833A JP 5145463 B2 JP5145463 B2 JP 5145463B2
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- hydrogen
- hydrogen sensor
- substrate
- sensor according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 229910052739 hydrogen Inorganic materials 0.000 title claims description 293
- 239000001257 hydrogen Substances 0.000 title claims description 293
- 238000004519 manufacturing process Methods 0.000 title claims description 77
- 125000004435 hydrogen atom Chemical class [H]* 0.000 title description 6
- 239000010409 thin film Substances 0.000 claims description 244
- 150000002431 hydrogen Chemical class 0.000 claims description 167
- 239000000758 substrate Substances 0.000 claims description 156
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 144
- 229910045601 alloy Inorganic materials 0.000 claims description 90
- 239000000956 alloy Substances 0.000 claims description 90
- 238000000034 method Methods 0.000 claims description 73
- 229910052723 transition metal Inorganic materials 0.000 claims description 45
- 150000003624 transition metals Chemical class 0.000 claims description 45
- 229910052763 palladium Inorganic materials 0.000 claims description 40
- 239000007789 gas Substances 0.000 claims description 26
- 229910052759 nickel Inorganic materials 0.000 claims description 16
- 229910001252 Pd alloy Inorganic materials 0.000 claims description 14
- 229910052709 silver Inorganic materials 0.000 claims description 14
- 229910052748 manganese Inorganic materials 0.000 claims description 13
- 229910052719 titanium Inorganic materials 0.000 claims description 13
- 229910052725 zinc Inorganic materials 0.000 claims description 13
- 229910052697 platinum Inorganic materials 0.000 claims description 10
- 238000000992 sputter etching Methods 0.000 claims description 9
- 229910052737 gold Inorganic materials 0.000 claims description 6
- 229910021069 Pd—Co Inorganic materials 0.000 claims description 5
- 229910021065 Pd—Fe Inorganic materials 0.000 claims description 5
- 229920003051 synthetic elastomer Polymers 0.000 claims description 5
- 239000005061 synthetic rubber Substances 0.000 claims description 5
- 244000043261 Hevea brasiliensis Species 0.000 claims description 4
- 229910018885 Pt—Au Inorganic materials 0.000 claims description 4
- 229910018879 Pt—Pd Inorganic materials 0.000 claims description 4
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- 229910052738 indium Inorganic materials 0.000 claims description 4
- 229910052742 iron Inorganic materials 0.000 claims description 4
- 229920003052 natural elastomer Polymers 0.000 claims description 4
- 229920001194 natural rubber Polymers 0.000 claims description 4
- 229910002845 Pt–Ni Inorganic materials 0.000 claims description 3
- 229910052721 tungsten Inorganic materials 0.000 claims description 3
- 229920000642 polymer Polymers 0.000 claims 1
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 163
- 230000008859 change Effects 0.000 description 44
- 239000012071 phase Substances 0.000 description 33
- 238000001514 detection method Methods 0.000 description 31
- 239000010408 film Substances 0.000 description 23
- 238000005259 measurement Methods 0.000 description 19
- 238000006243 chemical reaction Methods 0.000 description 17
- 239000013013 elastic material Substances 0.000 description 17
- 230000008569 process Effects 0.000 description 16
- 239000004205 dimethyl polysiloxane Substances 0.000 description 14
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 description 14
- 238000004544 sputter deposition Methods 0.000 description 13
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 12
- 239000000463 material Substances 0.000 description 12
- 239000002070 nanowire Substances 0.000 description 11
- 239000004065 semiconductor Substances 0.000 description 8
- 239000012298 atmosphere Substances 0.000 description 6
- 229920001971 elastomer Polymers 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 239000000203 mixture Substances 0.000 description 6
- 239000002861 polymer material Substances 0.000 description 6
- 230000035484 reaction time Effects 0.000 description 6
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- 238000005229 chemical vapour deposition Methods 0.000 description 5
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- 230000003287 optical effect Effects 0.000 description 5
- 239000000919 ceramic Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 229910001873 dinitrogen Inorganic materials 0.000 description 4
- 229910052757 nitrogen Inorganic materials 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 238000011160 research Methods 0.000 description 4
