KR101602001B1 - 구조화된 연마 용품, 그 제조 방법, 및 웨이퍼 평탄화에서의 사용 - Google Patents

구조화된 연마 용품, 그 제조 방법, 및 웨이퍼 평탄화에서의 사용 Download PDF

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Publication number
KR101602001B1
KR101602001B1 KR1020117006536A KR20117006536A KR101602001B1 KR 101602001 B1 KR101602001 B1 KR 101602001B1 KR 1020117006536 A KR1020117006536 A KR 1020117006536A KR 20117006536 A KR20117006536 A KR 20117006536A KR 101602001 B1 KR101602001 B1 KR 101602001B1
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South Korea
Prior art keywords
abrasive
meth
acrylate
delete delete
wafer
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Korean (ko)
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KR20110055686A (ko
Inventor
윌리엄 디 조셉
줄리 와이 첸
지미 알 주니어 바란
존 제이 개글리아디
Original Assignee
쓰리엠 이노베이티브 프로퍼티즈 컴파니
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P52/00—Grinding, lapping or polishing of wafers, substrates or parts of devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
    • B24B37/245—Pads with fixed abrasives
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/205—Lapping pads for working plane surfaces provided with a window for inspecting the surface of the work being lapped
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
KR1020117006536A 2008-08-28 2009-07-30 구조화된 연마 용품, 그 제조 방법, 및 웨이퍼 평탄화에서의 사용 Expired - Fee Related KR101602001B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US9252108P 2008-08-28 2008-08-28
US61/092,521 2008-08-28

Publications (2)

Publication Number Publication Date
KR20110055686A KR20110055686A (ko) 2011-05-25
KR101602001B1 true KR101602001B1 (ko) 2016-03-17

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KR1020117006536A Expired - Fee Related KR101602001B1 (ko) 2008-08-28 2009-07-30 구조화된 연마 용품, 그 제조 방법, 및 웨이퍼 평탄화에서의 사용

Country Status (7)

Country Link
US (1) US8251774B2 (enExample)
EP (1) EP2327088B1 (enExample)
JP (1) JP5351967B2 (enExample)
KR (1) KR101602001B1 (enExample)
CN (1) CN102138203B (enExample)
TW (1) TWI429735B (enExample)
WO (1) WO2010025003A2 (enExample)

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WO2014005120A1 (en) 2012-06-29 2014-01-03 Saint-Gobain Ceramics & Plastics, Inc. Abrasive particles having particular shapes and methods of forming such particles
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AU2015247739B2 (en) 2014-04-14 2017-10-26 Saint-Gobain Ceramics & Plastics, Inc. Abrasive article including shaped abrasive particles
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US10196551B2 (en) 2015-03-31 2019-02-05 Saint-Gobain Abrasives, Inc. Fixed abrasive articles and methods of forming same
TWI634200B (zh) 2015-03-31 2018-09-01 聖高拜磨料有限公司 固定磨料物品及其形成方法
EP3307483B1 (en) 2015-06-11 2020-06-17 Saint-Gobain Ceramics&Plastics, Inc. Abrasive article including shaped abrasive particles
KR102313436B1 (ko) 2016-05-10 2021-10-19 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 연마 입자들 및 그 형성 방법
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CN109475998B (zh) 2016-07-20 2021-12-31 3M创新有限公司 成形玻璃化磨料团聚物、磨料制品和研磨方法
EP4349896A3 (en) 2016-09-29 2024-06-12 Saint-Gobain Abrasives, Inc. Fixed abrasive articles and methods of forming same
WO2018081246A1 (en) 2016-10-25 2018-05-03 3M Innovative Properties Company Shaped vitrified abrasive agglomerate with shaped abrasive particles, abrasive articles, and related methods
KR20180072243A (ko) * 2016-12-21 2018-06-29 엠.씨.케이 (주) 연마체 수지 조성물 및 이에 의해 제조된 패드
US10759024B2 (en) 2017-01-31 2020-09-01 Saint-Gobain Ceramics & Plastics, Inc. Abrasive article including shaped abrasive particles
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CN110719946B (zh) 2017-06-21 2022-07-15 圣戈本陶瓷及塑料股份有限公司 颗粒材料及其形成方法
CN112055737B (zh) 2018-03-01 2022-04-12 3M创新有限公司 具有成型磨料颗粒的成型硅质磨料团聚物、磨料制品及相关方法
US11926019B2 (en) 2019-12-27 2024-03-12 Saint-Gobain Ceramics & Plastics, Inc. Abrasive articles and methods of forming same
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EP4457054A4 (en) 2021-12-30 2026-01-14 Saint Gobain Abrasives Inc ABRASIVE ARTICLES AND THEIR FORMATION PROCESSES
CN118591436A (zh) 2021-12-30 2024-09-03 圣戈班磨料磨具有限公司 磨料制品及其形成方法
JPWO2024034618A1 (enExample) * 2022-08-09 2024-02-15

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Also Published As

Publication number Publication date
WO2010025003A3 (en) 2010-04-22
JP2012501252A (ja) 2012-01-19
US8251774B2 (en) 2012-08-28
US20100056024A1 (en) 2010-03-04
KR20110055686A (ko) 2011-05-25
EP2327088B1 (en) 2019-01-09
TWI429735B (zh) 2014-03-11
TW201012908A (en) 2010-04-01
CN102138203B (zh) 2015-02-04
EP2327088A4 (en) 2017-06-14
EP2327088A2 (en) 2011-06-01
JP5351967B2 (ja) 2013-11-27
WO2010025003A2 (en) 2010-03-04
CN102138203A (zh) 2011-07-27

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