JP2012501252A5 - - Google Patents

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Publication number
JP2012501252A5
JP2012501252A5 JP2011525047A JP2011525047A JP2012501252A5 JP 2012501252 A5 JP2012501252 A5 JP 2012501252A5 JP 2011525047 A JP2011525047 A JP 2011525047A JP 2011525047 A JP2011525047 A JP 2011525047A JP 2012501252 A5 JP2012501252 A5 JP 2012501252A5
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JP
Japan
Prior art keywords
abrasive
layer
particles
translucent film
meth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2011525047A
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English (en)
Japanese (ja)
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JP2012501252A (ja
JP5351967B2 (ja
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Priority claimed from PCT/US2009/052188 external-priority patent/WO2010025003A2/en
Publication of JP2012501252A publication Critical patent/JP2012501252A/ja
Publication of JP2012501252A5 publication Critical patent/JP2012501252A5/ja
Application granted granted Critical
Publication of JP5351967B2 publication Critical patent/JP5351967B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2011525047A 2008-08-28 2009-07-30 構造化研磨物品、その製造方法、及びウエハの平坦化における使用 Expired - Fee Related JP5351967B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US9252108P 2008-08-28 2008-08-28
US61/092,521 2008-08-28
PCT/US2009/052188 WO2010025003A2 (en) 2008-08-28 2009-07-30 Structured abrasive article, method of making the same, and use in wafer planarization

Publications (3)

Publication Number Publication Date
JP2012501252A JP2012501252A (ja) 2012-01-19
JP2012501252A5 true JP2012501252A5 (enExample) 2012-07-05
JP5351967B2 JP5351967B2 (ja) 2013-11-27

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011525047A Expired - Fee Related JP5351967B2 (ja) 2008-08-28 2009-07-30 構造化研磨物品、その製造方法、及びウエハの平坦化における使用

Country Status (7)

Country Link
US (1) US8251774B2 (enExample)
EP (1) EP2327088B1 (enExample)
JP (1) JP5351967B2 (enExample)
KR (1) KR101602001B1 (enExample)
CN (1) CN102138203B (enExample)
TW (1) TWI429735B (enExample)
WO (1) WO2010025003A2 (enExample)

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