- 239000000523 sample Substances 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 238000000231 atomic layer deposition Methods 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 238000002485 combustion reaction Methods 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 238000000609 electron-beam lithography Methods 0.000 description 3
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- 238000010438 heat treatment Methods 0.000 description 3
- 238000000691 measurement method Methods 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 238000011084 recovery Methods 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 229920001059 synthetic polymer Polymers 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- 229910001020 Au alloy Inorganic materials 0.000 description 2
- KAKZBPTYRLMSJV-UHFFFAOYSA-N Butadiene Chemical compound C=CC=C KAKZBPTYRLMSJV-UHFFFAOYSA-N 0.000 description 2
- RRHGJUQNOFWUDK-UHFFFAOYSA-N Isoprene Chemical compound CC(=C)C=C RRHGJUQNOFWUDK-UHFFFAOYSA-N 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000007084 catalytic combustion reaction Methods 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 229910002804 graphite Inorganic materials 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- 238000001000 micrograph Methods 0.000 description 2
- 239000002086 nanomaterial Substances 0.000 description 2
- -1 palladium hydrogen Chemical class 0.000 description 2
- 229920000728 polyester Polymers 0.000 description 2
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- 229920002635 polyurethane Polymers 0.000 description 2
- 239000004814 polyurethane Substances 0.000 description 2
- 238000012552 review Methods 0.000 description 2
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- 230000035945 sensitivity Effects 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910001316 Ag alloy Inorganic materials 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910006404 SnO 2 Inorganic materials 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- 239000002041 carbon nanotube Substances 0.000 description 1
- 229910021393 carbon nanotube Inorganic materials 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- YACLQRRMGMJLJV-UHFFFAOYSA-N chloroprene Chemical compound ClC(=C)C=C YACLQRRMGMJLJV-UHFFFAOYSA-N 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000003792 electrolyte Substances 0.000 description 1
- 238000001962 electrophoresis Methods 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 229920002313 fluoropolymer Polymers 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 239000002105 nanoparticle Substances 0.000 description 1
- 239000002071 nanotube Substances 0.000 description 1
- 150000002825 nitriles Chemical class 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 229920000058 polyacrylate Polymers 0.000 description 1
- 229920000767 polyaniline Polymers 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000007790 solid phase Substances 0.000 description 1
- 239000006104 solid solution Substances 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/125—Composition of the body, e.g. the composition of its sensitive layer
- G01N27/127—Composition of the body, e.g. the composition of its sensitive layer comprising nanoparticles
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
- G01N33/0036—General constructional details of gas analysers, e.g. portable test equipment concerning the detector specially adapted to detect a particular component
- G01N33/005—H2
Landscapes
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Life Sciences & Earth Sciences (AREA)
- Immunology (AREA)
- General Physics & Mathematics (AREA)
- Pathology (AREA)
- Physics & Mathematics (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Nanotechnology (AREA)
- Electrochemistry (AREA)
- Combustion & Propulsion (AREA)
- Food Science & Technology (AREA)
- Medicinal Chemistry (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Applications Claiming Priority (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020090132402A KR101067557B1 (ko) | 2009-12-29 | 2009-12-29 | 수소 센서 및 그 제조방법 |
| KR10-2009-0132402 | 2009-12-29 | ||
| KR10-2010-0039531 | 2010-04-28 | ||
| KR20100039531A KR101130084B1 (ko) | 2010-04-28 | 2010-04-28 | 수소 센서 및 그 제조방법 |
| KR20100081180A KR101151662B1 (ko) | 2010-08-23 | 2010-08-23 | 수소 센서 및 그 제조방법 |
| KR10-2010-0081180 | 2010-08-23 | ||
| PCT/KR2010/008618 WO2011081308A2 (ko) | 2009-12-29 | 2010-12-03 | 수소 센서 및 그 제조 방법 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2012507037A JP2012507037A (ja) | 2012-03-22 |
| JP2012507037A5 JP2012507037A5 (enExample) | 2012-12-06 |
| JP5145463B2 true JP5145463B2 (ja) | 2013-02-20 |
