WO2011081308A3 - 수소 센서 및 그 제조 방법 - Google Patents

수소 센서 및 그 제조 방법 Download PDF

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Publication number
WO2011081308A3
WO2011081308A3 PCT/KR2010/008618 KR2010008618W WO2011081308A3 WO 2011081308 A3 WO2011081308 A3 WO 2011081308A3 KR 2010008618 W KR2010008618 W KR 2010008618W WO 2011081308 A3 WO2011081308 A3 WO 2011081308A3
Authority
WO
WIPO (PCT)
Prior art keywords
tension
thin film
hydrogen sensor
manufacturing same
elastic substrate
Prior art date
Application number
PCT/KR2010/008618
Other languages
English (en)
French (fr)
Other versions
WO2011081308A2 (ko
Inventor
이우영
이준민
이은영
Original Assignee
연세대학교 산학협력단
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1020090132402A external-priority patent/KR101067557B1/ko
Priority claimed from KR20100039531A external-priority patent/KR101130084B1/ko
Priority claimed from KR20100081180A external-priority patent/KR101151662B1/ko
Application filed by 연세대학교 산학협력단 filed Critical 연세대학교 산학협력단
Priority to JP2011547833A priority Critical patent/JP5145463B2/ja
Priority to EP10813060.0A priority patent/EP2520928B1/en
Priority to US13/059,882 priority patent/US8468872B2/en
Publication of WO2011081308A2 publication Critical patent/WO2011081308A2/ko
Publication of WO2011081308A3 publication Critical patent/WO2011081308A3/ko

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/125—Composition of the body, e.g. the composition of its sensitive layer
    • G01N27/127—Composition of the body, e.g. the composition of its sensitive layer comprising nanoparticles
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
    • G01N33/0036—General constructional details of gas analysers, e.g. portable test equipment concerning the detector specially adapted to detect a particular component
    • G01N33/005—H2

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  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Pathology (AREA)
  • Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Nanotechnology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

본 발명에 따라서 신규의 수소 센서 제조 방법이 제공되는데, 상기 방법은 탄성기판의 표면에 전이금속 또는 그 합금 박막을 형성하는 단계와; 상기 탄성 기판에 인장력을 인가하여, 상기 기판 표면에 형성된 상기 합금 박막에 복수 개의 나노 갭을 형성하는 단계를 포함하고, 상기 인장력의 인가 시에, 상기 박막은 인장력이 작용하는 방향으로 인장되는 동시에 인장력이 작용하는 방향과 수직한 방향으로 압축되고, 상기 인장력의 회수 시에 상기 박막은 인장력이 회수된 방향으로 다시 압축되면서 그 회수 방향과 수직한 방향으로 다시 인장되어, 상기 나노 갭이 형성되는 것을 특징으로 한다.
PCT/KR2010/008618 2009-12-29 2010-12-03 수소 센서 및 그 제조 방법 WO2011081308A2 (ko)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2011547833A JP5145463B2 (ja) 2009-12-29 2010-12-03 水素センサー及びその製造方法
EP10813060.0A EP2520928B1 (en) 2009-12-29 2010-12-03 Method for manufacturing a hydrogen sensor
US13/059,882 US8468872B2 (en) 2009-12-29 2010-12-03 Hydrogen sensor and method of manufacturing the same

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
KR10-2009-0132402 2009-12-29
KR1020090132402A KR101067557B1 (ko) 2009-12-29 2009-12-29 수소 센서 및 그 제조방법
KR20100039531A KR101130084B1 (ko) 2010-04-28 2010-04-28 수소 센서 및 그 제조방법
KR10-2010-0039531 2010-04-28
KR10-2010-0081180 2010-08-23
KR20100081180A KR101151662B1 (ko) 2010-08-23 2010-08-23 수소 센서 및 그 제조방법

Publications (2)

Publication Number Publication Date
WO2011081308A2 WO2011081308A2 (ko) 2011-07-07
WO2011081308A3 true WO2011081308A3 (ko) 2011-11-03

Family

ID=44226943

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2010/008618 WO2011081308A2 (ko) 2009-12-29 2010-12-03 수소 센서 및 그 제조 방법

Country Status (4)