Family
ID=44226943
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011547833A Expired - Fee Related JP5145463B2 (ja) | 2009-12-29 | 2010-12-03 | 水素センサー及びその製造方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US8468872B2 (enExample) |
| EP (1) | EP2520928B1 (enExample) |
| JP (1) | JP5145463B2 (enExample) |
| WO (1) | WO2011081308A2 (enExample) |
Families Citing this family (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010064650A1 (ja) * | 2008-12-02 | 2010-06-10 | 株式会社村田製作所 | ガスセンサ |
| US8839659B2 (en) | 2010-10-08 | 2014-09-23 | Board Of Trustees Of Northern Illinois University | Sensors and devices containing ultra-small nanowire arrays |
| WO2015179751A1 (en) | 2012-03-14 | 2015-11-26 | Anastasia Rigas | Breath analyzer and breath test methods |
| US20150250407A1 (en) * | 2012-03-14 | 2015-09-10 | Anastasia Rigas | Breath analyzer and breath test methods |
| KR101358245B1 (ko) * | 2012-03-19 | 2014-02-07 | 연세대학교 산학협력단 | 수소 센서 및 수소 센서 제조 방법 |
| CN105075405B (zh) * | 2012-12-31 | 2018-01-30 | 宜普电源转换公司 | 多层半导体器件的寄生电感减小电路板布局设计 |
| US9618465B2 (en) * | 2013-05-01 | 2017-04-11 | Board Of Trustees Of Northern Illinois University | Hydrogen sensor |
| WO2015083874A1 (ko) | 2013-12-03 | 2015-06-11 | 재단법인 멀티스케일 에너지시스템 연구단 | 크랙 함유 전도성 박막을 구비하는 고감도 센서 및 그의 제조방법 |
| JP6372794B2 (ja) * | 2014-02-07 | 2018-08-15 | 国立大学法人富山大学 | 水素応答素子 |
| KR101610629B1 (ko) * | 2014-02-18 | 2016-04-21 | 연세대학교 산학협력단 | 수소 센서 |
| KR101683977B1 (ko) | 2014-08-21 | 2016-12-20 | 현대자동차주식회사 | 수소 센서 및 그 제조 방법 |
| US10502725B2 (en) | 2015-10-13 | 2019-12-10 | University Of Utah Research Foundation | Ultra-low power digital chemical analyzers |
| JP6784486B2 (ja) * | 2015-10-13 | 2020-11-11 | 株式会社ミクニ | 水素センサおよびその製造方法 |
| US10502724B2 (en) | 2015-10-13 | 2019-12-10 | University Of Utah Research Foundation | Ultra-low power digital chemical analyzers |
| JP6926040B2 (ja) * | 2018-09-10 | 2021-08-25 | 株式会社東芝 | 水素センサ、水素検出方法およびプログラム |
| US12414710B2 (en) | 2018-12-10 | 2025-09-16 | Anastasia Rigas | Breath analyzer devices and breath test methods |
| WO2020123555A1 (en) | 2018-12-10 | 2020-06-18 | Heteron Biotechnologies, Llc | Hydrogen breath analyzer and breath test method |
| CN109708817A (zh) * | 2018-12-28 | 2019-05-03 | 衢州学院 | 微纳米显色模块、显色微纳米膜和微量气体泄露检测方法 |
| JP2020134388A (ja) * | 2019-02-22 | 2020-08-31 | 功 村上 | 水素ガス検知装置 |
| EP3754329B1 (de) * | 2019-06-21 | 2023-07-26 | Materion GmbH | Wasserstoffsensor und verfahren zu dessen herstellung, messvorrichtung und verfahren zum messen einer wasserstoffkonzentration |
| KR20230060124A (ko) * | 2021-10-27 | 2023-05-04 | 현대자동차주식회사 | 수소 센서 및 수소 센서 제조방법 |
| DE102024126239A1 (de) | 2024-09-12 | 2026-03-12 | Tdk Electronics Ag | Sensorvorrichtung |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7186381B2 (en) * | 2001-07-20 | 2007-03-06 | Regents Of The University Of California | Hydrogen gas sensor |
| US6849911B2 (en) * | 2002-08-30 | 2005-02-01 | Nano-Proprietary, Inc. | Formation of metal nanowires for use as variable-range hydrogen sensors |
| US7237429B2 (en) * | 2002-08-30 | 2007-07-03 | Nano-Proprietary, Inc. | Continuous-range hydrogen sensors |
| US7340941B1 (en) * | 2002-10-01 | 2008-03-11 | Xsilogy, Inc. | Dense thin film-based chemical sensors and methods for making and using same |
| KR20060111296A (ko) * | 2005-04-22 | 2006-10-27 | 엘지전자 주식회사 | 수소 센서 및 그 제조 방법 |
| JP4661493B2 (ja) * | 2005-09-26 | 2011-03-30 | パナソニック電工株式会社 | 水素ガス漏れ検知器及び水素ガス漏れ制御装置 |
| KR100849384B1 (ko) * | 2005-10-21 | 2008-07-31 | 한국생명공학연구원 | 나노갭 및 나노갭 센서의 제조방법 |
| KR100757389B1 (ko) * | 2005-12-06 | 2007-09-11 | 한국전자통신연구원 | 나노갭 전극을 갖는 센서 및 그 제조 방법 |
| JP4900954B2 (ja) * | 2007-05-31 | 2012-03-21 | 独立行政法人産業技術総合研究所 | マグネシウム・ニオブ合金薄膜を用いた水素センサ |
| KR100900904B1 (ko) * | 2007-08-31 | 2009-06-03 | 연세대학교 산학협력단 | 팔라듐-니켈 합금 박막을 이용한 수소 센서 제조 방법 및상기 방법을 이용하여 제조되는 수소 센서 |
| US7818993B2 (en) * | 2007-09-27 | 2010-10-26 | Uchicago Argonne, Llc | High-performance flexible hydrogen sensors |
-
2010
- 2010-12-03 JP JP2011547833A patent/JP5145463B2/ja not_active Expired - Fee Related
- 2010-12-03 WO PCT/KR2010/008618 patent/WO2011081308A2/ko not_active Ceased
- 2010-12-03 EP EP10813060.0A patent/EP2520928B1/en not_active Not-in-force
- 2010-12-03 US US13/059,882 patent/US8468872B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| EP2520928A2 (en) | 2012-11-07 |
| WO2011081308A3 (ko) | 2011-11-03 |
| US20110259083A1 (en) | 2011-10-27 |
| US8468872B2 (en) | 2013-06-25 |
| JP2012507037A (ja) | 2012-03-22 |
| EP2520928B1 (en) | 2016-09-28 |
| WO2011081308A2 (ko) | 2011-07-07 |
| EP2520928A4 (en) | 2014-12-31 |
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