Country Link
US (1) US8468872B2 (ko)
EP (1) EP2520928B1 (ko)
JP (1) JP5145463B2 (ko)
WO (1) WO2011081308A2 (ko)

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WO2010064650A1 (ja) * 2008-12-02 2010-06-10 株式会社村田製作所 ガスセンサ
US8839659B2 (en) 2010-10-08 2014-09-23 Board Of Trustees Of Northern Illinois University Sensors and devices containing ultra-small nanowire arrays
WO2015179751A1 (en) 2012-03-14 2015-11-26 Anastasia Rigas Breath analyzer and breath test methods
US20150250407A1 (en) * 2012-03-14 2015-09-10 Anastasia Rigas Breath analyzer and breath test methods
KR101358245B1 (ko) * 2012-03-19 2014-02-07 연세대학교 산학협력단 수소 센서 및 수소 센서 제조 방법
DE112013006313B4 (de) * 2012-12-31 2021-06-10 Efficient Power Conversion Corporation Leiterplatten-Layout-Design zur Reduzierung parasitärer Induktivitäten für Mehrlagen-Halbleiterbauelemente
US9618465B2 (en) * 2013-05-01 2017-04-11 Board Of Trustees Of Northern Illinois University Hydrogen sensor
WO2015083874A1 (ko) 2013-12-03 2015-06-11 재단법인 멀티스케일 에너지시스템 연구단 크랙 함유 전도성 박막을 구비하는 고감도 센서 및 그의 제조방법
JP6372794B2 (ja) * 2014-02-07 2018-08-15 国立大学法人富山大学 水素応答素子
KR101610629B1 (ko) * 2014-02-18 2016-04-21 연세대학교 산학협력단 수소 센서
KR101683977B1 (ko) 2014-08-21 2016-12-20 현대자동차주식회사 수소 센서 및 그 제조 방법
US10502724B2 (en) 2015-10-13 2019-12-10 University Of Utah Research Foundation Ultra-low power digital chemical analyzers
US10502725B2 (en) 2015-10-13 2019-12-10 University Of Utah Research Foundation Ultra-low power digital chemical analyzers
JP6784486B2 (ja) * 2015-10-13 2020-11-11 株式会社ミクニ 水素センサおよびその製造方法
JP6926040B2 (ja) * 2018-09-10 2021-08-25 株式会社東芝 水素センサ、水素検出方法およびプログラム
CN109708817A (zh) * 2018-12-28 2019-05-03 衢州学院 微纳米显色模块、显色微纳米膜和微量气体泄露检测方法
JP2020134388A (ja) * 2019-02-22 2020-08-31 功 村上 水素ガス検知装置
EP3754329B1 (de) * 2019-06-21 2023-07-26 Materion GmbH Wasserstoffsensor und verfahren zu dessen herstellung, messvorrichtung und verfahren zum messen einer wasserstoffkonzentration

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KR20060111296A (ko) * 2005-04-22 2006-10-27 엘지전자 주식회사 수소 센서 및 그 제조 방법
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KR20070059880A (ko) * 2005-12-06 2007-06-12 한국전자통신연구원 나노갭 전극을 갖는 센서 및 그 제조 방법
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KR20060111296A (ko) * 2005-04-22 2006-10-27 엘지전자 주식회사 수소 센서 및 그 제조 방법
KR20070043591A (ko) * 2005-10-21 2007-04-25 한국생명공학연구원 나노갭 및 나노갭 센서의 제조방법
KR20070059880A (ko) * 2005-12-06 2007-06-12 한국전자통신연구원 나노갭 전극을 갖는 센서 및 그 제조 방법
KR20090022620A (ko) * 2007-08-31 2009-03-04 연세대학교 산학협력단 팔라듐-니켈 합금 박막을 이용한 수소 센서 제조 방법 및상기 방법을 이용하여 제조되는 수소 센서

Non-Patent Citations (1)

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Title
See also references of EP2520928A4 *

Also Published As

Publication number Publication date
JP5145463B2 (ja) 2013-02-20
EP2520928A2 (en) 2012-11-07
EP2520928A4 (en) 2014-12-31
EP2520928B1 (en) 2016-09-28
WO2011081308A2 (ko) 2011-07-07
US20110259083A1 (en) 2011-10-27
US8468872B2 (en) 2013-06-25
JP2012507037A (ja) 2012-03-22

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